CN105324621B - Gas supply pipe and annealing device - Google Patents
Gas supply pipe and annealing device Download PDFInfo
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- CN105324621B CN105324621B CN201480034939.8A CN201480034939A CN105324621B CN 105324621 B CN105324621 B CN 105324621B CN 201480034939 A CN201480034939 A CN 201480034939A CN 105324621 B CN105324621 B CN 105324621B
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- Prior art keywords
- gas supply
- tube
- supply pipe
- gas
- inside tube
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/04—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity adapted for treating the charge in vacuum or special atmosphere
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/12—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity with special arrangements for preheating or cooling the charge
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/02—Supplying steam, vapour, gases, or liquids
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Furnace Details (AREA)
- Physics & Mathematics (AREA)
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
- Tunnel Furnaces (AREA)
- Geometry (AREA)
- Thermal Sciences (AREA)
- Heat Treatment Of Articles (AREA)
Abstract
Gas supply pipe (1) is closed comprising one end, tube wall possesses the outboard tube (2) of the multiple through holes (3) for arranging along its length, and one end be connected with gas supply source and be inserted into outboard tube (2) inside inside tube (5).The gas provided by gas supply source is flowed with following path：By inside tube (5), by the gap (7) being formed between the internal outboard tube (2) of outboard tube (2) and inside tube (5), surrounding space is discharged into from multiple through holes (3) of outboard tube (2).The gas for being provided during flowing through inside tube and flow through between outboard tube (2) and inside tube (5) gap during, be heated or cooled by the temperature conducted to the surrounding space of gas supply pipe (1).Aggregate of the inside tube (5) comprising multiple tubules (5a)~(5d).
Description
Technical field
The present invention relates to gas supply pipe and using the gas supply pipe atmosphere gas is provided to the treated object of furnace interior
Body and the annealing device being heat-treated.
Background technology
That implements for the ceramic electronic component obtained with ceramic capacitor as representative the heat of treated object such as burns till
Extensively using annealing device in treatment, the annealing device is provided the atmosphere corresponding with its purpose by gas feed unit
Gas.
As the annealing device for processing a large amount of treated objects, can enumerate and be positioned over loading component using connecting gear transmission
Treated object and be carried out continuously the continuous ovens such as roller bottom stove, mesh-belt conveying stove and the pusher furnace for the treatment of.
In above-mentioned continuous oven, it is more in the case of, atmosphere gas are provided to treated object after preheat.Gas supply is single
Unit includes gas supply pipe, and the gas supply pipe is configured to expose to the inner space of the body of heater heated by heater.Atmosphere
The preheating of gas is carried out during the inside for flowing through the gas supply pipe after being heated with the temperature of the inner space of body of heater.
As an example, proposed such as lower section in Japanese Patent Laid-Open 2012-225620 publications (patent document 1)
Method：The gas supply pipe that furnace interior will be configured at is set to the dual pipe being made up of outboard tube and inside tube, in atmosphere gas stream
During flowing through the gap of dual pipe with atmosphere gas during crossing inside tube, carried out using the temperature of the inner space of body of heater
Preheating.
Figure 10 A and Figure 10 B show the gas supply pipe 101 described in patent document 1.The tube wall of outboard tube 102 has
Through hole 103.The tube wall of inside tube 105 has through hole 110.Inserted in gap 107 between outboard tube 102 and inside tube 105
Enter to have bushing 108, the bushing 108 is used to be isolated gap 107 with the atmosphere outside body of heater, and using the interior of outboard tube 102
Portion supports inside tube 105.
The profile normal that outboard tube 102 and inside tube 105 are configured to the through hole 110 of inside tube 105 projects to outboard tube
Projected image during 102 internal face will not be overlap with the through hole 103 of outboard tube 102.
Gas supply pipe 102 is configured at furnace interior (not shown), and the gas (not shown) possessed with body of heater outside is supplied
It is connected to source.
Flowing to gas in gas supply pipe 101 is illustrated.The two ends of inside tube 105 are supplied to from gas supply source
Atmosphere gas flow through the inside 106 of inside tube 105 as shown by arrow a, way wherein, as shown by the arrowb like that from interior
The through hole 110 of side pipe 105 is discharged into gap 107.The atmosphere gas in gap 107 are discharged into as indicated by arrow c like that along outer
The internal face flowing of side pipe 102, is finally discharged into stove from the through hole 103 of outboard tube 102 like that as shown by the arrowd.
Atmosphere gas during flowing through the inside 106 of inside tube 105 and during flowing through gap 107, by temperature in stove
Spend and be preheated.
In patent document 1, above-mentioned gas supply pipe does not need unnecessary space, can provide the atmosphere gas of uniform temperature
To treated object.
