JPWO2018092606A1 - Film for sealing, cured product thereof, and electronic device - Google Patents
Film for sealing, cured product thereof, and electronic device Download PDFInfo
- Publication number
- JPWO2018092606A1 JPWO2018092606A1 JP2018551572A JP2018551572A JPWO2018092606A1 JP WO2018092606 A1 JPWO2018092606 A1 JP WO2018092606A1 JP 2018551572 A JP2018551572 A JP 2018551572A JP 2018551572 A JP2018551572 A JP 2018551572A JP WO2018092606 A1 JPWO2018092606 A1 JP WO2018092606A1
- Authority
- JP
- Japan
- Prior art keywords
- component
- sealing
- mass
- film
- sealing film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 title claims abstract description 121
- 239000003822 epoxy resin Substances 0.000 claims abstract description 67
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 67
- 239000007788 liquid Substances 0.000 claims abstract description 39
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 21
- 239000002904 solvent Substances 0.000 claims abstract description 17
- 239000011256 inorganic filler Substances 0.000 claims abstract description 13
- 229910003475 inorganic filler Inorganic materials 0.000 claims abstract description 13
- 239000002245 particle Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 7
- 239000000047 product Substances 0.000 description 29
- -1 Nippon Kayaku Co. Chemical compound 0.000 description 23
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 17
- 239000005011 phenolic resin Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 14
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 12
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 11
- 239000000203 mixture Substances 0.000 description 11
- 239000007787 solid Substances 0.000 description 10
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 9
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 9
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 9
- 238000000465 moulding Methods 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 7
- 239000004850 liquid epoxy resins (LERs) Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 239000004593 Epoxy Substances 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 238000011156 evaluation Methods 0.000 description 6
- 125000000524 functional group Chemical group 0.000 description 6
- 238000010030 laminating Methods 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229910000077 silane Inorganic materials 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 239000004305 biphenyl Substances 0.000 description 5
- 235000010290 biphenyl Nutrition 0.000 description 5
- 230000002349 favourable effect Effects 0.000 description 5
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 5
- 238000004898 kneading Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 229920003986 novolac Polymers 0.000 description 5
- 150000002989 phenols Chemical class 0.000 description 5
- 239000002966 varnish Substances 0.000 description 5
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
- 125000000217 alkyl group Chemical group 0.000 description 4
- 150000001412 amines Chemical class 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000009472 formulation Methods 0.000 description 4
- 238000003475 lamination Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 3
- 229930185605 Bisphenol Natural products 0.000 description 3
- 239000006087 Silane Coupling Agent Substances 0.000 description 3
- 150000008065 acid anhydrides Chemical class 0.000 description 3
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000008961 swelling Effects 0.000 description 3
- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical compound C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 2
- GQHTUMJGOHRCHB-UHFFFAOYSA-N 2,3,4,6,7,8,9,10-octahydropyrimido[1,2-a]azepine Chemical compound C1CCCCN2CCCN=C21 GQHTUMJGOHRCHB-UHFFFAOYSA-N 0.000 description 2
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- NBBJYMSMWIIQGU-UHFFFAOYSA-N Propionic aldehyde Chemical compound CCC=O NBBJYMSMWIIQGU-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 239000004844 aliphatic epoxy resin Substances 0.000 description 2
- 125000001931 aliphatic group Chemical group 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- HUMNYLRZRPPJDN-UHFFFAOYSA-N benzaldehyde Chemical compound O=CC1=CC=CC=C1 HUMNYLRZRPPJDN-UHFFFAOYSA-N 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- IJOOHPMOJXWVHK-UHFFFAOYSA-N chlorotrimethylsilane Chemical compound C[Si](C)(C)Cl IJOOHPMOJXWVHK-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- VURFVHCLMJOLKN-UHFFFAOYSA-N diphosphane Chemical compound PP VURFVHCLMJOLKN-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 150000002460 imidazoles Chemical class 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 150000004780 naphthols Chemical class 0.000 description 2
- 125000001624 naphthyl group Chemical group 0.000 description 2
- 150000002903 organophosphorus compounds Chemical class 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920006254 polymer film Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 2
- SMQUZDBALVYZAC-UHFFFAOYSA-N salicylaldehyde Chemical compound OC1=CC=CC=C1C=O SMQUZDBALVYZAC-UHFFFAOYSA-N 0.000 description 2
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 1
- HCNHNBLSNVSJTJ-UHFFFAOYSA-N 1,1-Bis(4-hydroxyphenyl)ethane Chemical compound C=1C=C(O)C=CC=1C(C)C1=CC=C(O)C=C1 HCNHNBLSNVSJTJ-UHFFFAOYSA-N 0.000 description 1
- OWEYKIWAZBBXJK-UHFFFAOYSA-N 1,1-Dichloro-2,2-bis(4-hydroxyphenyl)ethylene Chemical compound C1=CC(O)=CC=C1C(=C(Cl)Cl)C1=CC=C(O)C=C1 OWEYKIWAZBBXJK-UHFFFAOYSA-N 0.000 description 1
- OUPZKGBUJRBPGC-UHFFFAOYSA-N 1,3,5-tris(oxiran-2-ylmethyl)-1,3,5-triazinane-2,4,6-trione Chemical compound O=C1N(CC2OC2)C(=O)N(CC2OC2)C(=O)N1CC1CO1 OUPZKGBUJRBPGC-UHFFFAOYSA-N 0.000 description 1
- KUBDPQJOLOUJRM-UHFFFAOYSA-N 2-(chloromethyl)oxirane;4-[2-(4-hydroxyphenyl)propan-2-yl]phenol Chemical compound ClCC1CO1.C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 KUBDPQJOLOUJRM-UHFFFAOYSA-N 0.000 description 1
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- ZPQAUEDTKNBRNG-UHFFFAOYSA-N 2-methylprop-2-enoylsilicon Chemical compound CC(=C)C([Si])=O ZPQAUEDTKNBRNG-UHFFFAOYSA-N 0.000 description 1
- RMGZZGUIMNISKP-UHFFFAOYSA-N 3-(2,3-dihydroxyphenoxy)benzene-1,2-diol Chemical class OC1=CC=CC(OC=2C(=C(O)C=CC=2)O)=C1O RMGZZGUIMNISKP-UHFFFAOYSA-N 0.000 description 1
- IKYAJDOSWUATPI-UHFFFAOYSA-N 3-[dimethoxy(methyl)silyl]propane-1-thiol Chemical compound CO[Si](C)(OC)CCCS IKYAJDOSWUATPI-UHFFFAOYSA-N 0.000 description 1
- LZMNXXQIQIHFGC-UHFFFAOYSA-N 3-[dimethoxy(methyl)silyl]propyl 2-methylprop-2-enoate Chemical compound CO[Si](C)(OC)CCCOC(=O)C(C)=C LZMNXXQIQIHFGC-UHFFFAOYSA-N 0.000 description 1
- DCQBZYNUSLHVJC-UHFFFAOYSA-N 3-triethoxysilylpropane-1-thiol Chemical compound CCO[Si](OCC)(OCC)CCCS DCQBZYNUSLHVJC-UHFFFAOYSA-N 0.000 description 1
- URDOJQUSEUXVRP-UHFFFAOYSA-N 3-triethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CCO[Si](OCC)(OCC)CCCOC(=O)C(C)=C URDOJQUSEUXVRP-UHFFFAOYSA-N 0.000 description 1
- SJECZPVISLOESU-UHFFFAOYSA-N 3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCN SJECZPVISLOESU-UHFFFAOYSA-N 0.000 description 1
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 1
- NZGQHKSLKRFZFL-UHFFFAOYSA-N 4-(4-hydroxyphenoxy)phenol Chemical compound C1=CC(O)=CC=C1OC1=CC=C(O)C=C1 NZGQHKSLKRFZFL-UHFFFAOYSA-N 0.000 description 1
- BATCUENAARTUKW-UHFFFAOYSA-N 4-[(4-hydroxyphenyl)-diphenylmethyl]phenol Chemical compound C1=CC(O)=CC=C1C(C=1C=CC(O)=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 BATCUENAARTUKW-UHFFFAOYSA-N 0.000 description 1
- UMPGNGRIGSEMTC-UHFFFAOYSA-N 4-[1-(4-hydroxyphenyl)-3,3,5-trimethylcyclohexyl]phenol Chemical compound C1C(C)CC(C)(C)CC1(C=1C=CC(O)=CC=1)C1=CC=C(O)C=C1 UMPGNGRIGSEMTC-UHFFFAOYSA-N 0.000 description 1
- IJWIRZQYWANBMP-UHFFFAOYSA-N 4-[2-(4-hydroxy-3-propan-2-ylphenyl)propan-2-yl]-2-propan-2-ylphenol Chemical compound C1=C(O)C(C(C)C)=CC(C(C)(C)C=2C=C(C(O)=CC=2)C(C)C)=C1 IJWIRZQYWANBMP-UHFFFAOYSA-N 0.000 description 1
- PVFQHGDIOXNKIC-UHFFFAOYSA-N 4-[2-[3-[2-(4-hydroxyphenyl)propan-2-yl]phenyl]propan-2-yl]phenol Chemical compound C=1C=CC(C(C)(C)C=2C=CC(O)=CC=2)=CC=1C(C)(C)C1=CC=C(O)C=C1 PVFQHGDIOXNKIC-UHFFFAOYSA-N 0.000 description 1
- DGUJJOYLOCXENZ-UHFFFAOYSA-N 4-[2-[4-(oxiran-2-ylmethoxy)phenyl]propan-2-yl]phenol Chemical class C=1C=C(OCC2OC2)C=CC=1C(C)(C)C1=CC=C(O)C=C1 DGUJJOYLOCXENZ-UHFFFAOYSA-N 0.000 description 1
- PRKPGWQEKNEVEU-UHFFFAOYSA-N 4-methyl-n-(3-triethoxysilylpropyl)pentan-2-imine Chemical compound CCO[Si](OCC)(OCC)CCCN=C(C)CC(C)C PRKPGWQEKNEVEU-UHFFFAOYSA-N 0.000 description 1
- 229920003319 Araldite® Polymers 0.000 description 1
- VOWWYDCFAISREI-UHFFFAOYSA-N Bisphenol AP Chemical compound C=1C=C(O)C=CC=1C(C=1C=CC(O)=CC=1)(C)C1=CC=CC=C1 VOWWYDCFAISREI-UHFFFAOYSA-N 0.000 description 1
- HTVITOHKHWFJKO-UHFFFAOYSA-N Bisphenol B Chemical compound C=1C=C(O)C=CC=1C(C)(CC)C1=CC=C(O)C=C1 HTVITOHKHWFJKO-UHFFFAOYSA-N 0.000 description 1
- GIXXQTYGFOHYPT-UHFFFAOYSA-N Bisphenol P Chemical compound C=1C=C(C(C)(C)C=2C=CC(O)=CC=2)C=CC=1C(C)(C)C1=CC=C(O)C=C1 GIXXQTYGFOHYPT-UHFFFAOYSA-N 0.000 description 1
- SDDLEVPIDBLVHC-UHFFFAOYSA-N Bisphenol Z Chemical compound C1=CC(O)=CC=C1C1(C=2C=CC(O)=CC=2)CCCCC1 SDDLEVPIDBLVHC-UHFFFAOYSA-N 0.000 description 1
- 239000005046 Chlorosilane Substances 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
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- 229910052581 Si3N4 Inorganic materials 0.000 description 1
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- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- SMEGJBVQLJJKKX-HOTMZDKISA-N [(2R,3S,4S,5R,6R)-5-acetyloxy-3,4,6-trihydroxyoxan-2-yl]methyl acetate Chemical compound CC(=O)OC[C@@H]1[C@H]([C@@H]([C@H]([C@@H](O1)O)OC(=O)C)O)O SMEGJBVQLJJKKX-HOTMZDKISA-N 0.000 description 1
- NOKSMMGULAYSTD-UHFFFAOYSA-N [SiH4].N=C=O Chemical compound [SiH4].N=C=O NOKSMMGULAYSTD-UHFFFAOYSA-N 0.000 description 1
- GSFXLBMRGCVEMO-UHFFFAOYSA-N [SiH4].[S] Chemical compound [SiH4].[S] GSFXLBMRGCVEMO-UHFFFAOYSA-N 0.000 description 1
- NOZAQBYNLKNDRT-UHFFFAOYSA-N [diacetyloxy(ethenyl)silyl] acetate Chemical compound CC(=O)O[Si](OC(C)=O)(OC(C)=O)C=C NOZAQBYNLKNDRT-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- IKHGUXGNUITLKF-XPULMUKRSA-N acetaldehyde Chemical compound [14CH]([14CH3])=O IKHGUXGNUITLKF-XPULMUKRSA-N 0.000 description 1
- 229940081735 acetylcellulose Drugs 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
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- 150000001299 aldehydes Chemical class 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 125000004453 alkoxycarbonyl group Chemical group 0.000 description 1
