JPWO2011145387A1 - Si-SiC composite material and manufacturing method thereof, honeycomb structure, heat conductor, and heat exchanger - Google Patents

Si-SiC composite material and manufacturing method thereof, honeycomb structure, heat conductor, and heat exchanger Download PDF

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JPWO2011145387A1
JPWO2011145387A1 JP2012515783A JP2012515783A JPWO2011145387A1 JP WO2011145387 A1 JPWO2011145387 A1 JP WO2011145387A1 JP 2012515783 A JP2012515783 A JP 2012515783A JP 2012515783 A JP2012515783 A JP 2012515783A JP WO2011145387 A1 JPWO2011145387 A1 JP WO2011145387A1
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紫甫 小池
紫甫 小池
岳秀 下田
岳秀 下田
義政 小林
義政 小林
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NGK Insulators Ltd
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Abstract

Si−SiC系複合材料は、SiCを57質量%以上85質量%以下、Siを10.5質量%以上42.6質量%以下、Alを0.1質量%以上12.9質量%以下含み、重量比であるAl/Si比が1/99以上30/70以下の範囲である。また、Al2O3及びムライトのうち少なくともいずれか1つの相がSiC粒子間に存在する構造を有するものとしてもよい。このSi−SiC系複合材料は、SiCを含む被含浸体とSiを含む含浸金属供給体とを用い、該被含浸体及び該含浸金属供給体のうち少なくとも一方にAlを含み、常圧の不活性ガス雰囲気、1200℃以上1600℃以下の温度範囲で前記含浸金属供給体からのSiを含む溶融金属を前記被含浸体へ含浸処理する含浸工程を経て作製されている。The Si-SiC-based composite material includes SiC of 57% by mass to 85% by mass, Si of 10.5% by mass to 42.6% by mass, Al of 0.1% by mass to 12.9% by mass, The Al / Si ratio, which is the weight ratio, is in the range of 1/99 or more and 30/70 or less. Moreover, it is good also as what has a structure in which at least any one phase among Al2O3 and mullite exists between SiC particles. This Si-SiC-based composite material uses an impregnated body containing SiC and an impregnated metal supply body containing Si, Al is contained in at least one of the impregnated body and the impregnated metal supply body, and normal pressure is not applied. It is produced through an impregnation step of impregnating the object to be impregnated with molten metal containing Si from the impregnated metal supply body in an active gas atmosphere at a temperature range of 1200 ° C. to 1600 ° C.

Description

本発明は、Si−SiC系複合材料及びその製造方法、ハニカム構造体、熱伝導体ならびに熱交換器に関する。   The present invention relates to a Si-SiC composite material and a method for producing the same, a honeycomb structure, a heat conductor, and a heat exchanger.

Si−SiC系複合材料は、高い熱伝導率、高温で高い強度、優れた耐酸化性、軽量な材料として知られている。このSi−SiC系複合材料の製造方法としては、大別して下記の3つの方法が開示されている。例えば、SiC粉末を再結晶焼結させたSiC多孔質焼結体に溶融Siを含浸させる方法(特許文献1)、SiCと炭素分を焼結させた多孔質焼結体に溶融Siを含浸させる方法(特許文献2)、SiCと炭素分からなる成形体に溶融Siを反応含浸させてSiと炭素を反応させてSiCとし、全体としてSiC材料に炭素分と反応しなかったSiを含浸させる方法(特許文献3)などが挙げられる。また、SiC焼成体にSiとAlからなる溶融金属を含浸させた材料も開示されている(特許文献4,5)。SiCにSiのみを含浸した場合、溶融Siが凝固する際に体積膨張するため、焼結体表面からSiが噴出する場合があるが、Alを添加することによりAlは凝固する際に体積収縮するため、溶融金属が噴出することが抑制される。   Si-SiC based composite materials are known as high thermal conductivity, high strength at high temperatures, excellent oxidation resistance, and lightweight materials. As a method for producing this Si-SiC composite material, the following three methods are roughly classified. For example, a SiC porous sintered body obtained by recrystallizing and sintering SiC powder is impregnated with molten Si (Patent Document 1), and a porous sintered body obtained by sintering SiC and carbon is impregnated with molten Si. Method (Patent Document 2), a method of impregnating a molded body composed of SiC and carbon with molten Si and reacting Si with carbon to form SiC, and impregnating SiC as a whole with Si that has not reacted with carbon ( Patent document 3) etc. are mentioned. Moreover, the material which impregnated the molten metal which consists of Si and Al to the SiC sintered body is also disclosed (patent documents 4 and 5). When SiC is impregnated with only Si, volume expansion occurs when molten Si solidifies. Therefore, Si may be ejected from the surface of the sintered body, but when Al is added, Al shrinks in volume when solidified. Therefore, the molten metal is suppressed from being ejected.

特許公報昭54−10825号公報Japanese Patent Publication No. 54-10825 特開2000−103677号公報Japanese Patent Laid-Open No. 2000-103677 特開昭56−129684号公報JP-A-56-129684 特表2003−505329号公報Special table 2003-505329 gazette 特開2005−154832号公報JP 2005-154832 A

上記のように、焼成体に含浸、または2000℃以上の高温または真空で成形体に含浸の様に工数やエネルギー消費量が多い方法をとる理由としては、含浸前後で形状の変化が無く後加工が不要である利点やSiC粉末表面のSiO2層を除去する狙いがある。SiC粉末の表面にはSiO2層が形成されているが、溶融SiはSiO2層と濡れ性が悪く、含浸を阻害するため、SiC焼結体または成形体のSiO2層を除去する工程が必要となる。そのため、上記特許文献1および2に記載の方法では、成形体を焼結すると同時にSiO2層を除去している。また、上記特許文献3に記載の方法では高温または真空で含浸することにより、SiO2層を除去している。上記特許文献1および2に記載の方法では、焼結体に含浸しているため工数が多く、コストが高くなる問題があった。また、上記特許文献3に記載の方法では成形体に含浸しているが、2000℃以上の高温または真空で含浸しているため、工程が煩雑であり、高価な製造装置が必要で、エネルギー消費量が多く、コストが高くなる問題があった。また、特許文献4では、Siに対してAlを40〜60%添加しているため、高温での強度が著しく低下すると考えられる。また、特許文献5では、Alの添加量が少ないものの含浸体には気孔が残存し、その気孔を埋めるために、含浸体にアルキルシリケートを含浸させ乾燥させることで、SiO2を含浸体中に残存させ、気孔を封止しなければならないことがある。このように、高い熱伝導率、高い高温強度、優れた耐酸化性を有するSi−SiC系複合材料をより簡便な方法で、低コストに製造する方法がなかった。As described above, the reason for taking a method with high man-hours and energy consumption, such as impregnation into a fired body, or impregnation into a molded body at a high temperature of 2000 ° C. or higher, or vacuum, is that there is no change in shape before and after the impregnation. There is an advantage that is unnecessary, and there is an aim to remove the SiO 2 layer on the surface of the SiC powder. Although the SiO 2 layer is formed on the surface of the SiC powder, molten Si has poor wettability with the SiO 2 layer and impedes impregnation, so the process of removing the SiO 2 layer of the SiC sintered body or molded body Necessary. Therefore, in the methods described in Patent Documents 1 and 2, the SiO 2 layer is removed at the same time as the compact is sintered. In the method described in Patent Document 3, the SiO 2 layer is removed by impregnation at high temperature or in vacuum. In the methods described in Patent Documents 1 and 2, since the sintered body is impregnated, there are problems in that the number of steps is large and the cost is increased. Further, in the method described in Patent Document 3, the molded body is impregnated, but since the impregnation is performed at a high temperature of 2000 ° C. or higher or vacuum, the process is complicated, an expensive manufacturing apparatus is required, and energy consumption is reduced. There was a problem that the amount was large and the cost was high. Moreover, in patent document 4, since Al is added 40 to 60% with respect to Si, it is thought that the intensity | strength in high temperature falls remarkably. Further, in Patent Document 5, although the amount of Al added is small, pores remain in the impregnated body, and in order to fill the pores, the impregnated body is impregnated with alkyl silicate and dried, so that SiO 2 is contained in the impregnated body. It may be necessary to leave and seal the pores. Thus, there has been no method for producing a Si-SiC composite material having high thermal conductivity, high high-temperature strength, and excellent oxidation resistance by a simpler method and at a lower cost.

本発明は、このような課題に鑑みなされたものであり、より高温強度を高めると共に、より簡便な方法で作製することができるSi−SiC系複合材料及びその製造方法を提供することを主目的とする。   The present invention has been made in view of such problems, and it is a main object of the present invention to provide a Si-SiC-based composite material that can be produced by a simpler method and a high-temperature strength, and a method for producing the same. And

上述した主目的を達成するために鋭意研究したところ、本発明者らは、SiC及びSiに所定の関係となるようにAlを添加すると、常圧でSiをSiCに含浸させることが可能であり、より高温強度を高めると共に、より簡便な方法でSi−SiC系複合材料を作製することができることを見いだし、本発明を完成するに至った。   As a result of diligent research to achieve the main object described above, the present inventors are able to impregnate SiC with SiC at normal pressure when Al is added so as to have a predetermined relationship with SiC and Si. The inventors have found that the Si-SiC composite material can be produced by a simpler method while increasing the high-temperature strength, and the present invention has been completed.

SiCを含む被含浸体へSi及びAlを含む溶融金属を常圧、1200℃以上1600℃以下の低温範囲で含浸することにより、高い熱伝導率、高い高温強度、優れた耐酸化性を有するSi−SiC系複合材料を、簡便且つ低コストに製造する方法を発明した。また、SiC及びAlを含む被含浸体へ溶融Siを常圧、1200℃以上1600℃以下の低温範囲で含浸することにより、高い熱伝導率、高い高温強度、優れた耐酸化性を有するSi−SiC系複合材料を、簡便且つ低コストに製造する方法を発明した。また、SiC及びAlを含む被含浸体へSi及びAlを含む溶融金属を常圧、1200℃以上1600℃以下の低温範囲で含浸することにより、高い熱伝導率、高い高温強度、優れた耐酸化性を有するSi−SiC系複合材料を、簡便且つ低コストに製造する方法を発明した。   Si having high thermal conductivity, high high-temperature strength, and excellent oxidation resistance is obtained by impregnating an impregnated body containing SiC with molten metal containing Si and Al in a low temperature range of atmospheric pressure to 1200 ° C to 1600 ° C. Invented a method for producing a SiC-based composite material easily and at low cost. In addition, by impregnating melted Si into an object to be impregnated containing SiC and Al in a low temperature range of normal pressure and 1200 ° C. or higher and 1600 ° C. or lower, Si− having high thermal conductivity, high high temperature strength, and excellent oxidation resistance. We have invented a method for producing a SiC-based composite material simply and at low cost. In addition, by impregnating an impregnated body containing SiC and Al with molten metal containing Si and Al at a normal pressure and a low temperature range of 1200 ° C. to 1600 ° C., high thermal conductivity, high high temperature strength, and excellent oxidation resistance. Has invented a method for producing a Si-SiC composite material having high performance at a low cost.

