JPWO2009041682A1 - Detection device and measurement device - Google Patents

Abstract

With respect to the applied force, a force in a predetermined direction is extracted and accurately detected, and distortion in a direction other than the predetermined direction is reduced. Changes in the magnetic field formed by the magnets 4 in the vicinity of the pair of Hall elements 5 due to the relative displacement along the predetermined direction between the block 1 and the rail 2 and the block 1 and the rail 2 that are configured to be movable relative to each other in a predetermined direction. And a leaf spring 9 that applies a restoring force in a direction that reduces the relative displacement with respect to the block 1 and / or the rail 2. The direction of the magnetic pole of the magnet 4 is provided at an angle with respect to a predetermined direction of relative movement. The Hall element 5 outputs a signal based on the relative displacement amount based on the relative displacement amount of the rail 2 with respect to the block 1 due to the external force applied to the block 1 from the outside.

Description

The present invention relates to a dynamic physical quantity detection device or measurement device such as a position detection device and a position measurement device, a force detection device and a force measurement device, a speed detection device and a speed measurement device, an acceleration detection device and an acceleration measurement device, and the like. In particular, the present invention is suitable for application to a precision force measuring device and a force sensor that detect minute changes in force.

For example, the pressure detection will be described as an example. Conventionally, a diaphragm type pressure sensor is known as a pressure sensor that can be accurately detected even in a usage situation in which pressure is suddenly applied. FIG. 22 shows such a conventional pressure sensor.

As shown in FIG. 22, the pressure sensor 100 includes a pressure plate portion 109 that is in close contact with the substantially entire surface of the inner wall 103 b of the diaphragm portion 103 in a cylindrical pressure receiving chamber 102 in which a thin diaphragm portion 101 is formed at an end portion. The pressure receiving body 108 including the pressure plate portion 109 is accommodated in a state where the pressure plate portion 109 is in close contact with the inner wall 103 b of the diaphragm portion 103 via the spring 110. And the diaphragm part 103 receives a pressure via the pressure receiving body 108, and is a structure which acquires a pressure signal from the strain gauge 107 (refer patent document 2).

Moreover, what was described in patent document 3 is proposed as a beam type load sensor. The beam type load sensor 200 is shown in FIG.

That is, the beam-type load sensor 200 includes a fixed portion 201 fixed to the base portion, a loading portion 202, upper and lower beams (beams) 203 and 204, and an intermediate portion 205 sandwiched between the upper and lower beams 203 and 204 via a space. 206, a rectangular applied load portion 207 fixed to the loading portion 202. A strain gauge 208 is installed on one surface of the thin wall between the intermediate portion 205 and the intermediate portion 206. The strain gauge 208 is constituted by a thin film chip.

The strain gauge 208 is provided at the center of the rectangular applied load portion 207 at the center of the beams 203 and 204 in the longitudinal direction of the beams 203 and 204. Further, the strain gauge 208 is obtained from the correlation between the shape and size of the entire components of the beam-type load sensor and the thickness and shape of the thin wall between the intermediate portion 205 and the intermediate portion 206 in the thickness direction of the beams 203 and 204. It is provided on a moment zero line that becomes the center of twist of the required beams 203 and 204.

The pressure sensor 100 and the beam-type load sensor 200 can be applied to applications other than industrial use, such as home use, care use, or medical use. Therefore, it is necessary to realize an inexpensive and robust sensor as a market demand.

However, a force detection device called a load cell, such as a pressure sensor or a load sensor using the above-described conventional strain gauge, has structural problems and strain gauge problems.

That is, as a structural problem, it is necessary to make a very complicated beam structure so that a force on a predetermined axis does not affect other axes. Further, since the displacement amount of the beam structure is a force sense detection target, the S / N ratio is lowered. Furthermore, since the displacement amount of the beam structure is a force sense detection target, errors such as strain accumulate.

Also, as a problem on the strain gauge, since it is manually bonded to the inspector, the accuracy is not uniform by the operator, requiring work, inspection, calibration man-hours, etc. There is a problem of becoming. And, due to these reasons, there is a problem that it is vulnerable to disturbances such as vibration, impact, and temperature.

