JP5948151B2 - Sphere sample holder - Google Patents

Description

  The present invention relates to a sphere sample holder for holding a sphere sample.

A spherical sample holder is used for measuring and observing the surface of a sphere with a spherical interferometer, etc., correcting systematic errors of the spherical interferometer, and inspecting scratches and dirt on the sphere.
In general, the holder for a sphere sample can position the center of the sphere sample at an arbitrary position in space with good reproducibility, and can rotate around the sphere center of the sphere sample to freely change the arbitrary position on the sphere surface. Is small enough to be installed in various devices, the sphere sample is easy to attach and detach, and the sphere sample does not fall off when held, and the structure is simple and inexpensive to manufacture. There is a demand to be.

As a holder for the sphere sample, a cylindrical portion for storing the sphere sample is provided on the base, a shaft for supporting the sphere sample is provided on the cylindrical portion, and the sphere supports are respectively provided at three positions above the axis of the cylindrical portion. There is a sample holder that is provided along the radial direction and holds the spherical surface of the sphere sample with a sphere provided at the tip of these sphere supports (Patent Document 1).
In the conventional example shown in Patent Document 1, the spherical sample accommodated in the cylindrical portion can be changed in posture by rotating and moving back and forth to select an arbitrary position on the spherical surface. Each of the three sphere supports includes a pipe, a sphere provided at the tip of the pipe and in contact with the spherical surface of the sphere sample, a coil spring provided inside the pipe for adjusting the support strength of the sphere sample, and a rear end of the pipe. It is a ball plunger having a screw provided at the end, and has a structure in which the spherical surface above the center of the spherical sample is pressed by a spring force of a coil spring. A notch is formed along the axial direction from the upper end of the cylindrical portion to an intermediate position, and a spherical sample is taken out by inserting a rod-like object from the notch and lifting it upward. Mounting of the spherical sample is performed by pushing the spherical sample from above the cylindrical portion.

Japanese Patent No. 2903201

The conventional example shown in Patent Document 1 is a structure in which a sphere sample is sandwiched from above and below by a shaft provided in a cylindrical portion and three sphere supports. In other words, the shaft plays a role of giving rotation only to the sphere sample, and by itself, the sphere sample cannot be positioned and held in the cylindrical portion, so three sphere supports are provided, and these are in a plane perpendicular to the center line of the cylinder. The spherical sample is pressed in the center line direction of the cylinder. As a result, the spherical sample is pressed against the shaft and positioned in the direction of the center line of the cylinder, and positioning in space is realized. As a feature of this configuration, since it is necessary to provide three sphere supports above the equator of the sphere sample and to provide an axis below the opposite, the sphere sample is sandwiched. That is, the sphere sample is fitted into the holder. However, due to the configuration, there are the following problems.
When mounting the sphere sample, it is necessary to push the sphere sample from above, and care must be taken to install the sphere sample that is easily scratched.
Further, when removing the spherical sample, it is necessary to insert a rod-like object into the notch of the cylindrical portion and lift it up. Therefore, when removing the spherical sample, it was necessary to prepare a rod-shaped tool for removal. In addition, it was necessary to take care when removing the easily damaged sphere sample.
For this reason, when the influence of the deformation by the pressing force on the spherical sample becomes a problem, it has been difficult to apply. In this conventional method, due to a structural problem, it is impossible to stop only pressing because the pressing and positioning are performed simultaneously.

On the other hand, due to the structure of the holder, it is difficult to provide an opening on the side surface. Therefore, it was not easy to apply to observation and measurement of a spherical sample from the horizontal direction. As another countermeasure, it can be considered that the holder is rotated by 90 °. However, since the axis for giving rotation is positioned in the horizontal direction of the spherical sample, it is shifted by 90 ° from the direction of gravity of the spherical sample. For this reason, it becomes difficult to obtain the friction required for rotation transmission. In order to cope with this, it can be dealt with by increasing the pressing force. However, this method cannot be applied when the influence of deformation as described above becomes a problem or when a flaw is a concern.
Since it is difficult to provide an opening on the side surface due to the structure of the holder, it is difficult to realize a holder that supports observation and measurement from above and horizontally from the spherical sample. Furthermore, the structure of the patent document has a large number of parts, is complicated, and takes time for adjustment during assembly.

