JPWO2014203733A1 - Gas supply pipe and heat treatment equipment - Google Patents

Abstract

One end of the gas supply pipe (1) is closed, the outer pipe (2) having a plurality of through holes (3) arranged in the length direction on the pipe wall, and one end connected to the gas supply source, An inner tube (5) inserted into the outer tube (2). The gas supplied from the gas supply source passes through the inner pipe (5), passes through the gap (7) between the outer pipe (2) and the inner pipe (5) formed inside the outer pipe (2), and then enters the outer side. It flows along a path that is discharged from the plurality of through holes (3) of the pipe (2) to the surrounding space. The supplied gas is heated or cooled by the temperature of the surrounding space transmitted to the gas supply pipe (1) while flowing through the inner pipe and between the outer pipe (2) and the inner pipe (5). The The inner tube (5) includes an assembly of a plurality of small tubes (5a) to (5d).

Description

  The present invention relates to a gas supply pipe and a heat treatment apparatus that performs heat treatment using the gas supply pipe while supplying atmospheric gas to an object to be processed inside the furnace body.

  For heat treatment of an object to be processed such as firing performed to obtain a ceramic electronic component typified by a ceramic capacitor, a heat treatment apparatus in which an atmospheric gas corresponding to the purpose is supplied from a gas supply means is widely used. .

  Continuous furnaces, such as roller hearth furnaces, mesh belt furnaces, and pusher furnaces, that continuously process workpieces placed on stacking members while being transported by a transport mechanism as a heat treatment apparatus for processing a large amount of workpieces Is mentioned.

  In these continuous furnaces, in many cases, the atmospheric gas is supplied to the workpiece after being preheated. The gas supply means includes a gas supply pipe disposed so as to be exposed to the internal space of the furnace body heated by the heater. The preheating of the atmospheric gas is performed while flowing in the gas supply pipe heated at the temperature of the internal space of the furnace body.

  As an example, Japanese Patent Application Laid-Open No. 2012-225620 (Patent Document 1) discloses that a gas supply pipe disposed inside a furnace body is a double pipe composed of an outer pipe and an inner pipe, and an atmospheric gas is used for the inner pipe. A method of preheating according to the temperature of the internal space of the furnace body during the flow and the flow through the gap between the double tubes has been proposed.

  A gas supply pipe 101 described in Patent Document 1 is shown in FIGS. 10A and 10B. The outer tube 102 includes a through hole 103 in the tube wall. The inner tube 105 includes a through hole 110 in the tube wall. A bush 108 is inserted into the gap 107 between the outer tube 102 and the inner tube 105 to isolate the gap 107 from the atmosphere outside the furnace body and to support the inner tube 105 inside the outer tube 102.

  Further, the outer tube 102 and the inner tube 105 are arranged so that the projection image obtained when the contour of the through hole 110 of the inner tube 105 is vertically projected onto the inner wall surface of the outer tube 102 and the through hole 103 of the outer tube 102 do not overlap. Is arranged.

  The gas supply pipe 101 is disposed inside a furnace body (not shown), and is connected to a gas supply source (not shown) provided outside the furnace body.

  A gas flow in the gas supply pipe 101 will be described. The atmospheric gas supplied from the gas supply source to both ends of the inner pipe 105 flows through the inside 106 of the inner pipe 105 as shown by an arrow a, and in the middle of the through-hole of the inner pipe 105 as shown by an arrow b. 110 is discharged into the gap 107. The atmospheric gas discharged into the gap 107 flows along the inner wall surface of the outer tube 102 as indicated by the arrow c, and finally, from the through hole 103 of the outer tube 102 as indicated by the arrow d. To be released.

  The atmospheric gas is preheated by the furnace temperature while flowing through the inside 106 of the inner pipe 105 and through the gap 107.

  According to Patent Document 1, the above gas supply pipe can supply an atmosphere gas having a uniform temperature to an object to be processed without requiring an extra space.

JP 2012-225620 A

  In the gas supply pipe described in Patent Document 1, the atmospheric gas flowing through the inside 106 of the inner pipe 105 is heated by contacting the inner pipe 105. However, the atmospheric gas flowing in the vicinity of the central axis of the inside 106 of the inner tube 105 is difficult to be heated because it is away from the tube wall of the inner tube 105.