即ち、本発明のSi−SiC系複合材料は、SiCを57質量%以上85質量%以下、Siを10.5質量%以上42.6質量%以下、Alを0.1質量%以上12.9質量%以下含み、重量比であるAl/Si比が1/99以上30/70以下であることを特徴とする。   That is, in the Si—SiC based composite material of the present invention, SiC is 57% by mass to 85% by mass, Si is 10.5% by mass to 42.6% by mass, and Al is 0.1% by mass to 12.9%. The Al / Si ratio as a weight ratio is 1/99 or more and 30/70 or less.

あるいは、本発明のSi−SiC系複合材料は、SiCとSiとを含み、Al23及びムライトのうち少なくともいずれか1つの相が前記SiC粒子間に存在する構造を有することを特徴とする。Alternatively, the Si—SiC based composite material of the present invention includes SiC and Si, and has a structure in which at least one phase of Al 2 O 3 and mullite exists between the SiC particles. .

本発明のSi−SiC系複合材料の製造方法は、SiCを含む被含浸体とSiを含む含浸金属供給体とを用い、該被含浸体及び該含浸金属供給体のうち少なくとも一方にAlを含み、常圧の不活性ガス雰囲気、1200℃以上1600℃以下の温度範囲で前記含浸金属供給体からのSiを含む溶融金属を前記被含浸体へ含浸処理する含浸工程を含むことを特徴とする。   The method for producing a Si-SiC based composite material of the present invention uses an impregnated body containing SiC and an impregnated metal supply body containing Si, and Al is contained in at least one of the impregnated body and the impregnated metal supply body. An impregnation step of impregnating the object to be impregnated with molten metal containing Si from the impregnated metal supply body in a normal pressure inert gas atmosphere at a temperature range of 1200 ° C. to 1600 ° C.

添加金属としてAlを用い、SiCを含む被含浸体へSiを含む溶融金属を常圧、1200℃以上1600℃以下の低温範囲で含浸することにより、高い熱伝導率、高い高温強度、優れた耐酸化性を有するSi−SiC系複合材料をより簡便な方法で作製することができ、低コストに製造することが可能となった。   By using Al as the additive metal and impregnating the SiC-containing impregnated material with Si containing molten metal at normal pressure and in a low temperature range of 1200 ° C. to 1600 ° C., high thermal conductivity, high high temperature strength, and excellent acid resistance Si-SiC based composite material having a chemical property can be produced by a simpler method, and can be produced at low cost.

この理由としては、例えば以下のことが推察される。例えば、溶融SiにAlを添加することにより、SiC粒子表面のSiO2層との濡れ性が向上し、常圧かつ低温での含浸が可能となったと推察される。また、Al添加量を小さくすることにより、高温での強度低下を抑制できると推察される。また、AlとSiO2を反応させ(3SiO2+6Al→3Si+2Al23)、SiC粒子間にAl23またはムライトとして存在させることにより、高温におけるSiC粒子間のすべりを抑制し、強度低下を抑制可能と推察される。また、大気雰囲気で熱処理して、表面に酸化皮膜を生成することにより、AlはAl23となり、更に強度低下を抑制可能であると推察される。As this reason, the following is guessed, for example. For example, it is presumed that by adding Al to molten Si, wettability with the SiO 2 layer on the surface of the SiC particles is improved, and impregnation at normal pressure and low temperature is possible. Moreover, it is guessed that the strength fall at high temperature can be suppressed by making Al addition amount small. In addition, by reacting Al and SiO 2 (3SiO 2 + 6Al → 3Si + 2Al 2 O 3 ) and existing between SiC particles as Al 2 O 3 or mullite, slip between SiC particles at high temperature is suppressed, and strength is reduced. It is assumed that it can be suppressed. In addition, when heat treatment is performed in an air atmosphere to form an oxide film on the surface, Al becomes Al 2 O 3 and it is presumed that further reduction in strength can be suppressed.

本発明のSi−SiC系複合材料において、また、酸素(SiO2、Al23、ムライトのいずれかとして存在)を0.01〜2質量%含有するものとしてもよい。また、Feを0.01〜1質量%含むものとしてもよい。また、本発明のSi−SiC系複合材料において、SiC粒子間にAl23及びムライトのいずれかが存在しているものとしてもよい。Al23及びムライトのいずれかの存在する部分(Al凝集部とも称する)は、例えば、SiCの表面近傍に存在するものとしてもよい。In the Si—SiC based composite material of the present invention, oxygen (present as any of SiO 2 , Al 2 O 3 , and mullite) may be contained in an amount of 0.01 to 2% by mass. Moreover, it is good also as what contains 0.01-1 mass% of Fe. In the Si—SiC composite material of the present invention, either Al 2 O 3 or mullite may exist between SiC particles. The portion where either Al 2 O 3 or mullite exists (also referred to as Al agglomerated portion) may be present in the vicinity of the surface of SiC, for example.

本発明の含浸工程の一例を示すフローチャート。The flowchart which shows an example of the impregnation process of this invention. 含浸処理の検討結果。Examination results of impregnation treatment. 添加する各種の金属の種類と含浸後の外観の説明図。Explanatory drawing of the external appearance after impregnation of the kind of various metals to add. 被含浸体に添加材を入れた場合の含浸処理前後の試料の外観の説明図。Explanatory drawing of the external appearance of the sample before and behind the impregnation process at the time of putting an additive in a to-be-impregnated body. Alを含有させた場合の測定結果。Measurement results when Al is contained. Si及びAlを含む含浸金属供給体の含浸処理での微構造観察結果。The microstructure observation result in the impregnation process of the impregnation metal supply body containing Si and Al. Si及びAlを含む含浸金属供給体での元素分布測定結果。The element distribution measurement result in the impregnation metal supply body containing Si and Al. 含浸後の被含浸用成形体の高温強度及びAl添加量の検討結果Examination results of high temperature strength and Al addition amount of molded article for impregnation after impregnation

本発明のSi−SiC系複合材料は、SiCを57質量%以上85質量%以下、Siを10.5質量%以上42.6質量%以下、Alを0.1質量%以上12.9質量%以下含むものである。SiCが57質量%以上85質量%以下の範囲では、熱伝導率をより高めると共に、熱膨張率をより低減することができる。また、Siが10.5質量%以上42.6質量%以下の範囲では、より強度を高めると共に、熱伝導率の低下をより抑制することができる。また、Alが0.1質量%以上12.9質量%以下の範囲では、SiCに対するSiの濡れ性がより向上し、十分にSiがSiCへ含浸され、且つ高温での強度低下をより抑制することができる。Si−SiC系複合材料において、熱伝導率はSiC量により影響を受け、機械的強度はSi量により影響を受け、含浸処理の容易さはAl量により影響を受けるものと推察される。このため、所望の特性を得るよう、上記範囲内において、SiC量、Si量及びAl量を適宜選択することができる。   In the Si—SiC based composite material of the present invention, SiC is 57% by mass to 85% by mass, Si is 10.5% by mass to 42.6% by mass, and Al is 0.1% by mass to 12.9% by mass. Includes the following. When SiC is in the range of 57% by mass to 85% by mass, the thermal conductivity can be further increased and the thermal expansion coefficient can be further reduced. Further, when Si is in the range of 10.5% by mass or more and 42.6% by mass or less, the strength can be further increased and the decrease in thermal conductivity can be further suppressed. Moreover, when Al is in the range of 0.1% by mass or more and 12.9% by mass or less, the wettability of Si to SiC is further improved, Si is sufficiently impregnated into SiC, and the strength reduction at high temperature is further suppressed. be able to. In the Si-SiC composite material, it is presumed that the thermal conductivity is affected by the SiC amount, the mechanical strength is affected by the Si amount, and the ease of the impregnation treatment is affected by the Al amount. For this reason, the SiC amount, the Si amount, and the Al amount can be appropriately selected within the above range so as to obtain desired characteristics.

このSi−SiC系複合材料は、重量比であるAl/Si比が1/99以上30/70以下である。Al/Si比が1/99以上では、SiCに対するSiの濡れ性がより向上するため、十分にSiがSiCへ含浸される。また、Al/Si比が30/70以下では、高温での強度低下をより抑制することができる。このAl/Si比は、5/95以上20/80以下であることがより好ましく、10/90以上15/85以下であることが更に好ましい。   This Si-SiC composite material has an Al / Si ratio, which is a weight ratio, of 1/99 or more and 30/70 or less. When the Al / Si ratio is 1/99 or more, the wettability of Si to SiC is further improved, so that the SiC is sufficiently impregnated with SiC. Moreover, when the Al / Si ratio is 30/70 or less, the strength reduction at high temperature can be further suppressed. The Al / Si ratio is more preferably 5/95 or more and 20/80 or less, and further preferably 10/90 or more and 15/85 or less.

このSi−SiC系複合材料は、酸素を0.01質量%以上2.0質量%以下の範囲で含有するものとしてもよい。この酸素は、SiO2、Al23、ムライトのいずれかとして存在するものとしてもよい。酸素がSiCに存在すると、Siの濡れ性が低下し、含浸処理を行いにくくなるが、ここでは、Alを添加することにより、SiCからの酸素除去処理などを必要とすることなく、含浸処理を行うことができる。また、Feを0.01質量%以上1.0質量%以下の範囲で含むものとしてもよい。こうしても、より高温強度を高めると共に、より簡便な方法でSi−SiC系複合材料を作製することができる。This Si-SiC composite material may contain oxygen in the range of 0.01% by mass to 2.0% by mass. This oxygen may be present as any of SiO 2 , Al 2 O 3 , and mullite. If oxygen is present in SiC, the wettability of Si is reduced, and it is difficult to perform the impregnation treatment, but here, by adding Al, the impregnation treatment is performed without requiring an oxygen removal treatment from SiC. It can be carried out. Moreover, it is good also as Fe containing 0.01 mass% or more and 1.0 mass% or less. Even if it does in this way, while raising high temperature strength, a Si-SiC type composite material can be produced by a simpler method.

