JPWO2020049551A5 - - Google Patents

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Publication number
JPWO2020049551A5
JPWO2020049551A5 JP2021512758A JP2021512758A JPWO2020049551A5 JP WO2020049551 A5 JPWO2020049551 A5 JP WO2020049551A5 JP 2021512758 A JP2021512758 A JP 2021512758A JP 2021512758 A JP2021512758 A JP 2021512758A JP WO2020049551 A5 JPWO2020049551 A5 JP WO2020049551A5
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JP
Japan
Prior art keywords
light
illumination
inspection system
modalities
areas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2021512758A
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English (en)
Japanese (ja)
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JP2022501580A (ja
JP7500545B2 (ja
Publication date
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Priority claimed from PCT/IL2019/050958 external-priority patent/WO2020049551A1/fr
Publication of JP2022501580A publication Critical patent/JP2022501580A/ja
Publication of JPWO2020049551A5 publication Critical patent/JPWO2020049551A5/ja
Application granted granted Critical
Publication of JP7500545B2 publication Critical patent/JP7500545B2/ja
Active legal-status Critical Current
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JP2021512758A 2018-09-06 2019-08-27 光学検査システム向けマルチモダリティ多重化照明 Active JP7500545B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862727561P 2018-09-06 2018-09-06
US62/727,561 2018-09-06
PCT/IL2019/050958 WO2020049551A1 (fr) 2018-09-06 2019-08-27 Éclairage multiplexé à modalités multiples pour systèmes d'inspection optique

Publications (3)

Publication Number Publication Date
JP2022501580A JP2022501580A (ja) 2022-01-06
JPWO2020049551A5 true JPWO2020049551A5 (fr) 2022-09-01
JP7500545B2 JP7500545B2 (ja) 2024-06-17

Family

ID=69722341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021512758A Active JP7500545B2 (ja) 2018-09-06 2019-08-27 光学検査システム向けマルチモダリティ多重化照明

Country Status (6)

Country Link
US (1) US11974046B2 (fr)
EP (1) EP3847446A4 (fr)
JP (1) JP7500545B2 (fr)
KR (1) KR20210050565A (fr)
CN (1) CN112888936A (fr)
WO (1) WO2020049551A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201900005536A1 (it) * 2019-04-10 2020-10-10 Doss Visual Solution S R L Metodo di acquisizione immagini per una macchina di ispezione ottica
CN114813761B (zh) * 2022-06-27 2022-10-14 浙江双元科技股份有限公司 一种基于双光频闪的薄膜针孔和亮斑缺陷识别系统及方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5058982A (en) 1989-06-21 1991-10-22 Orbot Systems Ltd. Illumination system and inspection apparatus including same
DE19829986C1 (de) * 1998-07-04 2000-03-30 Lis Laser Imaging Systems Gmbh Verfahren zur Direktbelichtung von Leiterplattensubstraten
IL131284A (en) * 1999-08-05 2003-05-29 Orbotech Ltd Illumination for inspecting surfaces of articles
US20020186878A1 (en) 2001-06-07 2002-12-12 Hoon Tan Seow System and method for multiple image analysis
WO2004063668A2 (fr) * 2003-01-09 2004-07-29 Orbotech Ltd. Procede et appareil d'examen 2d et topographique simultane
US7641365B2 (en) 2006-10-13 2010-01-05 Orbotech Ltd Linear light concentrator
JP4932595B2 (ja) * 2007-05-17 2012-05-16 新日本製鐵株式会社 表面疵検査装置
US8462329B2 (en) * 2010-07-30 2013-06-11 Kla-Tencor Corp. Multi-spot illumination for wafer inspection
US9279774B2 (en) * 2011-07-12 2016-03-08 Kla-Tencor Corp. Wafer inspection
JP2014009969A (ja) 2012-06-27 2014-01-20 Sumitomo Metal Mining Co Ltd 画像処理装置、画像処理方法、及び露光パターン検査装置
JP2014052203A (ja) * 2012-09-05 2014-03-20 Toshiba Mitsubishi-Electric Industrial System Corp 平面形状測定装置
JP5890953B2 (ja) * 2013-09-30 2016-03-22 名古屋電機工業株式会社 検査装置
US9606056B2 (en) * 2013-12-06 2017-03-28 Canon Kabushiki Kaisha Selection of spectral bands or filters for material classification under multiplexed illumination
US9638644B2 (en) * 2013-08-08 2017-05-02 Camtek Ltd. Multiple mode inspection system and method for evaluating a substrate by a multiple mode inspection system
CN106066562B (zh) * 2015-04-21 2020-07-10 康代有限公司 具有扩展的角覆盖范围的检查系统

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