  The object of the present invention is to simplify the structure, to easily attach and detach the spherical sample, to prevent the spherical sample from being scratched, and to place the spherical sample in a predetermined position having an opening for observation and measurement from above and from the horizontal direction. The object is to provide a holder for a spherical sample that can be positioned with good reproducibility.

The holder for a sphere sample of the present invention includes a container-like base into which a sphere sample is inserted, two support portions provided on the bottom of the base, and a movement and axis along the axis inserted into and out of the base. A rotation transmission shaft that rotates the spherical sample by rotation about the center, and the support portion has a spherical surface at least in contact with the spherical sample, and the two support portions and the rotation transmission shaft The spherical sample is supported at three points.
In the present invention having this configuration, the spherical sample is disposed on the rotation transmission shaft and the plurality of support portions using tweezers or the like. The spherical sample is stably supported by its own weight at three points in total, one point on the rotation transmission shaft and two points on the two support parts. In this state, observation, measurement, processing, etc. are performed. The
In order to change the part to be observed of the spherical sample, the rotation transmission shaft is rotated or advanced / retreated. Thereby, rotation and advance / retreat of the rotation transmission shaft are transmitted to the sphere sample by the frictional force between the rotation transmission shaft and the sphere sample, and the sphere sample rotates. When the sphere sample rotates, the spherical surface of the sphere sample slides with respect to the support portion, and the sphere sample is stably supported on the rotation transmission shaft and the two support portions without moving its center position. Will remain.
Accordingly, in the present invention, the sphere sample is stably supported at three points by the two support portions and the rotation transmission shaft respectively provided on the base. By operating the rotation transmission shaft in this state, The sample can be positioned at a predetermined position with good reproducibility. Moreover, since a member for holding the upper part of the sphere sample is not required for observation or the like, the structure of the sphere sample holder can be simplified, and the detachment operation of the sphere sample can be easily performed.

Here, in the present invention, the base is provided with a drop prevention wall portion for preventing the drop of the spherical sample, and the drop prevention wall portion is provided with an opening for exposing the surface of the spherical sample. preferable.
In the present invention having this configuration, the base is provided with the drop-off preventing wall, so that the spherical sample does not drop off during observation or the like or during rotation of the spherical sample. Further, since the opening for exposing the surface of the spherical sample is provided in the drop-off prevention wall portion, access from the side surface direction of the spherical sample can be performed through this opening, and observation, measurement, processing, or the like is performed.
Accordingly, in the present invention, since the drop prevention wall portion is provided on the base, it is possible to prevent the sphere sample from falling off when observing or rotating the sphere sample. Further, the drop-off prevention wall is provided with an opening for exposing the surface of the spherical sample, so that it can be accessed from the side during observation or the like.

The opening is preferably formed on the front side and the back side of the drop-off prevention wall and has a size smaller than the diameter of the spherical sample.
In the present invention with this configuration, the spherical sample can be easily installed on the rotation transmission mechanism and the support portion from the two openings on the front side and the back side, or can be taken out from the rotation transmission mechanism and the support portion. .

The drop-off prevention wall portion preferably has a rotationally symmetric shape.
In the present invention having this configuration, since the drop-off prevention wall portion is rotationally symmetric, it is easy to integrally form the drop-off prevention wall portion and the base, and the structure of the spherical sample holder can be simplified.

It is preferable that the support portion includes a sphere, and a plurality of rolling elements that rotatably support the sphere are arranged in a recess formed in the base.
In the present invention having this configuration, since the sphere can be freely rotated by the plurality of rolling elements, the sphere sample slides more smoothly with respect to the support portion when the sphere sample rotates, and the rotation of the sphere sample is supported. The position of the spherical sample after rotation can be prevented without being obstructed by the portion.

It is preferable that the frictional resistance of the support portion with respect to the spherical sample is smaller than the frictional resistance of the rotation transmission shaft with respect to the spherical sample.
In the present invention having this configuration, the rotation and forward / backward movement of the rotation transmission shaft can be reliably transmitted to the sphere sample, and the sphere sample smoothly rotates with respect to the support portion. Therefore, the spherical sample can be smoothly rotated, and the positional deviation of the spherical sample after rotation can be prevented.