  Further, since the atmospheric gas ejected into the gap 107 from the through holes 110a and 110g of the inner pipe 105 in the vicinity of the outside of the furnace body has a short distance to flow through the inner pipe 105, the distance in contact with the inner pipe 105 is short. Therefore, such an atmospheric gas may have insufficient preheating.

  That is, in the heat treatment apparatus of Patent Document 1, it cannot be said that the preheating of the atmospheric gas is sufficient. This becomes conspicuous as the amount of atmospheric gas supplied increases.

  If the atmospheric gas is not sufficiently preheated in the middle of the supply path and is supplied to a large amount of object to be processed at a low temperature, the temperature of the object to be processed varies depending on the contact with the atmospheric gas. The variation in temperature during the heat treatment of the workpiece causes a variation in the state after the heat treatment. Moreover, the variation in the state of the workpiece after the heat treatment causes the variation in the performance of various products manufactured using the workpiece after the heat treatment.

  Therefore, it is required to sufficiently preheat the atmospheric gas and suppress variations in the temperature of the object to be processed during the heat treatment.

  Accordingly, an object of the present invention is to provide a gas supply pipe capable of sufficiently preheating the supplied atmospheric gas and a heat treatment apparatus capable of suppressing variations in temperature of the object to be processed during the heat treatment. is there.

  In this invention, in order to provide the gas supply pipe which can fully preheat the supplied atmospheric gas, the internal structure of the gas supply pipe is improved.

  The gas supply pipe according to the present invention includes an outer pipe and an inner pipe. The outer tube is closed at one end and includes a plurality of through holes arranged in the tube wall in the length direction. One end of the inner tube is connected to a gas supply source and is inserted into the outer tube.

  The gas supplied from the gas supply source passes through the inner tube, passes through the gap between the outer tube and the inner tube formed inside the outer tube, and is discharged from the plurality of through holes in the outer tube to the surrounding space of the gas supply tube. Will flow in the route. The supplied gas is heated or cooled by the temperature of the surrounding space transmitted to the gas supply pipe while flowing through the inner pipe and through the gap between the outer pipe and the inner pipe.

The inner tube includes an assembly of a plurality of small tubes.
In the gas supply pipe, the inner pipe includes an assembly of a plurality of small pipes. Therefore, the inner tube and the gas flowing through the inner tube are easily brought into contact with each other as compared with the case where the inner tube is a simple cylinder.

  Therefore, the gas supply pipe described above is a surrounding space where the gas supplied from the gas supply source is transmitted to the gas supply pipe both during the flow through the inner pipe and through the gap between the outer pipe and the inner pipe. It can be used to the full temperature. As a result, a gas having a sufficiently uniform temperature can be discharged from the plurality of through holes provided in the outer tube to the surrounding space.

  In the gas supply pipe according to the present invention, an insertion member may be inserted into a small pipe included in the inner pipe.

  In the above gas supply pipe, since the insertion member is inserted into the small pipe, the surface area inside the inner pipe is the sum of the surface area of the plurality of small pipes and the surface area of the insertion member. Therefore, the contact area between the inner tube and the supplied gas is further increased as compared with the case where the inner tube is a simple cylinder.

  In the gas supply pipe according to the present invention, a part of the pipe wall of the small pipe constituting the inner pipe may protrude toward the central axis of the small pipe.

  In the above gas supply pipe, a part of the wall of the small pipe is protruded toward the central axis of the small pipe, so that the surface area of the inside of the small pipe becomes large. Therefore, the contact area between the inner tube and the supplied gas is further increased as compared with the case where the inner tube is a simple cylinder.

  The present invention is also directed to a heat treatment apparatus that can suppress variations in the temperature of an object to be treated during heat treatment.

  A heat treatment apparatus according to the present invention includes a furnace body having an internal space surrounded by a heat insulating wall, a gas supply mechanism including a gas supply pipe disposed so as to be exposed in the internal space of the furnace body, and an interior of the furnace body A heating mechanism for heating the space.

  In this heat treatment apparatus, an atmosphere gas is supplied to the internal space of the furnace body by a gas supply mechanism, and the object to be processed is heat-treated by heating the object to be processed by a heating mechanism in an atmosphere gas environment.