Prior art literature
Patent document
Patent document 1：Japanese Patent Laid-Open 2012-225620 publications
The content of the invention
The technical problems to be solved by the invention
In gas supply pipe described in patent document 1, flow through inside tube 105 inside 106 atmosphere gas by with
Inside tube 105 is in contact and is heated.However, flow through atmosphere gas near the central axis of the inside 106 of inside tube 105 by
It is difficult to be heated in the tube wall away from inside tube 105.
Additionally, being ejected into the gas in gap 107 from through hole 110a, 110g of the inside tube 105 positioned at body of heater outer vicinity
Atmosphere gas is shorter therefore shorter with the distance that inside tube 105 is contacted due to the distance flowed in inside tube 105.Therefore, it is above-mentioned
Atmosphere gas may especially preheat insufficient.
That is, in the annealing device of patent document 1, it is impossible to think that the preheating of atmosphere gas is abundant.Above-mentioned situation is with institute
The atmosphere gas amount of offer increases and becomes notable.
If atmosphere gas are not fully warmed-up in the midway of feed path and maintain relatively low state of temperature to be provided to greatly
The treated object of amount, then according to the situation of the contact with atmosphere gas, the temperature of treated object can produce deviation.Treated object
Temperature deviation in heat treatment can cause the state after heat treatment deviation occur.Additionally, the state after the heat treatment of treated object
Deviation can cause to manufacture the aberrations in property of various products for obtaining using the treated object after heat treatment.
Thus, it is desirable to atmosphere gas are fully warmed-up, and suppress the temperature deviation of the treated object in being heat-treated.
Therefore, it is an object of the present invention to provide a kind of gas supply pipe that can be fully warmed-up provided atmosphere gas
And can suppress heat treatment in treated object temperature deviation annealing device.
Solve the technological means that technical problem is used
The present invention in order to provide can be fully to being provided the gas supply pipe that is preheated of atmosphere gas, and try hard to realization
For the improvement of the internal structure of gas supply pipe.
Gas supply pipe involved in the present invention includes outboard tube and inside tube.One end closing of outboard tube, tube wall possesses
The multiple through holes for arranging along its length.One end of inside tube is connected with gas supply source, and is inserted into the outboard tube
It is internal.
The gas provided by gas supply source is flowed with following path：By inside tube, by being formed in outboard tube
Gap between the outboard tube and inside tube in portion, the surrounding space of gas supply pipe is discharged into from multiple through holes of outboard tube.
The gas for being provided during flowing through inside tube and flow through between outboard tube and inside tube gap during, by conducting to gas
The temperature of the surrounding space of body supply pipe is heated or cooled.
Additionally, inside tube includes the aggregate of multiple tubules.
In above-mentioned gas supply pipe, inside tube includes the aggregate of multiple tubules.Thus, it is simple cylinder with inside tube
Situation compare, inside tube and flow through inside tube gas be easy to contact.
Therefore, in above-mentioned gas supply pipe, for the gas provided by gas supply source, in the phase that it flows through inside tube
Between and flow through between outboard tube and inside tube gap during during the two when, conduction to gas can be substantial access to and supplied
To the temperature of the surrounding space of pipe.As a result, temperature can be discharged to surrounding space from the multiple through holes for being arranged at outboard tube
The full and uniform gas of degree.
Additionally, the inside of tubule that gas supply pipe involved in the present invention can be included in inside tube is inserted with insertion
Component.
In above-mentioned gas supply pipe, insertion component is inserted with the inside of tubule, thus surface area inside inside tube into
It is multiple tubules surface area of itself and the surface area sum of insertion component.Thus, with the situation that inside tube is simple cylinder
Compare, the contact area of inside tube and the gas for being provided further becomes big.
In gas supply pipe involved in the present invention, a part of of tube wall for constituting the tubule of inside tube can be towards tubule
Central axis protrude.
In above-mentioned gas supply pipe, a part for the tube wall of tubule is protruded towards the central axis of tubule, therefore tubule
Internal surface area itself becomes big.Thus, compared with the situation that inside tube is simple cylinder, inside tube and the gas for being provided
Contact area further become big.
Annealing device of the present invention also facing the temperature deviation that can suppress the treated object in heat treatment.
Annealing device involved in the present invention includes：Body of heater with the inner space surrounded by thermal wall；Comprising
The gas supply mechanism of the gas supply pipe configured in the way of exposing to the inner space of body of heater；And it is empty to the inside of body of heater
Between the heating arrangements that are heated.
The annealing device provides atmosphere gas by gas supply mechanism to the inner space of body of heater, using heating arrangements
Treated object is heated under atmosphere gas environment, and treated object is heat-treated.
The gas supply pipe that gas supply mechanism is included is gas supply pipe involved in the present invention.
As described above, gas supply pipe involved in the present invention can make provided gas be substantial access to conduction to gas supplying
To the temperature of the surrounding space of pipe.Thus, in the annealing device using gas supply pipe involved in the present invention, provided
Atmosphere gas be substantial access to body of heater inner space temperature, after preheat in the state of be discharged into furnace interior.Therefore, heat
The temperature deviation of the treated object in treatment is inhibited, and the state after the heat treatment of treated object becomes uniform.As a result,
The performance for manufacturing the various products for obtaining using the treated object after heat treatment will not produce deviation, can improve the qualified of product
Rate.