また、本発明のSi−SiC系複合材料において、Al23及びムライトのうち少なくともいずれか1つの相が存在するものとしてもよい。このとき、SiC粒子間にAl23及びムライトのいずれかが存在しているものとしてもよい。Al23及びムライトのいずれかの存在する部分(Al凝集部とも称する)は、例えば、SiCの表面近傍としてもよい。また、Si−SiC系複合材料において、SiとAlの存在場所は、異なるものとしてもよい。また、AlはSiC粒子の周りに存在するものとしてもよい。また、Si−SiC系複合材料に含まれる酸素は、Al近傍に存在するものとしてもよい。例えば、Siを含浸する際にAlを添加すると、AlがSiCに含まれるSiO2などの酸化物を還元し、Al酸化物になることにより、SiCに対するSiの濡れ性を向上することができるものと推察される。In the Si—SiC composite material of the present invention, at least one phase of Al 2 O 3 and mullite may be present. At this time, either Al 2 O 3 or mullite may be present between the SiC particles. A portion where one of Al 2 O 3 and mullite exists (also referred to as Al agglomerated portion) may be, for example, near the surface of SiC. In the Si—SiC composite material, the locations of Si and Al may be different. Al may be present around the SiC particles. Further, oxygen contained in the Si—SiC composite material may be present in the vicinity of Al. For example, when Al is added when impregnating Si, Al reduces oxides such as SiO 2 contained in SiC and becomes Al oxide, thereby improving the wettability of Si to SiC It is guessed.

Si−SiC系複合材料の微構造としては、開気孔率が0体積%以上5体積%以下であることが好ましい。例えば、Siの含浸処理によると、SiCの気孔にSiが含浸されるため、開気孔率をより低減することができる。Si−SiC系複合材料では、気孔は、全体的に分散して存在しているものとしてもよい。また、SiCの平均粒径が2μm以上100μm以下であることが好ましい。なお、原料粉体における平均粒径は、レーザ回折/散乱式粒度分布測定装置を用いて測定したものをいい、成形体における平均粒径は、走査型電子顕微鏡(SEM)による観察結果を用いて測定した値をいう。   As the microstructure of the Si-SiC composite material, the open porosity is preferably 0% by volume or more and 5% by volume or less. For example, according to the Si impregnation treatment, the pores of SiC are impregnated with Si, so that the open porosity can be further reduced. In the Si—SiC based composite material, the pores may be present dispersed throughout. Moreover, it is preferable that the average particle diameter of SiC is 2 micrometers or more and 100 micrometers or less. In addition, the average particle diameter in raw material powder says what was measured using the laser diffraction / scattering type particle size distribution measuring apparatus, and the average particle diameter in a molded object uses the observation result by a scanning electron microscope (SEM). The measured value.

Si−SiC系複合材料は、熱伝導率150W/mK以上であることが好ましく、170W/mK以上であることがより好ましく、180W/mK以上であることが更に好ましい。Si−SiC系複合材料の製造工程を簡便なものにしようとすると、添加材を添加し、焼成温度を低減するなど行うが、これにより熱伝導率が低下することがある。このような場合でも、熱伝導率150W/mK以上であると、ハニカム構造体、放熱基板、熱伝導体及び熱交換器などとしての特性として好ましい。   The Si-SiC composite material preferably has a thermal conductivity of 150 W / mK or more, more preferably 170 W / mK or more, and still more preferably 180 W / mK or more. In order to simplify the manufacturing process of the Si—SiC composite material, an additive is added and the firing temperature is reduced. However, this may reduce the thermal conductivity. Even in such a case, a thermal conductivity of 150 W / mK or more is preferable as characteristics as a honeycomb structure, a heat dissipation substrate, a thermal conductor, a heat exchanger, and the like.

Si−SiC系複合材料は、室温(例えば20℃)での強度が150MPa以上であることが好ましく、180MPa以上であることがより好ましく、200MPa以上であることが更に好ましい。また、室温での強度は、250MPa以下であるものとしてもよい。更に、800℃での強度が50MPa以上であることが好ましく、70MPa以上であることがより好ましく、90MPa以上であることが更に好ましい。Si−SiC系複合材料の製造工程を簡便なものにしようとし、添加材を添加することがあるが、これにより機械的強度が低下することがある。このような場合でも、800℃での強度が50MPa以上であると、ハニカム構造体、放熱基板、熱伝導体及び熱交換器などとしての特性として好ましい。また、800℃での強度は、250MPa以下としてもよい。なお、「強度」は、曲げ強度をいうものとしてもよい。   The Si—SiC composite material preferably has a strength at room temperature (for example, 20 ° C.) of 150 MPa or more, more preferably 180 MPa or more, and further preferably 200 MPa or more. The strength at room temperature may be 250 MPa or less. Furthermore, the strength at 800 ° C. is preferably 50 MPa or more, more preferably 70 MPa or more, and further preferably 90 MPa or more. An attempt is made to simplify the production process of the Si—SiC composite material, and additives may be added, but this may reduce the mechanical strength. Even in such a case, when the strength at 800 ° C. is 50 MPa or more, it is preferable as characteristics as a honeycomb structure, a heat dissipation board, a heat conductor, a heat exchanger, and the like. The strength at 800 ° C. may be 250 MPa or less. “Strength” may refer to bending strength.

Si−SiC系複合材料は、含浸後の成形体の表面を酸化皮膜で覆うものとしてもよい。この酸化被膜は、Si金属を含浸したあとに、500℃以上1400℃以下の温度範囲で、大気雰囲気で酸化処理することにより形成するものとしてもよい。このSi−SiC系複合材料は、含浸工程のあとに行われる、500℃以上1400℃以下での酸化工程後に、酸化増量が0.4質量%以上1.0質量%以下の範囲であることが好ましい。また、金属アルミニウムの凝集粒の大きさが100μm以下であることが好ましい。   The Si-SiC composite material may cover the surface of the impregnated molded body with an oxide film. This oxide film may be formed by impregnating Si metal and then oxidizing it in an air atmosphere in a temperature range of 500 ° C. or higher and 1400 ° C. or lower. The Si-SiC composite material may have an oxidation increase in the range of 0.4% by mass or more and 1.0% by mass or less after the oxidation step at 500 ° C. or higher and 1400 ° C. or lower, which is performed after the impregnation step. preferable. Moreover, it is preferable that the size of the aggregated particles of metal aluminum is 100 μm or less.

本発明のSi−SiC系複合材料は、SiCを含む被含浸体(SiC成形体とも称する)とSiを含む含浸金属供給体とを用い、被含浸体及び含浸金属供給体のうち少なくとも一方にAlを含み、常圧の不活性ガス雰囲気、1200℃以上1600℃以下の温度範囲で、含浸金属供給体からのSiを含む溶融金属を被含浸体へ含浸処理する含浸工程によって作製されているものとしてもよい。   The Si—SiC-based composite material of the present invention uses an impregnated body containing SiC (also referred to as an SiC molded body) and an impregnated metal supply body containing Si, and at least one of the impregnated body and the impregnated metal supply body is made of Al. In a normal pressure inert gas atmosphere, and in a temperature range of 1200 ° C. or more and 1600 ° C. or less, the impregnated body is impregnated with a molten metal containing Si from the impregnated metal supply body. Also good.

本発明のSi−SiC系複合材料の製造方法は、被含浸体とSiを含む含浸金属供給体とを用い、この被含浸体及びこの含浸金属供給体のうち少なくとも一方にAlを含み、常圧の不活性ガス雰囲気、1200℃以上1600℃以下の温度範囲で、含浸金属供給体からのSiを含む溶融金属を被含浸体へ含浸処理する含浸工程、を含むものである。この含浸工程は、被含浸体にSi及びAlを含む含浸金属供給体からの溶融金属を含浸処理してもよい。あるいは、SiC及びAlを含む被含浸体に含浸金属供給体からの溶融Siを含浸処理してもよい。また、SiC及びAlを含む被含浸体にSi及びAlを含む含浸金属供給体からの溶融金属を含浸処理してもよい。これにより、高い熱伝導率、高い高温強度、優れた耐酸化性を有するSi−SiC系複合材料を、簡便且つ低コストに製造することができる。   The method for producing an Si-SiC composite material of the present invention uses an impregnated body and an impregnated metal supply body containing Si, and at least one of the impregnated body and the impregnated metal supply body contains Al, and is at atmospheric pressure. An impregnation step of impregnating the material to be impregnated with molten metal containing Si from the impregnated metal supply member in a temperature range of 1200 ° C. to 1600 ° C. In this impregnation step, the object to be impregnated may be impregnated with a molten metal from an impregnated metal supplier containing Si and Al. Alternatively, an impregnated body containing SiC and Al may be impregnated with molten Si from an impregnated metal supply body. Further, the impregnated body containing SiC and Al may be impregnated with a molten metal from an impregnated metal supply body containing Si and Al. Thereby, the Si-SiC type composite material having high thermal conductivity, high high-temperature strength, and excellent oxidation resistance can be manufactured easily and at low cost.

この含浸工程は、被含浸体にSi及びAlからなる溶融金属を常圧で、1200℃以上1600℃以下の低温の温度範囲で含浸を行うことが好ましい。また、被含浸体にAlを添加してもよいし、Alを添加した被含浸体にSi及びAlを含む含浸金属供給体からの溶融金属を含浸させてもよい。また、このSiCを含む被含浸体は、未焼結体であることが好ましい。この含浸工程では、常圧で行うことが可能であり、且つ、処理温度範囲は、1200℃以上1600℃以下であり、1300℃以上1500℃以下で行うことがより好ましい。また、不活性ガス雰囲気としては、例えば、HeやArなど希ガス雰囲気としてもよいし、窒素ガス雰囲気中としてもよい。このうち、Arガス雰囲気がより好ましい。   In this impregnation step, it is preferable to impregnate the object to be impregnated with a molten metal composed of Si and Al at a normal temperature and in a low temperature range of 1200 ° C. to 1600 ° C. Further, Al may be added to the object to be impregnated, or the object to be impregnated with Al may be impregnated with molten metal from an impregnated metal supply body containing Si and Al. Moreover, it is preferable that the to-be-impregnated body containing SiC is an unsintered body. This impregnation step can be performed at normal pressure, and the treatment temperature range is 1200 ° C. or higher and 1600 ° C. or lower, and more preferably 1300 ° C. or higher and 1500 ° C. or lower. Further, as the inert gas atmosphere, for example, a rare gas atmosphere such as He or Ar may be used, or a nitrogen gas atmosphere may be used. Of these, an Ar gas atmosphere is more preferable.