- 150000001343 alkyl silanes Chemical class 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
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- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 230000001588 bifunctional effect Effects 0.000 description 1
- VCCBEIPGXKNHFW-UHFFFAOYSA-N biphenyl-4,4'-diol Chemical group C1=CC(O)=CC=C1C1=CC=C(O)C=C1 VCCBEIPGXKNHFW-UHFFFAOYSA-N 0.000 description 1
- 239000004841 bisphenol A epoxy resin Substances 0.000 description 1
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- 239000004842 bisphenol F epoxy resin Substances 0.000 description 1
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 1
- ZTQSAGDEMFDKMZ-UHFFFAOYSA-N butyric aldehyde Natural products CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
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- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
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- DBKNGKYVNBJWHL-UHFFFAOYSA-N chloro-dimethyl-octylsilane Chemical compound CCCCCCCC[Si](C)(C)Cl DBKNGKYVNBJWHL-UHFFFAOYSA-N 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
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- 238000009833 condensation Methods 0.000 description 1
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- 239000007859 condensation product Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical group Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
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- 230000001186 cumulative effect Effects 0.000 description 1
- SJJCABYOVIHNPZ-UHFFFAOYSA-N cyclohexyl-dimethoxy-methylsilane Chemical compound CO[Si](C)(OC)C1CCCCC1 SJJCABYOVIHNPZ-UHFFFAOYSA-N 0.000 description 1
- 150000005690 diesters Chemical class 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- OTARVPUIYXHRRB-UHFFFAOYSA-N diethoxy-methyl-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](C)(OCC)CCCOCC1CO1 OTARVPUIYXHRRB-UHFFFAOYSA-N 0.000 description 1
- JJQZDUKDJDQPMQ-UHFFFAOYSA-N dimethoxy(dimethyl)silane Chemical compound CO[Si](C)(C)OC JJQZDUKDJDQPMQ-UHFFFAOYSA-N 0.000 description 1
- AHUXYBVKTIBBJW-UHFFFAOYSA-N dimethoxy(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](OC)(OC)C1=CC=CC=C1 AHUXYBVKTIBBJW-UHFFFAOYSA-N 0.000 description 1
- NHYFIJRXGOQNFS-UHFFFAOYSA-N dimethoxy-bis(2-methylpropyl)silane Chemical compound CC(C)C[Si](OC)(CC(C)C)OC NHYFIJRXGOQNFS-UHFFFAOYSA-N 0.000 description 1
- VHPUZTHRFWIGAW-UHFFFAOYSA-N dimethoxy-di(propan-2-yl)silane Chemical compound CO[Si](OC)(C(C)C)C(C)C VHPUZTHRFWIGAW-UHFFFAOYSA-N 0.000 description 1
- WHGNXNCOTZPEEK-UHFFFAOYSA-N dimethoxy-methyl-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](C)(OC)CCCOCC1CO1 WHGNXNCOTZPEEK-UHFFFAOYSA-N 0.000 description 1
- ZDSFBVVBFMKMRF-UHFFFAOYSA-N dimethyl-bis(prop-2-enyl)silane Chemical compound C=CC[Si](C)(C)CC=C ZDSFBVVBFMKMRF-UHFFFAOYSA-N 0.000 description 1
- LIKFHECYJZWXFJ-UHFFFAOYSA-N dimethyldichlorosilane Chemical compound C[Si](C)(Cl)Cl LIKFHECYJZWXFJ-UHFFFAOYSA-N 0.000 description 1
- 150000002009 diols Chemical class 0.000 description 1
- QBNKDNRLUFTYIN-UHFFFAOYSA-N dodecyl(methoxy)silane Chemical compound CCCCCCCCCCCC[SiH2]OC QBNKDNRLUFTYIN-UHFFFAOYSA-N 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- ZSWFCLXCOIISFI-UHFFFAOYSA-N endo-cyclopentadiene Natural products C1C=CC=C1 ZSWFCLXCOIISFI-UHFFFAOYSA-N 0.000 description 1
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 1
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- MABAWBWRUSBLKQ-UHFFFAOYSA-N ethenyl-tri(propan-2-yloxy)silane Chemical compound CC(C)O[Si](OC(C)C)(OC(C)C)C=C MABAWBWRUSBLKQ-UHFFFAOYSA-N 0.000 description 1
- SBRXLTRZCJVAPH-UHFFFAOYSA-N ethyl(trimethoxy)silane Chemical compound CC[Si](OC)(OC)OC SBRXLTRZCJVAPH-UHFFFAOYSA-N 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- YSEZLNANHYQLGP-UHFFFAOYSA-N hexane phenol Chemical compound C1(=CC=CC=C1)O.C1(=CC=CC=C1)O.CCCCCC YSEZLNANHYQLGP-UHFFFAOYSA-N 0.000 description 1
- CZWLNMOIEMTDJY-UHFFFAOYSA-N hexyl(trimethoxy)silane Chemical compound CCCCCC[Si](OC)(OC)OC CZWLNMOIEMTDJY-UHFFFAOYSA-N 0.000 description 1
- 238000001192 hot extrusion Methods 0.000 description 1
- 125000002768 hydroxyalkyl group Chemical group 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000010330 laser marking Methods 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- POPACFLNWGUDSR-UHFFFAOYSA-N methoxy(trimethyl)silane Chemical compound CO[Si](C)(C)C POPACFLNWGUDSR-UHFFFAOYSA-N 0.000 description 1
- ARYZCSRUUPFYMY-UHFFFAOYSA-N methoxysilane Chemical compound CO[SiH3] ARYZCSRUUPFYMY-UHFFFAOYSA-N 0.000 description 1
- 239000005055 methyl trichlorosilane Substances 0.000 description 1
- DRXHEPWCWBIQFJ-UHFFFAOYSA-N methyl(triphenoxy)silane Chemical compound C=1C=CC=CC=1O[Si](OC=1C=CC=CC=1)(C)OC1=CC=CC=C1 DRXHEPWCWBIQFJ-UHFFFAOYSA-N 0.000 description 1
- JLUFWMXJHAVVNN-UHFFFAOYSA-N methyltrichlorosilane Chemical compound C[Si](Cl)(Cl)Cl JLUFWMXJHAVVNN-UHFFFAOYSA-N 0.000 description 1
- BFXIKLCIZHOAAZ-UHFFFAOYSA-N methyltrimethoxysilane Chemical compound CO[Si](C)(OC)OC BFXIKLCIZHOAAZ-UHFFFAOYSA-N 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 239000006082 mold release agent Substances 0.000 description 1
- PHQOGHDTIVQXHL-UHFFFAOYSA-N n'-(3-trimethoxysilylpropyl)ethane-1,2-diamine Chemical compound CO[Si](OC)(OC)CCCNCCN PHQOGHDTIVQXHL-UHFFFAOYSA-N 0.000 description 1
- MQWFLKHKWJMCEN-UHFFFAOYSA-N n'-[3-[dimethoxy(methyl)silyl]propyl]ethane-1,2-diamine Chemical compound CO[Si](C)(OC)CCCNCCN MQWFLKHKWJMCEN-UHFFFAOYSA-N 0.000 description 1
- KBJFYLLAMSZSOG-UHFFFAOYSA-N n-(3-trimethoxysilylpropyl)aniline Chemical compound CO[Si](OC)(OC)CCCNC1=CC=CC=C1 KBJFYLLAMSZSOG-UHFFFAOYSA-N 0.000 description 1
- GLTDLAUASUFHNK-UHFFFAOYSA-N n-silylaniline Chemical compound [SiH3]NC1=CC=CC=C1 GLTDLAUASUFHNK-UHFFFAOYSA-N 0.000 description 1
- NXPPAOGUKPJVDI-UHFFFAOYSA-N naphthalene-1,2-diol Chemical compound C1=CC=CC2=C(O)C(O)=CC=C21 NXPPAOGUKPJVDI-UHFFFAOYSA-N 0.000 description 1
- MSRJTTSHWYDFIU-UHFFFAOYSA-N octyltriethoxysilane Chemical compound CCCCCCCC[Si](OCC)(OCC)OCC MSRJTTSHWYDFIU-UHFFFAOYSA-N 0.000 description 1
- AFEQENGXSMURHA-UHFFFAOYSA-N oxiran-2-ylmethanamine Chemical compound NCC1CO1 AFEQENGXSMURHA-UHFFFAOYSA-N 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- QNGNSVIICDLXHT-UHFFFAOYSA-N para-ethylbenzaldehyde Natural products CCC1=CC=C(C=O)C=C1 QNGNSVIICDLXHT-UHFFFAOYSA-N 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 150000004714 phosphonium salts Chemical class 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920006122 polyamide resin Chemical class 0.000 description 1
- 229920006289 polycarbonate film Polymers 0.000 description 1
- 125000003367 polycyclic group Chemical group 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000000790 scattering method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- TXDNPSYEJHXKMK-UHFFFAOYSA-N sulfanylsilane Chemical compound S[SiH3] TXDNPSYEJHXKMK-UHFFFAOYSA-N 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1
- ALVYUZIFSCKIFP-UHFFFAOYSA-N triethoxy(2-methylpropyl)silane Chemical compound CCO[Si](CC(C)C)(OCC)OCC ALVYUZIFSCKIFP-UHFFFAOYSA-N 0.000 description 1
- WUMSTCDLAYQDNO-UHFFFAOYSA-N triethoxy(hexyl)silane Chemical compound CCCCCC[Si](OCC)(OCC)OCC WUMSTCDLAYQDNO-UHFFFAOYSA-N 0.000 description 1
- CPUDPFPXCZDNGI-UHFFFAOYSA-N triethoxy(methyl)silane Chemical compound CCO[Si](C)(OCC)OCC CPUDPFPXCZDNGI-UHFFFAOYSA-N 0.000 description 1
- FBBATURSCRIBHN-UHFFFAOYSA-N triethoxy-[3-(3-triethoxysilylpropyldisulfanyl)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCSSCCC[Si](OCC)(OCC)OCC FBBATURSCRIBHN-UHFFFAOYSA-N 0.000 description 1
- VTHOKNTVYKTUPI-UHFFFAOYSA-N triethoxy-[3-(3-triethoxysilylpropyltetrasulfanyl)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCSSSSCCC[Si](OCC)(OCC)OCC VTHOKNTVYKTUPI-UHFFFAOYSA-N 0.000 description 1
- JXUKBNICSRJFAP-UHFFFAOYSA-N triethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](OCC)(OCC)CCCOCC1CO1 JXUKBNICSRJFAP-UHFFFAOYSA-N 0.000 description 1
- ZNOCGWVLWPVKAO-UHFFFAOYSA-N trimethoxy(phenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1 ZNOCGWVLWPVKAO-UHFFFAOYSA-N 0.000 description 1
- LFRDHGNFBLIJIY-UHFFFAOYSA-N trimethoxy(prop-2-enyl)silane Chemical compound CO[Si](OC)(OC)CC=C LFRDHGNFBLIJIY-UHFFFAOYSA-N 0.000 description 1
- HQYALQRYBUJWDH-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical compound CCC[Si](OC)(OC)OC HQYALQRYBUJWDH-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- 239000005051 trimethylchlorosilane Substances 0.000 description 1
- NLSXASIDNWDYMI-UHFFFAOYSA-N triphenylsilanol Chemical compound C=1C=CC=CC=1[Si](C=1C=CC=CC=1)(O)C1=CC=CC=C1 NLSXASIDNWDYMI-UHFFFAOYSA-N 0.000 description 1
- UKRDPEFKFJNXQM-UHFFFAOYSA-N vinylsilane Chemical compound [SiH3]C=C UKRDPEFKFJNXQM-UHFFFAOYSA-N 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
- 125000002256 xylenyl group Chemical class C1(C(C=CC=C1)C)(C)* 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/40—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/01—Use of inorganic substances as compounding ingredients characterized by their specific function
- C08K3/013—Fillers, pigments or reinforcing additives
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/293—Organic, e.g. plastic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K2201/00—Specific properties of additives
- C08K2201/002—Physical properties
- C08K2201/005—Additives being defined by their particle size in general
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Medicinal Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Organic Chemistry (AREA)
- Polymers & Plastics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Materials Engineering (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Epoxy Resins (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Abstract
(A)エポキシ樹脂、(B)硬化剤、(C)硬化促進剤、及び、(D)無機充填材を含有する封止用フィルムであって、上記(A)〜(C)成分のうち25℃で液状である液状成分の含有量が、上記(A)〜(D)成分の総質量を基準として20〜30質量%であり、上記(D)成分の含有量が、上記(A)〜(D)成分の総質量を基準として70〜80質量%であり、溶剤の含有量が、封止用フィルムの全質量を基準として0.05質量%以下である、封止用フィルム。(A) An epoxy resin, (B) a curing agent, (C) a curing accelerator, and (D) a sealing film containing an inorganic filler, wherein 25 of the components (A) to (C) The content of the liquid component that is liquid at ° C. is 20 to 30% by mass based on the total mass of the components (A) to (D), and the content of the component (D) is the above (A) to (D) The film for sealing which is 70-80 mass% on the basis of the total mass of a component, and whose solvent content is 0.05 mass% or less on the basis of the total mass of the film for sealing.