The gas supply pipe included in the gas supply mechanism is a gas supply pipe according to the present invention.
As described above, the gas supply pipe according to the present invention can sufficiently adjust the supplied gas to the temperature of the surrounding space transmitted to the gas supply pipe. Therefore, in the heat treatment apparatus using the gas supply pipe according to the present invention, the supplied atmospheric gas is sufficiently adapted to the temperature of the internal space of the furnace body and discharged into the furnace body in a preheated state. Therefore, variation in temperature of the object to be processed during the heat treatment is suppressed, and the state of the object to be processed after the heat treatment becomes uniform. As a result, there is no variation in the performance of various products manufactured using the processed object after heat treatment, and the yield of products can be increased.

  The gas supply pipe according to the present invention provides a surrounding space in which the gas supplied from the gas supply source is transmitted to the gas supply pipe both during the flow through the inner pipe and through the gap between the outer pipe and the inner pipe. It can be used to the full temperature. As a result, the gas supply pipe according to the present invention can discharge a gas having a sufficiently uniform temperature into the surrounding space from the plurality of through holes provided in the outer pipe.

  In addition, the heat treatment apparatus according to the present invention supplies the atmosphere gas having a sufficiently uniform temperature to the object to be processed using the gas supply pipe according to the present invention, whereby the temperature variation of the object to be processed during the heat treatment. Can be suppressed. Therefore, the state after the heat treatment of the object to be processed becomes uniform. As a result, the performance of various products manufactured using the object to be processed after heat treatment does not vary, and the product yield can be increased.

It is an external view of the gas supply pipe 1 which concerns on 1st Embodiment of this invention, and is an external view of a side surface. It is an external view of the gas supply pipe 1 which concerns on 1st Embodiment of this invention, and is an external view of a bottom face. It is an external view of the gas supply pipe 1 which concerns on 1st Embodiment of this invention, and is an external view of a front-end | tip. It is sectional drawing of the gas supply pipe | tube 1 along the Z1-Z1 line | wire shown to FIG. 1A. It is sectional drawing of the gas supply pipe | tube 1 along the X1-X1 line | wire shown to FIG. 1B. It is sectional drawing of the gas supply pipe | tube 1 along the Y1-Y1 line | wire shown to FIG. 1B. It is sectional drawing for comparing and showing the inner side pipe | tube of a gas supply pipe | tube between the comparative example outside the range of this invention, and 1st Embodiment within the range of this invention, In sectional drawing of a comparative example, is there. FIG. 2B is a cross-sectional view showing the inner pipe of the gas supply pipe in comparison between the comparative example outside the scope of the present invention and the first embodiment within the scope of the present invention, and the gas supply pipe shown in FIG. 2A 1 is a cross-sectional view of one inner tube 5. FIG. 3B is a schematic diagram showing heat received by a gas flowing in the inner pipe of the gas supply pipe shown in FIG. 3A, and is a schematic diagram in a comparative example. FIG. 3B is a schematic diagram showing heat received by a gas flowing in the inner pipe of the gas supply pipe shown in FIG. 3B, and is a schematic diagram in the inner pipe 5 of the gas supply pipe 1 shown in FIG. 3B. It is sectional drawing of the heat processing apparatus 11 comprised using the gas supply pipe | tube 1 shown to FIG. 1A to FIG. 1C, and is sectional drawing which looked at the heat processing apparatus 11 from the side surface direction. It is sectional drawing of the heat processing apparatus 11 comprised using the gas supply pipe | tube 1 shown to FIG. 1A to FIG. 1C, and is Y2-Y2 sectional drawing of FIG. 5A. It is a graph which shows how the atmospheric gas is preheated by comparing between the gas supply pipe of the comparative example outside the scope of the present invention and the gas supply pipe 1 of the first embodiment within the scope of the present invention. . It is sectional drawing of the inner side pipe | tube 5 of the gas supply pipe | tube 1 in the modification of 1st Embodiment of this invention. It is sectional drawing of the inner side pipe | tube 5 of the gas supply pipe | tube 1 in 2nd Embodiment of this invention. It is sectional drawing of the inner side pipe | tube 5 of the gas supply pipe | tube 1 in 3rd Embodiment of this invention. It is sectional drawing of the gas supply pipe | tube 101 of background art, and is sectional drawing which looked at the gas supply pipe | tube 101 from the side surface direction. It is sectional drawing of the gas supply pipe | tube 101 of background art, and is Y3-Y3 sectional drawing of FIG. 10A.