含浸工程では、含浸後のSi−SiC系複合材料が、SiCを57質量%以上85質量%以下、Siを10.5質量%以上42.6質量%以下、Alを0.1質量%以上12.9質量%以下含み、重量比であるAl/Si比が1/99以上30/70以下となるよう、被含浸体と含浸金属供給体とを調製するものとしてもよい。こうすれば、高い熱伝導率、高い高温強度、優れた耐酸化性を有するSi−SiC系複合材料を、簡便且つ低コストに製造することができる。原料としては、Si酸化物を除去する工程を経たSiCを用いるものとしてもよいが、Si酸化物を除去しないSiCを用いることができる。これは、添加したAlによるSi酸化物の還元効果によるものと推測される。   In the impregnation step, the Si-SiC based composite material after the impregnation is composed of 57 mass% to 85 mass% of SiC, 10.5 mass% to 42.6 mass% of Si, and 0.1 mass% to 12 of Al. It is good also as what prepares a to-be-impregnated body and an impregnated metal supply body so that it may contain 0.9 mass% or less, and Al / Si ratio which is weight ratio will be 1/99 or more and 30/70 or less. If it carries out like this, the Si-SiC type composite material which has high heat conductivity, high high temperature intensity | strength, and outstanding oxidation resistance can be manufactured simply and at low cost. As a raw material, SiC that has undergone a process of removing Si oxide may be used, but SiC that does not remove Si oxide can be used. This is presumably due to the reduction effect of the Si oxide by the added Al.

含浸工程では、被含浸体と含浸金属供給体とを閉塞空間である鞘内部に載置して含浸処理するのが好ましい。こうすれば、含浸処理の加熱時にAlが揮発した場合などにおいても、鞘内部のAl濃度の低下を抑制可能であり、含浸ムラの発生をより抑制することができる。特に、本発明の含浸工程では、Alの添加量が少ないことが好ましいことから、閉塞空間である鞘に被含浸体と含浸金属供給体とを載置して含浸処理する意義が高い。この鞘としては、密閉できるものほど好ましく、例えば、アルミナ、窒化結合のSiC、SiCコートしたカーボンなどの材質とするのが好ましい。   In the impregnation step, it is preferable that the impregnated body and the impregnated metal supply body are placed in a sheath which is a closed space and impregnated. By so doing, even when Al is volatilized during the heating of the impregnation treatment, a decrease in the Al concentration inside the sheath can be suppressed, and the occurrence of impregnation unevenness can be further suppressed. In particular, in the impregnation step of the present invention, since it is preferable that the amount of Al added is small, it is highly significant to place the impregnated body and the impregnated metal supply body on the sheath which is a closed space and perform the impregnation treatment. As the sheath, a material that can be hermetically sealed is preferable. For example, a material such as alumina, nitride-bonded SiC, or SiC-coated carbon is preferable.

含浸工程では、被含浸体よりも溶融金属との濡れ性が悪い敷部材の上にこの被含浸体を載置して含浸処理することがより好ましい。含浸処理では、被含浸体の上に含浸金属供給体を載置して加熱処理を行い、含浸金属供給体を溶融して被含浸体に含浸させるが、溶融金属が被含浸体との濡れ性よりも敷部材との濡れ性がよいと溶融金属が敷部材に吸収され、すべて流れ落ちてしまうことがある。このため、濡れ性が悪い敷部材を用いることで、溶融金属は敷部材にはじかれるため、溶融金属が流れ落ちず被含浸体内に留まり、ムラなく含浸することができる。また、敷部材に被含浸体が固着してしまうことを防止することができる。敷部材は、板状体であってもよいし、敷粉としてもよい。この敷部材は、主としてSiやAlに対して濡れ性の悪いものであればよく、例えば、BNコートしたカーボンや、酸化Al、酸化Zrなどが挙げられる。   In the impregnation step, it is more preferable that the impregnated body is placed on a floor member having poorer wettability with the molten metal than the impregnated body and impregnated. In the impregnation treatment, the impregnated metal supply body is placed on the object to be impregnated and subjected to heat treatment, and the impregnated metal supply body is melted and impregnated into the impregnated object. If the wettability with the laying member is better than that, the molten metal may be absorbed by the laying member, and all may flow down. For this reason, since the molten metal is repelled by the floor member by using the floor member having poor wettability, the molten metal does not flow down but remains in the impregnated body and can be impregnated without unevenness. In addition, it is possible to prevent the impregnated body from adhering to the floor member. The laying member may be a plate-like body or a laying powder. This laying member is only required to have mainly poor wettability to Si and Al, and examples thereof include BN-coated carbon, Al oxide, and Zr oxide.

この含浸工程は、焼成後の被含浸体を用いるものとしてもよいが、未焼成の被含浸体を用い、この被含浸体の焼成工程を兼ねた処理として行うことが好ましい。こうすれば、被含浸体を焼結したのちに、更に加熱して含浸処理を行うのに比してエネルギー効率がよい。   This impregnation step may be performed by using an object to be impregnated after firing, but is preferably performed as a treatment using an unfired material to be impregnated and also serving as a firing step for the object to be impregnated. In this way, after the object to be impregnated is sintered, it is more energy efficient than heating and further impregnation.

本発明のSi−SiC系複合材料は、Siを含む溶融金属で被含浸体を含浸したあとに、500℃以上1400℃以下の温度範囲で、大気雰囲気で酸化処理する酸化処理工程を含むことが好ましい。こうすれば、室温強度や、高温での強度をより高めることができ、好ましい。酸化処理温度は、実用する温度以上であることが好ましく、例えば、800℃以上がより好ましく、1000℃以上が更に好ましく、1200℃以上が最も好ましい。このとき、酸化処理工程では、酸化増量が0.4質量%以上1.0質量%以下の範囲で行うことが好ましい。こうすれば、より強度を高めることができる。   The Si—SiC-based composite material of the present invention may include an oxidation treatment step of oxidizing in an air atmosphere at a temperature range of 500 ° C. to 1400 ° C. after impregnating the object to be impregnated with a molten metal containing Si. preferable. This is preferable because the room temperature strength and the strength at high temperatures can be further increased. The oxidation treatment temperature is preferably equal to or higher than a practical temperature, for example, more preferably 800 ° C. or higher, still more preferably 1000 ° C. or higher, and most preferably 1200 ° C. or higher. At this time, in the oxidation treatment step, the oxidation increase is preferably performed in the range of 0.4 mass% to 1.0 mass%. In this way, the strength can be further increased.

本発明において、SiC成形体に含まれるSiO2量と、SiとAlの混合物に含まれるAl量との重量比である、Al/SiO2が0.9以上1000以下の範囲であることが好ましい。また、SiC成形体に含まれるSiO2量と、SiCとAl成形体に含まれるAl量との重量比である、Al/SiO2が0.9以上1000以下の範囲であることが好ましい。また、SiC成形体又はSiCとAlの成形体に含まれるSiO2量と、SiとAlの混合物及びSiCとAlの成形体の両方に含まれるAl量と、の重量比であるAl/SiO2比が0.9以上1000以下の範囲であることが好ましい。In the present invention, Al / SiO 2 , which is a weight ratio between the amount of SiO 2 contained in the SiC molded body and the amount of Al contained in the mixture of Si and Al, is preferably in the range of 0.9 to 1000. . Further, the SiO 2 content in the SiC molded body, a weight ratio of Al content in the SiC and Al moldings, it is preferred Al / SiO 2 is in a range of 0.9 to 1000. Further, Al / SiO 2 which is a weight ratio between the amount of SiO 2 contained in the SiC molded body or the molded body of SiC and Al and the amount of Al contained in both the mixture of Si and Al and the molded body of SiC and Al. The ratio is preferably in the range of 0.9 to 1000.

本発明において、Si−SiC系複合材料は、ハニカム構造としてもよい。即ち、上述したいずれかのSi−SiC系複合材料を含んで構成されているハニカム構造体としてもよい。こうすれば、高い熱伝導率、高い高温強度、優れた耐酸化性を有するハニカム構造体を提供することができる。ハニカム構造体としては、例えば、内燃機関の排ガス浄化に用いる、浄化触媒用のハニカム構造体や、内燃機関から排出される粒子状物質(PM)を捕集除去するハニカムフィルタなどとしてもよい。   In the present invention, the Si—SiC based composite material may have a honeycomb structure. That is, a honeycomb structure including any of the Si-SiC composite materials described above may be used. By doing so, it is possible to provide a honeycomb structure having high thermal conductivity, high high-temperature strength, and excellent oxidation resistance. The honeycomb structure may be, for example, a purification catalyst honeycomb structure used for exhaust gas purification of an internal combustion engine, or a honeycomb filter that collects and removes particulate matter (PM) discharged from the internal combustion engine.

あるいは、Si−SiC系複合材料の用途としては、熱交換体、放熱基板及び熱伝導体などが挙げられる。また、Si−SiC系複合材料は、500℃以上、より好ましくは600℃以上、更に好ましくは800℃以上で用いることが好ましい。このとき、100℃より高温のガスと100℃以下の水とを熱交換することを特徴とした熱交換器としてもよい。   Or as a use of a Si-SiC type composite material, a heat exchanger, a heat dissipation board, a heat conductor, etc. are mentioned. Further, the Si—SiC composite material is preferably used at 500 ° C. or higher, more preferably 600 ° C. or higher, and still more preferably 800 ° C. or higher. At this time, it is good also as a heat exchanger characterized by heat-exchanging the gas higher than 100 degreeC, and the water below 100 degreeC.