Description
本開示は、封止用フィルム及びその硬化物、並びに、電子装置に関する。より詳しくは、本開示は、半導体デバイスの封止、プリント配線基板に配置された電子部品の埋め込み等を可能とする封止用フィルム及びその硬化物、並びに、電子装置に関する。 The present disclosure relates to a sealing film, a cured product thereof, and an electronic device. More specifically, the present disclosure relates to a sealing film that enables sealing of a semiconductor device, embedding of an electronic component disposed on a printed wiring board, a cured product thereof, and an electronic apparatus.
近年、実装基板上の半導体素子、コンデンサ、抵抗素子等の電子部品の封止に、取扱性に優れた封止用フィルムが広く用いられている。 In recent years, sealing films with excellent handling properties have been widely used for sealing electronic components such as semiconductor elements, capacitors, and resistance elements on a mounting substrate.
このような封止用フィルムとしては、例えば、エポキシ樹脂、硬化剤、及び、充填材等を配合して調製したワニス(組成物)を、フィルム上に塗布することにより成膜された、シート状エポキシ樹脂組成物材料が提案されている(例えば、特許文献1参照)。 As such a sealing film, for example, a sheet-like film formed by applying a varnish (composition) prepared by blending an epoxy resin, a curing agent, and a filler onto the film. An epoxy resin composition material has been proposed (see, for example, Patent Document 1).
特許文献1に記載のシート状エポキシ樹脂組成物材料は、上記のように、各種成分を配合してワニス(組成物)を調製した後、そのワニスを支持体上に塗布することにより成膜され、作製される。 As described above, the sheet-like epoxy resin composition material described in Patent Document 1 is formed by preparing various varnishes to prepare a varnish (composition) and then applying the varnish on a support. Produced.
しかし、このような作製方法では、支持体上に塗布したワニス状エポキシ樹脂組成物を乾燥させたときに、露出した側と支持体側とで溶剤量に大きな差が生じるため、1枚で300μm以上の厚みを有する封止用フィルムの作製が難しい。 However, in such a production method, when the varnish-like epoxy resin composition applied on the support is dried, there is a large difference in the amount of solvent between the exposed side and the support side. It is difficult to produce a sealing film having a thickness of 5 mm.
また、特許文献1に記載のように、ワニス状エポキシ樹脂組成物を塗工して作製した封止用フィルムを複数枚貼り合わせることで300μm以上の膜厚を得た封止用フィルムでは、電子部品を封止成形する際に、封止用フィルムに含まれる溶剤により、ふくれ等の不具合が生じる場合がある。 In addition, as described in Patent Document 1, in a sealing film obtained by laminating a plurality of sealing films produced by applying a varnish-like epoxy resin composition, a film thickness of 300 μm or more is obtained. When sealing and molding a component, a problem such as blistering may occur due to the solvent contained in the sealing film.
そこで、本開示の目的は、厚みを300μm以上とした場合であっても、封止成形時のふくれを抑制することができると共に、良好な可とう性及び良好な流動性を有する封止用フィルム、及びその硬化物、並びに、その封止用フィルムにより封止された電子部品又は電子デバイスを備える電子装置を提供することにある。 Accordingly, an object of the present disclosure is to provide a sealing film that can suppress blistering during sealing molding and has good flexibility and good fluidity even when the thickness is 300 μm or more. Another object of the present invention is to provide an electronic apparatus including an electronic component or an electronic device sealed with the sealing film and the cured product thereof.
上記目的を達成するために、本開示の一側面は、(A)エポキシ樹脂、(B)硬化剤、(C)硬化促進剤、及び、(D)無機充填材を含有する封止用フィルムであって、上記(A)〜(C)成分((A)成分、(B)成分及び(C)成分)のうち25℃で液状である液状成分の含有量が、上記(A)〜(D)成分((A)成分、(B)成分、(C)成分及び(D)成分)の総質量を基準として20〜30質量%であり、上記(D)成分の含有量が、上記(A)〜(D)成分の総質量を基準として70〜80質量%であり、溶剤の含有量が、封止用フィルムの全質量を基準として0.05質量%以下である、封止用フィルムを提供する。 In order to achieve the above object, one aspect of the present disclosure is a sealing film containing (A) an epoxy resin, (B) a curing agent, (C) a curing accelerator, and (D) an inorganic filler. Of the components (A) to (C) (components (A), (B) and (C)), the content of the liquid component which is liquid at 25 ° C. is the above (A) to (D ) Component ((A) component, (B) component, (C) component and (D) component) based on the total mass of 20 to 30% by mass, and the content of the above (D) component is the above (A ) To (D) 70 to 80% by mass based on the total mass of components, and the content of the solvent is 0.05% by mass or less based on the total mass of the sealing film. provide.
本開示の一側面に係る封止用フィルムによれば、良好な可とう性及び良好な流動性を有すると共に、厚みを300μm以上とした場合であっても、封止成形時のふくれを抑制することができる。そのため、上記開示によれば、TSV(Through−Silicon Via)等を有する厚いパッケージの一括封止が可能な厚み300μm以上の封止用フィルムを提供することができる。 The sealing film according to one aspect of the present disclosure has good flexibility and good fluidity, and suppresses blistering during sealing molding even when the thickness is 300 μm or more. be able to. Therefore, according to the above disclosure, it is possible to provide a sealing film having a thickness of 300 μm or more capable of collectively sealing a thick package having TSV (Through-Silicon Via) or the like.
また、上記条件を満たす本開示の封止用フィルムは、(A)エポキシ樹脂、(B)硬化剤、(C)硬化促進剤、及び、(D)無機充填材を混練して得られる混練物を、塑性加工することにより得ることができる。つまり、エポキシ樹脂及び無機充填材を含有するワニスをフィルム上に塗布することなく、封止用フィルムを形成することができるので、封止用フィルムに含まれる溶剤起因の硬化成形時のふくれを抑制することができる。その結果、封止用フィルムの性能の向上を図ることができる。 The sealing film of the present disclosure that satisfies the above conditions is a kneaded product obtained by kneading (A) an epoxy resin, (B) a curing agent, (C) a curing accelerator, and (D) an inorganic filler. Can be obtained by plastic working. In other words, it is possible to form a sealing film without applying a varnish containing an epoxy resin and an inorganic filler on the film, thus suppressing blistering during curing molding caused by the solvent contained in the sealing film. can do. As a result, the performance of the sealing film can be improved.
上記封止用フィルムにおいて、上記(D)成分の含有量は、上記(A)〜(D)成分の総質量を基準として70〜78質量%であってもよい。 In the sealing film, the content of the component (D) may be 70 to 78% by mass based on the total mass of the components (A) to (D).
上記封止用フィルムにおいて、上記(D)成分の平均粒径は、0.01〜50μmであってもよい。 In the sealing film, the average particle size of the component (D) may be 0.01 to 50 μm.
本開示の別の側面は、上記本開示の一側面に係る封止用フィルムの硬化物を提供する。 Another aspect of the present disclosure provides a cured product of the sealing film according to one aspect of the present disclosure.
本開示の別の側面は、電子部品又は電子デバイスと、上記電子部品又は上記電子デバイスを封止する、上記本開示の一側面に係る封止用フィルムの硬化物を含む封止部と、を備える電子装置を提供する。 Another aspect of the present disclosure includes an electronic component or an electronic device, and a sealing unit that includes the cured product of the sealing film according to one aspect of the present disclosure that seals the electronic component or the electronic device. An electronic device is provided.
本開示によれば、厚みを300μm以上とした場合であっても、封止成形時のふくれを抑制することができると共に、良好な可とう性及び良好な流動性を有する封止用フィルム、及びその硬化物、並びに、その封止用フィルムにより封止された電子部品又は電子デバイスを備える電子装置を提供することができる。 According to the present disclosure, even when the thickness is 300 μm or more, the swelling film at the time of sealing molding can be suppressed, and a sealing film having good flexibility and good fluidity, and An electronic device including the cured product and an electronic component or an electronic device sealed with the sealing film can be provided.
以下、本開示を実施するための形態(以下、「本実施形態」という。)について詳細に説明する。なお、本開示は、以下の実施形態に限定されるものではない。 Hereinafter, a mode for carrying out the present disclosure (hereinafter referred to as “the present embodiment”) will be described in detail. Note that the present disclosure is not limited to the following embodiment.
本実施形態の封止用フィルムは、(A)エポキシ樹脂(以下(A)成分という場合もある。)、(B)硬化剤(以下(B)成分という場合もある。)、(C)硬化促進剤(以下(C)成分という場合もある。)、及び、(D)無機充填材(以下(D)成分という場合もある。)を含有する封止用フィルムであって、上記(A)〜(C)成分のうち25℃で液状である液状成分の含有量が、上記(A)〜(D)成分の総質量を基準として20〜30質量%であり、上記(D)成分の含有量が、上記(A)〜(D)成分の総質量を基準として70〜80質量%であり、溶剤の含有量が、封止用フィルムの全質量を基準として0.05質量%以下である。 The sealing film of this embodiment includes (A) an epoxy resin (hereinafter also referred to as “component (A)”), (B) a curing agent (hereinafter also referred to as “component (B)”), and (C) curing. A sealing film containing an accelerator (hereinafter also referred to as (C) component) and (D) an inorganic filler (hereinafter also referred to as (D) component), wherein (A) The content of the liquid component that is liquid at 25 ° C. among the components (C) is 20 to 30% by mass based on the total mass of the components (A) to (D), and the content of the component (D) The amount is 70 to 80% by mass based on the total mass of the components (A) to (D), and the solvent content is 0.05% by mass or less based on the total mass of the sealing film. .