JP 2007-187596 A Japanese Patent Laid-Open No. 10-062279 Japanese Patent Application Laid-Open No. 07-229799

Therefore, an object of the present invention is to extract only a mechanical physical quantity such as a force along a preset direction with respect to an applied force, and to perform detection more accurately. Another object of the present invention is to provide a dynamic physical quantity detection device and a measurement device capable of reducing distortion in a direction other than that along the direction and reducing the cost of manufacturing a product.

In order to achieve the above object, the first invention of the present invention provides:

A first moving body and a second moving body configured to be able to move relative to each other in a predetermined direction;

A magnetoelectric conversion element that is provided in the first moving body and outputs a voltage based on the magnitude of a magnetic field;

Magnetic field generating means provided on the second moving body and capable of generating a magnetic field,

Due to the relative displacement of the second moving body with respect to the first moving body, a signal corresponding to a change in the magnetic field in the vicinity of the magnetoelectric conversion element in the magnetic field formed by the magnetic field generating means is output from the magnetoelectric conversion element. A detecting device for measuring the relative displacement amount,

The magnetic field generator is provided such that the direction of the magnetic pole connecting the S pole and the N pole of the magnetic field generator is at an angle with respect to the predetermined direction of motion.

This is a detection device characterized by that.

The second invention of the present invention is:
A first moving body and a second moving body configured to be able to move relative to each other in a predetermined direction;

Detecting means for outputting a signal based on a relative displacement amount of the first moving body and the second moving body along the predetermined direction;

Restoring means for applying a restoring force in a direction to reduce the relative displacement amount with respect to at least one of the first moving body and the second moving body;

A signal is output from the detection means based on a relative displacement amount of the second moving body with respect to the first moving body due to an external force applied to the second moving body from the outside.

This is a detection device characterized by that.

The third invention of the present invention is:
The detection means includes

A magnetoelectric conversion element that is provided in the first moving body and outputs a voltage based on the magnitude of a magnetic field;

Magnetic field generating means provided on the second moving body and capable of generating a magnetic field,

Due to the relative displacement of the second moving body with respect to the first moving body caused by the external force applied to the second moving body from the outside, the vicinity of the magnetoelectric conversion element in the magnetic field formed by the magnetic field generating means A signal based on the amount of relative displacement is output from the detection means by outputting a signal corresponding to a change in the magnetic field from the magnetoelectric transducer.

The detection device according to claim 2.

Thus, by providing a so-called beam structure that moves by the action of an external force and a displacement amount detection unit that detects the displacement amount of the beam structure, the distortion of the beam structure does not affect the detection device. Therefore, it is possible to obtain a mechanical physical quantity detection device that is more robust and more reproducible than the conventional detection device that measures the magnitude of the external force by strain of the strain gauge. In addition, as a physical physical quantity in this invention, force, speed, acceleration, a position, etc. can be mentioned, for example.

The present invention also provides:
The restoring means includes an elastic member,
The first moving body and the second moving body are coupled to each other by the elastic member,

When the elastic members apply restoring forces in opposite directions to the first moving body and the second moving body, the restoring forces act in a direction in which the amount of relative displacement decreases.

You may do it.

The present invention also provides:
The magnetoelectric transducer is provided in a pair, and the magnetic field generating means is a magnet,

The direction of the magnetic pole connecting the S pole and the N pole in the magnet may be at an angle of 45 ° to 70 ° with respect to the arrangement direction of the pair of magnetoelectric transducers.

The present invention also provides:
The first moving body and the second moving body may be regulated so as to be able to move relative to each other via a rolling element.

The present invention also provides:
The first moving body and the second moving body may be coupled and regulated, and the relative motion between the first moving body and the second moving body may be a linear motion. .

The present invention also provides:

The magnetoelectric conversion element is a Hall element

It is good as well.

The present invention also provides:
The detecting means has a strain gauge;

The strain gauge may be distorted by the relative displacement of the second moving body, and the signal may be output based on the strain of the strain gauge.

The present invention also provides:
The restoring means includes an elastic member,
Force transmission means for transmitting force between the elastic member and the second movable body;

The strain gauge is fixed to the elastic member;

Due to the relative displacement of the second moving body relative to the first moving body, a force is transmitted from the second moving body to the elastic member through the force transmitting means, and the strain gauge is distorted. You may do it.

