JPWO2010023738A1 - 光非相反素子製造方法及び光非相反素子 - Google Patents
光非相反素子製造方法及び光非相反素子 Download PDFInfo
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- JPWO2010023738A1 JPWO2010023738A1 JP2009529451A JP2009529451A JPWO2010023738A1 JP WO2010023738 A1 JPWO2010023738 A1 JP WO2010023738A1 JP 2009529451 A JP2009529451 A JP 2009529451A JP 2009529451 A JP2009529451 A JP 2009529451A JP WO2010023738 A1 JPWO2010023738 A1 JP WO2010023738A1
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/09—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on magneto-optical elements, e.g. exhibiting Faraday effect
- G02F1/095—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on magneto-optical elements, e.g. exhibiting Faraday effect in an optical waveguide structure
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12061—Silicon
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12097—Ridge, rib or the like
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12157—Isolator
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/212—Mach-Zehnder type
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/06—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide
- G02F2201/063—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide ridge; rib; strip loaded
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/10—Materials and properties semiconductor
- G02F2202/105—Materials and properties semiconductor single crystal Si
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- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Nonlinear Science (AREA)
- Power Engineering (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
横井秀樹、他2名、「Si導波層を有する光非相反素子」、信学技報、電子情報通信学会、2004年2月、Vol.103、No.667(20040213)、pp.17-22
本実施態様は、上記の実施例に限定されることなく種々に変形して適用することが可能である。例えば、上記実施例では、非相反移相器について、2本の導波路における非相反な位相変化の差が、順方向において90°(逆方向において−90°)となるように設計し、相反移相器について、−90°となるように設計しているが、これらの符号が逆になっていてもよい。
Claims (4)
- 基板上に磁気光学材料層を成膜し、
前記磁気光学材料層の上にSi層を成膜し、
前記Si層に導波路を形成し、
前記導波路を伝播する光に非相反な位相変化を生じさせることができるように、前記磁気光学材料層を磁化する、光非相反素子製造方法。 - 前記磁気光学材料層を磁化することが、前記磁気光学材料層を前記導波路の光の伝播方向に対して垂直方向に磁化することである、請求の範囲第1項記載の光非相反素子製造方法。
- 前記磁気光学材料層が、前記基板上に結晶成長させた磁性ガーネットにより形成されている、請求の範囲第1項記載の光非相反素子製造方法。
- 導波路が形成されたSi導波層と、前記Si導波層の前記導波路が形成された面と反対側の面に接する磁気光学材料層と、を備え、
前記Si導波層が、前記磁気光学材料層の上に成膜されたSi層に導波路を形成することで得られたものであり、
前記磁気光学材料層が、前記導波路を伝播する光に非相反な位相変化を生じさせるように磁化されている、光非相反素子。
Applications Claiming Priority (1)
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PCT/JP2008/065331 WO2010023738A1 (ja) | 2008-08-27 | 2008-08-27 | 光非相反素子製造方法及び光非相反素子 |
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JPWO2010023738A1 true JPWO2010023738A1 (ja) | 2012-01-26 |
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JP2009529451A Pending JPWO2010023738A1 (ja) | 2008-08-27 | 2008-08-27 | 光非相反素子製造方法及び光非相反素子 |
Country Status (3)
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US (1) | US8306371B2 (ja) |
JP (1) | JPWO2010023738A1 (ja) |
WO (1) | WO2010023738A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9170440B2 (en) | 2008-07-01 | 2015-10-27 | Duke University | Polymer optical isolator |
US8587490B2 (en) * | 2009-07-27 | 2013-11-19 | New Jersey Institute Of Technology | Localized wave generation via model decomposition of a pulse by a wave launcher |
JP6338404B2 (ja) * | 2014-03-07 | 2018-06-06 | 国立大学法人東京工業大学 | 導波路型磁気光学デバイス及びその製造方法 |