<(A)エポキシ樹脂>
(A)エポキシ樹脂としては、1分子中に2個以上のグリシジル基を有するものであれば特に制限なく用いることができる。(A)成分としては、例えば、ビスフェノールA型エポキシ樹脂、ビスフェノールAP型エポキシ樹脂、ビスフェノールAF型エポキシ樹脂、ビスフェノールB型エポキシ樹脂、ビスフェノールBP型エポキシ樹脂、ビスフェノールC型エポキシ樹脂、ビスフェノールE型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ビスフェノールG型エポキシ樹脂、ビスフェノールM型エポキシ樹脂、ビスフェノールS型エポキシ樹脂、ビスフェノールP型エポキシ樹脂、ビスフェノールPH型エポキシ樹脂、ビスフェノールTMC型エポキシ樹脂、ビスフェノールZ型エポキシ樹脂、ヘキサンジオールビスフェノールSジグリシジルエーテル等のビスフェノールS型エポキシ樹脂、ノボラックフェノール型エポキシ樹脂、ビフェニル型エポキシ樹脂、ナフタレン型エポキシ樹脂、ジシクロペンタジエン型エポキシ樹脂、ビキシレノールジグリシジルエーテル等のビキシレノール型エポキシ樹脂、水添ビスフェノールAグリシジルエーテル等の水添ビスフェノールA型エポキシ樹脂、及びそれらの二塩基酸変性ジグリシジルエーテル型エポキシ樹脂、並びに、脂肪族エポキシ樹脂などが挙げられる。(A)成分は、1種を単独で用いてもよく、2種以上を併用してもよい。<(A) Epoxy resin>
(A) As an epoxy resin, if it has 2 or more glycidyl groups in 1 molecule, it can be especially used without a restriction | limiting. As the component (A), for example, bisphenol A type epoxy resin, bisphenol AP type epoxy resin, bisphenol AF type epoxy resin, bisphenol B type epoxy resin, bisphenol BP type epoxy resin, bisphenol C type epoxy resin, bisphenol E type epoxy resin Bisphenol F type epoxy resin, bisphenol G type epoxy resin, bisphenol M type epoxy resin, bisphenol S type epoxy resin, bisphenol P type epoxy resin, bisphenol PH type epoxy resin, bisphenol TMC type epoxy resin, bisphenol Z type epoxy resin, hexane Bisphenol S type epoxy resin such as diol bisphenol S diglycidyl ether, novolak phenol type epoxy resin, biphenyl type epoxy resin , Naphthalene type epoxy resins, dicyclopentadiene type epoxy resins, bixylenol type epoxy resins such as bixylenol diglycidyl ether, hydrogenated bisphenol A type epoxy resins such as hydrogenated bisphenol A glycidyl ether, and dibasic acid-modified diesters thereof Examples thereof include glycidyl ether type epoxy resins and aliphatic epoxy resins. (A) A component may be used individually by 1 type and may use 2 or more types together.
(A)成分には、市販のエポキシ樹脂を使用することもできる。市販のエポキシ樹脂としては、例えば、DIC株式会社製の商品名:EXA4700(4官能ナフタレン型エポキシ樹脂)、日本化薬株式会社製の商品名:NC−7000(ナフタレン骨格含有多官能固形エポキシ樹脂)等のナフタレン型エポキシ樹脂;日本化薬株式会社製の商品名:EPPN−502H(トリスフェノールエポキシ樹脂)等のフェノール類とフェノール性水酸基を有する芳香族アルデヒドとの縮合物のエポキシ化物(トリスフェノール型エポキシ樹脂);DIC株式会社製の商品名:エピクロンHP−7200H(ジシクロペンタジエン骨格含有多官能固形エポキシ樹脂)等のジシクロペンタジエンアラルキル型エポキシ樹脂;日本化薬株式会社製の商品名:NC−3000H(ビフェニル骨格含有多官能固形エポキシ樹脂)等のビフェニルアラルキル型エポキシ樹脂;DIC株式会社製の商品名:エピクロンN660、エピクロンN690、日本化薬株式会社製の商品名:EOCN−104S等のノボラック型エポキシ樹脂;日産化学工業株式会社製の商品名:TEPIC等のトリス(2,3−エポキシプロピル)イソシアヌレート、DIC株式会社製の商品名:エピクロン860、エピクロン900−IM、エピクロンEXA―4816、エピクロンEXA−4822、旭チバ株式会社製の商品名:アラルダイトAER280、東都化成株式会社製の商品名:エポトートYD−134、三菱化学株式会社製の商品名:JER834、JER872、住友化学株式会社製の商品名:ELA−134、三菱化学株式会社製の商品名:エピコート807、815、825、827、828、834、1001、1004、1007、1009、ダウケミカル社製の商品名:DER−330、301、361、東都化成株式会社製の商品名:YD8125、YDF8170等のビスフェノールA型エポキシ樹脂;三菱化学株式会社製の商品名:806等のビスフェノールF型エポキシ樹脂;三菱化学株式会社製の商品名:828等のビスフェノールA型エポキシ樹脂;DIC株式会社製の商品名:エピクロンHP−4032等のナフタレン型エポキシ樹脂;DIC株式会社製の商品名:エピクロンHP−4032等のナフタレン型エポキシ樹脂;DIC株式会社製の商品名:エピクロンN−740等のフェノールノボラック型エポキシ樹脂、ナガセケムテックス株式会社製の商品名:ナデコールDLC301等の脂肪族エポキシ樹脂などが挙げられる。これらのエポキシ樹脂は、1種を単独で用いてもよく、2種以上を併用してもよい。 A commercially available epoxy resin can also be used for (A) component. As a commercially available epoxy resin, for example, trade name: EXA4700 (tetrafunctional naphthalene type epoxy resin) manufactured by DIC Corporation, trade name: NC-7000 (naphthalene skeleton-containing polyfunctional solid epoxy resin) manufactured by Nippon Kayaku Co., Ltd. Naphthalene type epoxy resins such as Nippon Kayaku Co., Ltd., trade name: EPPN-502H (trisphenol epoxy resin) and other epoxidized products of the condensation products of phenols and aromatic aldehydes having phenolic hydroxyl groups (trisphenol type) Epoxy resin); product name manufactured by DIC Corporation: dicyclopentadiene aralkyl type epoxy resin such as Epicron HP-7200H (dicyclopentadiene skeleton-containing polyfunctional solid epoxy resin); product name manufactured by Nippon Kayaku Co., Ltd .: NC- 3000H (Biphenyl skeleton-containing polyfunctional solid epoxy tree Biphenyl aralkyl type epoxy resins such as DIC Co., Ltd .; trade names manufactured by DIC Corporation: Epicron N660, Epicron N690, Nippon Kayaku Co., Ltd. trade names: EOCN-104S and other novolak epoxy resins; manufactured by Nissan Chemical Industries, Ltd. Product name: Tris (2,3-epoxypropyl) isocyanurate such as TEPIC, DIC Corporation product name: Epicron 860, Epicron 900-IM, Epicron EXA-4816, Epicron EXA-4822, manufactured by Asahi Ciba Co., Ltd. Product name: Araldite AER280, Toto Kasei Co., Ltd. Product name: Epototo YD-134, Mitsubishi Chemical Corporation product name: JER834, JER872, Sumitomo Chemical Co., Ltd. Product name: ELA-134, Mitsubishi Chemical Corporation Product name: Epicoat 807, 815, 25, 827, 828, 834, 1001, 1004, 1007, 1009, trade names made by Dow Chemical Co., Ltd .: DER-330, 301, 361, trade names made by Tohto Kasei Co., Ltd .: bisphenol A type epoxy such as YD8125, YDF8170, etc. Resin; Trade name: 806 grade bisphenol F epoxy resin manufactured by Mitsubishi Chemical Corporation; Trade name: 828 grade bisphenol A epoxy resin manufactured by Mitsubishi Chemical Corporation; Trade name: Epicron HP-4032 Naphthalene-type epoxy resin such as DIC Corporation; Naphthalene-type epoxy resin such as Epiklon HP-4032; DIC Corporation product name: phenol novolac-type epoxy resin such as Epiklon N-740, Nagase ChemteX Corporation Product name: Nadekor DLC301 And aliphatic epoxy resins. These epoxy resins may be used individually by 1 type, and may use 2 or more types together.
(A)成分としては、25℃において液状のエポキシ樹脂を用いてもよい。液状のエポキシ樹脂としては、25℃において液状を示すものであれば特に限定はされない。液状のエポキシ樹脂としては、例えば、ビスフェノールA系、ビスフェノールF系、ビフェニル系、ノボラック系、ジシクロペンタジエン系、多官能フェノール系、ナフタレン系、アラルキル変性系、脂環式系及びアルコール系等のグリシジルエーテル、グリシジルアミン系、並びにグリシジルエステル系樹脂が挙げられる。これらは、1種を単独で用いてもよいし、2種以上を併用してもよい。液状のエポキシ樹脂としては、上記の中でも、取り扱い性付与の観点から、ビスフェノールF型エポキシ樹脂であってもよい。 As the component (A), a liquid epoxy resin at 25 ° C. may be used. The liquid epoxy resin is not particularly limited as long as it is liquid at 25 ° C. Examples of liquid epoxy resins include bisphenol A, bisphenol F, biphenyl, novolac, dicyclopentadiene, polyfunctional phenol, naphthalene, aralkyl-modified, alicyclic, and alcoholic glycidyl. Examples include ether, glycidylamine-based resins, and glycidyl ester-based resins. These may be used individually by 1 type and may use 2 or more types together. Among the above, the liquid epoxy resin may be a bisphenol F type epoxy resin from the viewpoint of imparting handleability.
本明細書において、25℃において液状のエポキシ樹脂とは、E型粘度計又はB型粘度計で測定した25℃における粘度が400Pa・s以下であるものを指す。 In this specification, the epoxy resin that is liquid at 25 ° C. refers to an epoxy resin having a viscosity at 25 ° C. of 400 Pa · s or less as measured with an E-type viscometer or a B-type viscometer.
(A)成分の含有量は、封止用フィルムに良好な取り扱い性を付与する観点から、(A)〜(D)成分の総質量を基準として、5〜30質量%であってもよく、5〜20質量%であってもよく、10〜20質量%であってもよい。 The content of the component (A) may be 5 to 30% by mass based on the total mass of the components (A) to (D) from the viewpoint of imparting good handling properties to the sealing film. 5-20 mass% may be sufficient and 10-20 mass% may be sufficient.
<(B)硬化剤>
(B)硬化剤としては、1分子中に2個以上のグリシジル基と反応する官能基を有するものであれば特に制限なく用いることができる。グリシジル基と反応する官能基としては、例えば、フェノール性水酸基、アミン、酸無水物(無水フタル酸等)が挙げられる。(B)成分としては、例えば、フェノール樹脂、酸無水物、イミダゾール化合物、脂肪族アミン、脂環族アミンが挙げられる。(B)成分は、1種を単独で用いてもよく、2種以上を併用してもよい。<(B) Curing agent>
(B) The curing agent can be used without particular limitation as long as it has a functional group that reacts with two or more glycidyl groups in one molecule. Examples of the functional group that reacts with the glycidyl group include a phenolic hydroxyl group, an amine, and an acid anhydride (such as phthalic anhydride). Examples of the component (B) include phenol resins, acid anhydrides, imidazole compounds, aliphatic amines, and alicyclic amines. (B) A component may be used individually by 1 type and may use 2 or more types together.
フェノール樹脂としては、1分子中に2個以上のフェノール性水酸基を有するものであれば、特に制限無く公知のフェノール樹脂を用いることができる。フェノール樹脂としては、例えば、フェノール、クレゾール、キシレノール、レゾルシノール、カテコール、ビスフェノールA、ビスフェノールF等のフェノール類又はα−ナフトール、β−ナフトール、ジヒドロキシナフタレン等のナフトール類とホルムアルデヒド、アセトアルデヒド、プロピオンアルデヒド、ベンズアルデヒド、サリチルアルデヒド等のアルデヒド類とを酸性触媒下で縮合あるいは共縮合させて得られる樹脂、ビフェニル骨格型フェノール樹脂、パラキシリレン変性フェノール樹脂、メタキシリレン・パラキシリレン変性フェノール樹脂、メラミン変性フェノール樹脂、テルペン変性フェノール樹脂、ジシクロペンタジエン変性フェノール樹脂、シクロペンタジエン変性フェノール樹脂、多環芳香環変性フェノール樹脂、キシリレン変性ナフトール樹脂が挙げられる。フェノール樹脂は、1種を単独で用いてもよく、2種以上を併用してもよい。 As the phenol resin, any known phenol resin can be used without particular limitation as long as it has two or more phenolic hydroxyl groups in one molecule. Examples of the phenolic resin include phenols such as phenol, cresol, xylenol, resorcinol, catechol, bisphenol A, and bisphenol F, or naphthols such as α-naphthol, β-naphthol, and dihydroxynaphthalene, and formaldehyde, acetaldehyde, propionaldehyde, and benzaldehyde. , Resins obtained by condensation or cocondensation with aldehydes such as salicylaldehyde under acidic catalyst, biphenyl skeleton type phenol resin, paraxylylene modified phenol resin, metaxylylene / paraxylylene modified phenol resin, melamine modified phenol resin, terpene modified phenol resin , Dicyclopentadiene modified phenolic resin, cyclopentadiene modified phenolic resin, polycyclic aromatic ring modified phenolic resin, Examples include xylylene-modified naphthol resin. A phenol resin may be used individually by 1 type, and may use 2 or more types together.