The present invention also provides:

The restoring means is provided on the first moving body and the second moving body, and acts on the restoring force by a repulsive force generated between magnets disposed so that magnetic poles of the same polarity face each other. You may make it make it.

The present invention also provides:
The second moving body is coupled to the first moving body through a rolling ball train at a plurality of locations as viewed from the predetermined direction so as to be relatively movable,

The detection means includes

N poles and S poles are alternately arranged in the predetermined direction on a plane that is perpendicular to the plane including the rolling ball rows at specific two of the plurality of locations and parallel to the predetermined direction. A plurality of magnetic field generating means arranged on one of the first moving body and the second moving body,

A magneto-electric conversion element that is provided on the other of the first moving body and the second moving body and outputs a voltage based on the magnitude of the magnetic field,

A signal corresponding to the magnetic field in the vicinity of the magnetoelectric conversion element in the magnetic field formed by the magnetic field generating unit is output from the magnetoelectric conversion element by the relative displacement of the second moving body with respect to the first moving body. It may be.

The present invention also provides:
Two magnetoelectric transducers are arranged in the same posture in the vertical direction with respect to the arrangement direction of the plurality of magnetic field generating means,

A difference between outputs from the two magnetoelectric transducers may be used as the output of the detection means.

In the present invention, the detecting means is

In a plane parallel to the predetermined direction, a plurality of elements arranged on one of the first moving body and the second moving body so that the N pole and the S pole are alternately arranged in the predetermined direction. Magnetic field generating means;

A magneto-electric conversion element that is provided on the other of the first moving body and the second moving body and outputs a voltage based on the magnitude of the magnetic field,

Due to the relative displacement of the second moving body with respect to the first moving body, a signal corresponding to the magnetic field in the vicinity of the magnetoelectric conversion element in the magnetic field formed by the magnetic field generating means is output from the magnetoelectric conversion element,

Two magnetoelectric transducers are arranged in the same posture in the vertical direction with respect to the arrangement direction of the plurality of magnetic field generating means,

A difference between outputs from the two magnetoelectric transducers may be used as the output of the detection means.

The present invention also provides:
Any one of the above detection devices;

Amplifying means for amplifying a signal output from the detection device;

And a signal detection means provided with an output unit for outputting the magnitude of the component in the predetermined direction of the physical quantity detected by the force detection device based on the signal output from the detection device. Have

The measuring device characterized by this may be used.

In the present invention, typically, the first moving body and the second moving body are coupled and regulated, and the relative movement between the first moving body and the second moving body is a linear motion. is there. That is, in the present invention, the relative motion in the predetermined direction is a relative linear motion, and in this case, the linear motion guide device is configured to include the first moving body and the second moving body. Is done. It is also possible to configure a curved motion guide device having a first moving body and a second moving body so that the relative motion in a predetermined direction is a curved motion such as a circular motion or an arc motion. .

In the present invention, typically, the first moving body is provided with a magnetoelectric conversion element, and the second moving body is provided with a magnet to constitute a detecting means. The first moving body and the second moving body A signal is output from the magnetoelectric conversion element due to a change in the magnetic field by the magnet in the vicinity of the magnetoelectric conversion element accompanying relative movement with the moving body. Typically, when a magnetoelectric conversion element is used as the detection means, a Hall element that is typically a magnetoelectric conversion element utilizing the Hall effect is employed. For example, a magnetoresistive element (MR element) It is also possible to employ other magnetoelectric conversion elements such as. According to this configuration, since the force detection is performed using the magnetoelectric conversion element such as the Hall element and the magnet, the displacement detection unit and the beam structure can be configured separately. It is possible to improve the reproducibility (repeatability).

In the present invention, preferably, a pair of magnetoelectric conversion elements are provided, the magnetic field generating means is composed of a magnet, and the direction of the magnetic pole connecting the S pole and the N pole in the magnet is such that the magnetoelectric elements such as the pair of Hall elements. It is inclined with respect to the arrangement direction of the conversion element by a predetermined angle (90 ° −θ). (For example, the angle is not less than 45 ° and not more than 70 °.) That is, according to the configuration in which the predetermined direction is the direction perpendicular to the arrangement direction of the magnetoelectric transducer, the predetermined direction is The magnet as the magnetic field generating means is arranged so that the magnetic pole of the magnet is inclined by a predetermined angle θ. According to this configuration, by using a plurality of magnetic circuits in which the magnets are tilted and the magnetoelectric conversion elements for detecting magnetism, a larger output is obtained compared to the case where the magnetoelectric conversion elements are used alone (one). Can be obtained. In addition, as a magnet, it is possible to employ | adopt a normal fixed magnet and an electromagnet.

