JPWO2014185159A1 - Substrate plating equipment - Google Patents

Substrate plating equipment Download PDF

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JPWO2014185159A1
JPWO2014185159A1 JP2015516981A JP2015516981A JPWO2014185159A1 JP WO2014185159 A1 JPWO2014185159 A1 JP WO2014185159A1 JP 2015516981 A JP2015516981 A JP 2015516981A JP 2015516981 A JP2015516981 A JP 2015516981A JP WO2014185159 A1 JPWO2014185159 A1 JP WO2014185159A1
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plating
paddle
substrate
plating apparatus
substrate holder
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吉岡　潤一郎
潤一郎 吉岡
村山　隆史
隆史 村山
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JCU Corp
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JCU Corp
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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/10—Agitating of electrolytes; Moving of racks
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

めっき槽外に循環ポンプを設けることなく、めっき液の流速を上げるとともに、めっき槽の底から液面まで流速を同一とすることができ、その結果、基板全域にわたってめっき膜厚が均一で析出速度も速いめっきが可能なめっき装置の提供を目的とし、めっき液を収容するめっき槽と、基板を着脱自在に保持する基板ホルダと、基板ホルダに保持された基板に対向して配置されたアノードと、基板ホルダと平行するようにめっき槽の上方に架け渡されたレール部と、該レール部に懸垂支持されレール部に沿って往復移動可能なパドルとを備えためっき装置であって、該パドルには軸部を中心に回転自在もしくは回動自在な羽根部が垂設されていることを特徴とするめっき装置。Without providing a circulation pump outside the plating tank, the flow rate of the plating solution can be increased and the flow rate can be made uniform from the bottom of the plating tank to the liquid surface. A plating tank for storing a plating solution, a substrate holder for detachably holding a substrate, and an anode disposed facing the substrate held by the substrate holder; A plating apparatus comprising: a rail portion suspended above the plating tank so as to be parallel to the substrate holder; and a paddle suspended and supported by the rail portion and capable of reciprocating along the rail portion. The plating apparatus is characterized in that a blade portion that is rotatable or rotatable about a shaft portion is vertically suspended.

Description

本発明は、めっき液中に基板を浸漬し基板表面にめっきを行うめっき装置に関するものである。   The present invention relates to a plating apparatus that immerses a substrate in a plating solution and performs plating on the surface of the substrate.

従来、基板を保持しためっき治具を鉛直に設置し、めっき槽の底面よりめっき液を流入させ上面よりオーバーフローさせる半導体基板用めっき装置において、めっき処理中にめっき液を基板の被めっき面の全域に均一に供給するように、めっき治具とアノードとの間に往復動可能なパドルを設けているものが知られている。   Conventionally, in a plating apparatus for semiconductor substrates in which a plating jig that holds a substrate is installed vertically and the plating solution is allowed to flow in from the bottom surface of the plating tank and overflow from the top surface, the plating solution is applied to the entire surface of the substrate to be plated during the plating process. It is known that a paddle capable of reciprocating movement is provided between the plating jig and the anode so as to be uniformly supplied to the anode.

かかるパドルによる攪拌の場合、基板をめっき治具で保持し、パドルを往復動させながらめっきするが、液流の方向とパドルの進行方向が逆になり、液流方向が交互になるため表面での流速が早くすることができないという課題があった。   In the case of stirring by such paddle, the substrate is held by a plating jig and plating is performed while reciprocating the paddle. However, the liquid flow direction and the paddle traveling direction are reversed, and the liquid flow direction is alternated. There was a problem that the flow velocity of the can not be increased.

そこで、特許文献１には、めっき液に渦流を発生させる渦発生器により、めっき槽の下部から供給されるめっき液に渦流を発生させるめっき装置が開示されている。   Therefore, Patent Document 1 discloses a plating apparatus that generates a vortex in the plating solution supplied from the lower part of the plating tank by a vortex generator that generates a vortex in the plating solution.

しかしながら、かかるめっき装置の場合、渦発生器にめっき液を送るための循環ポンプをめっき槽外に設ける必要があり、設置スペースが大きくなるのに加え、めっき槽の下部から渦発生器にめっき液が供給されるため、被めっき面の上下において流速が均一にすることが困難であった。   However, in the case of such a plating apparatus, it is necessary to provide a circulation pump for sending the plating solution to the vortex generator outside the plating tank. Therefore, it is difficult to make the flow velocity uniform above and below the surface to be plated.