-First embodiment-
A gas supply pipe 1 according to a first embodiment of the present invention will be described with reference to FIGS. 1A, 1B, 1C and 2A, 2B, 2C.

  The gas supply pipe 1 includes an outer pipe 2 and an inner pipe 5. The outer tube 2 is closed at one end and includes a plurality of through holes 3 (3a to 3i) arranged in the tube wall in the length direction. Moreover, the outer side pipe | tube 2 equips the other end with the flange 4 which is a support member at the time of attaching to the side part heat insulation wall 15 of the heat processing apparatus 11 mentioned later, for example.

  One end of the inner tube 5 is connected to a gas supply source (not shown) and is inserted into the outer tube 2. In the gap 7 formed by inserting the inner tube 5 into the outer tube 2, a bush 8 for isolating the gap 7 from the surrounding space and supporting the inner tube 5 inside the outer tube 2 is inserted. Yes.

  The inner tube 5 is an assembly of a plurality of small tubes 5a to 5d. In this embodiment, the plurality of small tubes 5a to 5d are integrally formed.

  The gas flow in the gas supply pipe 1 will be described with reference to FIG. 2B. The gas supplied from the gas supply source to one end of the inner pipe 5 passes through the inside 6a of the small pipe 5a and the inside 6c of the small pipe 5c as shown by the arrow A, and passes through the inside of the inner pipe 5 as shown by the arrow B. It is discharged from the end into the outer tube 2.

  The gas released into the outer tube 2 flows along the gap 7 as indicated by the arrow C, and finally, as shown by the arrow D, the plurality of through holes 3 (3a to 3a) of the outer tube 2 are provided. 3i) is released into the surrounding space. This path is the same when gas flows through the inside 6b of the small tube 5b and the inside 6d of the small tube 5d.

  In FIG. 2B, the gas indicated by the arrow C is illustrated as flowing through a portion of the gap 7 close to the through hole 3, but actually flows over the entire gap 7.

  The gas supply pipe 1 can be disposed at various locations, but in any case, the temperature of the space around the gas supply pipe 1 is transmitted to the gas supply pipe 1. Therefore, the supplied gas is heated or cooled by the temperature of the surrounding space transmitted to the gas supply pipe 1 both during the flow through the inner pipe 5 and through the gap 7 between the outer pipe 2 and the inner pipe 5. Is done.

  It will be described with reference to FIGS. 3A, 3B, 4A, and 4B that the inner tube 5 has a larger contact area with the gas than a simple cylinder, and the flowing gas is easily compatible with the ambient temperature. .

  FIG. 3A is an enlarged view of a cross section of the inner tube 35 of the comparative example. The inner tube 35 is a tube having a normal structure. The cross section of the interior 36 is circular and has an area S and a circumferential length P. That is, if the length of the inner tube 35 is L, the inner volume of the inner tube 35 is SL. The inner surface area of the inner tube 35 is PL.

  FIG. 3B is an enlarged view of a cross section of the inner tube 5 of the present invention. The inner tube 5 is an assembly of a plurality of small tubes 5a to 5d as described above. The cross section of the inside 6a of the small tube 5a is circular and has a cross-sectional area Sa and a circumferential length Pa. The cross section of the inside 6b of the small tube 5b is also circular, and has a cross-sectional area Sb and a circumferential length Pb. The cross section of the inside 6c of the small tube 5c is also circular, and has a cross sectional area Sc and a circumferential length Pc. The cross section of the inside 6d of the small tube 5d is also circular, and has a cross-sectional area Sd and a circumferential length Pd.

3B, the sectional area S _a of the internal 6a, the cross-sectional area S _b of the inner 6b, the cross-sectional area S _d of the cross-sectional area S _c, and internal 6d internal 6c are all set to be a S / 4 Yes. In that case, the circumferential length P _a of the internal 6a, the peripheral length P _c of the peripheral length P _b, the interior 6c of the inner 6b, perimeter P _d of the internal 6d are all the P / 2. Therefore, when the sum _{S a + S b + S c} + S d of the cross-sectional area of the tubule 6a~6d was S _T, S _T becomes S. Further, when the sum P _a + P _b + P _c + P _d of the circumference of the cross section is P _T , P _T is 2P. That is, if the length of the inner tube 5 is L, the inner volume of the inner tube 5 is SL. Further, the inner surface area of the inner tube 5 is 2PL.