フェノール樹脂には、市販のフェノール樹脂を使用することもできる。市販のフェノール樹脂としては、例えば、DIC株式会社製の商品名:フェノライトLF2882、フェノライトLF2822、フェノライトTD−2090、フェノライトTD−2149、フェノライトVH−4150、フェノライトVH4170、明和化成株式会社製の商品名:MEH7000、MEH8000H、三井化学株式会社製の商品名:XLC−LL、XLC−4L、新日鉄住金化学株式会社製の商品名:SN−100、SN−300、SN−400、エア・ウォーター株式会社製の商品名:SKレジンHE910が挙げられる。これらは、1種を単独で用いてもよく、2種以上を併用してもよい。 A commercially available phenol resin can also be used for a phenol resin. Examples of commercially available phenol resins include trade names of DIC Corporation: Phenolite LF2882, Phenolite LF2822, Phenolite TD-2090, Phenolite TD-2149, Phenolite VH-4150, Phenolite VH4170, Meiwa Kasei Co., Ltd. Product names manufactured by the company: MEH7000, MEH8000H, product names manufactured by Mitsui Chemicals, Inc .: XLC-LL, XLC-4L, products manufactured by Nippon Steel & Sumikin Chemicals, Inc .: SN-100, SN-300, SN-400, Air -Product name manufactured by Water Co., Ltd .: SK Resin HE910. These may be used alone or in combination of two or more.
(B)成分としては、25℃において液状の硬化剤を用いてもよい。液状の硬化剤としては、25℃において液状を示すものであれば特に限定はされない。液状の硬化剤としては、例えば、グリシジル基と反応する官能基を1分子中に2個以上有するものが好ましく、例えば、フェノール樹脂、酸無水物、イミダゾール化合物、脂肪族アミン、及び脂環族アミン等が挙げられる。これらの硬化剤は、1種を単独で用いてもよく、2種以上を併用してもよい。25℃にて液状を示すフェノール樹脂としては、ビスフェノール骨格を含むものが好ましく、例えば、ビスフェノールA、ビスフェノールF、ビスフェノールAD、及びビスフェノールS等のビスフェノール類;4,4’−ジヒドロキシビフェニル等のジヒドロキシビフェニル類;ビス(4−ヒドロキシフェニル)エーテル等のジヒドロキシフェニルエーテル類;並びにこれらのフェノール骨格の芳香環に直鎖アルキル基、分岐アルキル基、アリール基、ヒドロキシアルキル基、アリル基、環状脂肪族基等を導入したもの、及びこれらのビスフェノール骨格の中央にある炭素原子に直鎖アルキル基、分岐アルキル基、アリル基、置換基のついたアリル基、環状脂肪族基、又はアルコキシカルボニル基等を導入した多環二官能フェノール類が挙げられる。 As the component (B), a liquid curing agent at 25 ° C. may be used. The liquid curing agent is not particularly limited as long as it is liquid at 25 ° C. As a liquid hardening | curing agent, what has 2 or more of functional groups which react with a glycidyl group in 1 molecule is preferable, for example, a phenol resin, an acid anhydride, an imidazole compound, an aliphatic amine, and an alicyclic amine Etc. These curing agents may be used alone or in combination of two or more. As a phenol resin which shows a liquid state at 25 ° C., those containing a bisphenol skeleton are preferable, for example, bisphenols such as bisphenol A, bisphenol F, bisphenol AD, and bisphenol S; dihydroxybiphenyls such as 4,4′-dihydroxybiphenyl. Dihydroxyphenyl ethers such as bis (4-hydroxyphenyl) ether; and straight chain alkyl groups, branched alkyl groups, aryl groups, hydroxyalkyl groups, allyl groups, cyclic aliphatic groups on the aromatic ring of these phenol skeletons, etc. And a straight chain alkyl group, a branched alkyl group, an allyl group, an allyl group with a substituent, a cyclic aliphatic group, or an alkoxycarbonyl group introduced into the carbon atom at the center of these bisphenol skeletons. Polycyclic bifunctional phenols It is.
本明細書において、25℃において液状の硬化剤とは、E型粘度計又はB型粘度計で測定した25℃における粘度が400Pa・s以下であるものを指す。 In this specification, the liquid curing agent at 25 ° C. refers to one having a viscosity at 25 ° C. of 400 Pa · s or less measured with an E-type viscometer or a B-type viscometer.
(B)成分の含有量は、未反応の(A)成分及び未反応の(B)成分を少なくするという観点から、(A)成分100質量部に対して、50〜100質量部であってもよく、55〜90質量部であってもよく、60〜75質量部であってもよい。 The content of the component (B) is 50 to 100 parts by mass with respect to 100 parts by mass of the component (A) from the viewpoint of reducing the unreacted component (A) and the unreacted component (B). It may be 55-90 mass parts, and may be 60-75 mass parts.
(A)成分及び(B)成分の比率は、(A)成分のグリシジル基の当量と、(B)成分のグリシジル基と反応する官能基の当量との比率(エポキシ樹脂のグリシジル基の当量/硬化剤のグリシジル基と反応する官能基の当量)として、0.7〜2.0であってもよく、0.8〜1.8であってもよく、0.9〜1.7であってもよい。この比率が上記範囲の場合、未反応の(A)成分又は未反応の(B)成分が少なくなり、封止用フィルムを硬化させたときに所望の硬化膜物性が得られやすい傾向にある。 The ratio of the component (A) and the component (B) is the ratio of the equivalent of the glycidyl group of the component (A) and the equivalent of the functional group that reacts with the glycidyl group of the component (B) (equivalent of the glycidyl group of the epoxy resin / The equivalent of the functional group that reacts with the glycidyl group of the curing agent) may be 0.7 to 2.0, 0.8 to 1.8, or 0.9 to 1.7. May be. When this ratio is in the above range, the unreacted component (A) or the unreacted component (B) decreases, and desired cured film properties tend to be easily obtained when the sealing film is cured.
<(C)硬化促進剤>
(C)硬化促進剤としては、特に制限無く用いることができるが、アミン系又はリン系の硬化促進剤であってもよい。アミン系の硬化促進剤としては、例えば、イミダゾール化合物、脂肪族アミン、芳香族アミン、変性アミン、ポリアミド樹脂等が挙げられる。リン系の硬化促進剤としては、例えば、ホスフィンオキサイド、ホスホニウム塩、ダイホスフィン等の有機リン化合物が挙げられる。これらの硬化促進剤の中でも、誘導体が豊富であり、所望の活性温度を得やすい点から、(C)成分はイミダゾール化合物であってもよい。<(C) Curing accelerator>
(C) Although it can use without a restriction | limiting especially as a hardening accelerator, An amine type or phosphorus type hardening accelerator may be sufficient. Examples of amine-based curing accelerators include imidazole compounds, aliphatic amines, aromatic amines, modified amines, and polyamide resins. Examples of the phosphorus curing accelerator include organic phosphorus compounds such as phosphine oxide, phosphonium salt, and diphosphine. Among these curing accelerators, the component (C) may be an imidazole compound because it is rich in derivatives and easily obtains a desired activation temperature.
(C)成分としては、25℃において液状の硬化促進剤を用いてもよい。液状の硬化促進剤としては、25℃において液状を示すものであれば特に限定はされない。液状の硬化促進剤としては、例えば、ホスフィン、ホスホニウム塩等の有機リン化合物、DBU(1,8−ジアザビシクロ[5.4.0]ウンデセン−7)、DBN(1,5−ジアザビシクロ[4.3.0]ノネン−5)等のアミン化合物が挙げられる。これらは、1種を単独で用いてもよいし、2種以上を併用してもよい。 As the component (C), a liquid curing accelerator at 25 ° C. may be used. The liquid curing accelerator is not particularly limited as long as it is liquid at 25 ° C. Examples of the liquid curing accelerator include organic phosphorus compounds such as phosphine and phosphonium salts, DBU (1,8-diazabicyclo [5.4.0] undecene-7), DBN (1,5-diazabicyclo [4.3]. .0] nonene-5) and the like. These may be used individually by 1 type and may use 2 or more types together.
本明細書において、25℃において液状の硬化促進剤とは、E型粘度計又はB型粘度計で測定した25℃における粘度が400Pa・s以下であるものを指す。 In this specification, the liquid curing accelerator at 25 ° C. refers to one having a viscosity at 25 ° C. of 400 Pa · s or less measured with an E-type viscometer or a B-type viscometer.
(C)成分の含有量は、(A)成分及び(B)成分の総質量100質量部に対して、0.01〜5質量部であってもよく、0.1〜3質量部であってもよく、0.3〜1.5質量部であってもよい。(C)成分の含有量が、0.01質量部以上の場合には、充分な硬化促進効果が得られやすい。一方、(C)成分の含有量が、5質量部以下の場合、封止用フィルムの作製時又は保管中の硬化の進行が抑制され、封止用フィルムの割れ又は溶融粘度の上昇に伴う成型不良が少なくなる傾向にある。 The content of the component (C) may be 0.01 to 5 parts by mass, or 0.1 to 3 parts by mass with respect to 100 parts by mass of the total mass of the components (A) and (B). It may be 0.3 to 1.5 parts by mass. When the content of the component (C) is 0.01 parts by mass or more, a sufficient curing acceleration effect is easily obtained. On the other hand, when the content of the component (C) is 5 parts by mass or less, the progress of curing during the production of the sealing film or during storage is suppressed, and the molding accompanying the cracking of the sealing film or an increase in melt viscosity There is a tendency for defects to decrease.
<液状成分>
本実施形態の封止用フィルムは、(A)〜(C)成分のうちの25℃で液状である液状成分を、(A)〜(D)成分の総質量を基準として20〜30質量%含有する。液状成分の含有量が20質量%以上であると、(A)〜(D)成分の混練物の塑性加工により封止用フィルムを得ることができ、封止用フィルムに含まれる溶剤起因の硬化成形時のふくれを抑制することができる。また、液状成分の含有量が20質量%以上であると、良好な可とう性及び良好な流動性を有する封止用フィルムを得ることができる。一方、液状成分の含有量が30質量%以下であると、厚み300μm以上の封止用フィルムを得ることができる。また、液状成分の含有量が上記範囲内であることで、封止用フィルムに良好な取り扱い性を付与することができる。上記効果をより高水準で得る観点から、液状成分の含有量は、20〜28質量%であってもよく、20〜25質量%であってもよい。<Liquid component>
The sealing film of this embodiment is a liquid component which is liquid at 25 ° C. among the components (A) to (C), and is 20 to 30% by mass based on the total mass of the components (A) to (D). contains. When the content of the liquid component is 20% by mass or more, a sealing film can be obtained by plastic processing of the kneaded product of the components (A) to (D), and curing due to the solvent contained in the sealing film Swelling during molding can be suppressed. Moreover, the film for sealing which has favorable flexibility and favorable fluidity | liquidity can be obtained as content of a liquid component is 20 mass% or more. On the other hand, when the content of the liquid component is 30% by mass or less, a sealing film having a thickness of 300 μm or more can be obtained. Moreover, favorable handleability can be provided to the film for sealing because content of a liquid component exists in the said range. From the viewpoint of obtaining the above effect at a higher level, the content of the liquid component may be 20 to 28% by mass or 20 to 25% by mass.