以下には、Si−SiC系複合材料及びその製造方法を説明する。まず、含浸材としての溶融金属を供給する側の成形体である含浸金属供給体と、含浸される側の成形体である被含浸体との関係について実験例として検討した。図1は、本発明の含浸工程の一例を示すフローチャートである。図1に示すように、被含浸体の原料を調合し、この原料をアルコールを溶媒として自転公転混合機により自転/公転=600/1800rpm、5分間湿式混合し、100℃、15h乾燥後、粉砕して分級した。得られた粉体を更に所定の形状(直径30mmのペレット)にプレス成形し、CIP処理を行った。この成形体を更に500℃で5h、窒素雰囲気中で脱脂し、被含浸体を得た。また、含浸金属供給体の原料を調合し、袋中で乾式混合したのち、所定の形状(直径30mmのペレット)にプレス成形し、含浸金属供給体を得た。この被含浸体上に含浸金属供給体を載せたものを、鞘内に配置した敷部材上に載置した。鞘としては、密閉可能なアルミナ鞘を用い、敷部材は、SiやAlとの濡れ性の低いもの、ここではアルミナ板を用いた。この鞘を常圧下、1450℃で4h、Ar雰囲気とし、含浸金属供給体により被含浸体を含浸処理した。ここでは、未焼成の成形体である被含浸体を用い、含浸処理と被含浸体の焼成とを兼ねた工程として含浸工程を実行した。   Below, Si-SiC type composite material and its manufacturing method are demonstrated. First, the relationship between an impregnated metal supply body, which is a molded body on the side of supplying molten metal as an impregnation material, and an object to be impregnated, which is a molded body on the side to be impregnated, was examined as an experimental example. FIG. 1 is a flowchart showing an example of the impregnation step of the present invention. As shown in FIG. 1, the raw material of the material to be impregnated is prepared, and this raw material is wet-mixed by rotation / revolution = 600/1800 rpm for 5 minutes using an alcohol / solvent as a solvent, dried at 100 ° C. for 15 hours, and then pulverized And classified. The obtained powder was further press-molded into a predetermined shape (a pellet with a diameter of 30 mm) and subjected to CIP treatment. The molded body was further degreased at 500 ° C. for 5 hours in a nitrogen atmosphere to obtain an impregnated body. Moreover, the raw material of the impregnated metal supply body was prepared, dry-mixed in a bag, and then press-formed into a predetermined shape (a pellet having a diameter of 30 mm) to obtain an impregnated metal supply body. What put an impregnation metal supply body on this to-be-impregnated body was mounted on the covering member arrange | positioned in the sheath. As the sheath, a sealable alumina sheath was used, and as the laying member, a material having low wettability with Si or Al, here, an alumina plate was used. The sheath was impregnated with an impregnated metal supplier in an Ar atmosphere at 1450 ° C. for 4 hours under normal pressure. Here, the impregnation process was performed as a process that used both the impregnation treatment and the firing of the impregnated body, using an impregnated body that was an unfired molded body.

まず、はじめに、被含浸体であるSiC成形体へのSiの含浸性について検討した。図2は、含浸処理の検討結果である。ここでは、SiCにより形成された被含浸体の上に、金属Siにより形成された含浸金属供給体をのせ、添加金属を用いない所定の条件で被含浸体へ含浸金属供給体から金属Siを含浸させた。含浸条件として、減圧Ar雰囲気、含浸温度を1550℃とした際には、含浸することができた。このとき、酸素量は、0.01質量%未満であった。また、含浸条件として、減圧Ar雰囲気、含浸温度を1450℃とした際には含浸することができた。このとき、酸素量は、0.01質量%であった。また、含浸条件として、常圧Ar雰囲気、含浸温度1450℃とした際には、含浸することができなかった。このとき、酸素量は、0.15質量%であった。また、含浸条件として、減圧Ar雰囲気から常圧Ar雰囲気へ移行し、含浸温度を1450℃とした際には、含浸することができた。このとき、酸素量は、0.04質量%であった。図2に示すように、SiC成形体へのSiの含浸は、SiC成形体に含まれている酸素量を減らすなどの処理を行うか、減圧雰囲気とすれば可能であることがわかった。一方、SiC成形体に酸素が含まれている場合などでは特に、常圧では含浸できないことがわかった。このように、含浸することは可能であるが、減圧状態という、煩雑な処理を要することがわかった。また、常圧で含浸処理を行うには、何らかの添加材が必要であると推察された。   First, the impregnation property of Si into the SiC molded body, which is an object to be impregnated, was examined. FIG. 2 shows the results of the impregnation treatment. Here, an impregnated metal supply body formed of metal Si is placed on an impregnated body formed of SiC, and the impregnated body is impregnated with metal Si from the impregnated metal supply body under a predetermined condition without using an additive metal. I let you. As the impregnation conditions, when the reduced pressure Ar atmosphere and the impregnation temperature were 1550 ° C., the impregnation was possible. At this time, the amount of oxygen was less than 0.01% by mass. Further, as the impregnation conditions, the impregnation was possible when the reduced pressure Ar atmosphere and the impregnation temperature were 1450 ° C. At this time, the amount of oxygen was 0.01% by mass. Further, when the impregnation conditions were an atmospheric pressure Ar atmosphere and an impregnation temperature of 1450 ° C., the impregnation could not be performed. At this time, the amount of oxygen was 0.15 mass%. Further, as the impregnation condition, when the reduced Ar atmosphere was changed to the normal Ar atmosphere and the impregnation temperature was set to 1450 ° C., the impregnation could be performed. At this time, the oxygen content was 0.04 mass%. As shown in FIG. 2, it was found that impregnation of Si into the SiC molded body was possible by performing a treatment such as reducing the amount of oxygen contained in the SiC molded body or by setting a reduced pressure atmosphere. On the other hand, it was found that impregnation was not possible at normal pressure, especially when the SiC molded body contains oxygen. Thus, although it was possible to impregnate, it turned out that the complicated process called a pressure reduction state is required. Moreover, it was speculated that some kind of additive was necessary to perform the impregnation treatment at normal pressure.

次に、添加材の種類と、被含浸体及び含浸金属供給体のいずれに添加材を入れるかを実験例として検討した。ここでは、添加金属(Me)を被含浸体に含有させた場合(案1:Si/SiC+Me)、添加金属を含浸金属供給体に含有させた場合(案2:Si+Me/SiC)、添加金属を被含浸体及び含浸金属供給体に含有させた場合(案3:Si+Me/SiC+Me)について検討した。   Next, the type of additive and whether to add the additive into the impregnated body or the impregnated metal supply body were examined as experimental examples. Here, when the additive metal (Me) is included in the impregnated body (plan 1: Si / SiC + Me), when the additive metal is included in the impregnated metal supply body (plan 2: Si + Me / SiC), The case of inclusion in an impregnated body and an impregnated metal supply body (plan 3: Si + Me / SiC + Me) was examined.

(実験例1)
被含浸体がSiC及びAlを含み、含浸金属供給がSiの場合の成形体を作製し、これを実験例1とした。被含浸用成形体の作製は、以下のように行った。SiC粉末とAl粉末とバインダーを調合後、自転公転混合機を用いて自転/公転=600/1800rpmにて約4分間混合した。100℃にて15時間乾燥した後、粉砕し、30μmの篩を通して、原料粉末を作製した。この原料粉末を1軸プレスで成形後、3ton、30sでCIP処理を行い、直径30mmのペレットを作製し、窒素雰囲気にて500℃、5時間脱脂を行い、被含浸用成形体とした。ここでは、SiCが100重量部、金属Alが5重量部となるようにSiC及びAl粉末を調合した。含浸金属供給体は、以下のように作製した。被含浸体の重量に対して85/100の重量比となるようSiを秤量後、1軸プレスにより直径30mmのペレットに成形して作製した。
(Experimental example 1)
A molded body in which the object to be impregnated contains SiC and Al and the impregnated metal supply is Si was produced. The impregnated molded body was produced as follows. After preparing SiC powder, Al powder, and a binder, they were mixed for about 4 minutes at a rotation / revolution = 600/1800 rpm using a rotation / revolution mixer. After drying at 100 ° C. for 15 hours, the mixture was pulverized and passed through a 30 μm sieve to produce a raw material powder. This raw material powder was molded with a uniaxial press, and then subjected to CIP treatment at 3 tons and 30 s to produce a pellet with a diameter of 30 mm, and degreased in a nitrogen atmosphere at 500 ° C. for 5 hours to obtain a molded article for impregnation. Here, SiC and Al powder were prepared so that SiC might be 100 weight part and metal Al might be 5 weight part. The impregnated metal supply was produced as follows. The Si was weighed so as to have a weight ratio of 85/100 with respect to the weight of the impregnated material, and then formed into pellets having a diameter of 30 mm by a uniaxial press.

(実験例2〜6)
添加材をMg,Ti,カーボンブラック,フェノール樹脂、砂糖として被含浸体を作製した以外は、実験例1の作製条件に準じて作製したものをそれぞれ実験例2〜6とした。
(Experimental Examples 2-6)
Except that the impregnated material was prepared using Mg, Ti, carbon black, phenol resin, and sugar as the additive, the samples prepared according to the manufacturing conditions of Experimental Example 1 were used as Experimental Examples 2 to 6, respectively.

(実験例7)
被含浸体がSiCであり、含浸金属供給体がSi及びAlを含む場合について検討し、これを実験例1とした。被含浸体の作製は、以下のように行った。SiC粉末とバインダーを調合後、自転公転混合機を用いて自転/公転=600/1800rpmにて約4分間混合した。100℃にて15時間乾燥したあと、粉砕し、30μmの篩を通して、原料粉末を作製した。この原料粉末を1軸プレスで成形後、3ton、30sでCIP処理を行い、直径30mmのペレットを作製し、窒素雰囲気にて500℃、5時間脱脂を行い、被含浸体とした。含浸金属成形体の作製は、以下のように行った。被含浸体の重量に対して85/100の重量比となるようSiとAl粉末を調合後、袋混合したあと、1軸プレスにより直径30mmのペレットに成形して作製した。ここでは、金属Siが87重量部、金属Alが13重量部となるようにSi及びAl粉末を調合した。
(Experimental example 7)
The case where the object to be impregnated was SiC and the impregnated metal supply body contained Si and Al was considered as Experimental Example 1. The impregnated body was produced as follows. After the SiC powder and the binder were prepared, they were mixed for about 4 minutes at a rotation / revolution = 600/1800 rpm using a rotation / revolution mixer. After drying at 100 ° C. for 15 hours, the mixture was pulverized and passed through a 30 μm sieve to produce a raw material powder. After this raw material powder was formed by a uniaxial press, CIP treatment was performed at 3 tons and 30 s to produce a pellet having a diameter of 30 mm, and degreasing was performed in a nitrogen atmosphere at 500 ° C. for 5 hours to obtain an impregnated body. The impregnated metal molded body was produced as follows. After preparing Si and Al powder so that it might become a weight ratio of 85/100 with respect to the weight of a to-be-impregnated body, it mixed with the bag, Then, it shape | molded and formed into the pellet of diameter 30mm with uniaxial press. Here, Si and Al powder were prepared so that metal Si might be 87 weight part and metal Al might be 13 weight part.