  Therefore, although the inner tube 5 has the same internal volume as the inner tube 35, the inner surface area is doubled, and the contact area with the gas flowing through the small tubes 5a to 5d is increased.

  FIG. 4A is a schematic diagram showing the temperature of the gas divided into regions corresponding to the temperature when the gas flows in the interior 36 of FIG. 3A. FIG. 4B is a schematic diagram showing the temperatures of the gases in the small tubes 5a to 5d in FIG. 3B divided into regions corresponding to the high temperatures.

  4A and 4B, it is assumed that the heat radiation from the inner tube is the same regardless of the shape of the tube. 4A and 4B, the temperature relationship between the regions is H6 <H5 <H4 <H3 <H2 <H1, with H1 indicating the highest temperature region and H6 indicating the lowest temperature region. ing.

  In FIG. 4A, the temperature of the gas flowing in the vicinity of the tube wall of the inside 36 of the inner tube 35 is high, but the temperature of the gas flowing in the vicinity of the center remains low. On the other hand, in FIG. 4B, the temperature of the gas flowing through the small pipes 5a to 5d of the inner pipe 5 is high up to the vicinity of the central portion. This difference becomes more prominent as the amount of gas supplied increases. As described above, the inner tube 5 which is an assembly of the small tubes 5a to 5d has a large contact area with the gas flowing through the inner tube 5 and can easily convey the temperature of the surrounding environment to the gas. This is because.

  That is, in the inner pipe 5 according to the present invention, the gas supplied from the gas supply source can be sufficiently adapted to the temperature of the space around the gas supply pipe while flowing through the inner pipe 5.

  Further, since the inner tube 5 is an assembly of small tubes 5a to 5d, the outer surface of the inner tube 5 is larger than a simple cylinder having the same internal volume. Therefore, in the gas supply pipe 1, the contact area with the gas flowing through the gap 7 between the outer pipe 2 and the inner pipe 5 is also large.

  Therefore, the gas supply pipe 1 is configured to cause the gas supplied from the gas supply source to flow between the inner pipe 5 (small pipes 5a to 5d) and the gap 7 between the outer pipe 2 and the inner pipe 5. In both cases, the temperature of the surrounding space transmitted to the gas supply pipe 1 can be sufficiently adjusted. As a result, the gas supply pipe 1 can discharge a gas having a sufficiently uniform temperature from the plurality of through holes 3 (3a to 3i) provided in the outer pipe 2 to the surrounding space.

  A heat treatment apparatus 11 using the gas supply pipe 1 according to the first embodiment of the present invention described above will be described with reference to FIGS. 5A, 5B and 6. FIG.

  The heat treatment apparatus 11 includes a furnace body 12, a gas supply mechanism 18, a heating mechanism 19, and a transport mechanism 22. The workpiece 27 is transported by the heating mechanism 19 while being transported by the transport mechanism 22 while being placed on the stacking member 26 inside the furnace body 12 filled with a predetermined atmospheric gas supplied from the gas supply mechanism 18. It is heat-treated by being heated.

  The furnace body 12 includes an upper heat insulating wall 13, a lower heat insulating wall 14, and side heat insulating walls 15. The internal space of the furnace body 12 is divided into a plurality of heat treatment zones by heat treatment zone partition walls 16. The heat treatment zone partition 16 is provided with a passage port 17 through which a stacking member 26 on which an object 27 is placed can pass during conveyance.

  The gas supply mechanism 18 includes a gas supply pipe 1 and a gas supply source (not shown). The gas supply pipe 1 is disposed so as to protrude from the one side of the two side heat insulating walls 15 in the direction crossing the furnace body 12 into the internal space of the furnace body 12, and the side heat insulating walls are provided by the flange 4. 15 is attached. In each heat treatment zone, a total of two gas supply pipes 1 are disposed, one near the heat treatment zone partition 16 on the inlet side and the outlet side.

  The heating mechanism 19 includes an upper heater 20, a lower heater 21, a power source (not shown), and an output controller (not shown). The output controller adjusts the outputs of the upper heater 20 and the lower heater 21 and sets the temperature environment inside the heat treatment zone to a predetermined state.