液状成分は、(A)〜(C)成分のうちの一成分のみであってもよく、二成分以上であってもよい。本実施形態の封止用フィルムにおいては、少なくとも(A)成分が液状成分を含むことが好ましく、少なくとも(A)成分及び(B)成分が液状成分を含むことがより好ましい。なお、(A)成分は、25℃において液状のエポキシ樹脂と、25℃において固形のエポキシ樹脂とを含んでいてもよい。(B)成分は、25℃において液状の硬化剤と、25℃において固形の硬化剤とを含んでいてもよい。(C)成分は、25℃において液状の硬化促進剤と、25℃において固形の硬化促進剤とを含んでいてもよい。 The liquid component may be only one component among the components (A) to (C), or may be two or more components. In the sealing film of this embodiment, it is preferable that at least the component (A) includes a liquid component, and it is more preferable that at least the component (A) and the component (B) include a liquid component. In addition, (A) component may contain the liquid epoxy resin in 25 degreeC, and the solid epoxy resin in 25 degreeC. The component (B) may contain a liquid curing agent at 25 ° C. and a solid curing agent at 25 ° C. The component (C) may contain a liquid curing accelerator at 25 ° C. and a solid curing accelerator at 25 ° C.
本実施形態の封止用フィルムが25℃において液状のエポキシ樹脂を含有する場合、その含有量は、封止用フィルムに良好な取り扱い性を付与する観点から、(A)〜(D)成分の総質量を基準として、5質量%以上であってもよく、6質量%以上であってもよく、10質量%以上であってもよい。一方、フィルム表面の過度なタックを抑制するという観点から、25℃において液状のエポキシ樹脂の含有量は、(A)〜(D)成分の総質量を基準として、20質量%以下であってもよく、18質量%以下であってもよく、17質量%以下であってもよい。 When the sealing film of the present embodiment contains a liquid epoxy resin at 25 ° C., the content of the components (A) to (D) is from the viewpoint of imparting good handling properties to the sealing film. Based on the total mass, it may be 5 mass% or more, 6 mass% or more, or 10 mass% or more. On the other hand, from the viewpoint of suppressing excessive tack on the film surface, the content of the liquid epoxy resin at 25 ° C. may be 20% by mass or less based on the total mass of the components (A) to (D). It may be 18% by mass or less, or 17% by mass or less.
本実施形態の封止用フィルムが25℃において液状の硬化剤を含有する場合、その含有量は、封止用フィルムに良好な取り扱い性を付与する観点から、(A)〜(D)成分の総質量を基準として、1質量%以上であってもよく、2質量%以上であってもよく、3質量%以上であってもよい。一方、フィルム表面の過度なタックを抑制するという観点から、25℃において液状の硬化剤の含有量は、(A)〜(D)成分の総質量を基準として、20質量%以下であってもよく、15質量%以下であってもよく、13質量%以下であってもよい。 When the sealing film of this embodiment contains a liquid hardening | curing agent at 25 degreeC, the content is (A)-(D) component from a viewpoint which provides favorable handleability to the sealing film. Based on the total mass, it may be 1% by mass or more, 2% by mass or more, or 3% by mass or more. On the other hand, from the viewpoint of suppressing excessive tack on the film surface, the content of the liquid curing agent at 25 ° C. may be 20% by mass or less based on the total mass of the components (A) to (D). It may be 15% by mass or less, or 13% by mass or less.
<(D)無機充填材>
(D)無機充填材としては、従来公知の無機充填材が使用でき、特定のものに限定されない。(D)成分としては、例えば、硫酸バリウム、チタン酸バリウム、無定形シリカ、結晶性シリカ、溶融シリカ、球状シリカ、タルク、クレー、炭酸マグネシウム、炭酸カルシウム、酸化アルミニウム、水酸化アルミニウム、窒化ケイ素、窒化アルミニウムが挙げられる。(D)成分としては、表面改質等により、樹脂中への分散性の向上がしやすいこと、また比較的小さい熱膨張率を有することから所望の硬化膜特性が得られやすいことから、シリカ類であってもよい。<(D) Inorganic filler>
(D) As an inorganic filler, a conventionally well-known inorganic filler can be used and it is not limited to a specific thing. Examples of the component (D) include barium sulfate, barium titanate, amorphous silica, crystalline silica, fused silica, spherical silica, talc, clay, magnesium carbonate, calcium carbonate, aluminum oxide, aluminum hydroxide, silicon nitride, An example is aluminum nitride. As component (D), it is easy to improve the dispersibility in the resin by surface modification and the like, and since it has a relatively low coefficient of thermal expansion, desired cured film characteristics can be easily obtained. It may be a kind.
(D)成分は、表面改質を行ってもよい。表面改質の手法は特に限定されないが、表面改質が簡便であり、官能基の種類が豊富なため所望の特性を付与しやすいことからシランカップリング剤を用いた手法であってもよい。シランカップリング剤としては、例えば、アルキルシラン、アルコキシシラン、ビニルシラン、エポキシシラン、アミノシラン、アクリルシラン、メタクリルシラン、メルカプトシラン、スルフィドシラン、イソシアネートシラン、サルファーシラン、スチリルシラン、アルキルクロロシラン等が挙げられる。 The component (D) may be subjected to surface modification. The method of surface modification is not particularly limited, but a method using a silane coupling agent may be used because the surface modification is simple and there are many types of functional groups, so that desired characteristics are easily imparted. Examples of the silane coupling agent include alkyl silane, alkoxy silane, vinyl silane, epoxy silane, amino silane, acrylic silane, methacryl silane, mercapto silane, sulfide silane, isocyanate silane, sulfur silane, styryl silane, alkyl chloro silane, and the like.
シランカップリング剤としては、例えば、メチルトリメトキシシラン、ジメチルジメトキシシラン、トリメチルメトキシシラン、メチルトリエトキシシラン、メチルトリフェノキシシラン、エチルトリメトキシシラン、n−プロピルトリメトキシシラン、ジイソプロピルジメトキシシラン、イソブチルトリメトキシシラン、ジイソブチルジメトキシシラン、イソブチルトリエトキシシラン、n−ヘキシルトリメトキシシラン、n−ヘキシルトリエトキシシラン、シクロヘキシルメチルジメトキシシラン、n−オクチルトリエトキシシラン、n−ドデシルメトキシシラン、フェニルトリメトキシシラン、ジフェニルジメトキシシラン、トリフェニルシラノール、メチルトリクロロシラン、ジメチルジクロロシラン、トリメチルクロロシラン、n−オクチルジメチルクロロシラン、テトラエトキシシラン、3−アミノプロピルトリメトキシシラン、3−アミノプロピルトリエトキシシラン、3−(2−アミノエチル)アミノプロピルトリメトキシシラン、3−(2−アミノエチル)アミノプロピルメチルジメトキシシラン、3−フェニルアミノプロピルトリメトキシシラン、3−グリシドキシプロピルトリメトキシシラン、3−グリシドキシプロピルメチルジメトキシシラン、3−グリシドキシプロピルトリエトキシシラン、3−グリシドキシプロピルメチルジエトキシシラン、ビス(3−(トリエトキシシリル)プロピル)ジスルフィド、ビス(3−(トリエトキシシリル)プロピル)テトラスルフィド、ビニルトリアセトキシシラン、ビニルトリメトキシシラン、ビニルトリエトキシシラン、ビニルトリイソプロポキシシラン、アリルトリメトキシシラン、ジアリルジメチルシラン、3−メタクリロキシプロピルトリメトキシシラン、3−メタクリロキシプロピルメチルジメトキシシラン、3−メタクリロキシプロピルトリエトキシシラン、3−メルカプトプロピルトリメトキシシラン、3−メルカプトプロピルメチルジメトキシシラン、3−メルカプトプロピルトリエトキシシラン、N−(1,3−ジメチルブチリデン)−3−アミノプロピルトリエトキシシラン、アミノシラン等が挙げられる。これらは、1種を単独で用いてもよく、2種類以上を併用してもよい。 Examples of the silane coupling agent include methyltrimethoxysilane, dimethyldimethoxysilane, trimethylmethoxysilane, methyltriethoxysilane, methyltriphenoxysilane, ethyltrimethoxysilane, n-propyltrimethoxysilane, diisopropyldimethoxysilane, isobutyltrimethyl. Methoxysilane, diisobutyldimethoxysilane, isobutyltriethoxysilane, n-hexyltrimethoxysilane, n-hexyltriethoxysilane, cyclohexylmethyldimethoxysilane, n-octyltriethoxysilane, n-dodecylmethoxysilane, phenyltrimethoxysilane, diphenyl Dimethoxysilane, triphenylsilanol, methyltrichlorosilane, dimethyldichlorosilane, trimethylchlorosilane, n Octyldimethylchlorosilane, tetraethoxysilane, 3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3- (2-aminoethyl) aminopropyltrimethoxysilane, 3- (2-aminoethyl) aminopropylmethyldimethoxy Silane, 3-phenylaminopropyltrimethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, 3-glycidoxypropyltriethoxysilane, 3-glycidoxypropylmethyldiethoxy Silane, bis (3- (triethoxysilyl) propyl) disulfide, bis (3- (triethoxysilyl) propyl) tetrasulfide, vinyltriacetoxysilane, vinyltrimethoxysilane, vinyltriethoxy Silane, vinyltriisopropoxysilane, allyltrimethoxysilane, diallyldimethylsilane, 3-methacryloxypropyltrimethoxysilane, 3-methacryloxypropylmethyldimethoxysilane, 3-methacryloxypropyltriethoxysilane, 3-mercaptopropyltrimethoxy Examples include silane, 3-mercaptopropylmethyldimethoxysilane, 3-mercaptopropyltriethoxysilane, N- (1,3-dimethylbutylidene) -3-aminopropyltriethoxysilane, and aminosilane. These may be used alone or in combination of two or more.
(D)成分の含有量は、フィルムとしての良好な取扱性(可とう性等)を得る観点から、(A)〜(D)成分の総質量を基準として、70〜80質量%であり、70〜78質量%であってもよい。 (D) Content of a component is 70-80 mass% on the basis of the total mass of (A)-(D) component from a viewpoint of obtaining the favorable handleability (flexibility etc.) as a film, 70-78 mass% may be sufficient.
(D)成分の平均粒径は、0.01〜50μmであってもよく、0.1〜25μmであってもよく、0.3〜10μmであってもよい。平均粒径が0.01μm以上の場合、無機充填材の凝集が抑制され、無機充填材の分散が容易となる傾向にある。平均粒径が50μm以下の場合、半導体パッケージ成形後のパッケージ表面のレーザーマーキングによる印字において良好な外観を得られる傾向にある。平均粒径とは、粒子の全体積を100%として粒径による累積度数分布曲線を求めたとき、体積50%に相当する点の粒径であり、レーザー回折散乱法を用いた粒度分布測定装置等で測定することができる。 (D) 0.01-50 micrometers may be sufficient as the average particle diameter of a component, 0.1-25 micrometers may be sufficient, and 0.3-10 micrometers may be sufficient. When the average particle diameter is 0.01 μm or more, the aggregation of the inorganic filler is suppressed, and the inorganic filler tends to be easily dispersed. When the average particle size is 50 μm or less, there is a tendency that a good appearance can be obtained in printing by laser marking on the package surface after molding the semiconductor package. The average particle diameter is a particle diameter at a point corresponding to a volume of 50% when a cumulative frequency distribution curve based on the particle diameter is obtained with the total volume of the particles being 100%, and a particle size distribution measuring apparatus using a laser diffraction scattering method. Etc. can be measured.
本実施形態の封止用フィルムには、本開示の効果を損なわない範囲で、更に他の添加剤を用いることができる。このような添加剤の具体例としては、エラストマー、顔料、染料、離型剤、酸化防止剤、表面張力調整剤等を挙げることができる。 Other additives can be used for the sealing film of the present embodiment as long as the effects of the present disclosure are not impaired. Specific examples of such additives include elastomers, pigments, dyes, mold release agents, antioxidants, surface tension modifiers, and the like.