Invention effect
In gas supply pipe involved in the present invention, for the gas provided by gas supply source, inside tube is flowed through at it
During and flow through between outboard tube and inside tube gap during during the two when, conduction to gas can be substantial access to
The temperature of the surrounding space of body supply pipe.As a result, in gas supply pipe involved in the present invention, can be from being arranged at outboard tube
Multiple through holes discharge the full and uniform gas of temperature to surrounding space.
In annealing device involved in the present invention, by using gas supply pipe involved in the present invention to treated object
There is provided temperature full and uniform atmosphere gas, so as to suppress the temperature deviation of the treated object in heat treatment.Therefore, it is processed
State after the heat treatment of thing becomes uniform.As a result, manufacturing the various products for obtaining using the treated object after heat treatment
Performance will not produce deviation, the qualification rate of product can be improved.
Brief description of the drawings
Figure 1A is the outside drawing of the gas supply pipe 1 involved by embodiments of the present invention 1, is the outside drawing of side.
Figure 1B is the outside drawing of the gas supply pipe 1 involved by embodiments of the present invention 1, is the outside drawing of bottom surface.
Fig. 1 C are the outside drawings of the gas supply pipe 1 involved by embodiments of the present invention 1, are the outside drawings of front end.
Fig. 2A is the sectional view of the gas supply pipe 1 along the Z1-Z1 lines shown in Figure 1A.
Fig. 2 B are the sectional views of the gas supply pipe 1 along the X1-X1 lines shown in Figure 1B.
Fig. 2 C are the sectional views of the gas supply pipe 1 along the Y1-Y1 lines shown in Figure 1B.
Fig. 3 A are for being carried out between the implementation method 1 in the comparative example and the scope of the present invention outside the scope of the present invention
Compare to represent the sectional view of the inside tube of gas supply pipe, be the sectional view of comparative example.
Fig. 3 B are for being carried out between the implementation method 1 in the comparative example and the scope of the present invention outside the scope of the present invention
Compare to represent the sectional view of the inside tube of gas supply pipe, be the section view of the inside tube 5 of gas supply pipe 1 shown in Fig. 2A
Figure.
During Fig. 4 A are the inside tube for represent the gas supply pipe shown in Fig. 3 A, flow through the heat that its internal gas receives
Schematic diagram, is the schematic diagram of comparative example.
During Fig. 4 B are the inside tube for represent the gas supply pipe shown in Fig. 3 B, flow through the heat that its internal gas receives
Schematic diagram, is the schematic diagram of the inside tube 5 of gas supply pipe 1 shown in Fig. 3 B.
Fig. 5 A are the sectional views of the annealing device 11 constituted using the gas supply pipe 1 shown in Figure 1A to Fig. 1 C, are
The sectional view of annealing device 11 is observed from the side.
Fig. 5 B are the sectional views of the annealing device 11 constituted using the gas supply pipe 1 shown in Figure 1A to Fig. 1 C, are
The Y2-Y2 sectional views of Fig. 5 A.
Fig. 6 is the implementation method 1 in the gas supply pipe and the scope of the present invention of the comparative example outside the scope of the present invention
Gas supply pipe 1 between be compared to represent the curve map of the preheating that atmosphere gas are subject to.
Fig. 7 is the sectional view of the inside tube 5 of the gas supply pipe 1 of the variation of embodiments of the present invention 1.
Fig. 8 is the sectional view of the inside tube 5 of the gas supply pipe 1 of embodiments of the present invention 2.
Fig. 9 is the sectional view of the inside tube 5 of the gas supply pipe 1 of embodiments of the present invention 3.
Figure 10 A are the sectional views of the gas supply pipe 101 of background technology, are to observe gas supply pipe 101 from the side
Sectional view.
Figure 10 B are the sectional views of the gas supply pipe 101 of background technology, are the Y3-Y3 sectional views of Figure 10 A.
Specific embodiment
- implementation method 1-
The gas involved by embodiments of the present invention 1 is supplied using Figure 1A, Figure 1B, Fig. 1 C and Fig. 2A, Fig. 2 B, Fig. 2 C
Pipe 1 is illustrated.
Gas supply pipe 1 includes outboard tube 2 and inside tube 5.One end closing of outboard tube 2, tube wall possesses along its length
Multiple through holes 3 (3a~3i) of arrangement.Additionally, the other end of outboard tube 2 includes that for example conduct is installed on heat treatment described later
The flange 4 of the supporting member during sidepiece thermal wall 15 of device 11.
