JPWO2019028064A5 - - Google Patents

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Publication number
JPWO2019028064A5
JPWO2019028064A5 JP2020505151A JP2020505151A JPWO2019028064A5 JP WO2019028064 A5 JPWO2019028064 A5 JP WO2019028064A5 JP 2020505151 A JP2020505151 A JP 2020505151A JP 2020505151 A JP2020505151 A JP 2020505151A JP WO2019028064 A5 JPWO2019028064 A5 JP WO2019028064A5
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JP
Japan
Prior art keywords
scan
spot
film
aod
beams
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JP2020505151A
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English (en)
Japanese (ja)
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JP7274455B2 (ja
JP2020530196A (ja
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Priority claimed from PCT/US2018/044671 external-priority patent/WO2019028064A1/en
Publication of JP2020530196A publication Critical patent/JP2020530196A/ja
Publication of JPWO2019028064A5 publication Critical patent/JPWO2019028064A5/ja
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JP2020505151A 2017-07-31 2018-07-31 ファイバーレーザー装置及びワークピースを処理するための方法 Active JP7274455B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201762539183P 2017-07-31 2017-07-31
US62/539,183 2017-07-31
US201762549254P 2017-08-23 2017-08-23
US62/549,254 2017-08-23
PCT/US2018/044671 WO2019028064A1 (en) 2017-07-31 2018-07-31 FIBER LASER APPARATUS AND PART PROCESSING METHOD

Publications (3)

Publication Number Publication Date
JP2020530196A JP2020530196A (ja) 2020-10-15
JPWO2019028064A5 true JPWO2019028064A5 (zh) 2022-12-14
JP7274455B2 JP7274455B2 (ja) 2023-05-16

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ID=65234163

Family Applications (1)

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JP2020505151A Active JP7274455B2 (ja) 2017-07-31 2018-07-31 ファイバーレーザー装置及びワークピースを処理するための方法

Country Status (5)

Country Link
EP (2) EP3646419A4 (zh)
JP (1) JP7274455B2 (zh)
KR (2) KR102531020B1 (zh)
CN (2) CN111133639B (zh)
WO (1) WO2019028064A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117355383A (zh) * 2021-03-18 2024-01-05 戴弗根特技术有限公司 基于可变波束几何结构能量束的粉末床熔合
DE102022125106A1 (de) 2022-09-29 2024-04-04 Trumpf Laser Gmbh Optische Anordnung für eine Laserbearbeitungsanlage

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1553643A3 (en) * 2003-12-26 2009-01-21 Sel Semiconductor Energy Laboratory Co., Ltd. Laser irradiation method and method for manufacturing crystalline semiconductor film
JP2005217209A (ja) * 2004-01-30 2005-08-11 Hitachi Ltd レーザアニール方法およびレーザアニール装置
JP2005333117A (ja) 2004-04-23 2005-12-02 Semiconductor Energy Lab Co Ltd レーザ照射装置及び半導体装置の作製方法
JP2006134986A (ja) 2004-11-04 2006-05-25 Sony Corp レーザ処理装置
US7700463B2 (en) * 2005-09-02 2010-04-20 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
WO2007046290A1 (en) * 2005-10-18 2007-04-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US7317179B2 (en) * 2005-10-28 2008-01-08 Cymer, Inc. Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate
GB2460648A (en) * 2008-06-03 2009-12-09 M Solv Ltd Method and apparatus for laser focal spot size control
WO2010056990A1 (en) * 2008-11-14 2010-05-20 The Trustees Of Columbia University In The City Of New York Systems and methods for the crystallization of thin films
GB0900036D0 (en) * 2009-01-03 2009-02-11 M Solv Ltd Method and apparatus for forming grooves with complex shape in the surface of apolymer
DE102009021251A1 (de) * 2009-05-14 2010-11-18 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Formung von Laserstrahlung sowie Laservorrichtung mit einer derartigen Vorrichtung
TW201222009A (en) * 2010-05-21 2012-06-01 Corning Inc Systems and methods for reducing speckle using diffusing surfaces
CN202183771U (zh) * 2011-08-25 2012-04-04 武汉光迅科技股份有限公司 一种光差分正交相移键控格式解调器
KR102015845B1 (ko) * 2012-11-26 2019-08-30 엘지디스플레이 주식회사 레이저 조사장치 및 이를 이용한 유기발광소자 제조방법
JP2017528922A (ja) 2014-07-03 2017-09-28 アイピージー フォトニクス コーポレーション ファイバーレーザーによってアモルファスシリコン基板を均一に結晶化させるための方法及びシステム
CN107924827B (zh) 2015-06-29 2022-07-01 Ipg光子公司 用于非晶硅衬底的均匀结晶的基于光纤激光器的系统
US11437236B2 (en) 2016-01-08 2022-09-06 The Trustees Of Columbia University In Thf City Of New York Methods and systems for spot beam crystallization

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