In the present invention, typically, the first moving body is a block in the linear guide, and the second moving body is a rail in the linear guide. Conversely, the first moving body is a rail, and the second moving body is a rail. It is also possible to use the moving body as a block. That is, a first moving body having a pair of side walls provided in parallel with each other at a predetermined interval and a reciprocating movement in the longitudinal direction of the first moving body inserted between the side walls of the first moving body are provided. It is desirable to have a configuration having a second moving body. In general, when measuring an external force, it is preferable to fix a moving body on a side different from the moving body to which the external force is applied. In the present invention, preferably, the first moving body and the second moving body are regulated so as to be able to move relative to each other via the rolling elements.

  In the present invention, as another typical example, the detecting means has a strain gauge, the strain gauge is distorted by the relative displacement of the second moving body, and a signal is output based on the strain of the strain gauge. It is configured to be.

In this invention, it is preferable that the first moving body and the second moving body are coupled to each other by the elastic member, and the restoring force in the opposite direction is applied to the first moving body and the second moving body by the elastic member. By acting, the restoring force is configured to act in a direction in which the relative displacement amount decreases.

The present invention also provides:

A first moving body and a second moving body configured to be able to move relative to each other in a predetermined direction;

A magnetoelectric conversion element that is provided in the first moving body and outputs a voltage based on the magnitude of a magnetic field;

Magnetic field generating means provided on the second moving body and capable of generating a magnetic field,

Due to the relative displacement of the second moving body with respect to the first moving body, a signal corresponding to a change in the magnetic field in the vicinity of the magnetoelectric conversion element in the magnetic field formed by the magnetic field generating means is output from the magnetoelectric conversion element. A force detection device for measuring the relative displacement amount,

The magnetic field generator is provided such that the direction of the magnetic pole connecting the S pole and the N pole of the magnetic field generator is at an angle with respect to the predetermined direction of motion.

The force detection apparatus characterized by this may be sufficient.

The present invention also provides:
A first moving body and a second moving body configured to be able to move relative to each other in a predetermined direction;

Detecting means for outputting a signal based on a relative displacement amount of the first moving body and the second moving body along the predetermined direction;

An elastic member that applies a restoring force in a direction to reduce the relative displacement amount with respect to at least one of the first moving body and the second moving body;

A signal is output from the detection means based on a relative displacement amount of the second moving body with respect to the first moving body due to an external force applied to the second moving body from the outside.

The force detection apparatus characterized by this may be sufficient.

In the present invention, the detecting means comprises:

A magnetoelectric conversion element that is provided in the first moving body and outputs a voltage based on the magnitude of a magnetic field;

Magnetic field generating means provided on the second moving body and capable of generating a magnetic field,

Due to the relative displacement of the second moving body with respect to the first moving body caused by the external force applied to the second moving body from the outside, the vicinity of the magnetoelectric conversion element in the magnetic field formed by the magnetic field generating means A signal based on the amount of relative displacement is output from the detection means by outputting a signal corresponding to a change in the magnetic field from the magnetoelectric transducer.

The force detection device described above may be used.

The present invention also provides:
The first moving body and the second moving body are coupled to each other by the elastic member,

When the elastic members apply restoring forces in opposite directions to the first moving body and the second moving body, the restoring forces act in a direction in which the amount of relative displacement decreases.

The force detection device described above may be used.

The present invention also provides:
The magnetoelectric transducer is provided in a pair, and the magnetic field generating means is a magnet,

The direction of the magnetic pole connecting the S pole and the N pole in the magnet forms an angle of 45 ° or more and 70 ° or less with respect to the arrangement direction of the pair of magnetoelectric transducers.

The force detection device described above may be used.

The present invention also provides:
The first moving body and the second moving body are regulated to be able to move relative to each other via a rolling element.

The force detection device described above may be used.