One end of inside tube 5 is connected with gas supply source (not shown), and inserts the inside of outboard tube 2.By by inner side
Bushing 8 is inserted with the gap 7 that pipe 5 inserts outboard tube 2 and formed, the bushing 8 is used to completely cut off in gap 7 and surrounding space, and
Inside tube 5 is supported in the inside of outboard tube 2.
Inside tube 5 is the aggregate of multiple tubule 5a~5d.In present embodiment, multiple tubule 5a~5d are formed as one
Body.
Flowing using Fig. 2 B to the gas in gas supply pipe 1 is illustrated.There is provided to inside tube 5 from gas supply source
One end gas as indicated by arrow by the inside 6c of the inside 6a and tubule 5c of tubule 5a, and as shown by arrow B that
Sample is discharged into the inside of outboard tube 2 from the other end of inside tube 5.
The gas for being released to the inside of outboard tube 2 flows along gap 7 like that as shown by arrow C, final such as arrow D institutes
Show and be discharged into surrounding space from multiple through holes 3 (3a~3i) of outboard tube 2 like that.For the path, tubule is flowed through in gas
It is also identical in the case of the inside 6d of the inside 6b and tubule 5d of 5b.
In addition, the gas being illustrated as in Fig. 2 B shown in arrow C is flowed through close to the part of the through hole 3 in gap 7, but actually
Flow through gap 7 overall.
Gas supply pipe 1 can be arranged at various places, but in the case of any one, the surrounding space of gas supply pipe 1
Temperature is conducted to gas supply pipe 1.Thus, the air for being provided is during inside tube 5 is flowed through and flows through the and of outboard tube 2
When during the gap 7 between inside tube 5 during this pair, all the temperature by conducting to the surrounding space of gas supply pipe 1 adds
Heat or cooling.
Using Fig. 3 A, Fig. 3 B and Fig. 4 A, Fig. 4 B explanation situations below：That is, compared with simple cylinder, above-mentioned inside tube 5
Contact area between gas becomes big, the temperature of the easily accessible surrounding environment of flowing gas.
Fig. 3 A are the enlarged drawings in the section of the inside tube 35 of comparative example.Inside tube 35 is the pipe of usual structure.Internal 36
Section is rounded, with area S and girth P.That is, if the length of inside tube 35 is set into L, the internal volume of inside tube 35 is
SL.Additionally, the surface area of the inside of inside tube 35 is PL.
Fig. 3 B are the enlarged drawings in the section of inside tube of the invention 5.Inside tube 5 is as described above multiple tubule 5a~5d's
Aggregate.The section of the inside 6a of tubule 5a is rounded, with sectional area Sa and girth Pa.The section of the inside 6b of tubule 5b is in
Circle, with sectional area Sb and girth Pb.The section of the inside 6c of tubule 5c is rounded, with sectional area Sc and girth Pc.It is small
The section of the inside 6d of pipe 5d is rounded, with sectional area Sd and girth Pd.
In Fig. 3 B, the sectional area S of internal 6aa, inside 6b sectional area Sb, inside 6c sectional area Sc, inside 6d section
Product SdCan be set to that S/4.In this case, the girth P of inside 6aa, inside 6b girth Pb, inside 6c girth Pc, inside 6d
Girth PdIt is P/2.Therefore, by the sectional area sum S of tubule 6a~6da+Sb+Sc+SdIt is set to STWhen, STIt is S.To cut
The girth sum P in facea+Pb+Pc+PdIt is set to PTWhen, PTIt is 2P.That is, if the length of inside tube 5 is set into L, inside tube 5 it is interior
Volume is SL.Additionally, the surface area of the inside of inside tube 5 is 2PL.
Thus, inside tube 5 and inside tube 35 have an identical internal volume, and the surface area of inside turns into 2 times, small with flowing through
The contact area of the gas of pipe 5a~5d becomes big.
Fig. 4 A are, when gas flows through the inside 36 of Fig. 3 A, the temperature of the gas to be divided into corresponding with the height of temperature
Region come the schematic diagram that represents.Fig. 4 B are, when gas flows through the tubule 5a~5d of Fig. 3 B, the temperature of the gas to be divided into
The region corresponding with the height of temperature is come the schematic diagram that represents.
In addition, in Fig. 4 A and Fig. 4 B, it is assumed that the shape regardless of pipe, the radiating from inside tube is all identical.Fig. 4 A and
In Fig. 4 B, the relation of each interregional temperature represents temperature highest region, H6 tables for H6 ＜ H5 ＜ H4 ＜ H3 ＜ H2 ＜ H1, H1
The minimum region of temperature displaying function.
In Fig. 4 A, the temperature for flowing through the gas of the near-wall of the inside 36 of inside tube 35 is uprised, but is flowed through near center
Gas temperature it is still relatively low.On the other hand, in Fig. 4 B, the gas for flowing through the tubule 5a~5d of inside tube 5 is attached to central portion
Temperature is uprised untill near.The difference becomes notable as the gas flow for being provided increases.Its reason is, as mentioned above
As, the inside tube 5 of aggregate and the contact area of the gas for flowing through inside tube 5 as tubule 5a~5d become big, surrounding
The temperature of environment is easy to be transmitted to gas.