(実験例8,9)
添加材をMg,Tiとして含浸金属供給体を作製した以外は、実験例7の作製条件に準じて作製したものをそれぞれ実験例8,9とした。
(Experimental examples 8 and 9)
Except that the impregnated metal supply body was prepared using Mg and Ti as additives, those prepared according to the manufacturing conditions of Experimental Example 7 were designated as Experimental Examples 8 and 9, respectively.

(実験例10)
被含浸体がSiC及びAlを含み、含浸金属供給体がSi及びAlを含む場合の成形体を作製し、これを実験例10とした。被含浸体の作製は、以下のように行った。SiC粉末とAl粉末とバインダーを調合後、自転公転混合機を用いて自転/公転=600/1800rpmにて約4分間混合した。100℃にて15時間乾燥した後、粉砕し、30μmの篩を通して、原料粉末を作製した。この原料粉末を1軸プレスで成形後、3ton、30sでCIP処理を行い、直径30mmのペレットを作製し、窒素雰囲気にて500℃、5時間脱脂を行い、被含浸体とした。ここでは、SiCが100重量部、金属Alが5重量部となるようにSiC及びAl粉末を調合した。含浸金属供給体は以下のように作製した。被含浸体の重量に対して85/100の重量比となるようSiとAl粉末を調合後、袋混合した後、1軸プレスにより直径30mmのペレットに成形して作製した。ここでは、金属Siが87重量部、金属Alが13重量部となるようにSi及びAl粉末を調合した。
(Experimental example 10)
A molded body in which the impregnated body contains SiC and Al and the impregnated metal supply body contains Si and Al was produced. The impregnated body was produced as follows. After preparing SiC powder, Al powder, and a binder, they were mixed for about 4 minutes at a rotation / revolution = 600/1800 rpm using a rotation / revolution mixer. After drying at 100 ° C. for 15 hours, the mixture was pulverized and passed through a 30 μm sieve to produce a raw material powder. After this raw material powder was formed by a uniaxial press, CIP treatment was performed at 3 tons and 30 s to produce a pellet having a diameter of 30 mm, and degreasing was performed in a nitrogen atmosphere at 500 ° C. for 5 hours to obtain an impregnated body. Here, SiC and Al powder were prepared so that SiC might be 100 weight part and metal Al might be 5 weight part. The impregnated metal supply was produced as follows. After preparing Si and Al powder so that it might become a weight ratio of 85/100 with respect to the weight of a to-be-impregnated body, it mixed with the bag, Then, it shape | molded and formed into the pellet of diameter 30mm with uniaxial press. Here, Si and Al powder were prepared so that metal Si might be 87 weight part and metal Al might be 13 weight part.

(含浸処理)
アルミナ鞘に、Si及びAlとの濡れ性の低い敷部材としてのアルミナ板を配置し、その上にSiCを含む被含浸体を載置し、その上に金属Siを含む含浸金属供給体を載せ、常圧Ar雰囲気、1450℃、4hの条件で含浸処理を行った。
(Impregnation treatment)
An alumina plate as a floor member having low wettability with Si and Al is placed on the alumina sheath, an impregnated body containing SiC is placed thereon, and an impregnated metal supply body containing metal Si is placed thereon. The impregnation treatment was performed under the conditions of normal pressure Ar atmosphere, 1450 ° C., and 4 hours.

(評価)
気孔率をアルキメデス法により測定した。熱伝導率をレーザーフラッシュ法により測定した。熱伝導率(W/mK)は、Ar雰囲気中で示差走査熱量測定(DSC)法にて測定した比熱:Cp(J/kg/K;JIS−R1672参照)と、Ar雰囲気中でレーザーフラッシュ法にて測定した熱拡散率:α(m2/s)と、アルキメデス法で測定した密度:ρ(kg/m3;JIS−R1634参照)とから、熱伝導率の算出式:κ=α×Cp×ρの式に従い算出した(JIS−R1611参照)。結晶相の同定は、粉末XRD法(BRUKER社製D8 ADVANCE)によって行った。強度は、JIS−R1601記載の4点曲げ試験によって測定した。酸化増量は、1000℃で1時間保持しその前後の重量から算出した。アルミニウム量は、ICP発光分光測定器(日本シャーレルアッシュ社製ICAP-55Spectrometer)により測定した。
(Evaluation)
The porosity was measured by Archimedes method. The thermal conductivity was measured by the laser flash method. The thermal conductivity (W / mK) is a specific heat: Cp (J / kg / K; see JIS-R1672) measured by a differential scanning calorimetry (DSC) method in an Ar atmosphere, and a laser flash method in an Ar atmosphere. The thermal diffusivity measured in γ: α (m 2 / s) and the density measured by the Archimedes method: ρ (kg / m 3 ; see JIS-R1634), the formula for calculating the thermal conductivity: κ = α × Calculation was performed according to the formula of Cp × ρ (see JIS-R1611). The crystal phase was identified by a powder XRD method (D8 ADVANCE manufactured by BRUKER). The strength was measured by a four-point bending test described in JIS-R1601. The increase in oxidation was calculated from the weight before and after holding at 1000 ° C. for 1 hour. The amount of aluminum was measured with an ICP emission spectrophotometer (ICAP-55Spectrometer manufactured by Japan Charler Ash).

図3は、添加する各種の金属の種類と含浸後の外観の説明図である。図4は、被含浸体に添加材を入れた場合の含浸処理前後の試料の外観の説明図である。この結果より、Alを被含浸体及び含浸金属供給体のいずれかに添加すると、常圧でのSiCへのSiの含浸処理を行うことができることがわかった。   FIG. 3 is an explanatory diagram of the types of various metals to be added and the appearance after impregnation. FIG. 4 is an explanatory view of the appearance of the sample before and after the impregnation treatment when an additive is added to the object to be impregnated. From this result, it was found that when Al is added to either the impregnated body or the impregnated metal supply body, it is possible to perform the impregnation treatment of SiC into SiC at normal pressure.

図5は、Alを被含浸体及び含浸金属供給体のいずれかに含有させた場合の測定結果である。この図5では、結晶相、気孔率(画像解析及びアルキメデス法)、熱伝導率、Al含有量(質量%)、O含有量(質量%)などの測定結果を示した。また、上述した図2の水準2を実験例13として示した。図5に示すように、Alの添加がSiCへのSiの含浸処理に有効であることがわかった。   FIG. 5 shows the measurement results when Al is contained in either the impregnated body or the impregnated metal supply body. FIG. 5 shows the measurement results of the crystal phase, porosity (image analysis and Archimedes method), thermal conductivity, Al content (mass%), O content (mass%), and the like. Moreover, the level 2 of FIG. As shown in FIG. 5, it was found that the addition of Al is effective for the Si impregnation treatment in SiC.

図6は、被含浸体がSiC、含浸金属供給体がSi及びAlを含むの場合(実験例7)の微構造観察結果である。微構造観察は、電子顕微鏡(SEM)を用いて行った。この結果、SiCの粒子間には、含浸した金属Siが存在し、且つ、SiCの表面近傍にはAlを含む成分、例えば金属Al,Al23及びムライトのうちいずれか1以上の相の存在(Al凝集部とも称する)が確認された。なお、気孔は被含浸体の全体的に存在することが確認され、常圧下の含浸処理であったが、含浸ムラがほとんどないことが確認された。FIG. 6 shows the microstructure observation results when the impregnated body contains SiC and the impregnated metal supply body contains Si and Al (Experimental Example 7). Microstructure observation was performed using an electron microscope (SEM). As a result, between the SiC particles, impregnated metal Si exists, and in the vicinity of the SiC surface, an Al-containing component, for example, one of one or more phases of metal Al, Al 2 O 3 and mullite. Existence (also referred to as Al agglomerated part) was confirmed. In addition, it was confirmed that the pores existed as a whole in the impregnated body, and the impregnation treatment was performed under normal pressure, but it was confirmed that there was almost no impregnation unevenness.

図7は、被含浸体がSiC、含浸金属供給体がSi及びAlを含む場合(実験例7)の元素分布測定結果である。元素分布測定は、電子顕微鏡(SEM:フィリップスエレクトロンオプティクス社製XL30)による観察画像において、EDX(EDAX社製)を用いて行った。その結果、SiとAlとの存在場所が異なることがわかった。また、AlがSiC粒子の周りに存在することがわかった。このため、AlによるSiの濡れ性の向上があるものと推察された。また、Oは、若干、Alと同じ場所に多いことが観察された。このため、Alが、SiCの表面に存在するSiO2を還元していることも予想された。FIG. 7 shows the element distribution measurement result when the impregnated body contains SiC and the impregnated metal supply body contains Si and Al (Experimental Example 7). Element distribution measurement was performed using an EDX (manufactured by EDAX) in an observation image by an electron microscope (SEM: XL30 manufactured by Philips Electron Optics). As a result, it was found that the location of Si and Al was different. It was also found that Al exists around the SiC particles. For this reason, it was speculated that there was an improvement in the wettability of Si by Al. Further, it was observed that O was slightly higher in the same place as Al. For this reason, Al was also expected to reduce SiO 2 present on the surface of SiC.

図8は、含浸後の被含浸用成形体の高温強度及びAl添加量の検討結果である。サンプルは、被含浸体がSiC、含浸金属供給体がSi及びAlを含む場合(実験例7)の被含浸体とした。また、高温強度測定では、含浸金属供給体のSiとAlとの重量比は、80:20とした。Al添加量の検討では、含浸金属供給体のSiとAlとの重量比は、80:20、85:15、90:10、95:5とした。Al添加量の検討結果では、含浸金属成形体のSiとAlとの重量比が95:5では、多少の含浸ムラが生じてはいたが、含浸処理を行うことができた。また、高温強度測定では、温度(℃)の上昇に伴い曲げ強度(MPa)が減少する傾向であることがわかった。Alの添加量を低減させると、この温度上昇に伴う曲げ強度の減少をより抑制することができると推察された。即ち、高温強度を高めることができることがわかった。   FIG. 8 shows the examination results of the high temperature strength and Al addition amount of the molded article for impregnation after impregnation. The sample was an impregnated body when the impregnated body included SiC and the impregnated metal supply body included Si and Al (Experimental Example 7). In the high temperature strength measurement, the weight ratio of Si and Al in the impregnated metal supply was 80:20. In the examination of the amount of Al added, the weight ratio of Si and Al in the impregnated metal supplier was 80:20, 85:15, 90:10, and 95: 5. As a result of studying the amount of Al added, when the weight ratio of Si to Al in the impregnated metal molded body was 95: 5, some impregnation unevenness occurred, but the impregnation treatment could be performed. Further, in the high temperature strength measurement, it was found that the bending strength (MPa) tends to decrease as the temperature (° C.) increases. It was speculated that when the amount of Al added is reduced, the decrease in bending strength accompanying this temperature rise can be further suppressed. That is, it was found that the high temperature strength can be increased.