特開２００４−３４５０６６JP 2004-345066 A

そこで本発明は、従来のめっき装置のかかる欠点を克服し、めっき槽外に循環ポンプを設けることなく、めっき液の流速を上げるとともに、めっき槽の底から液面まで流速を同一とすることができ、その結果、基板全域にわたってめっき膜厚が均一で析出速度も速いめっき処理が可能なめっき装置の提供をその課題とするものである。   Therefore, the present invention overcomes the disadvantages of the conventional plating apparatus, increases the flow rate of the plating solution without providing a circulation pump outside the plating vessel, and makes the flow rate the same from the bottom of the plating vessel to the liquid level. As a result, an object of the present invention is to provide a plating apparatus capable of performing a plating process in which the plating film thickness is uniform over the entire substrate and the deposition rate is high.

本発明は、上記課題を解決するものであり、めっき液を収容するめっき槽と、基板を着脱自在に保持する基板ホルダと、基板ホルダに保持された基板に対向して配置されたアノードと、基板ホルダと平行するようにめっき槽の上方に架け渡されたレール部と、該レール部に懸垂支持されレール部に沿って往復移動可能なパドルとを備えためっき装置であって、該パドルには軸部を中心に回転自在もしくは回動自在な羽根部が垂設されていることを特徴とするめっき装置である。   The present invention solves the above-mentioned problem, a plating tank for storing a plating solution, a substrate holder for detachably holding a substrate, an anode disposed to face the substrate held by the substrate holder, A plating apparatus comprising: a rail portion that extends over a plating tank so as to be parallel to the substrate holder; and a paddle that is suspended and supported by the rail portion and is capable of reciprocating along the rail portion. Is a plating apparatus characterized in that a blade portion that is rotatable or rotatable around a shaft portion is suspended.

本発明に係るめっき装置は、レール部に沿って往復移動可能なパドルに回転自在もしくは回動自在な羽根部を設けたことにより、基板に当たる流速や方向を調整でき、基板の全面にわたってムラなく平均的に流れが当たるため、めっき膜厚を均一にすることができる。   The plating apparatus according to the present invention can adjust the flow velocity and the direction of contact with the substrate by providing a rotatable or rotatable blade portion on the paddle that can reciprocate along the rail portion, and averages the entire surface of the substrate without unevenness. Therefore, the plating film thickness can be made uniform.

また、本発明に係るめっき装置で、パドルの羽根部が常に一定方向に回転するものは、基板の被めっき面付近の液流が一方向となり、少ない動力で液流を基板表面に高速で当てることができる。   Further, in the plating apparatus according to the present invention, in which the blade portion of the paddle always rotates in a certain direction, the liquid flow near the surface to be plated of the substrate becomes one direction, and the liquid flow is applied to the substrate surface at a high speed with a small amount of power. be able to.

また、本発明に係るめっき装置で、パドルの羽根部を所定の角度の範囲内において回動（揺動）するものは、液流が基板Ｗの被めっき面に垂直に当たるとともに、基板Ｗ全面にわたって流れがあたるため、均一にめっき処理を行うことができる。   In the plating apparatus according to the present invention, the blade of the paddle is rotated (oscillated) within a predetermined angle range so that the liquid flow is perpendicular to the surface to be plated of the substrate W and the entire surface of the substrate W is covered. Because of the flow, the plating process can be performed uniformly.

本発明に係るめっき装置の概略平面図Schematic plan view of a plating apparatus according to the present invention 本発明に係るめっき装置の概略断面図Schematic sectional view of a plating apparatus according to the present invention 本発明に係るめっき装置で異なる実施態様の概略平面図Schematic plan view of different embodiments in the plating apparatus according to the present invention 本発明に係るめっき装置で異なる実施態様の概略断面図Schematic sectional view of different embodiments in the plating apparatus according to the present invention （ａ）本発明に係るめっき装置のパドルの一実施態様を表す正面図、（ｂ）本発明に係るめっき装置のパドルの一実施態を表す断面図(A) Front view showing one embodiment of paddle of plating apparatus according to the present invention, (b) Cross-sectional view showing one embodiment of paddle of plating apparatus according to the present invention

以下、本発明のめっき装置の実施態様を、図面に基づいて具体的に説明する。なお、本発明はこれら実施態様に何ら制約されるものではない。   Hereinafter, embodiments of the plating apparatus of the present invention will be specifically described with reference to the drawings. Note that the present invention is not limited to these embodiments.