That is, in inside tube 5 of the invention, during the gas provided by gas supply source flows through inside tube 5, can be fully
Close to the temperature of the surrounding space of gas supply pipe.
Additionally, inside tube 5 is the aggregate of tubule 5a~5d, thus its outer surface area than being accumulated with identical content
The area of simple cylinder is compared to big.Therefore, in gas supply pipe 1, the gas with the gap 7 for flowing through outboard tube 2 and inside tube 5
The contact area of body also becomes big.
Thus, in above-mentioned gas supply pipe 1, for the gas provided by gas supply source, flow through inside tube 5 at it (small
Pipe 5a~5d) during and flow through between outboard tube 2 and inside tube 5 gap 7 during during this pair, can fully connect
The temperature of surrounding space of the nearly conduction to gas supply pipe 1.As a result, above-mentioned gas supply pipe 1 can be full and uniform by temperature
Gas be discharged into surrounding space from the multiple through holes 3 (3a~3i) for being arranged at outboard tube 2.
Using Fig. 5 A, Fig. 5 B and Fig. 6 to having used the gas involved by the embodiments of the present invention 1 of described above to supply
The annealing device 11 of pipe 1 is illustrated.
Annealing device 11 includes body of heater 12, gas supply mechanism 18, heating arrangements 19, connecting gear 22.Treated object
27 state to be placed in loading component 26, using connecting gear 22 in the body of heater 12 that the atmosphere gas being prescribed are full of
Portion is transmitted, and heated mechanism 19 heats, and so as to be heat-treated, the atmosphere gas of the regulation are by gas supply mechanism 18
There is provided.
Body of heater 12 includes top thermal wall 13, bottom thermal wall 14, sidepiece thermal wall 15.The inner space of body of heater 12 is hot
Processing region next door 16 is divided into multiple thermal treatment zones.Thermal treatment zone next door 16 is provided with can be for being placed with treated object 27
Loading component 26 pass through in transmit process by mouth 17.
Gas supply mechanism 18 includes gas supply pipe 1 and gas supply source (not shown).Gas supply pipe 1 be configured to from
The inner space that two sides of sidepiece thermal wall 15 are risen to body of heater 12 on the direction of crosscutting body of heater 12 is prominent, and by flange
4 are installed on side wall thermal wall 15.In each thermal treatment zone, near the thermal treatment zone next door 16 of entrance side and outlet side respectively
A gas supply pipe 1 is provided with, it is total to be configured with two gas supply pipes 1.
Heating arrangements 19 include upper portion heater 20, lower heater 21, power supply (not shown), output control (not shown)
Device.Output of the o controller to upper portion heater 20 and lower heater 21 is adjusted, inside above-mentioned thermal treatment zone
Temperature environment be set as specified states.
Connecting gear 22 is included：Transfer roller 23, the supporting member 24 being supported on base station (not shown), driver element 25.
Transfer roller 23 is set to be rotated with fixing speed using driver element 25.Placed by the loading component 26 that will be placed with treated object 27
In on transfer roller 23, so as to be placed with treated object 27 in the inside transmission of body of heater 12 in the direction of arrow c with fixing speed
Loading component 26.Transfer rate is set by each thermal treatment zone.
Each thermal treatment zone is adjusted using o controller come the output to upper portion heater 18 and lower heater 19
It is whole, become any one of the intensification region, temperature-holding zone and cooling region of rated condition.The energy of annealing device 11
Regulation is set by combining intensification region, temperature-holding zone and cooling region and adjusting the transfer rate in each region
Temperature Distribution.Thus, transmitting the phase of treated object 24 in the inside of the body of heater 12 of annealing device 11 using connecting gear 22
Between, can be heat-treated with the Temperature Distribution for specifying.
The atmosphere gas of the regulation for being provided by gas supply source, at the inside that it flows through gas supply pipe 1, can quilt
The temperature conducted to the inner space of the body of heater 12 of gas supply pipe 1 is preheated.From the insertion of the outboard tube 2 of gas supply pipe 1
Hole 3 constantly discharges the atmosphere gas after preheating in the direction of arrow F.As a result, the inner space of body of heater 12 maintains quilt
The state that the atmosphere gas of regulation are full of.
Fig. 6 uses the situation (comparative example) of the gas supply pipe for possessing the inside tube 35 shown in Fig. 3 A by comparing and uses
The situation (embodiment) for possessing the gas supply pipe 1 of the inside tube 5 shown in Fig. 3 B is represented by gas supply pipe to atmosphere gas
The difference of situation about being preheated.In addition, the inside tube 5 of the gas supply pipe of comparative example is changed to inside tube 35, other components
It is identical with gas supply pipe 1.