US9829728B2 (en) | 2015-11-19 | 2017-11-28 | Massachusetts Institute Of Technology | Method for forming magneto-optical films for integrated photonic devices |
US11016317B2 (en) * | 2016-02-02 | 2021-05-25 | The Regents Of The University Of California | Reconfigurable integrated-optics-based non-reciprocal devices |
US10466515B2 (en) | 2016-03-15 | 2019-11-05 | Intel Corporation | On-chip optical isolator |
US20180059446A1 (en) * | 2016-08-29 | 2018-03-01 | Woosung Kim | Optical iso-modulator |
CN106405885A (zh) * | 2016-08-31 | 2017-02-15 | 欧阳征标 | 无泄漏磁光薄膜磁表面快波方向可控光二极管 |
CN106249443A (zh) * | 2016-08-31 | 2016-12-21 | 欧阳征标 | 磁光薄膜磁表面快波方向可控光二极管 |
CN106226925A (zh) * | 2016-08-31 | 2016-12-14 | 欧阳征标 | 无泄漏磁光薄膜磁表面快波光二极管 |
JP2021527839A (ja) | 2018-04-04 | 2021-10-14 | ザ リサーチ ファンデーション フォー ザ ステート ユニバーシティ オブ ニューヨーク | 集積フォトニクスプラットフォーム上の異質構造体 |
US10614843B2 (en) * | 2018-07-17 | 2020-04-07 | Seagate Technology Llc | Input coupler with features to divert stray light from a waveguide |
CN112596157B (zh) * | 2020-12-22 | 2024-06-18 | 浙江大学绍兴微电子研究中心 | 一种硅基磁光非互易条形光波导 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0743654A (ja) * | 1993-08-02 | 1995-02-14 | Kyocera Corp | 磁気光学導波路 |
JPH07318876A (ja) * | 1994-05-19 | 1995-12-08 | Nippon Telegr & Teleph Corp <Ntt> | 光非相反回路 |
JPH0868965A (ja) * | 1994-08-31 | 1996-03-12 | Nippon Telegr & Teleph Corp <Ntt> | 光非相反回路 |
JP2000338450A (ja) * | 1999-05-26 | 2000-12-08 | Nippon Telegr & Teleph Corp <Ntt> | 光非相反回路 |
JP2003302603A (ja) * | 2002-04-11 | 2003-10-24 | Tokyo Inst Of Technol | 干渉計型光アイソレータ及び光サーキュレータ |
JP2004240003A (ja) * | 2003-02-04 | 2004-08-26 | Rikogaku Shinkokai | シリコン導波層を有する磁気光学導波路及びそれを用いた光非相反素子 |
JP2007219285A (ja) * | 2006-02-17 | 2007-08-30 | Mitsumi Electric Co Ltd | 導波路型光アイソレータ用磁石ホルダ及びそれを利用した導波路型光アイソレータ |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001081989A2 (en) * | 2000-04-20 | 2001-11-01 | The Trustees Of Columbia University In The City Of New York | Waveguide mach-zehnder optical isolator |
JP2001350039A (ja) | 2000-06-06 | 2001-12-21 | Tokyo Inst Of Technol | 光アイソレータ及び光エレクトロニクス装置 |
JP4851122B2 (ja) | 2005-06-13 | 2012-01-11 | 住友大阪セメント株式会社 | 光学素子及びその製造方法 |
WO2009059144A1 (en) * | 2007-11-01 | 2009-05-07 | Massachusetts Institute Of Technology | Magnetic material for magneto-optical isolator |
-
2008
- 2008-08-27 US US12/665,435 patent/US8306371B2/en not_active Expired - Fee Related
- 2008-08-27 WO PCT/JP2008/065331 patent/WO2010023738A1/ja active Application Filing
- 2008-08-27 JP JP2009529451A patent/JPWO2010023738A1/ja active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH0743654A (ja) * | 1993-08-02 | 1995-02-14 | Kyocera Corp | 磁気光学導波路 |
JPH07318876A (ja) * | 1994-05-19 | 1995-12-08 | Nippon Telegr & Teleph Corp <Ntt> | 光非相反回路 |
JPH0868965A (ja) * | 1994-08-31 | 1996-03-12 | Nippon Telegr & Teleph Corp <Ntt> | 光非相反回路 |
JP2000338450A (ja) * | 1999-05-26 | 2000-12-08 | Nippon Telegr & Teleph Corp <Ntt> | 光非相反回路 |
JP2003302603A (ja) * | 2002-04-11 | 2003-10-24 | Tokyo Inst Of Technol | 干渉計型光アイソレータ及び光サーキュレータ |
JP2004240003A (ja) * | 2003-02-04 | 2004-08-26 | Rikogaku Shinkokai | シリコン導波層を有する磁気光学導波路及びそれを用いた光非相反素子 |
JP2007219285A (ja) * | 2006-02-17 | 2007-08-30 | Mitsumi Electric Co Ltd | 導波路型光アイソレータ用磁石ホルダ及びそれを利用した導波路型光アイソレータ |
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US8306371B2 (en) | 2012-11-06 |
US20110158578A1 (en) | 2011-06-30 |
WO2010023738A1 (ja) | 2010-03-04 |
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