図１は本発明のめっき装置の概略平面図、図２は本発明のめっき装置の概略正面図である。図に示すように、本発明のめっき装置は、めっき液を収容するめっき槽１と、基板を着脱自在に保持する基板ホルダ２と、基板ホルダ２に保持された基板Ｗに対向して配置されたアノード３と、基板ホルダ２と平行するようにめっき槽１の上方に架け渡されたレール部５と、該レール部５に懸垂支持されレール部５に沿って往復移動可能なパドル４とを備える。以下、各部材について説明する。   FIG. 1 is a schematic plan view of the plating apparatus of the present invention, and FIG. 2 is a schematic front view of the plating apparatus of the present invention. As shown in the figure, the plating apparatus of the present invention is disposed to face a plating tank 1 for containing a plating solution, a substrate holder 2 for detachably holding a substrate, and a substrate W held by the substrate holder 2. An anode 3, a rail portion 5 that extends over the plating tank 1 so as to be parallel to the substrate holder 2, and a paddle 4 that is suspended and supported by the rail portion 5 and that can reciprocate along the rail portion 5. Prepare. Hereinafter, each member will be described.

図に示すように、レール部５は、めっき槽１上方であって基板ホルダ２とアノード３の間に、基板ホルダ２と平行するように架け渡されている。そして、このレール部５には、レール部５に沿って左右に往復移動するための駆動手段（図示せず）を備えたパドル４が懸垂支持されている。かかるパドル４は、羽根部４１の回転駆動手段であるモーター４３を備え、モーター４３に連動して回転自在に垂設された軸部４２を有している。   As shown in the drawing, the rail portion 5 is bridged above the plating tank 1 and between the substrate holder 2 and the anode 3 so as to be parallel to the substrate holder 2. A paddle 4 provided with driving means (not shown) for reciprocating left and right along the rail portion 5 is suspended and supported on the rail portion 5. The paddle 4 includes a motor 43 that is a rotation driving unit for the blade portion 41, and includes a shaft portion 42 that is rotatably suspended in conjunction with the motor 43.

パドル４の軸部４２には、それぞれ反対方向へ突出する２枚の羽根部４１が形成されており、モーター４３から軸部４２を介して伝えられた回転力により回転自在に設けられている。本実施態様において、羽根部４１は断面矩形状に形成されているが、これを羽根車の回転進行方向に凹面を有する弧状に形成しても良い。かかる凹面を設けることにより、羽根部４１が効率よくめっき液をつかまえて流速を向上させることができる。また、羽根部４１の枚数に関しては特に制限はないが、２枚が特に好ましい。さらに、羽根部４１の幅（図面上では上下方向の長さ）については、少なくとも、基板Ｗの被めっき面の高さをカバーできるだけの幅があることが望ましい。   Two shaft portions 41 projecting in opposite directions are formed on the shaft portion 42 of the paddle 4, and are rotatably provided by the rotational force transmitted from the motor 43 through the shaft portion 42. In the present embodiment, the blade portion 41 is formed in a rectangular cross section, but it may be formed in an arc shape having a concave surface in the rotational traveling direction of the impeller. By providing such a concave surface, the blade portion 41 can efficiently catch the plating solution and improve the flow velocity. Further, the number of blade portions 41 is not particularly limited, but two is particularly preferable. Furthermore, it is desirable that the width of the blade portion 41 (the length in the vertical direction in the drawing) be at least wide enough to cover the height of the surface to be plated of the substrate W.

本実施態様のパドル４は、レール部５に沿って左右に往復移動するが、このとき、羽根部４１は常時一方向に回転する。例えば、図１の態様では、羽根部４１はパドル４の往復移動中、常に時計回りに回転する。このように、パドル４の進行方向に関わらず、常に羽根部４１の回転方向を一定にすることにより、基板Ｗの被めっき面付近の液流が一方向となり、少ない動力で液流を基板表面に高速で当てることができる。   The paddle 4 of this embodiment reciprocates left and right along the rail portion 5, but at this time, the blade portion 41 always rotates in one direction. For example, in the aspect of FIG. 1, the blade portion 41 always rotates clockwise while the paddle 4 reciprocates. In this way, regardless of the traveling direction of the paddle 4, the rotation direction of the blade portion 41 is always constant, so that the liquid flow near the surface to be plated of the substrate W becomes one direction, and the liquid flow is reduced with less power. Can be applied at high speed.