The base is preferably provided with a preload mechanism for preloading the spherical sample toward at least the rotation transmission shaft.
In the present invention of this configuration, the friction force between the sphere sample and the rotation transmission shaft is increased by the preload mechanism, so that the sphere sample can be reliably secured by rotating or advancing or retreating the rotation transmission shaft even if the sphere sample is lightweight. Can be rotated.

The preload mechanism preferably includes a pressing member that presses the spherical sample and a retraction mechanism that retracts the pressing member from a position that presses the spherical sample.
In the present invention having this configuration, if the pressing member is retracted from the position where the spherical sample is pressed by the retracting mechanism, the preloading mechanism does not interfere with observation or the like.

The pressing member preferably has a configuration in which a plane for pressing the spherical sample toward the support portion and the rotation transmission shaft is formed.
In the present invention with this configuration, since the tip of the pressing member is flat, even if the center of the pressing member is deviated from the top of the spherical sample, the spherical sample is evenly directed toward the support portion and the rotation transmission shaft. It can be pressed with force.

The pressing member is preferably configured to be eccentric with respect to the center of the spherical sample so as to press the spherical sample toward the rotation transmission shaft.
In the present invention having this configuration, since the pressing member is eccentric with respect to the spherical sample, when the pressing member is pressed, the spherical sample is pressed toward the rotation transmission shaft, and the spherical sample, the rotation transmission shaft, The friction of increases. Therefore, since the rotation or advance / retreat movement of the rotation transmission shaft can be reliably transmitted to the spherical sample, the rotation operation of the rotation transmission shaft can be performed smoothly.

The perspective view of the holder for spherical samples concerning a 1st embodiment of the present invention. The perspective view of the holder for spherical samples seen from the direction different from FIG. The top view of the holder for spherical samples. Sectional drawing which shows the attachment structure of a support part. The top view which shows the state which performs a measurement using the holder for spherical samples. The side view which shows the state which performs a measurement using the holder for spherical samples. The perspective view explaining the motion of a rotation transmission shaft. The perspective view of the holder for spherical samples which concerns on 2nd Embodiment of this invention. (A) (B) is sectional drawing which shows the state by which a spherical sample is preloaded.

Embodiments of the present invention will be described with reference to the drawings.
1 to 3 show the overall configuration of the spherical sample holder 1 according to the first embodiment of the present invention.
1 and 2 are perspective views of the spherical sample holder 1 as seen from different directions, and FIG. 3 is a plan view of the spherical sample holder 1.
1 to 3, a spherical sample holder 1 includes a cylindrical container-like base 11, two support portions 121 and 122 that are provided on the base 11 and support the spherical sample S, a rotation transmission shaft 13, and a base. 11 is provided with a drop-off prevention wall portion 14 that is integrally provided with the ball sample S to prevent the spherical sample S from dropping off, and a clamp screw 15 that fixes the rotation transmission shaft 13. In addition, the column-shaped support stand 16 may be provided in the bottom part of the base 11 so that attachment or detachment is possible as needed.

The base 11 has a shape in which a front side of a bottomed cylindrical member having a disc portion 11A and a cylindrical portion 11B is partially cut out, and is formed from a synthetic resin such as polyurethane.
The disc portion 11A is a disc member having a notch in a part thereof, and a clearance hole 11C for preventing interference with the bottom of the sphere sample S when the sphere sample S is placed at the center thereof. Is formed. The escape hole 11C is formed with a step.
The outer peripheral surface of the cylindrical portion 11B coincides with the outer peripheral surface of the disc portion 11A.

Each of the drop-off prevention wall portions 14 is a pair of upright portions that are integrally formed extending in the axial direction from the cylindrical portion 11B, the outer peripheral surface thereof coincides with the outer peripheral surface of the base 11, and the inner peripheral surface thereof is the cylindrical portion. It coincides with the inner peripheral surface of 11B. These drop-off prevention wall portions 14 have a rotationally symmetric shape with the axis of the cylindrical portion 11B as a circle center.
The diameter of the inner periphery of the dropout prevention wall portion 14 is larger than the diameter of the spherical sample S. The upper part of the inner periphery of the cylindrical part 11B and the drop-off prevention wall part 14 is opened as a space for attaching and removing the spherical sample S.