本開示の封止用フィルムは、例えば、次のようにして製造することができる。上述した(A)〜(D)成分を溶融混練する。溶融混練の方法としては、特に限定されないが、例えば、ミキシングロール、加圧式ニーダー、押出機等の公知の混練機により、溶融混練する方法などが挙げられる。 The sealing film of the present disclosure can be manufactured, for example, as follows. The components (A) to (D) described above are melt-kneaded. The melt kneading method is not particularly limited, and examples thereof include a melt kneading method using a known kneader such as a mixing roll, a pressure kneader, and an extruder.
混練条件としては、温度が、上記した各成分の軟化点以上であれば特に制限されず、例えば、30〜130℃、エポキシ樹脂の熱硬化性を考慮すると、好ましくは、40〜120℃、更に好ましくは、60〜110℃であり、時間が、例えば、1〜30分間、好ましくは、5〜15分間である。 The kneading conditions are not particularly limited as long as the temperature is equal to or higher than the softening point of each component described above. For example, considering the thermosetting property of the epoxy resin, preferably 30 to 130 ° C. Preferably, it is 60-110 degreeC, and time is 1 to 30 minutes, for example, Preferably, it is 5 to 15 minutes.
上述した混練方法により調製された混練物は、例えば、次のようにして封止用フィルムに加工することができる。二軸ロール又はカレンダーロール等のロール機、押出し機、あるいはプレス機などで、厚みが所望の厚みとなるように圧延、押出し、プレスさせて加工することができる。これによって調製された封止用フィルムは、そのハンドリング性、成形性の観点から、常温では形状を保持するものであることが好ましい。 The kneaded material prepared by the kneading method described above can be processed into a sealing film, for example, as follows. It can be processed by rolling, extruding, and pressing so as to have a desired thickness with a roll machine such as a biaxial roll or a calender roll, an extruder, or a press. The sealing film prepared in this way preferably retains its shape at room temperature from the viewpoints of handling properties and moldability.
封止用フィルムの加工温度としては、上記した各成分の軟化点以上であれば、特に制限されないが、エポキシ樹脂の熱硬化性及び加工性を考慮すると、例えば、30〜150℃、好ましくは、50〜140℃、更に好ましくは、60〜120℃である。 The processing temperature of the sealing film is not particularly limited as long as it is equal to or higher than the softening point of each component described above, but considering the thermosetting property and workability of the epoxy resin, for example, 30 to 150 ° C., preferably, 50-140 degreeC, More preferably, it is 60-120 degreeC.
封止用フィルムの厚みは、例えば、100〜1500μm、好ましくは、300〜1200μmである。本実施形態によれば、300μm以上の厚みを有する封止用フィルムを容易に得ることができる。 The thickness of the film for sealing is 100-1500 micrometers, for example, Preferably, it is 300-1200 micrometers. According to this embodiment, a sealing film having a thickness of 300 μm or more can be easily obtained.
封止用フィルムは、支持体上に形成してもよい。支持体としては、例えば、高分子フィルムを用いることができる。 The sealing film may be formed on the support. As the support, for example, a polymer film can be used.
高分子フィルムとしては、例えば、ポリエチレンフィルム、ポリプロピレンフィルム、ポリ塩化ビニルフィルム等のポリオレフィンフィルム、ポリエチレンテレフタレートフィルム等のポリエステルフィルム、ポリカーボネートフィルム、アセチルセルロースフィルム、テトラフルオロエチレンフィルムなどが挙げられる。 Examples of the polymer film include polyolefin films such as polyethylene films, polypropylene films, and polyvinyl chloride films, polyester films such as polyethylene terephthalate films, polycarbonate films, acetylcellulose films, and tetrafluoroethylene films.
本実施形態に係る電子部品装置は、電子部品と、上記電子部品を封止する封止部と、を備え、上記封止部が、本実施形態に係る封止用フィルム又はその硬化物を含む。本実施形態に係る電子部品装置は、封止用フィルム又はその硬化物を用いて電子部品が封止されてなる。電子部品を備える電子部品装置としては、例えば、半導体素子を備える半導体装置が挙げられる。電子部品は、電子デバイス中の電子部品であってもよい。 The electronic component device according to the present embodiment includes an electronic component and a sealing portion that seals the electronic component, and the sealing portion includes the sealing film according to the present embodiment or a cured product thereof. . The electronic component device according to the present embodiment is formed by sealing an electronic component using a sealing film or a cured product thereof. Examples of the electronic component device including the electronic component include a semiconductor device including a semiconductor element. The electronic component may be an electronic component in an electronic device.
また、本実施形態に係る電子装置は、電子部品又は電子デバイスと、上記電子部品又は上記電子デバイスを封止する、本実施形態に係る封止用フィルムの硬化物を含む封止部と、を備える。 Moreover, the electronic apparatus according to the present embodiment includes an electronic component or an electronic device, and a sealing portion that includes the cured product of the sealing film according to the present embodiment that seals the electronic component or the electronic device. Prepare.
本実施形態に係る電子装置の製造方法は、本実施形態に係る封止用フィルムにより電子部品又は電子デバイスを封止する封止工程と、上記封止用フィルムを硬化させて封止部を得る工程と、を備える。封止工程は、例えば、封止用フィルムを加熱下で押圧することにより、基板上に設けられた電子部品又は電子デバイスを封止する工程である。本実施形態に係る電子装置の製造方法は、例えば、加熱下で封止用フィルムを電子部品又は電子デバイスに押圧することにより、封止用フィルムで電子部品又は電子デバイスを封止する工程と、電子部品又は電子デバイスを封止した封止用フィルムを硬化させて封止部を得る工程と、を備える。 The manufacturing method of the electronic device according to the present embodiment obtains a sealing portion by sealing the electronic component or the electronic device with the sealing film according to the present embodiment, and curing the sealing film. A process. A sealing process is a process of sealing the electronic component or electronic device provided on the board | substrate by pressing the film for sealing under a heating, for example. The manufacturing method of the electronic device according to the present embodiment includes, for example, a step of sealing the electronic component or the electronic device with the sealing film by pressing the sealing film against the electronic component or the electronic device under heating, Curing a sealing film that seals the electronic component or electronic device to obtain a sealing portion.
封止用フィルムによる電子部品又は電子デバイスの封止は、ラミネート法により行うことができる。ラミネート法に使用するラミネータとしては、特に限定されるものではないが、例えば、ロール式、バルーン式等のラミネータが挙げられる。これらの中でも、埋め込み性に優れる観点から、真空加圧が可能なバルーン式を用いることができる。 The electronic component or the electronic device can be sealed with the sealing film by a laminating method. The laminator used in the laminating method is not particularly limited, and examples thereof include roll type and balloon type laminators. Among these, a balloon type capable of vacuum pressurization can be used from the viewpoint of excellent embeddability.
ラミネート温度は、通常、支持体(フィルム状の支持体等)を用いる場合にはその軟化点以下である。ラミネート温度は、例えば、封止用フィルムの最低溶融粘度付近である。ラミネート時の圧力は、埋め込む電子デバイス(半導体素子等)のサイズ又は密集度によって変わるが、0.1〜1.5MPaであってもよく、0.3〜1.0MPaであってもよい。ラミネート時間は、特に限定されるものではないが、20〜600秒であってもよく、30〜300秒であってもよく、40〜120秒であってもよい。 The laminating temperature is usually below the softening point when a support (such as a film-like support) is used. The laminating temperature is, for example, around the minimum melt viscosity of the sealing film. The pressure at the time of lamination varies depending on the size or density of the embedded electronic device (semiconductor element or the like), but may be 0.1 to 1.5 MPa, or 0.3 to 1.0 MPa. The laminating time is not particularly limited, but may be 20 to 600 seconds, 30 to 300 seconds, or 40 to 120 seconds.
封止用フィルムの硬化は、例えば、大気下又は不活性ガス下で行うことができる。硬化温度は、特に限定されるものではないが、80〜280℃であってもよく、100〜240℃であってもよく、120〜200℃であってもよい。硬化温度が80℃以上であれば、封止用フィルムの硬化が充分に進み、不具合の発生を容易に抑制することができる。硬化温度が280℃以下であれば、他の材料への熱害の発生を抑制することができる。硬化時間は、特に限定されるものではないが、30〜600分であってもよく、45〜300分であってもよく、60〜240分であってもよい。硬化時間がこれらの範囲であれば、封止用フィルムの硬化が充分に進み、良好な生産効率が得られる。複数の硬化条件を組み合わせてもよい。 Curing of the sealing film can be performed, for example, in the air or under an inert gas. Although hardening temperature is not specifically limited, 80-280 degreeC may be sufficient, 100-240 degreeC may be sufficient, and 120-200 degreeC may be sufficient. If the curing temperature is 80 ° C. or higher, the curing of the sealing film proceeds sufficiently, and the occurrence of defects can be easily suppressed. If the curing temperature is 280 ° C. or lower, the occurrence of heat damage to other materials can be suppressed. The curing time is not particularly limited, but may be 30 to 600 minutes, 45 to 300 minutes, or 60 to 240 minutes. If the curing time is within these ranges, curing of the sealing film proceeds sufficiently, and good production efficiency is obtained. A plurality of curing conditions may be combined.
以上、本開示に係る封止用フィルム及び電子装置の好適な実施形態について説明した。本開示は必ずしも上述した実施形態に限定されるものではなく、その趣旨を逸脱しない範囲で適宜変更を行ってもよい。半導体素子以外の電子部品としては、例えば、配線板材料用途にも、本開示に係る封止用フィルムを適用することができる。 The preferred embodiments of the sealing film and the electronic device according to the present disclosure have been described above. The present disclosure is not necessarily limited to the above-described embodiment, and may be modified as appropriate without departing from the spirit of the present disclosure. As an electronic component other than a semiconductor element, for example, the sealing film according to the present disclosure can be applied to wiring board material applications.
以下、実施例により本開示を更に詳しく説明するが、本開示はこれらの実施例に何ら限定されるものではない。 Hereinafter, the present disclosure will be described in more detail with reference to examples. However, the present disclosure is not limited to these examples.
封止用フィルムを作製するために下記の成分を用意した。
((A)成分:エポキシ樹脂)
エポキシ樹脂a:ビスフェノールF型エポキシ樹脂(三菱化学株式会社製の商品名:グレード806、エポキシ当量:160、25℃において液状)
エポキシ樹脂b:ビスフェノールA型エポキシ樹脂(三菱化学株式会社製の商品名:グレード828、エポキシ当量:185、25℃において液状)
エポキシ樹脂c:ナフタレン骨格含有多官能固形エポキシ樹脂(DIC株式会社製の商品名:EXA−4750、エポキシ当量:182、25℃において固形)
((B)成分:硬化剤)
硬化剤a:フェノールノボラック(旭有機材工業株式会社製の商品名:PAPS−PN2、フェノール性水酸基当量:104、25℃において固形)
硬化剤b:フェノールノボラック(明和化成株式会社製の商品名:MEH8000H、フェノール性水酸基当量:140、25℃において液状)
((C)成分:硬化促進剤)
硬化促進剤:イミダゾール(四国化成工業株式会社製の商品名:2PHZ−PW、25℃において固形)
((D)成分:無機充填材)
無機充填材:シリカ(株式会社アドマテックス製の商品名:SX−E2、フェニルアミノシラン処理、平均粒径5.8μm)The following components were prepared to produce a sealing film.
((A) component: epoxy resin)
Epoxy resin a: Bisphenol F type epoxy resin (trade name: grade 806, manufactured by Mitsubishi Chemical Corporation, epoxy equivalent: 160, liquid at 25 ° C.)
Epoxy resin b: bisphenol A type epoxy resin (trade name, grade 828, epoxy equivalent: 185, manufactured by Mitsubishi Chemical Corporation, liquid at 25 ° C.)
Epoxy resin c: polyfunctional solid epoxy resin containing naphthalene skeleton (trade name: EXA-4750, epoxy equivalent: 182 manufactured by DIC Corporation, solid at 25 ° C.)