  The transport mechanism 22 includes a transport roller 23, a support member 24 supported on a base (not shown), and a driving unit 25. The transport roller 23 is rotated at a predetermined speed by the driving unit 25. The stacking member 26 on which the workpiece 27 is placed is placed on the carrying roller 23, so that the inside of the furnace body 12 is carried in the direction of arrow C at a predetermined speed. The conveyance speed is set for each heat treatment zone.

  Each heat treatment zone is set to one of a temperature rising zone, a temperature holding zone, and a temperature lowering zone under predetermined conditions by adjusting the outputs of the upper heater 18 and the lower heater 19 with an output controller. The heat treatment apparatus 11 can set a predetermined temperature profile by combining the temperature increase zone, the temperature holding zone, and the temperature decrease zone, and adjusting the conveyance speed in each zone. Therefore, the workpiece 24 is heat-treated with a predetermined temperature profile while being transported by the transport mechanism 22 inside the furnace body 12 of the heat treatment apparatus 11.

  The predetermined atmospheric gas supplied from the gas supply source is preheated by the temperature of the internal space of the furnace body 12 transmitted to the gas supply pipe 1 when flowing inside the gas supply pipe 1. From the through hole 3 of the outer pipe 2 of the gas supply pipe 1, atmospheric gas preheated in the direction of arrow F is continuously released. As a result, the internal space of the furnace body 12 is maintained filled with a predetermined atmospheric gas.

  FIG. 6 shows the difference in how the atmospheric gas is preheated by the gas supply pipe when the gas supply pipe including the inner pipe 35 shown in FIG. 3A is used (comparative example) and the inner pipe 5 shown in FIG. 3B. It compares and shows the case where the gas supply pipe | tube 1 provided with (Example) is used. In the gas supply pipe of the comparative example, the inner pipe 5 is changed to the inner pipe 35 and the other members are the same as those of the gas supply pipe 1.

  Of the two gas supply pipes 1 arranged in the maximum temperature holding zone, the temperature measurement point is “near the tip” of the gas supply pipe 1 arranged in the vicinity of the heat treatment zone partition wall 16 on the inlet side (through hole 3a of the outer pipe). Near the tip) (between 3c), "near the center" (near 3e), "between the center and root" (near 3g) and "near the root" (near 3i).

  A thermocouple was disposed in the vicinity of each through-hole in a position where the atmospheric gas immediately after discharge hits so that the temperature of the atmospheric gas preheated inside the gas supply pipe 1 can be measured. The set temperature of the maximum temperature holding zone was set to a temperature set when firing a normal ceramic electronic component. In FIG. 6, the temperature at the measurement location is shown in the form of a deviation from the set temperature.

  In the “near base” and “between the center and the root” of the gas supply pipe, there is almost no difference in measured temperature between the comparative example and the example. This is because, regardless of which gas supply pipe is used, the atmospheric gas discharged from the through hole 3i of the outer pipe 2 of the gas supply pipe passes through the gap 7 between the inner pipe 5 (or the inner pipe 35) and the outer pipe 2. This is because it is sufficiently preheated during the flow.

  However, as the distance flowing through the gap 7 becomes shorter, the difference in measurement temperature corresponding to the difference in the gas supply pipes used becomes more prominent. In the comparative example, the atmospheric gas is not sufficiently preheated while flowing in the inner pipe 35. Furthermore, the shorter the distance flowing through the gap 7, the less preheating there will be.

  Therefore, the atmospheric gas discharged from the through holes 3a to 3f of the outer tube 2 having a relatively short distance flowing through the gap 7 is released without the temperature sufficiently rising. In particular, the temperature drop in the “near the tip” of the gas supply pipe affected by the atmospheric gas discharged from the through hole 3a having the shortest distance flowing through the gap 7 is remarkable. As a result, the released atmospheric gas lowers the temperature inside the furnace body 12 from “near the tip” to “near the center” of the gas supply pipe.

  On the other hand, in the embodiment, the atmospheric gas is sufficiently preheated while flowing inside the inner pipe 5. Therefore, even if the distance flowing through the gap 7 is short, preheating is not insufficient.

  Therefore, even if it is atmospheric gas discharged | emitted from the through-holes 3a-3f of the outer side pipe | tube 2 where the distance which flows through the clearance gap 7 is comparatively short, temperature rises enough. As a result, the released atmospheric gas does not lower the temperature inside the furnace body 12 near the through holes 3a to 3f of the outer tube 2.