  The rotation transmission shaft 13 is rotatable about the axis X of the rotation transmission shaft 13 so that the base 11 can select the position of the surface of the sphere sample S without moving the center position of the sphere sample S. It is provided along the way. That is, the support points P1 and P2 that support the spherical sample S of the support portions 121 and 122 and the support point P3 that supports the spherical sample S of the rotation transmission shaft 13 are arranged to be the vertices of the equilateral triangle A, respectively. . The center of the circle SB that connects the vertices of the regular triangle A coincides with the center of the circle on the inner periphery of the dropout prevention wall portion 14.

The rotation transmission shaft 13 includes a shaft main body 130 provided through the base 11 so that the shaft core is parallel to a straight line B connecting the two support portions 121 and 122, and provided at both ends of the shaft main body 130, respectively. The knob part 131 is provided. Further, the rotation transmission shaft 13 is made of a material having small thermal conductivity, and the friction resistance of the support portions 121 and 122 with respect to the sphere sample S is smaller than the friction resistance of the rotation transmission shaft 13 with respect to the sphere sample S.
The shaft main body 130 is a round shaft member provided so as to be rotatable about the axis with respect to the base 11 and to be movable back and forth in the axial direction, and the diameter thereof is substantially the same as the diameter of the sphere 124.
The knob 131 is a short cylindrical member having a diameter larger than the diameter of the hole through which the shaft main body 130 of the base 11 is inserted, and functions as a knob for rotating or advancing and retracting the rotation transmission shaft 13 as well as rotation transmission. The shaft 13 also functions as a stopper from the base 11.
The clamp screw 15 fixes the rotation transmission shaft 13 at its head, and extends in a direction orthogonal to the axial direction of the rotation transmission shaft 13 and is provided on the back side of the base 11.

In the present embodiment, the direction that is far from the rotation transmission shaft 13 from the outside of the base 11 and close to the straight line connecting the support points P1 and P2 is the front direction R1, and is close to the rotation transmission shaft 13 from the outside of the base 11. The direction is a back direction R2. An opening 14A for accessing from the front direction R1 is formed in the vicinity of the support portions 121 and 122 in the base 11 and the drop-off preventing wall portion 14, and an opening 14B for accessing from the back direction R2 to the rotation transmission shaft 130 side. Each is formed.
These openings 14A and 14B have a dimension L in the width direction (a direction in a plane orthogonal to the axial direction of the base 11) that is necessary for observation and measurement, and is set smaller than the diameter of the spherical sample S. Yes.
The height of the drop-off prevention wall portion 14 is set to be lower than the height of the spherical sample S supported by the support portions 121 and 122 and the rotation transmission shaft 13. That is, when the spherical sample S is installed in the spherical sample holder 1, the top side spherical portion, the front side spherical portion, and the back side spherical portion are exposed.

The attachment structure of the support parts 121 and 122 is shown in detail in FIG.
In FIG. 4, the support portions 121 and 122 include a plurality of rolling elements 123 that are rotatably provided in a recess 11 </ b> D formed in the disk portion 11 </ b> A of the base 11, and a sphere 124 that is supported by these rolling elements 123. And a retainer 125 for connecting the plurality of rolling elements 123 to each other.
The two spheres 124 are formed in the same spherical shape from the same synthetic resin such as polyacetal. The plurality of rolling elements 123 are each formed in a spherical shape having the same diameter from the same synthetic resin such as polyacetal.
The concave portion 11D of the disc portion 11A is formed in a hemispherical shape, and a retaining portion 11E for preventing the rolling element 123 and the sphere 124 from coming out of the disc portion 11A is provided at the end edge thereof. The retaining portion 11E is formed in a tapered shape so that the inner peripheral surface thereof is narrowed upward. The sphere center O of the sphere 124 is located below the upper surface of the disk portion 11A.