Temperature measuring position is arranged in being configured at entrance side in two gas supply pipes 1 of maximum temperature holding area
Thermal treatment zone next door 16 near " near front end " (near the through hole 3a of outboard tube), " between front end-center " (be equal to
Near 3c), " center nearby " (being equal near 3e), " between center-root " (being equal near 3e) and " near root " (equally
Near 3i).
The position being in contact with the atmosphere gas after release in the vicinity of each through hole configures thermocouple, enables to
Determine the temperature of the atmosphere gas of the state after the inside of gas supply pipe 1 is preheated.By setting for maximum temperature holding area
Constant temperature degree is set to burn till the temperature set during common ceramic electronic component.In addition, in Fig. 6, with the deviation with design temperature
Form represent the temperature of measurement site.
In " near the root " of gas supply pipe and " between center-root ", cannot almost be seen between comparative example and embodiment
To the difference of temperature of the measurement.Because, no matter using which gas supply pipe, from the insertion of the outboard tube 2 of gas supply pipe
The atmosphere gas that hole 3i is discharged are abundant during the gap 7 between inside tube 5 (or inside tube 35) and outboard tube 2 is flowed through
Preheating.
However, the distance for flowing through gap 7 is shorter, the difference of the temperature of the measurement corresponding to the difference of gas supply pipe has been used
Become more notable.In comparative example, atmosphere gas are not fully warmed-up during the inside of inside tube 35 is flowed through.Also, flow through
The distance in gap 7 is shorter, and its preheating is more insufficient.
Thus, the distance that flows through gap 7 is shorter, atmosphere gas that are being discharged from the through hole 3a~3f of outboard tube 2
It is released in the state of temperature does not rise fully.Especially for flowing through, the distance in gap 7 is most short to be discharged from through hole 3a
Atmosphere gas, the temperature of " near the front end " of the gas supply pipe being affected by is remarkably decreased.As a result, discharge
Atmosphere gas make the temperature reduction inside the body of heater 12 from " near front end " to " near center " of gas supply pipe.
On the other hand, in embodiment, atmosphere gas are fully warmed-up during the inside of inside tube 5 is flowed through.Therefore, i.e.,
Make the distance for flowing through gap 7 shorter, preheating will not also occur insufficient.
Thus, even the distance for flowing through gap 7 is shorter, gas that is being discharged from the through hole 3a~3f of outboard tube 2
Atmosphere gas, its temperature also fully rises.As a result, the atmosphere gas for discharging will not make the through hole 3a~3f of outboard tube 2
Temperature reduction inside neighbouring body of heater 12.
In addition, in embodiment, as the temperature inside the body of heater 12 of " near the root " and " near front end " of gas supply pipe
The reasons why spending slightly lower, it is considered to the influence of the heat absorption that sidepiece thermal wall 15 is carried out, but details is not clear.If temperature is dropped to
The degree, then the temperature deviation for confirming treated object is inhibited, the state after the heat treatment of treated object is full and uniform
's.
That is, in annealing device 11 involved in the present invention, the atmosphere gas for being provided fill in the temperature with furnace interior
It is released into inside body of heater 12 in the state of dividing after preheating.Therefore, the temperature deviation of the treated object in heat treatment is inhibited,
State after the heat treatment of treated object becomes uniform.As a result, using after heat treatment treated object manufacture obtain it is each
The performance for planting product will not produce deviation, can improve the qualification rate of product.
In embodiments of the present invention 1, used as annealing device 11, the transmission medium with loading component 26 is transfer roller 23
It is illustrated as a example by i.e. so-called roller bottom stove, but the present invention can also apply to the annealing device of other modes.
Annealing device of the invention can be widely used in being coated with the base materials such as glass substrate comprising metal material or
The thickener of inorganic material drying or burns till or the heat treatment such as the pre-burning of powder comprising metal material or inorganic material.
In addition, as embodiments of the present invention 1, exemplified with inside tube 5 by by the multiple tubule 5a shown in Fig. 3 B~
5d form as one obtained from situation, but be not limited to this.
For example, it is also possible to as shown in Figure 7, will be obtained from grafting material 9 be by multiple tubule 5a~5d engagements
Inside tube is used as inside tube 5.In this case, ready-made tubule is engaged using grafting material 9, so as to easily produce
Inside tube 5.
- implementation method 2-
The inside tube 5 of the gas supply pipe 1 involved by embodiments of the present invention 2 is illustrated using Fig. 8.
Fig. 8 is the enlarged drawing in the section of the inside tube 5 of the gas supply pipe 1 involved by embodiments of the present invention 2.Fig. 8
In shown inside tube 5, the inside 6a~6d for constituting the tubule 5a~5d of inside tube 5 is inserted with section for criss-cross next door shape
Insertion component 10.Therefore, the surface area of the inside of inside tube 5 is the surface area and insertion component 10 of tubule 5a~5d itself
Surface area sum, compared with situation of the inside tube 5 for simple cylinder, the contact area with the gas for being provided further increases
Greatly.