  In the embodiment, the reason why the temperature inside the furnace body 12 is slightly lower at “near the root” and “near the tip” of the gas supply pipe is considered to be due to the effect of heat absorption by the side heat insulating wall 15. Is unknown. Further, if the temperature drop is about this level, it is confirmed that the temperature variation of the object to be processed is suppressed, and the state after the heat treatment of the object to be processed is sufficiently uniform.

  That is, in the heat treatment apparatus 11 according to the present invention, the supplied atmospheric gas is released into the furnace body 12 in a state of being sufficiently preheated at the temperature inside the furnace body. Therefore, variation in temperature of the object to be processed during the heat treatment is suppressed, and the state of the object to be processed after the heat treatment becomes uniform. As a result, the performance of various products manufactured using the object to be processed after heat treatment does not vary, and the product yield can be increased.

  In the first embodiment of the present invention, a so-called roller hearth furnace in which the transport medium of the stacking member 26 is the transport roller 23 has been described as an example of the heat treatment apparatus 11, but the present invention is also applicable to other forms of heat treatment apparatuses. it can.

  Further, the heat treatment apparatus of the present invention is widely used for heat treatment such as drying or baking of a paste containing a metal material or an inorganic material applied to a base material such as a glass substrate, or calcination of a powder containing a metal material or an inorganic material. Can be applied.

  In addition, as 1st Embodiment of this invention, although the inner tube 5 illustrated what integrally molded the some small tube 5a-5d shown to FIG. 3B, it is not restricted to this.

  For example, as shown in FIG. 7, a plurality of small tubes 5 a to 5 d joined by a joining material 9 may be used as the inner tube 5. In this case, the inner tube 5 can be easily manufactured by bonding the ready-made small tubes with the bonding material 9.

-Second Embodiment-
The inner pipe 5 of the gas supply pipe 1 according to the second embodiment of the present invention will be described with reference to FIG.

  FIG. 8 is an enlarged view of a cross section of the inner pipe 5 of the gas supply pipe 1 according to the second embodiment of the present invention. In the inner tube 5 shown in FIG. 8, a partition-shaped insertion member 10 having a cross-shaped cross section is inserted into the inside 6 a to 6 d of the small tubes 5 a to 5 d constituting the inner tube 5. Therefore, the inner surface area of the inner tube 5 is a combination of the surface area of the small tubes 5a to 5d itself and the surface area of the insertion member 10, and the supplied gas is compared to the case where the inner tube 5 is a simple cylinder. The contact area with the is further increased.

  The insertion member 10 is inserted in close contact with the inner peripheral surfaces of the small tubes 5a to 5d so that the temperature of the small tubes 5a to 5d constituting the inner tube 5 is efficiently transmitted into the space of the inside 6a to 6d. Yes. Therefore, the Mohs hardness of the material of the insertion member 10 is preferably equal to or less than the Mohs hardness of the material of the small tubes 5a to 5d. In this case, when the insertion member 10 is inserted into the small tubes 5a to 5d, the inside of the small tubes 5a to 5d is not damaged.

  Moreover, it is preferable that the thermal expansion coefficient of the insertion member 10 is the same as or close to the thermal expansion coefficient of the material of the small tubes 5a to 5d. In this case, when the insertion member 10 is thermally expanded in a high temperature environment, excessive stress is not applied to the inner peripheral surfaces of the small tubes 5a to 5d, and the small tubes 5a to 5d are not damaged.

  In addition, in FIG. 8, although the insertion member 10 inserted in the inside 6a-6d of the small pipes 5a-5d illustrated the thing of the cross-sectional partition shape, it is not restricted to this.

  For example, as the insertion member 10, an aggregate of thread members may be used. Since the aggregate of the thread-like members has a large surface area, the contact area with the supplied gas can be increased even with a small amount.

  In addition, since the assembly of the thread-like members is rich in elasticity, the inside of the small tubes 5a to 5d is not damaged when inserted into the small tubes 5a to 5d. Further, when the thermal expansion is performed in a high temperature environment, excessive stress is not applied to the inner peripheral surfaces of the small tubes 5a to 5d, and the small tubes 5a to 5d are not damaged.