A method of measuring using the spherical sample holder 1 having the above configuration will be described with reference to FIGS.
FIG. 5 shows a plane in a state where measurement is performed using the spherical sample holder 1, and FIG. 6 shows a side surface where measurement is performed using the spherical sample holder 1. 5 and 6 show examples used when interference measurement is performed on the surface shape of a spherical sample.
5 and 6, the sphere sample S is placed on the two spheres 124 and the rotation transmission shaft 13 of the sphere sample holder 1 using tweezers or the like, and close to the sphere sample holder 1. A horizontal spherical interference measuring apparatus 100 such as a Fizeau interferometer is disposed. 5 and 6 show a part of the spherical sample surface interference device.
The spherical interference measuring apparatus 100 includes a reference spherical original device 101 provided with a reference spherical surface (not shown) and a Fizeau interferometer 102, and a spherical sample in which conical measurement light Q is exposed from the opening 14A of the spherical sample holder 1. S is irradiated to an arbitrary position from the horizontal direction.
When the measurement of the position of the spherical sample S is completed, the clamp screw 15 is loosened so that the rotation transmission shaft 13 can be rotated or retreated.

FIG. 7 is a diagram for explaining the movement of the rotation transmission shaft 13.
In FIG. 7, in a state where the sphere sample S is placed on the two spheres 123 and the rotation transmission shaft 13 of the sphere sample holder 1, the rotation transmission shaft 13 is rotated or moved back and forth in the axial direction.
For example, when the rotation transmission shaft 13 is rotated in the arrow M1 direction, the spherical sample S rotates in the arrow M2 direction, and when the rotation transmission shaft 13 is advanced and retracted in the arrow N1 direction, the spherical sample S is parallel to the arrow N1 direction. It rotates in the direction of arrow N2 in the plane. The spherical sample S has a frictional force between itself and the rotation transmission shaft 13 due to its own weight, and the rotation transmission shaft 13 rotates in the direction of the arrow M1 and advances and retreats in the direction of the arrow N1, so that the spherical sample S becomes the arrow M2, Rotate to N2. Even if the sphere sample S rotates, the sphere sample S slides between the support parts 121 and 122, so that the center of gravity (sphere center) of the sphere sample S does not deviate from the circle center of the base 11.
When the surface to be measured exposed from the opening 14 </ b> A of the spherical sample S is changed, the clamp screw 15 is tightened so that the rotation transmission shaft 13 does not move with respect to the base 11.
Furthermore, the measurement light Q is irradiated to the changed measurement position of the spherical sample S exposed from the opening 14A to perform measurement.

Therefore, in the first embodiment, the following operational effects can be achieved.
(1) The container-shaped base 11 is provided with one rotation transmission shaft 13 and two support portions 121 and 122 for supporting the spherical sample S, and the rotation transmission shaft 13 is rotated about the axis with respect to the base 11. Since the spherical sample S is supported at three points of the two support portions 121 and 122 and the rotation transmission shaft 13 so as to be freely movable along the axial direction. One rotation transmission shaft 13 may be rotated or advanced / retracted, and the spherical sample S is stably supported at three points of the two support parts 121 and 122 and the rotation transmission shaft 13 even after the change, The spherical sample S can be positioned at a predetermined position with good reproducibility. In addition, since a member for holding the upper portion of the sphere sample S is not required, the structure of the sphere sample holder 1 can be simplified, and the sphere sample S can be easily attached and detached.

(2) The base 11 is provided with a drop-preventing wall 14 for preventing the drop of the spherical sample S to constitute the spherical sample holder 1, and the openings 14 </ b> A and 14 </ b> B for exposing the surface of the spherical sample S to the drop-off preventing wall 14. Since the spherical sample S can be accessed from the horizontal direction, measurement using a horizontal Fizeau interferometer and the like can be performed, and the spherical sample S can be dropped by the drop prevention wall 14. Can be prevented.

(3) The support points P1 and P2 that support the spherical sample S of the support portions 121 and 122 and the support point P3 of the rotation transmission shaft 13 that supports the spherical sample S are arranged so as to be the vertices of an equilateral triangle. Therefore, the sphere sample S is supported very stably, and the sphere sample S does not move during observation or the like.

(4) An opening 14A is formed on the front side of the drop-off prevention wall portion 14, and an opening 14B is formed on the back side of the drop-off prevention wall portion 14. The width dimension L of these openings 14A and 14B is the same as that of the spherical sample S. Since the dimension is smaller than the diameter, the spherical sample S can be exposed from two directions, the front side and the back side. Therefore, since the spherical sample S can be held with tweezers or the like through the openings 14A and 14B facing each other, the spherical sample S can be easily attached to and detached from the base 11. In addition, the spherical sample S does not drop out from the openings 14A and 14B during measurement and observation.