The present invention also provides:
The first moving body and the second moving body are coupled to each other and regulated, and the relative motion between the first moving body and the second moving body is a linear motion.

The force detection device described above may be used.

The present invention also provides:
The magnetoelectric conversion element is a Hall element

The force detection device described above may be used.

The present invention also provides:
The detecting means has a strain gauge;

The strain gauge is distorted by the relative displacement of the second moving body, and the signal is output based on the strain of the strain gauge.

The force detection device described above may be used.

The present invention also provides:
Force transmission means for transmitting force between the elastic member and the second movable body;

The strain gauge is fixed to the elastic member;

Due to the relative displacement of the second moving body relative to the first moving body, a force is transmitted from the second moving body to the elastic member through the force transmitting means, and the strain gauge is distorted.

The force detection device described above may be used.

The present invention also provides:
The force detection device,

Amplifying means for amplifying the signal output from the force detection device;

And a signal detection unit provided with a display unit for displaying the magnitude of a component in a predetermined direction of the external force applied to the force detection device based on a signal output from the force detection device.

The force measuring device characterized by this may be used.

As described above, according to the present invention, with respect to the applied force, only a mechanical physical quantity along a preset direction can be extracted and detected more accurately, and the force along this direction can be detected. It is possible to reduce distortion in directions other than the above and to reduce costs.

1 is a block diagram illustrating an overall configuration of a force measuring device according to a first embodiment of the present invention. They are a top view (Drawing 2A), a side sectional view (Drawing 2B), and a transverse cross section (Drawing 2C) which show a force sensing device by a 1st embodiment of this invention. It is a side view (Drawing 3A) and a top view (Drawing 3B) for explaining an experimental method in arrangement of a hall element, and inclination of a permanent magnet in the case of using a hall element by an embodiment of this invention. It is a graph which shows the feeding amount dependence of an output voltage for every attachment angle of the square magnet (W10xL10) with respect to arrangement | positioning of a Hall element. It is a graph which shows the feed amount dependence of an output voltage for every attachment angle of the strip magnet (W3xL10) with respect to arrangement | positioning of a Hall element. It is a graph which shows the feed amount dependence of an output voltage for every attachment angle of the neodymium magnet ((phi) 3.2x2) with respect to arrangement | positioning of a Hall element. It is a top view (Drawing 7A), a side sectional view (Drawing 7B), and a transverse cross section (Drawing 7C) which show a force sensing device by a 2nd embodiment of this invention. It is a top view (Drawing 8A), a side sectional view (Drawing 8B), and a transverse cross section (Drawing 8C) showing a force sensing device by a 3rd embodiment of this invention. It is the top view (Drawing 9A), side sectional view (Drawing 9B), and transverse cross section (Drawing 9C) which show the force sensing device by a 4th embodiment of this invention. It is the sectional side view (FIG. 10A) which shows another example of the force detection apparatus by 4th Embodiment of this invention, and the figure (FIG. 10B) which extracted a part of top view. It is a top view (Drawing 11A), a side view (Drawing 11B), and a figure about arrangement of a hall element and a magnet row (Drawing 11C) which shows a force sensing device by a 5th embodiment of this invention. It is a figure as a comparative example shown about the influence of the inclination of a block in the case of detecting the change of the relative position of the block with respect to a rail. It is a figure shown about the influence of the inclination of a block in the case of detecting change of the relative position of a block to a rail in a 5th embodiment of this invention. In the 5th Embodiment of this invention, it is a figure shown about the structure for taking the difference of the output signal obtained from two Hall elements, and making it the relative position signal of the block with respect to a rail. A top view (FIG. 15A), a side view (FIG. 15B), a front view (FIG. 15C), and a top view (FIG. 15D) showing a force detection device regarding the arrangement of Hall elements and magnet arrays in the sixth embodiment of the present invention. It is. It is a top view about other examples of arrangement of a hall element and a magnet row in a 6th embodiment of this invention. It is the upper sectional view (Drawing 17A) and the side sectional view (Drawing 17B) which show the force sensing device by a 7th embodiment of this invention. It is side sectional drawing (FIG. 18A, B) which shows the other example of the force detection apparatus by 7th Embodiment of this invention. It is a sectional side view (FIG. 19A, B) which shows the acceleration pick-up by 8th Embodiment of this invention. It is a top view (Drawing 20A) and a perspective view (Drawing 20B) of a leaf spring showing a force sensing device by a 9th embodiment of this invention. FIG. 21A is a top view (FIG. 21A) and a side view (FIG. 21B) showing a force detection device according to a reference embodiment of the present invention, and FIG. 21C is a plan view showing a gauge part. It is sectional drawing which shows the diaphragm type | mold force detection apparatus by a prior art. It is a perspective view which shows the shear (beam) type | mold force detection apparatus by a prior art.