-Third embodiment-
An inner pipe 5 of a gas supply pipe 1 according to a third embodiment of the present invention will be described with reference to FIG.

  FIG. 9 is an enlarged view of a cross section of the inner pipe 5 of the gas supply pipe 1 according to the third embodiment of the present invention. In the inner tube 5 shown in FIG. 9, a part of the tube walls of the small tubes 5a to 5d constituting the inner tube 5 protrudes toward the central axis of the small tubes 5a to 5d so as to have a substantially rectangular cross section. In this case, the surface area itself of the insides 6a to 6d of the small tubes 5a to 5d is increased. Therefore, compared with the case where the inner tube 5 is a simple cylinder, the surface area itself of the inner tube 5 is further increased. It is preferable that this projecting structure reaches as close to the central axis of the small tubes 5a to 5d as possible. Thereby, the contact area with the gas supplied from the gas supply source can be sufficiently increased inside the inner pipe 5.

  In FIG. 9, the protruding structure of the tube walls of the small tubes 5 a to 5 d is illustrated as having a substantially rectangular cross section, but is not limited thereto, and the cross section may have another shape.

  For the inner pipe 5 of the gas supply pipe 1 of the present invention, the contact area with the gas may be further increased by combining the second and third embodiments. The shapes of the small tubes 5a to 5d are not necessarily the same, and may be a collection of small tubes having different shapes.

  Moreover, the material of each component of the gas supply pipe 1 of this invention is suitably selected according to the purpose of use. For example, when used in the heat treatment apparatus 11, a high melting point ceramic material such as alumina that can withstand a high-temperature oxidizing atmosphere can be used. On the other hand, when used in a relatively low temperature environment, a metal material such as stainless steel may be used.

  The gas supply pipe 1 of the present invention may be used for the purpose of heating a low temperature gas supplied from a gas supply source at the ambient temperature of the gas supply pipe 1. On the other hand, a high temperature gas supplied from a gas supply source may be used for the purpose of cooling at the ambient temperature of the gas supply pipe 1.

  In addition, this invention is not limited to said embodiment, A various application and deformation | transformation are possible within the scope of this invention.

  Although the embodiments of the present invention have been described above, the embodiments disclosed herein are illustrative and non-restrictive in every respect. The scope of the present invention is defined by the terms of the claims, and includes meanings equivalent to the terms of the claims and all changes within the scope.

  1 Gas supply pipe, 2 Outer pipe, 3 Outer pipe through-hole, 5 Inner pipe, 5a, 5b, 5c, 5d Small pipe, 6a, 6b, 6c, 6d Inside of the small pipe, 7 Clearance between the outer pipe and the inner pipe, DESCRIPTION OF SYMBOLS 10 Insertion member, 11 Heat processing apparatus, 12 Furnace body, 18 Gas supply mechanism, 19 Heating mechanism, 27 To-be-processed object.

Claims (4)

An outer tube that is closed at one end and includes a plurality of through-holes arranged longitudinally in the tube wall;
A gas supply pipe having one end connected to a gas supply source and an inner pipe inserted into the outer pipe;
The gas supplied from the gas supply source passes through the inner pipe, passes through a gap between the outer pipe and the inner pipe formed inside the outer pipe, and passes through the plurality of through holes in the outer pipe. Heated by the temperature of the surrounding space transmitted to the gas supply pipe while flowing in the path discharged to the surrounding space of the supply pipe and flowing through the inner pipe and through the gap between the outer pipe and the inner pipe. Or cooled and
The inner pipe includes a collection of a plurality of small pipes.   The gas supply pipe according to claim 1, wherein an insertion member is inserted into the small pipe.   The gas supply pipe according to claim 1 or 2, wherein a part of the pipe wall of the small pipe projects toward a central axis of the small pipe. A furnace body having an internal space surrounded by an insulating wall;
A gas supply mechanism including a gas supply pipe disposed so as to be exposed in the internal space of the furnace body;
A heating mechanism for heating the internal space of the furnace body;
Including
A heat treatment apparatus for supplying an atmosphere gas to the internal space of the furnace body by the gas supply mechanism, heating the object to be processed by a heating mechanism in the atmosphere gas environment, and heat-treating the object to be processed,
A heat treatment apparatus, wherein the gas supply pipe is the gas supply pipe according to any one of claims 1 to 3.