(5) Since the height of the drop-off prevention wall portion 14 is set lower than the height of the sphere sample S supported by the support portions 121 and 122 and the rotation transmission shaft 13, the sphere sample S placed on the base 11. Can be rotated from above. In addition, the spherical sample S can be measured and observed from above as in the conventional method.

(6) Since the drop-off prevention wall portion 14 is rotationally symmetric, the drop-off prevention wall portion 14 and the base 11 can be easily formed integrally, and the structure of the spherical sample holder 1 can be simplified.

(7) Since the clearance hole 11C is formed in the disc portion 11A of the base 11, the bottom of the spherical sample S does not interfere with the base 11.

(8) The support portions 121 and 122 include a sphere 124 that supports the sphere sample S, and a plurality of rolling elements 123 that support the sphere 124 and that are rotatably provided on a recess 11D formed in the base 11. Since the rolling member 123 rotates smoothly with the rotation of the spherical sample S, the spherical sample S can be rotated smoothly, and the rotation of the spherical sample S is supported by the support portions 121 and 122. Without being hindered, it is possible to prevent the positional deviation of the spherical sample S after rotation.

(9) Since the frictional resistance of the support portions 121 and 122 with respect to the sphere sample S is smaller than the frictional resistance of the rotation transmission shaft 13 with respect to the sphere sample S, the rotation and forward / backward movement of the rotation transmission shaft 13 can be reliably transmitted to the sphere sample S. At the same time, the spherical sample S rotates smoothly with respect to the support portion. Therefore, smooth rotation of the sphere sample S and prevention of displacement of the sphere sample S after rotation can be realized.

(10) Since the spheres 124 of the support portions 121 and 122 are made of synthetic resin, it is possible to reduce the damage to the sphere sample S to be supported.

(11) Since the base 11 is made of a synthetic resin, the weight of the spherical sample holder 1 can be reduced.

(12) Since the rotation transmission shaft 13 includes the shaft main body 130 and the knobs 131 provided at both ends of the shaft main body 130, an operation for rotating or moving the rotation transmission shaft 13 by the knob 131 is performed. The rotation transmission shaft 13 is prevented from being detached from the base 11.

(13) Since the clamp screw 15 for fixing the rotation transmission shaft 13 is provided on the base 11, the position of the spherical sample S is not inadvertently shifted during measurement or observation.

Next, a second embodiment of the present invention will be described with reference to FIGS.
In the second embodiment, a preload mechanism is connected to the spherical sample holder 1 of the first embodiment. Here, in 2nd Embodiment, the component same as 1st Embodiment attaches | subjects the same code | symbol, and abbreviate | omits description.
FIG. 8 is a perspective view of the spherical sample holder 2 of the second embodiment.
In FIG. 8, the spherical sample holder 2 includes a base 11, two support portions 121 and 122, a rotation transmission shaft 13, two dropout prevention wall portions 14, a clamp screw (not shown in FIG. 8), and a support base 16. The spherical sample holder of the first embodiment and a preload mechanism 20 provided on the base 11 are provided.

The preload mechanism 20 preloads the spherical sample S toward at least the rotation transmission shaft 13 when changing the position of the spherical surface to be measured or observed, and is provided on the top of one of the two dropout prevention wall portions 14. And a plate-like plunger base 22 provided with one end with respect to the support 21, and a pressing member 23 as a pressing member fixed to the other end of the plunger base 22. The
The plunger base 22 is attached so as to be rotatable with respect to the axis Y of the support column 21, thereby configuring a retraction mechanism 24 that switches between a position where the spherical sample S is pressed and a position where the spherical sample S is retracted. The support column 21 may have a stepped shape for supporting the plunger base 22 at a predetermined position. Further, a locking portion such as a protrusion is provided on the stepped portion to hold the plunger base 22 at a predetermined rotation angle. It is possible to employ a configuration in which the plunger base 22 is provided with a locking recess that is provided and locked to the locking portion.
The pressing member 23 includes a cylindrical case 230, a spring (not shown) provided inside the case 230, and a tip 231 that presses the spherical sample S toward at least the rotation transmission shaft 13 by the spring. The specific structure is a known spring plunger or ball plunger. Note that the protruding amount of the tip 231 is adjusted in advance so that the spherical sample S is preloaded at the tip 231 with a predetermined pressure.