Insertion component 10 is inserted into the way of the inner peripheral surface with tubule 5a~5d is in close contact so that constitute inside tube 5
The temperature of tubule 5a~5d effectively conduct to the space of its internal 6a~6d.Therefore, the material of component 10 is inserted not
Family name's hardness is preferably below the Mohs' hardness of the material of tubule 5a~5d.In this case, in the insertion insertion tubule of component 10 5a
During the inside of~5d, the inside of tubule 5a~5d will not be damaged.
Additionally, insertion component 10 thermal coefficient of expansion be preferably it is identical with the thermal coefficient of expansion of the material of tubule 5a~5d or
It is close.In this case, when insertion component 10 occurs thermal expansion in high temperature environments, will not be applied to the inner peripheral surface of tubule 5a~5d
Plus excessive stress, so that tubule 5a~5d will not occur breakage.
In addition, the section that the insertion component 10 of the inside 6a~6d for being inserted into tubule 5a~5d is illustrated in Fig. 8 is ten
The situation of the next door shape of font, but it is not limited to this.
It is, for example possible to use the aggregate of silk wire-like members is used as inserting component 10.The aggregate of silk wire-like members
Surface area is larger, even therefore it is a small amount of, the contact area with the gas for being provided also can be larger.
In addition, the aggregate of silk wire-like members is elastic excellent, when the inside of tubule 5a~5d is inserted into, no
The inside of tubule 5a~5d can be damaged.Additionally, when there is thermal expansion in high temperature environments, will not be to the inner circumferential of tubule 5a~5d
Face applies excessive stress, so that tubule 5a~5d will not occur breakage.
- implementation method 3-
The inside tube 5 of the gas supply pipe 1 involved by embodiments of the present invention 3 is illustrated using Fig. 9.
Fig. 9 is the enlarged drawing in the section of the inside tube 5 of the gas supply pipe 1 involved by embodiments of the present invention 3.Fig. 9
In shown inside tube 5, the section of a part of the tube wall of the tubule 5a~5d of inside tube 5 is constituted towards in tubule 5a~5d
Heart axis is protruded in rectangular mode.In this case, the surface area itself of the inside 6a~6d of tubule 5a~5d becomes big.Cause
This, compared with the situation that inside tube 5 is simple cylinder, the surface area itself of the inside of inside tube 5 further becomes big.The protrusion
Structure preferably reaches the region of the central axis near tubule 5a~5d as far as possible.Thus, can be abundant in the inside of inside tube 5
The contact area of the gas that increase is provided with gas supply source.
In addition, in Fig. 9, the situation of rectangular cross-section is exemplified as the prominent structure of the tube wall of tubule 5a~5d, but simultaneously
Not limited to this, section can be other shapes.
For the inside tube 5 of gas supply pipe of the invention 1, implementation method 2 and implementation method 3 can be combined to enter one
Step increase and the contact area of gas.Additionally, the shape of tubule 5a~5d need not be all identical, can be tubule of different shapes
Aggregate.
The material of each structural element of gas supply pipe of the invention 1 can suitably be selected according to its application target.
For example, in the case where annealing device 11 is used in, can be made pottery using high-melting-points such as the aluminum oxide of resistant to elevated temperatures oxidizing atmosphere
Ceramic material.On the other hand, in the case of in the environment of being used in compared with low temperature, it is possible to use stainless steel and other metal materials.
Gas supply pipe of the invention 1 can be used for the environment temperature using gas supply pipe 1 to by gas supply source
The purpose that the gas of the lower temperature for being provided is heated.On the other hand, it is also possible to for using around gas supply pipe 1
The purpose that the gas of higher temperature of the temperature to being provided by gas supply source is cooled down.
The present invention is not limited to above-mentioned implementation method, within the scope of the invention, can increase various applications, deformation.
More than, embodiments of the present invention are illustrated, but implementation method disclosed herein should be regarded as in all sides
Face is illustration and not limits.The scope of the present invention represents by the scope of claim, the scope of the present invention also include with
Being had altered in the equivalent meaning of the scope of claim and scope.
Label declaration
1 gas supply pipe, 2 outboard tubes, the through hole of 3 outboard tubes, 5 inside tubes, 5a, 5b, 5c, 5d tubule, 6a, 6b, 6c,
Gap, 10 insertion components between the inside of 6d tubules, 7 outboard tubes and inside tube, 11 annealing devices, 12 bodies of heater, 18 gases
Feed mechanism, 19 heating arrangements, 27 treated objects.