次に、Al添加効果について詳細に検討した。ここでは、被含浸体がSiCであり、含浸金属供給体にSi及びAlを含む場合の含浸処理により作製されたSi−SiC系複合材料の材料特性について詳細に検討した。   Next, the Al addition effect was examined in detail. Here, the material characteristics of the Si—SiC composite material produced by the impregnation treatment when the impregnated body is SiC and the impregnated metal supply body includes Si and Al were examined in detail.

(実施例1)
SiC粉末とバインダーを調合後、自転公転混合機を用いて自転/公転=600/1800rpmにて約4分間混合した。100℃にて15時間乾燥したあと、粉砕し、30μmの篩を通して、原料粉末を作製した。この原料粉末を1軸プレスで成形後、3ton、30sでCIP処理を行い、直径30mmのペレットを作製し、窒素雰囲気にて500℃、5時間脱脂を行い、被含浸体とした。含浸金属成形体の作製は、以下のように行った。被含浸体の重量に対して85/100の重量比となるようSiとAl粉末を調合後、袋混合したあと、1軸プレスにより直径30mmのペレットに成形して作製した。ここでは、金属Siが95重量部、金属Alが5重量部となるようにSi及びAl粉末を調合した。次に、アルミナ鞘に、Si及びAlとの濡れ性の低い敷部材としてのアルミナ板を配置し、その上にSiCを含む被含浸体を載置し、その上に金属Si及びAlを含む含浸金属供給体を載せ、常圧Ar雰囲気、1450℃、4h保持の条件で含浸処理を行った。得られたSi−SiC系複合材料を実施例1とした。実施例1では、SiC,Si,Alがそれぞれ85質量%、14.9質量%、0.1質量%であった。また、重量によるAl/Si比は、1/99であった。実施例1の測定結果等を表1に示す。なお、後述する実施例2〜6,比較例1〜4についても表1に示した。
Example 1
After the SiC powder and the binder were prepared, they were mixed for about 4 minutes at a rotation / revolution = 600/1800 rpm using a rotation / revolution mixer. After drying at 100 ° C. for 15 hours, the mixture was pulverized and passed through a 30 μm sieve to produce a raw material powder. After this raw material powder was formed by a uniaxial press, CIP treatment was performed at 3 tons and 30 s to produce a pellet having a diameter of 30 mm, and degreasing was performed in a nitrogen atmosphere at 500 ° C. for 5 hours to obtain an impregnated body. The impregnated metal molded body was produced as follows. After preparing Si and Al powder so that it might become a weight ratio of 85/100 with respect to the weight of a to-be-impregnated body, it mixed with the bag, Then, it shape | molded and formed into the pellet of diameter 30mm with uniaxial press. Here, Si and Al powder were prepared so that metal Si might be 95 weight part and metal Al might be 5 weight part. Next, an alumina plate as a floor member having low wettability with Si and Al is placed on the alumina sheath, an impregnated body containing SiC is placed thereon, and impregnation containing metal Si and Al is placed thereon. The metal supply body was mounted, and the impregnation treatment was performed under the conditions of normal pressure Ar atmosphere, 1450 ° C., and 4 hours. The obtained Si—SiC composite material was taken as Example 1. In Example 1, SiC, Si, and Al were 85 mass%, 14.9 mass%, and 0.1 mass%, respectively. Further, the Al / Si ratio by weight was 1/99. The measurement results of Example 1 are shown in Table 1. In addition, it showed in Table 1 also about Example 2-6 mentioned later and Comparative Examples 1-4.

(実施例2〜6)
SiC,Si,Alがそれぞれ85質量%、10.5質量%、4.5質量%であり、重量によるAl/Si比が30/70としたものを実施例2とした。また、SiC,Si,Alがそれぞれ57質量%、42.4質量%、0.6質量%であり、重量によるAl/Si比が1.4/98.6としたものを実施例3とした。また、SiC,Si,Alがそれぞれ57質量%、30.1質量%、12.9質量%であり、重量によるAl/Si比が30/70としたものを実施例4とした。また、SiC,Si,Alがそれぞれ65質量%、29.8質量%、5.2質量%であり、重量によるAl/Si比が17.4/69.3としたものを実施例5とした。また、SiC,Si,Alがそれぞれ65.4質量%、32.4質量%、2.2質量%であり、重量によるAl/Si比が6.4/93.6としたものを実施例6とした。
(Examples 2 to 6)
SiC, Si, and Al were 85% by mass, 10.5% by mass, and 4.5% by mass, respectively, and an Al / Si ratio by weight of 30/70 was taken as Example 2. Further, SiC, Si, and Al were 57 mass%, 42.4 mass%, and 0.6 mass%, respectively, and an Al / Si ratio by weight of 1.4 / 98.6 was set as Example 3. . Further, SiC, Si, and Al were 57 mass%, 30.1 mass%, and 12.9 mass%, respectively, and an Al / Si ratio by weight of 30/70 was determined as Example 4. Further, SiC, Si and Al were 65% by mass, 29.8% by mass and 5.2% by mass, respectively, and an Al / Si ratio by weight of 17.4 / 69.3 was determined as Example 5. . Further, Example 6 in which SiC, Si, and Al were 65.4 mass%, 32.4 mass%, and 2.2 mass%, respectively, and the Al / Si ratio by weight was 6.4 / 93.6. It was.

(比較例1〜4)
SiC,Si,Alがそれぞれ80質量%、20質量%、0質量%であり、重量によるAl/Si比が0/100としたものを比較例1とした。また、SiC,Si,Alがそれぞれ40質量%、5質量%、55質量%であり、重量によるAl/Si比が91.7/8.3としたものを比較例2とした。また、SiC,Si,Alがそれぞれ30質量%、40質量%、30質量%であり、重量によるAl/Si比が42.9/57.1としたものを比較例3とした。また、SiC,Si,Alがそれぞれ20質量%、60質量%、20質量%であり、重量によるAl/Si比が25/75としたものを比較例4とした。
(Comparative Examples 1-4)
SiC, Si, and Al were 80% by mass, 20% by mass, and 0% by mass, respectively, and an Al / Si ratio by weight of 0/100 was defined as Comparative Example 1. Further, SiC, Si, and Al were 40% by mass, 5% by mass, and 55% by mass, respectively, and the Al / Si ratio by weight was 91.7 / 8.3. Further, SiC, Si, and Al were 30 mass%, 40 mass%, and 30 mass%, respectively, and an Al / Si ratio by weight of 42.9 / 57.1 was set as Comparative Example 3. Further, SiC, Si, and Al were 20% by mass, 60% by mass, and 20% by mass, respectively, and the Al / Si ratio by weight was 25/75.

(評価)
作製した実施例1に対して、含浸の可否の確認、熱伝導率(W/mK)、熱膨張率(/℃)、室温強度(MPa)、800℃強度(MPa)、耐熱衝撃試験などにより評価した。含浸可否の確認については、含浸処理後の試料を切断し、切断面において、含浸が目視されたものを「○」、含浸が目視されなかったものを「×」として評価した。熱膨張率は、示差熱膨張計(理学電機工業社製TMA8310)で室温から1000℃、大気中で測定した。また、耐熱衝撃試験は、得られたSi−SiC系複合材料を250℃、30分間熱処理したのち、20℃の水へ投下し、クラックが目視できなかったものを「○」、クラックが目視されたものを「×」として評価した。
(Evaluation)
By confirming whether or not impregnation is possible, thermal conductivity (W / mK), thermal expansion coefficient (/ ° C.), room temperature strength (MPa), 800 ° C. strength (MPa), thermal shock test, etc. evaluated. For confirmation of whether or not impregnation was possible, the sample after the impregnation treatment was cut, and on the cut surface, the case where the impregnation was visually observed was evaluated as “◯”, and the case where the impregnation was not visually observed was evaluated as “x”. The coefficient of thermal expansion was measured in the atmosphere at room temperature to 1000 ° C. with a differential thermal dilatometer (TMA8310 manufactured by Rigaku Corporation). In the thermal shock test, the obtained Si—SiC composite material was heat treated at 250 ° C. for 30 minutes, and then dropped into 20 ° C. water. Were evaluated as “×”.

表1に示すように、比較例1では、Siの含浸を行うことができなかった。また、比較例2,3では、Al量やAl/Si比が大きく、熱膨張率が比較的大きく、800℃の強度は試料が熔解することにより測定不能であり、耐熱衝撃性も低かった。比較例4では、Si量が大きく、800℃の強度は極めて低く、耐熱衝撃性も低かった。これに対して、実施例1〜7では、含浸処理可能であり、熱伝導率が比較的高く、室温強度や高温強度(800℃)、耐熱衝撃性などが高いことが明らかとなった。また、SiCを57質量%以上85質量%以下、Siを10.5質量%以上42.6質量%以下、Alを0.1質量%以上12.9質量%以下含むのがよいことが明らかとなった。また、重量比であるAl/Si比が1/99以上30/70以下であることが好ましいことがわかった。   As shown in Table 1, in Comparative Example 1, impregnation with Si could not be performed. In Comparative Examples 2 and 3, the Al amount and Al / Si ratio were large, the coefficient of thermal expansion was relatively large, the strength at 800 ° C. was not measurable by melting the sample, and the thermal shock resistance was also low. In Comparative Example 4, the amount of Si was large, the strength at 800 ° C. was extremely low, and the thermal shock resistance was also low. On the other hand, in Examples 1 to 7, it was revealed that the impregnation treatment was possible, the thermal conductivity was relatively high, the room temperature strength, the high temperature strength (800 ° C.), the thermal shock resistance, and the like were high. Further, it is clear that SiC should be contained in an amount of 57% by mass to 85% by mass, Si 10.5% by mass to 42.6% by mass, and Al 0.1% by mass to 12.9% by mass. became. Moreover, it turned out that it is preferable that Al / Si ratio which is weight ratio is 1/99 or more and 30/70 or less.