A specific structure of the pressing member 23 is shown in FIG. In FIG. 9, only the sphere 124 is shown as the support part 121 (122).
FIG. 9A illustrates a case where the spherical sample S is pressed toward both the rotation transmission shaft 13 and the support portion 121 (122) by the pressing member 23.
In FIG. 9A, the tip 231 is arranged so that its axial center passes through the center C of the sphere sample S, and the sphere sample S is directed toward the support portion 121 (122) and the rotation transmission shaft 13. A flat surface 231A for pressing evenly is formed at the tip.

FIG. 9B illustrates a case where the spherical sample S is pressed toward the rotation transmission shaft 13 by the pressing member 23.
In FIG. 9B, the tip 231 is arranged eccentrically so that its axial center is shifted from the center C of the sphere sample S, and presses the sphere sample S toward the rotation transmission shaft 13. A spherical projecting portion 231B is formed at the tip. That is, the protruding portion 231B is disposed at a position away from the rotation transmission shaft 13 from the center C of the spherical sample S, and the tip portion 231 is pressed downward toward the support portion 121 (122) side. A force pressed downward and a force pressed horizontally are applied to the spherical surface of the spherical sample S with which the protruding portion 231B abuts, and the resultant force is directed toward the rotation transmission shaft 13. The specific structure of the protruding portion 231B is not limited. For example, a protrusion having a spherical tip may be used.

Therefore, in the second embodiment, in addition to the effects (1) to (13) of the first embodiment, the following effects can be obtained.
(14) Since the preload mechanism 20 for preloading the sphere sample S toward the support portions 121 and 122 and the rotation transmission shaft 13 is provided on the base 11, the preload mechanism 20 generates a frictional force between the sphere sample S and the rotation transmission shaft 13. By increasing the size, even when the sphere sample S is light, the sphere sample S can be reliably rotated by rotating or advancing and retracting the rotation transmission shaft 13.

(15) Since the preload mechanism 20 includes the pressing member 23 that presses the spherical sample S and the retracting mechanism 24 that retracts the spherical sample S from the position at which the spherical sample S is pressed by the pressing member 23, the pressing member 23 is moved by the retracting mechanism 20. If the spherical sample S is retracted from the position where it is pressed, the preload mechanism 20 does not get in the way during observation or the like.

(16) If the pressing member 23 is configured to have a tip 231 formed with a flat surface 231A for pressing the spherical sample S toward the support portions 121 and 122 and the rotation transmission shaft 13, the center of the pressing member 23 is a sphere. Even if it is displaced with respect to the top of the sample S, the spherical sample S can be pressed toward the support portions 121 and 122 and the rotation transmission shaft 13 with an equal force.

(17) The pressing member 23 is arranged eccentrically with respect to the center of the spherical sample S, and a protruding portion 231B for pressing the spherical sample S toward the rotation transmission shaft 13 is formed at the distal end portion 231 of the pressing member 23. In this case, since the friction between the spherical sample S and the rotation transmission shaft 13 is increased, the rotation or forward / backward movement of the rotation transmission shaft 13 can be reliably transmitted to the spherical sample S.

In addition, this invention is not limited to embodiment mentioned above, The deformation | transformation shown below is included in the range which can achieve the objective of this invention.
For example, in the above-described embodiment, the support portions 121 and 122 are each provided with two rolling elements 123 and one sphere 124, but in the present invention, the support portions 121 and 122 are spheres embedded in the base 11. It may consist of only 124. In this case, instead of the sphere 124, only the head that contacts the sphere sample S may be a spherical surface, and the portion fixed to the base 11 may be a shaft portion.