Claims (4)
1. a kind of gas supply pipe, including：
One end is closed, and tube wall possesses the outboard tube of the multiple through holes for arranging along its length；And
One end is connected with gas supply source, and is inserted into the inside tube of the inside of the outboard tube, the feature of the gas supply pipe
It is,
The gas provided by the gas supply source is flowed with following path：It is described outer by being formed at by the inside tube
Gap between the outboard tube and the inside tube of the inside of side pipe, institute is discharged into from multiple through holes of the outboard tube
State the surrounding space of gas supply pipe, and during the inside tube is flowed through and flow through the outboard tube and the inside tube it
Between gap during, be heated or cooled by the temperature conducted to the surrounding space of the gas supply pipe,
The inside tube includes the aggregate of multiple tubules.
2. gas supply pipe as claimed in claim 1, it is characterised in that
The inside of the tubule is inserted with insertion component.
3. gas supply pipe as claimed in claim 1 or 2, it is characterised in that
A part for the tube wall of the tubule is protruded towards the central axis of the tubule.
4. a kind of annealing device, including：
Body of heater with the inner space surrounded by thermal wall；
Gas supply mechanism comprising the gas supply pipe configured in the way of exposing to the inner space of the body of heater；And
The heating arrangements heated to the inner space of the body of heater,
Atmosphere gas are provided to the inner space of the body of heater by the gas supply mechanism, using heating arrangements in the gas
Treated object is heated under atmosphere gaseous environment, and the treated object is heat-treated, the feature of the annealing device
It is,
The gas supply pipe is the gas supply pipe described in any one of claims 1 to 3.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-129549 | 2013-06-20 | ||
| JP2013129549 | 2013-06-20 | ||
| PCT/JP2014/064844 WO2014203733A1 (en) | 2013-06-20 | 2014-06-04 | Gas supply tube and heat processing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105324621A CN105324621A (en) | 2016-02-10 |
| CN105324621B true CN105324621B (en) | 2017-06-13 |
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ID=52104473
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480034939.8A Active CN105324621B (en) | 2013-06-20 | 2014-06-04 | Gas supply pipe and annealing device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5950042B2 (en) |
| KR (1) | KR101782824B1 (en) |
| CN (1) | CN105324621B (en) |
| WO (1) | WO2014203733A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101941649B1 (en) * | 2017-11-24 | 2019-01-23 | 주식회사 엘지화학 | Polarizing plate and image display apparatus comprising the same |
| JP7216537B2 (en) * | 2018-12-13 | 2023-02-01 | オリンパス株式会社 | heating furnace |
| JP2021173419A (en) * | 2020-04-17 | 2021-11-01 | 中外炉工業株式会社 | Pusher device used for continuous type heating furnace, and continuous type heating furnace provided therewith |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05340676A (en) * | 1992-06-08 | 1993-12-21 | Murata Mfg Co Ltd | Batch type kiln |
| JP2000039114A (en) * | 1998-07-22 | 2000-02-08 | Tokyo Gas Co Ltd | Radiant tube burner device and indirect heating device using the same |
| JP2000079462A (en) * | 1998-09-07 | 2000-03-21 | Maruyasu Industries Co Ltd | Heat exchanger |
| JP2002299273A (en) * | 2001-04-04 | 2002-10-11 | Sharp Corp | Heat treatment device for semiconductor wafer |
| JP2006189249A (en) | 2006-03-01 | 2006-07-20 | Matsushita Electric Ind Co Ltd | Double pipe heat exchanger |
| JP2009019784A (en) * | 2007-07-10 | 2009-01-29 | Sumitomo Metal Mining Co Ltd | Continuous baking furnace |
| JP2009068739A (en) * | 2007-09-12 | 2009-04-02 | Sumitomo Metal Mining Co Ltd | Continuous baking furnace |
| KR101250626B1 (en) * | 2010-08-10 | 2013-04-03 | 삼성전기주식회사 | Ceramic firing furnace |
| JP2012225557A (en) * | 2011-04-19 | 2012-11-15 | Panasonic Corp | Heat treatment device |
| JP5877358B2 (en) * | 2011-04-22 | 2016-03-08 | パナソニックＩｐマネジメント株式会社 | Heat treatment equipment |
| JP2013120027A (en) * | 2011-12-08 | 2013-06-17 | Panasonic Corp | Double pipe type heat exchanger |
| CN202836268U (en) * | 2012-08-29 | 2013-03-27 | 洛阳麦达斯铝业有限公司 | Pipe type heat exchanger and heat exchanging device |
-
2014
- 2014-06-04 JP JP2015522732A patent/JP5950042B2/en active Active
- 2014-06-04 WO PCT/JP2014/064844 patent/WO2014203733A1/en active Application Filing
- 2014-06-04 KR KR1020157033603A patent/KR101782824B1/en active IP Right Grant
- 2014-06-04 CN CN201480034939.8A patent/CN105324621B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR20160003781A (en) | 2016-01-11 |
| WO2014203733A1 (en) | 2014-12-24 |
| JPWO2014203733A1 (en) | 2017-02-23 |
| JP5950042B2 (en) | 2016-07-13 |
| KR101782824B1 (en) | 2017-09-28 |
| CN105324621A (en) | 2016-02-10 |
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