次に、含浸処理後の酸化処理の効果について検討した。ここでは、被含浸体がSiCであり、含浸金属供給体にSi及びAlを含む場合の含浸処理により作製されたSi−SiC系複合材料の材料特性について検討した。   Next, the effect of the oxidation treatment after the impregnation treatment was examined. Here, the material characteristics of the Si—SiC composite material produced by the impregnation treatment when the impregnated body is SiC and the impregnated metal supply body includes Si and Al were examined.

(実施例7,8)
実施例5のSi−SiC系複合材料を作製した。実施例5では、SiC,Si,Alがそれぞれ65質量%、29.8質量%、5.6質量%であった。また、重量によるAl/Si比は、17.4/69.3であった。この実施例5に対し、1000℃、大気雰囲気で酸化処理を行い、所定の評価(酸化増量(%)、室温強度(MPa)、800℃強度(MPa))を行った。また、別の実施例5に対し、1200℃、大気雰囲気で酸化処理を行い、所定の評価を行った。これらを実施例7とし、その評価結果を表2に示す。また、同様に実施例6を用いて酸化処理を行い、得られたものを実施例8とした。
(Examples 7 and 8)
The Si—SiC composite material of Example 5 was produced. In Example 5, SiC, Si, and Al were 65 mass%, 29.8 mass%, and 5.6 mass%, respectively. Moreover, Al / Si ratio by weight was 17.4 / 69.3. This Example 5 was subjected to oxidation treatment at 1000 ° C. in an air atmosphere, and predetermined evaluations (oxidation increase (%), room temperature strength (MPa), and 800 ° C. strength (MPa)) were performed. Further, another Example 5 was subjected to an oxidation treatment at 1200 ° C. in an air atmosphere, and a predetermined evaluation was performed. These were taken as Example 7, and the evaluation results are shown in Table 2. Similarly, Example 6 was used for oxidation treatment, and the resulting product was designated as Example 8.

(結果と考察)
表2に示すとおり、酸化処理を行った試料では、酸化増量が0.4%〜1.0%の範囲であった。また、酸化処理をより高い温度で行う方が、より高い強度を示すことが明らかとなった。
(Results and discussion)
As shown in Table 2, in the sample subjected to the oxidation treatment, the increase in oxidation was in the range of 0.4% to 1.0%. Moreover, it became clear that the one where oxidation treatment is performed at a higher temperature shows higher strength.

本出願は、2010年5月21日に出願された米国仮出願61/346,938号を優先権主張の基礎としており、引用によりその内容の全てが本明細書に含まれる。   This application is based on US provisional application 61 / 346,938, filed May 21, 2010, the contents of which are incorporated herein by reference in their entirety.

本発明は、熱伝導材料などの技術分野に利用可能である。   The present invention is applicable to technical fields such as a heat conductive material.

Claims (19)

SiCを57質量%以上85質量%以下、Siを10.5質量%以上42.6質量%以下、Alを0.1質量%以上12.9質量%以下含み、重量比であるAl/Si比が1/99以上30/70以下であることを特徴とするSi−SiC系複合材料。   Al / Si ratio which is a weight ratio including SiC of 57% by mass to 85% by mass, Si of 10.5% by mass to 42.6% by mass, Al of 0.1% by mass to 12.9% by mass. Is 1/99 or more and 30/70 or less, Si-SiC type composite material characterized by the above-mentioned. 前記Al/Si比が5/95以上20/80以下であることを特徴とする、請求項1に記載のSi−SiC系複合材料。   The Si-SiC based composite material according to claim 1, wherein the Al / Si ratio is 5/95 or more and 20/80 or less. 酸素を0.01質量%以上2.0質量%以下含有することを特徴とする、請求項1又は2に記載のSi−SiC系複合材料。   The Si-SiC composite material according to claim 1 or 2, wherein oxygen is contained in an amount of 0.01% by mass to 2.0% by mass. 前記Al23及びムライトのうち少なくともいずれか1つの相がSiC粒子間に存在することを特徴とする、請求項1〜3のいずれか1項に記載のSi−SiC系複合材料。The Al 2 O 3 and at least one of the phases of the mullite is characterized in that present between SiC particles, Si-SiC-based composite material according to any one of claims 1 to 3. 800℃での強度が50MPa以上250MPa以下の範囲であることを特徴とする、請求項1〜4のいずれか1項に記載のSi−SiC系複合材料。   The Si-SiC composite material according to any one of claims 1 to 4, wherein the strength at 800 ° C is in a range of 50 MPa or more and 250 MPa or less. SiCとSiとを含み、
Al23及びムライトのうち少なくともいずれか1つの相が前記SiC粒子間に存在する構造を有することを特徴とする、Si−SiC系複合材料。
Including SiC and Si,
A Si—SiC based composite material characterized by having a structure in which at least one phase of Al 2 O 3 and mullite exists between the SiC particles.
Si−SiC系複合材料の製造方法であって、
SiCを含む被含浸体とSiを含む含浸金属供給体とを用い、該被含浸体及び該含浸金属供給体のうち少なくとも一方にAlを含み、常圧の不活性ガス雰囲気、1200℃以上1600℃以下の温度範囲で前記含浸金属供給体からのSiを含む溶融金属を前記被含浸体へ含浸処理する含浸工程、を含むことを特徴とする、Si−SiC系複合材料の製造方法。
A method for producing a Si-SiC composite material,
Using an impregnated body containing SiC and an impregnated metal supply body containing Si, at least one of the impregnated body and the impregnated metal supply body contains Al, and an inert gas atmosphere at normal pressure, 1200 ° C. or higher and 1600 ° C. An impregnation step of impregnating the object to be impregnated with a molten metal containing Si from the impregnated metal supply body in the following temperature range.
前記含浸工程では、Si及びAlを含む前記含浸金属供給体からの溶融金属を前記被含浸体へ含浸処理することを特徴とする、請求項7に記載のSi−SiC系複合材料の製造方法。   The method for producing a Si-SiC composite material according to claim 7, wherein in the impregnation step, the impregnated material is impregnated with molten metal from the impregnated metal supply body containing Si and Al. 前記含浸工程では、前記含浸金属供給体からの溶融SiをSiCとAlとを含む被含浸体へ含浸処理することを特徴とする、請求項7に記載のSi−SiC系複合材料の製造方法。   The method for producing a Si-SiC composite material according to claim 7, wherein in the impregnation step, the impregnated material containing SiC and Al is impregnated with molten Si from the impregnated metal supply body. 前記含浸工程では、Si及びAlを含む含浸金属供給体からの溶融金属をSiC及びAlを含む被含浸体へ含浸処理することを特徴とする、請求項7に記載のSi−SiC系複合材料の製造方法。   In the impregnation step, the molten metal from the impregnated metal supply body containing Si and Al is impregnated into the impregnated body containing SiC and Al, The Si-SiC based composite material according to claim 7, Production method. 前記含浸工程では、含浸後のSi−SiC系複合材料が、SiCを57質量%以上85質量%以下、Siを10.5質量%以上42.6質量%以下、Alを0.1質量%以上12.9質量%以下含み、重量比であるAl/Si比が1/99以上30/70以下となるよう、前記被含浸体と前記含浸金属供給体とを調製する、請求項7〜10のいずれか1項に記載のSi−SiC系複合材料の製造方法。   In the impregnation step, the Si-SiC composite material after impregnation is composed of SiC of 57% by mass to 85% by mass, Si of 10.5% by mass to 42.6% by mass, and Al of 0.1% by mass or more. The said to-be-impregnated body and the said impregnated metal supply body are prepared so that Al / Si ratio which is 12.9 mass% may be 1/99 or more and 30/70 or less including 12.9 mass% or less. The manufacturing method of the Si-SiC type composite material of any one. 前記含浸工程では、前記被含浸体と前記含浸金属供給体とを閉塞空間である鞘内部で前記含浸処理することを特徴とする、請求項7〜11のいずれか1項に記載のSi−SiC系複合材料の製造方法。   The Si-SiC according to any one of claims 7 to 11, wherein in the impregnation step, the impregnated body and the impregnated metal supply body are subjected to the impregnation treatment inside a sheath which is a closed space. Method for manufacturing a composite material. 前記含浸工程では、前記被含浸体よりも前記溶融金属との濡れ性が低い敷部材の上に該被含浸体を載置して前記含浸処理することを特徴とする、請求項7〜12のいずれか1項に記載のSi−SiC系複合材料の製造方法。   In the impregnation step, the impregnated body is placed on a floor member having lower wettability with the molten metal than the impregnated body, and the impregnation treatment is performed. The manufacturing method of the Si-SiC type composite material of any one. 請求項7〜13のいずれか1項に記載のSi−SiC系複合材料の製造方法であって、
前記溶融金属を前記被含浸体へ含浸したあとに、500℃以上1400℃以下の温度範囲で、大気雰囲気で該被含浸体を酸化処理する酸化処理工程、を含むこと特徴とする、Si−SiC系複合材料の製造方法。
It is a manufacturing method of Si-SiC system composite material given in any 1 paragraph of Claims 7-13,
An impregnation treatment step of oxidizing the impregnated body in an air atmosphere in a temperature range of 500 ° C. to 1400 ° C. after impregnating the impregnated body with the molten metal. Method for manufacturing a composite material.
前記酸化処理工程では、酸化増量が0.4質量%以上1.0質量%以下の範囲であることを特徴とする、請求項14に記載のSi−SiC系複合材料の製造方法。   The method for producing a Si-SiC composite material according to claim 14, wherein in the oxidation treatment step, an increase in oxidation is in a range of 0.4 mass% to 1.0 mass%. 請求項1〜6のいずれか1項に記載のSi−SiC系複合材料を含んで構成されていることを特徴とする、ハニカム構造体。   A honeycomb structure comprising the Si-SiC composite material according to any one of claims 1 to 6. 請求項1〜6のいずれか1項に記載のSi−SiC系複合材料を用いたことを特徴とする、熱伝導体。   A heat conductor using the Si-SiC composite material according to any one of claims 1 to 6. 請求項1〜6のいずれか1項に記載のSi−SiC系複合材料を用いたことを特徴とする、熱交換器。   A heat exchanger using the Si-SiC composite material according to any one of claims 1 to 6. 100℃より高温のガスと100℃以下の水とを熱交換することを特徴とする、請求項18に記載の熱交換器。   The heat exchanger according to claim 18, wherein heat exchange is performed between a gas having a temperature higher than 100 ° C. and water having a temperature of 100 ° C. or less.
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