図３および図４は、本発明のめっき装置の第二の実施態様を示す。かかる第二実施態様のものは、めっき槽１の上方に架け渡されたレール部５に懸垂支持されたパドル４が往復移動可能な点において、第一の実施態様のものと同様である。そして、第二実施態様では以下の点に特徴を有する。すなわち、本実施態様では、パドル４の羽根部４１は所定の角度の範囲内において、モーター４３により回動（揺動）自在に設けられている。具体的には、軸部４２から基板Ｗ方向へ突出して設けられた羽根部４１が、図の矢印のように、基板Ｗに対して直角の位置から左右へ回動する。このとき、羽根部４１の回動角度は特に制限はないが、最も少ない動力で効率よく液流を生じさせるために、３０度〜９０度（基板Ｗへの垂線に対して片側１５度〜４５度）の範囲に設定するのが好ましい。また、羽根部４１の枚数についても制限はないが、枚数が増えると余計な液流が生じるため、図のように１枚とすることが好ましい。   3 and 4 show a second embodiment of the plating apparatus of the present invention. The second embodiment is the same as that of the first embodiment in that the paddle 4 suspended and supported by the rail portion 5 spanned above the plating tank 1 can reciprocate. The second embodiment is characterized by the following points. That is, in the present embodiment, the blade portion 41 of the paddle 4 is provided so as to be rotatable (swingable) by the motor 43 within a predetermined angle range. Specifically, the blade portion 41 provided so as to protrude from the shaft portion 42 in the direction of the substrate W rotates from the position perpendicular to the substrate W to the left and right as indicated by the arrows in the figure. At this time, the rotation angle of the blade portion 41 is not particularly limited, but in order to efficiently generate a liquid flow with the least power, it is 30 to 90 degrees (15 to 45 degrees on one side with respect to the perpendicular to the substrate W). Is preferably set in the range of degrees. Further, the number of blades 41 is not limited, but an excessive liquid flow is generated when the number of blades is increased.

以上のとおり、第二実施態様では、羽根部４１は所定の角度の範囲内において回動しつつ、パドル４がレール部５に沿って左右に往復移動するため、液流が基板Ｗの被めっき面に垂直に当たるとともに、基板Ｗ全面にわたって流れがあたるため、均一にめっき処理を行うことができる。   As described above, in the second embodiment, since the paddle 4 reciprocates left and right along the rail portion 5 while the blade portion 41 rotates within a predetermined angle range, the liquid flow is to be plated on the substrate W. Since it strikes perpendicularly to the surface and flows over the entire surface of the substrate W, the plating process can be performed uniformly.

なお、第二実施態様のめっき装置において、羽根部４１を回動させずに、パドル４の進行方向に対して一定の角度に保持しながらパドル４を移動させてもよい。この方法によると、基板Ｗの被めっき面に効率的に液流を当てることができるので、少ない動力で均一にめっき処理を行うことができる。   In the plating apparatus of the second embodiment, the paddle 4 may be moved while being held at a constant angle with respect to the traveling direction of the paddle 4 without rotating the blade portion 41. According to this method, since the liquid flow can be efficiently applied to the surface to be plated of the substrate W, the plating process can be performed uniformly with less power.

さらに、第二実施態様のめっき装置において、羽根部４１を自由に回動するように保持するとともに、羽根部４１の回動角度を所定の範囲内に制限するストッパーをパドル４に設けてもよい。この態様によると、パドル４の進行方向に応じて羽根部４１に対する液の抵抗が変わるため、羽根部４１の向き及び角度が、パドル４の移動に合わせて変更、保持される。これにより、基板Ｗの被めっき面に効率的に液流を当てることができるので、少ない動力で均一にめっき処理を行うことができる。   Furthermore, in the plating apparatus of the second embodiment, the paddle 4 may be provided with a stopper that holds the blade portion 41 so as to freely rotate and restricts the rotation angle of the blade portion 41 within a predetermined range. . According to this aspect, since the resistance of the liquid with respect to the blade part 41 changes according to the traveling direction of the paddle 4, the direction and angle of the blade part 41 are changed and held in accordance with the movement of the paddle 4. Thereby, since a liquid flow can be efficiently applied to the to-be-plated surface of the board | substrate W, a metal-plating process can be performed uniformly with little power.