((B) component: curing agent)
Curing agent a: Phenol novolak (trade name: PAPS-PN2, manufactured by Asahi Organic Materials Co., Ltd., phenolic hydroxyl group equivalent: 104, solid at 25 ° C.)
Curing agent b: phenol novolak (trade name: MEH8000H, manufactured by Meiwa Kasei Co., Ltd., phenolic hydroxyl group equivalent: 140, liquid at 25 ° C.)
((C) component: curing accelerator)
Curing accelerator: Imidazole (trade name: 2PHZ-PW, manufactured by Shikoku Kasei Kogyo Co., Ltd., solid at 25 ° C.)
((D) component: inorganic filler)
Inorganic filler: Silica (trade name: SX-E2, phenylaminosilane treatment, average particle size 5.8 μm, manufactured by Admatechs Co., Ltd.)
(実施例1〜2)
表1に示す処方(単位:質量%)で、各成分を配合し、ロール混練機により60〜100℃、10分間溶融混練し、混練物を調製した。(Examples 1-2)
Each component was blended according to the formulation shown in Table 1 (unit: mass%), and melt-kneaded at 60 to 100 ° C. for 10 minutes with a roll kneader to prepare a kneaded product.
次いで、得られた混練物を、熱押出し成形法によりフィルム状に成形し、厚み500μmの実施例1の封止用フィルム、及び、厚み1000μmの実施例2の封止用フィルムをそれぞれ作製した。 Next, the obtained kneaded material was formed into a film by a hot extrusion molding method, and a sealing film of Example 1 having a thickness of 500 μm and a sealing film of Example 2 having a thickness of 1000 μm were produced.
(実施例3〜6及び比較例2〜3)
表1及び表2に示す処方(単位:質量%)で、各成分を配合し、ロール混練機により60〜100℃、10分間溶融混練し、混練物を調製した。(Examples 3-6 and Comparative Examples 2-3)
Each component was blended with the formulation shown in Table 1 and Table 2 (unit: mass%), and melt-kneaded at 60 to 100 ° C. for 10 minutes with a roll kneader to prepare a kneaded product.
次いで、得られた混練物を、平板プレス法により、シート状に成形して、厚み500μmの封止用フィルムを作製した。但し、比較例2については、成形後の材料が流動してフィルム形状の保持ができず、封止用フィルムを作製できなかった。 Next, the obtained kneaded material was formed into a sheet shape by a flat plate pressing method to produce a sealing film having a thickness of 500 μm. However, in Comparative Example 2, the molded material flowed and the film shape could not be maintained, and a sealing film could not be produced.
(比較例1)
表2に示す処方(単位:質量%)で、各成分を配合した。得られた配合物に溶剤としてメチルエチルケトンを、溶剤添加後の組成物全質量の15質量%となる量で添加して、塗工用ワニス状エポキシ樹脂組成物を調製した。このワニス状エポキシ樹脂組成物を、塗工機を使用して支持体(38μm厚のポリエチレンテレフタレートフィルム)上に、以下の条件で塗布し、フィルムの厚みが250μm(支持体の厚みは含まない)の封止用フィルムを作製した。
・塗布ヘッド方式:コンマ
・塗布及び乾燥速度:1m/分
・乾燥条件(温度/炉長):110℃/3.3m、130℃/3.3m、140℃/3.3m(Comparative Example 1)
Each component was blended according to the formulation shown in Table 2 (unit: mass%). Methyl ethyl ketone as a solvent was added to the obtained formulation in an amount that was 15% by mass of the total mass of the composition after the addition of the solvent to prepare a varnish-like epoxy resin composition for coating. This varnish-like epoxy resin composition was coated on a support (polyethylene terephthalate film having a thickness of 38 μm) using a coating machine under the following conditions, and the film thickness was 250 μm (the thickness of the support was not included). A sealing film was prepared.
・ Coating head method: Comma ・ Coating and drying speed: 1 m / min ・ Drying conditions (temperature / furnace length): 110 ° C./3.3 m, 130 ° C./3.3 m, 140 ° C./3.3 m
その後、フィルムの厚みが250μmの封止用フィルム2枚を積層し、真空加圧ラミネーターにより以下の条件で貼り合わせ、フィルムの厚みが500μmである封止用フィルムを作製した。
・ラミネーター装置:真空加圧ラミネーター(株式会社名機製作所製の商品名MVLP−500)
・ラミネート温度:90℃
・ラミネート圧力:0.5MPa
・真空引き時間:30秒
・ラミネート時間:40秒Thereafter, two sealing films having a film thickness of 250 μm were laminated and bonded under the following conditions using a vacuum pressure laminator to produce a sealing film having a film thickness of 500 μm.
-Laminator device: vacuum pressurization laminator (trade name MVLP-500 manufactured by Meiki Seisakusho Co., Ltd.)
・ Lamination temperature: 90 ℃
・ Lamination pressure: 0.5 MPa
・ Evacuation time: 30 seconds ・ Lamination time: 40 seconds
<評価>
(可とう性評価)
封止用フィルムの可とう性は、屈曲試験機を用いて次の手順で評価した。試験機として、ヨシミツ精機株式会社製の屈曲試験機(JIS型タイプ1、円筒形マンドレル法)を準備した。各実施例及び各比較例の封止用フィルムを縦50mm、横50mmに切り出して試験片を準備した。直径2mmの円筒形マンドレルに試験片の一方の面(比較例1においては支持体の面)を接触させ、試験片を135°曲げ、下記の基準で可とう性を評価した。評価結果を表1及び表2に示す。
A:135°折り曲げても割れず、ヒビも入らなかった。
B:135°折り曲げても割れなかったが、ヒビが入った。
C:135°折り曲げると割れた。<Evaluation>
(Flexibility evaluation)
The flexibility of the sealing film was evaluated by the following procedure using a bending tester. A bending tester (JIS type 1, cylindrical mandrel method) manufactured by Yoshimitsu Seiki Co., Ltd. was prepared as a tester. The sealing films of each Example and each Comparative Example were cut into 50 mm length and 50 mm width to prepare test pieces. One surface of the test piece (the surface of the support in Comparative Example 1) was brought into contact with a cylindrical mandrel having a diameter of 2 mm, the test piece was bent 135 °, and the flexibility was evaluated according to the following criteria. The evaluation results are shown in Tables 1 and 2.
A: Even when it was bent at 135 °, it did not crack and no cracks were formed.
B: Although it did not crack even if it bent 135 degrees, it cracked.
C: Cracked when bent at 135 °.
(流動性評価)
封止用フィルムの流動性は、次の手順で評価した。試験機として、TA Instruments社製のレオメータ(ARES G2)を準備した。各実施例及び各比較例の封止用フィルム0.6gを直径20mmの円形に成形し、2枚のAl平行板ではさみ、溶融粘度を測定(測定温度40〜220℃、昇温速度5℃/分)した。比較例1の封止用フィルムについては、支持体を剥離してから測定した。流動性は下記の基準で評価した。評価結果を表1及び表2に示す。
A:最低溶融粘度が100Pa・s以下。
B:最低溶融粘度が100Pa・sより大きく、300Pa・s以下。
C:最低溶融粘度が300Pa・sより大きい。(Liquidity assessment)
The fluidity of the sealing film was evaluated by the following procedure. A rheometer (ARES G2) manufactured by TA Instruments was prepared as a testing machine. The sealing film 0.6 g of each example and each comparative example was formed into a circle having a diameter of 20 mm, and sandwiched between two Al parallel plates, and the melt viscosity was measured (measurement temperature 40 to 220 ° C., heating rate 5 ° C. / Min). The sealing film of Comparative Example 1 was measured after peeling the support. The fluidity was evaluated according to the following criteria. The evaluation results are shown in Tables 1 and 2.
A: The minimum melt viscosity is 100 Pa · s or less.
B: The minimum melt viscosity is greater than 100 Pa · s and 300 Pa · s or less.
C: The minimum melt viscosity is greater than 300 Pa · s.
(ふくれ評価)
封止用フィルムのふくれは次の手順で評価した。各実施例及び各比較例の封止用フィルムを縦70mm、横100mmに切り出して試験片を準備した。比較例1の封止用フィルムについては、支持体を剥離した状態とした。試験片をガラス板に貼り付け、140℃のオーブンで10分間加熱した。封止用フィルム上部及びガラス面からふくれの有無を目視で確認した。評価結果を表1及び表2に示す。(Blown evaluation)
The swelling of the sealing film was evaluated by the following procedure. The sealing films of each Example and each Comparative Example were cut into a length of 70 mm and a width of 100 mm to prepare test pieces. About the sealing film of the comparative example 1, it was set as the state which peeled the support body. The test piece was attached to a glass plate and heated in an oven at 140 ° C. for 10 minutes. The presence or absence of blistering was visually confirmed from the upper part of the sealing film and the glass surface. The evaluation results are shown in Tables 1 and 2.
(溶剤量測定)
封止用フィルムにおける溶剤含有量は次の手順で算出した。各実施例及び各比較例の封止用フィルムを5cm角の試料に切り出した。比較例1の封止用フィルムについては、支持体を剥離した状態とした。この試料を予め質量を測定したアルミカップに入れて、試料が入ったアルミカップの質量を測定した。次いで、試料をアルミカップに入れたまま、180℃のオーブンで10分間加熱し、室温にて10分間放置した後、試料が入ったアルミカップの質量を再度測定した。次いで、加熱前及び加熱後の試料が入ったアルミカップの質量の測定値から、アルミカップの質量を差し引いて、加熱前及び加熱後の封止用フィルムの質量をそれぞれ求めた。そして、加熱前の封止用フィルムの質量から加熱後の封止用フィルムの質量を差し引いた重量減少の値を、溶剤の配合の有無にかかわらず、封止用フィルムに含まれる溶剤の質量とした。そして、加熱前の封止用フィルムの質量に対する溶剤の質量の割合を溶剤の含有量(溶剤量)とした。結果を表1及び表2に示す。(Solvent amount measurement)
The solvent content in the sealing film was calculated according to the following procedure. The sealing film of each Example and each Comparative Example was cut into a 5 cm square sample. About the sealing film of the comparative example 1, it was set as the state which peeled the support body. This sample was put in an aluminum cup whose mass was measured in advance, and the mass of the aluminum cup containing the sample was measured. Next, the sample was placed in an aluminum cup, heated in an oven at 180 ° C. for 10 minutes, and allowed to stand at room temperature for 10 minutes, and then the mass of the aluminum cup containing the sample was measured again. Next, the mass of the aluminum cup containing the sample before and after heating was subtracted from the measured value of the aluminum cup to determine the mass of the sealing film before and after heating. And, the value of weight reduction obtained by subtracting the mass of the sealing film after heating from the mass of the sealing film before heating, regardless of the presence or absence of the solvent, the mass of the solvent contained in the sealing film and did. And the ratio of the mass of the solvent with respect to the mass of the film for sealing before a heating was made into content (solvent amount) of a solvent. The results are shown in Tables 1 and 2.
Claims (5)
前記(A)〜(C)成分のうち25℃で液状である液状成分の含有量が、前記(A)〜(D)成分の総質量を基準として20〜30質量%であり、
前記(D)成分の含有量が、前記(A)〜(D)成分の総質量を基準として70〜80質量%であり、
溶剤の含有量が、封止用フィルムの全質量を基準として0.05質量%以下である、封止用フィルム。A sealing film containing (A) an epoxy resin, (B) a curing agent, (C) a curing accelerator, and (D) an inorganic filler,
The content of the liquid component that is liquid at 25 ° C. among the components (A) to (C) is 20 to 30% by mass based on the total mass of the components (A) to (D),
The content of the component (D) is 70 to 80% by mass based on the total mass of the components (A) to (D),
The film for sealing whose content of a solvent is 0.05 mass% or less on the basis of the total mass of the film for sealing.
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WO2018092606A1 (en) | 2018-05-24 |
KR20190080892A (en) | 2019-07-08 |
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CN109983052B (en) | 2021-07-23 |
KR102466931B1 (en) | 2022-11-11 |
JP7103225B2 (en) | 2022-07-20 |
TW201825587A (en) | 2018-07-16 |
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