In the present invention, the provision of the preload mechanism 20 is not limited to the structure of the second embodiment. For example, in FIG. 9A, the shape of the tip portion 231 may be a shape having a protruding portion 231B at the tip instead of the shape having the flat surface 231A. In FIG. 9B, the pressing member 23 is structured to be decentered with respect to the center C of the spherical sample S. However, in the present invention, the pressing member 23 is disposed obliquely so that its axial center passes through the center C. It is good also as composition to do.
Furthermore, although it is not always necessary to provide the retracting mechanism 24, even if it is provided, it is not limited to the structure of the second embodiment. For example, when the column 21 is configured to be movable back and forth along the axial direction, and when the sphere sample S is attached to and detached from the base 11 or when measurement or observation is performed, the column 21 is extended and the pressing member 23 is separated from the sphere sample S. It is good also as a structure.

Furthermore, in the present invention, it is not always necessary to provide the drop-off prevention wall portion 14, and when provided, the drop-off prevention wall portion 14 is not limited to a rotationally symmetric shape. Even if it is rotationally symmetric, the number of drop-off prevention wall portions 14 may be three or more.
In the present invention, the structures of the base 11 and the drop-off prevention wall portion 14 are not limited to those of the above embodiment. For example, the base has a structure in which a conical storage surface for storing a spherical sample is formed, and a rotation transmission shaft is provided on the base so as to be rotatable and axially movable. The structure which supports a spherical sample stably in a total of three places with the two support parts of a surface may be sufficient.
Further, the shape of the base 11 may be a planar rectangular shape.
Furthermore, you may provide the base 11 and the drop-off prevention wall part 14 separately. Furthermore, the support portions 121 and 122 and the rotation transmission shaft 13 may be made of metal.

  The present invention can be used in an apparatus for measuring, observing, or processing the surface shape of a spherical sample.

  DESCRIPTION OF SYMBOLS 1, 2 ... Sphere sample holder, 11 ... Base, 13 ... Rotation transmission shaft, 14 ... Fall-off prevention wall part, 15 ... Clamp screw, 20 ... Preload mechanism, 21 ... Strut, 23 ... Press member, 24 ... Retraction mechanism, 121, 122 ... support part, 123 ... rolling element, 124 ... sphere, 231 ... tip part, 231A ... plane, 231B ... projecting part, A ... triangle, P1, P2, P3 ... support point

Claims (10)

The spherical sample by a container-like base into which the spherical sample is inserted, two support portions provided at the bottom of the base, movement along the axis inserted into and out of the base, and rotation around the axis A rotation transmission shaft for rotating the spherical sample, and the support portion has a spherical surface at least in contact with the spherical sample, and supports the spherical sample at three points of the two support portions and the rotation transmission shaft. A holder for a spherical sample. In the spherical sample holder according to claim 1,
A holder for a sphere sample, wherein the base is provided with a drop prevention wall portion for preventing the sphere sample from falling off, and the drop prevention wall portion is provided with an opening for exposing the surface of the sphere sample. . In the spherical sample holder according to claim 2,
The spherical sample holder, wherein the opening is formed on each of a front side and a back side of the drop-off preventing wall and has a size smaller than the diameter of the spherical sample. In the spherical sample holder according to any one of claims 1 to 3,
The holder for a spherical sample, wherein the drop-off prevention wall portion is rotationally symmetric. In the spherical sample holder according to any one of claims 1 to 4,
The holder for a sphere sample, wherein the support portion includes a sphere, and a plurality of rolling elements that rotatably support the sphere are arranged in a recess formed in the base. In the spherical sample holder according to any one of claims 1 to 5,
A spherical sample holder, wherein a frictional resistance of the support portion with respect to the spherical sample is smaller than a frictional resistance of the rotation transmission shaft with respect to the spherical sample. The holder for a spherical sample according to any one of claims 1 to 6,
A holder for a sphere sample, wherein the base is provided with a preload mechanism for preloading the sphere sample toward at least the rotation transmission shaft. In the spherical sample holder according to claim 7,
The spherical sample holder, wherein the preload mechanism includes a pressing member that presses the spherical sample and a retraction mechanism that retracts the pressing member from a position where the spherical sample is pressed. The holder for a spherical sample according to claim 8,
A spherical sample holder, wherein the pressing member is formed with a flat surface that presses the spherical sample toward the support and the rotation transmission shaft. The holder for a spherical sample according to claim 8,
The spherical sample holder, wherein the pressing member is arranged eccentrically with respect to the center of the spherical sample so as to press the spherical sample toward the rotation transmission shaft.

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