JPWO2019028064A5 - - Google Patents
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- JPWO2019028064A5 JPWO2019028064A5 JP2020505151A JP2020505151A JPWO2019028064A5 JP WO2019028064 A5 JPWO2019028064 A5 JP WO2019028064A5 JP 2020505151 A JP2020505151 A JP 2020505151A JP 2020505151 A JP2020505151 A JP 2020505151A JP WO2019028064 A5 JPWO2019028064 A5 JP WO2019028064A5
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- JP
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- Prior art keywords
- scan
- spot
- film
- aod
- beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201762539183P | 2017-07-31 | 2017-07-31 | |
US62/539,183 | 2017-07-31 | ||
US201762549254P | 2017-08-23 | 2017-08-23 | |
US62/549,254 | 2017-08-23 | ||
PCT/US2018/044671 WO2019028064A1 (en) | 2017-07-31 | 2018-07-31 | FIBER LASER APPARATUS AND PART PROCESSING METHOD |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2020530196A JP2020530196A (ja) | 2020-10-15 |
JPWO2019028064A5 true JPWO2019028064A5 (zh) | 2022-12-14 |
JP7274455B2 JP7274455B2 (ja) | 2023-05-16 |
Family
ID=65234163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020505151A Active JP7274455B2 (ja) | 2017-07-31 | 2018-07-31 | ファイバーレーザー装置及びワークピースを処理するための方法 |
Country Status (5)
Country | Link |
---|---|
EP (2) | EP3646419A4 (zh) |
JP (1) | JP7274455B2 (zh) |
KR (2) | KR102531020B1 (zh) |
CN (2) | CN111133639B (zh) |
WO (1) | WO2019028064A1 (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4308331A1 (en) * | 2021-03-18 | 2024-01-24 | Divergent Technologies, Inc. | Variable beam geometry energy beam-based powder bed fusion |
DE102022125106A1 (de) | 2022-09-29 | 2024-04-04 | Trumpf Laser Gmbh | Optische Anordnung für eine Laserbearbeitungsanlage |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1553643A3 (en) * | 2003-12-26 | 2009-01-21 | Sel Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation method and method for manufacturing crystalline semiconductor film |
JP2005217209A (ja) * | 2004-01-30 | 2005-08-11 | Hitachi Ltd | レーザアニール方法およびレーザアニール装置 |
JP2005333117A (ja) | 2004-04-23 | 2005-12-02 | Semiconductor Energy Lab Co Ltd | レーザ照射装置及び半導体装置の作製方法 |
JP2006134986A (ja) | 2004-11-04 | 2006-05-25 | Sony Corp | レーザ処理装置 |
US7700463B2 (en) * | 2005-09-02 | 2010-04-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
WO2007046290A1 (en) * | 2005-10-18 | 2007-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US7317179B2 (en) * | 2005-10-28 | 2008-01-08 | Cymer, Inc. | Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate |
GB2460648A (en) * | 2008-06-03 | 2009-12-09 | M Solv Ltd | Method and apparatus for laser focal spot size control |
KR20110094022A (ko) * | 2008-11-14 | 2011-08-19 | 더 트러스티이스 오브 콜롬비아 유니버시티 인 더 시티 오브 뉴욕 | 박막 결정화를 위한 시스템 및 방법 |
GB0900036D0 (en) * | 2009-01-03 | 2009-02-11 | M Solv Ltd | Method and apparatus for forming grooves with complex shape in the surface of apolymer |
DE102009021251A1 (de) * | 2009-05-14 | 2010-11-18 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Formung von Laserstrahlung sowie Laservorrichtung mit einer derartigen Vorrichtung |
TW201222009A (en) * | 2010-05-21 | 2012-06-01 | Corning Inc | Systems and methods for reducing speckle using diffusing surfaces |
CN202183771U (zh) * | 2011-08-25 | 2012-04-04 | 武汉光迅科技股份有限公司 | 一种光差分正交相移键控格式解调器 |
KR102015845B1 (ko) * | 2012-11-26 | 2019-08-30 | 엘지디스플레이 주식회사 | 레이저 조사장치 및 이를 이용한 유기발광소자 제조방법 |
CN109979805B (zh) * | 2014-07-03 | 2023-02-21 | Ipg光子公司 | 通过光纤激光器使非晶硅衬底均匀再结晶的工艺和系统 |
WO2017004280A1 (en) * | 2015-06-29 | 2017-01-05 | Ipg Photonics Corporation | Fiber laser-based system for uniform crystallization of amorphous silicon substrate |
KR102631102B1 (ko) | 2016-01-08 | 2024-01-30 | 더 트러스티이스 오브 콜롬비아 유니버시티 인 더 시티 오브 뉴욕 | 스폿 빔 결정화를 위한 방법 및 시스템 |
-
2018
- 2018-07-31 JP JP2020505151A patent/JP7274455B2/ja active Active
- 2018-07-31 EP EP18840834.8A patent/EP3646419A4/en active Pending
- 2018-07-31 WO PCT/US2018/044671 patent/WO2019028064A1/en unknown
- 2018-07-31 KR KR1020207005577A patent/KR102531020B1/ko active IP Right Grant
- 2018-07-31 CN CN201880060545.8A patent/CN111133639B/zh active Active
- 2018-07-31 EP EP18841667.1A patent/EP3642384A4/en active Pending
- 2018-07-31 KR KR1020237015373A patent/KR20230068442A/ko not_active Application Discontinuation
- 2018-07-31 CN CN201880058227.8A patent/CN111065759B/zh active Active
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