図５は、本発明のめっき装置のパドルの異なる実施態様を示す。本実施態様のパドルはいわゆるクロスフロー羽根車と呼ばれるタイプで、上下の円板状の支持部４４の間に、２枚の羽根部４１が回転軸部分を空けて対称に垂設している。かかる羽根部４１は、上部の支持部４４に連設された軸部４２を回転軸として回転自在に形成されている。さらに、本実施態様のパドル４には、アノード３側に対向する側面に沿って、半円形に湾曲するカバー４５が設けられている。このように、本発明のめっき装置のパドルをクロスフロー羽根車タイプとすることにより、基板Ｗ全面にわたって流れがあたるため、均一にめっき処理を行うことができる。   FIG. 5 shows different embodiments of the paddle of the plating apparatus of the present invention. The paddle of this embodiment is of a type called a so-called crossflow impeller, and two blade portions 41 are symmetrically suspended between upper and lower disk-shaped support portions 44 with a rotation shaft portion therebetween. The blade portion 41 is formed to be rotatable about a shaft portion 42 provided continuously to the upper support portion 44 as a rotation axis. Further, the paddle 4 of this embodiment is provided with a cover 45 that is curved in a semicircular shape along a side surface facing the anode 3 side. Thus, since the flow is applied over the entire surface of the substrate W by making the paddle of the plating apparatus of the present invention a cross flow impeller type, the plating process can be performed uniformly.

１ … … めっき槽
２ … … 基板ホルダ
３ … … アノード
４ … … パドル
５ … … レール部
４１ … … 羽根部
４２ … … 軸部
４３ … … モーター部
４４ … … 支持部
４５ … … カバー

DESCRIPTION OF SYMBOLS 1 ...… Plating tank 2…… Substrate holder 3…… Anode 4…… Paddle 5…… Rail portion 41…… Blade portion
42…… Shaft 43…… Motor
44…… Support 45…… Cover

Claims (5)

めっき液を収容するめっき槽と、基板を着脱自在に保持する基板ホルダと、基板ホルダに保持された基板に対向して配置されたアノードと、基板ホルダと平行するようにめっき槽の上方に架け渡されたレール部と、該レール部に懸垂支持されレール部に沿って往復移動可能なパドルとを備えためっき装置であって、該パドルには軸部を中心に回転自在もしくは回動自在な羽根部が垂設されていることを特徴とするめっき装置。   A plating tank for storing the plating solution, a substrate holder for detachably holding the substrate, an anode disposed opposite to the substrate held by the substrate holder, and an upper portion of the plating tank so as to be parallel to the substrate holder. A plating apparatus comprising a passed rail part and a paddle suspended and supported by the rail part and capable of reciprocating along the rail part, wherein the paddle is rotatable or rotatable around a shaft part A plating apparatus characterized in that a blade portion is vertically provided. 前記羽根部は、駆動手段により常に一方向に回転することを特徴とする請求項１に記載のめっき装置。   The plating apparatus according to claim 1, wherein the blade portion is always rotated in one direction by a driving unit. 前記羽根部は、駆動手段により所定の角度の範囲内において回動することを特徴とする請求項１に記載のめっき装置。   The plating apparatus according to claim 1, wherein the blade portion is rotated within a range of a predetermined angle by a driving unit. 前記パドルにおいて、上下の円板状の支持部の間に垂設された一組の羽根部が、上部の支持部に連設された軸部を回転軸として回転自在に形成されていることを特徴とする請求項１に記載のめっき装置。   In the paddle, a pair of blade portions suspended between the upper and lower disk-shaped support portions are formed so as to be rotatable about a shaft portion connected to the upper support portion as a rotation axis. The plating apparatus according to claim 1, wherein the plating apparatus is characterized. 前記パドルにおいて、側面に沿って半円形に湾曲するカバーが設けられていることを特徴とする請求項４に記載のめっき装置。



The plating apparatus according to claim 4, wherein the paddle is provided with a cover that is curved in a semicircular shape along a side surface.



JP2015516981A 2013-05-13 2014-03-27 Substrate plating equipment Pending JPWO2014185159A1 (en)

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