Explanation of symbols

1 rail

1b recess

2 blocks

2a Rolling elements

2b groove

2c recess

3 cage

3a Rolling element

4 Magnet

5 Hall element

5a output line

6 Connector

7 Elastic material

8 Fixing screws

9 Leaf spring

10 Force detector

11 Spacer

12 Stopper

13 Elastic material

14 Bonding plate

15 gauge plate

16 Strain gauge

17 Sphere

20 Amplifier

30 External signal detector

30a Display section

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings of the following embodiments, the same or corresponding parts are denoted by the same reference numerals.

(First embodiment)

First, a force measuring device according to a first embodiment of the present invention will be described. FIG. 1 shows the overall configuration of the force measuring device according to the first embodiment.

(Force detection device)

As shown in FIG. 1, the force measuring device according to the first embodiment includes a force detecting device 10 that detects an external force and outputs a signal based on the magnitude of the external force. Then, the force measurement device includes an amplifier 20 as an amplification unit that amplifies the signal output from the force detection device 10 and an external signal detection as a signal detection unit that detects the voltage value of the signal amplified by the amplifier 20. And a container 30. In addition, the external signal detector 30 is provided with a display unit 30a as an output unit that outputs, as a value based on the voltage value, for example, the magnitude of an external force based on the voltage value to the outside as a display.

In the force detection device configured as described above, the external force measured by the force detection device 10 is output as a voltage value corresponding to the external force, amplified by the amplifier 20, and then in the external signal detector 30. For example, it is converted into a force value displayed in units of N (Newton) or kgf (kg weight) and displayed on the display unit 30a. As will be described later, since the output from the force detection device 10 is an output from the magnetoelectric conversion element and is often a weak current, the amplifier 20 and the external signal detector 30 are used to reduce noise. A low-pass filter (LPF) is provided to reduce noise. In the above description, the output unit is the display unit 30a that displays the force value together with the unit of N (Newton) or kgf (kg weight). However, the output unit displays the magnitude of the force in a visually recognizable form. It is not limited to what is output. It includes everything that has a function of outputting the magnitude of force to a separately prepared display, LED, or other device.

(Force detection device 10)

Next, the force detection device according to the first embodiment will be described. FIG. 2 shows the force detection device 10 according to the first embodiment.

As shown in FIG. 2, in the force detection device 10 according to the first embodiment, a block 1, a rail 2, a cage 3, a magnet 4, a hall element 5 as a pair of magnetoelectric conversion elements, a connector 6, and a leaf spring. 9.

As shown in FIG. 2C, the U-shaped block 1 and the rectangular rail 2 include a rolling element 2 a in which an inner peripheral portion of the block 1 and an outer peripheral portion of the rail 2 are provided on the side wall of the rail 2. And it is comprised so that relative motion is possible via the rolling element 3a hold | maintained at the holder | retainer 3. FIG. That is, the block 1 and the rail 2 constitute a linear guide that relatively linearly moves. In this invention, the block 1 is the first moving body and the rail 2 is the second moving body. However, the block 1 may be the second moving body and the rail 2 may be the first moving body. .

Further, as shown in FIGS. 2A and 2B, a groove 2 b is formed on the upper surface of the rail 2. The groove 2b is formed so as to be able to hold the magnet 4 as the magnetic field generating means while being inclined with respect to the longitudinal direction of the rail 2. That is, the magnet 4 is configured to be interlocked with the motion of the rail 2. In the first embodiment, the magnet 4 has an NS magnetic pole direction that is at an angle θ with respect to the longitudinal direction of the rail 2, that is, the relative movement direction of the block 1 and the rail 2. And disposed inside the groove 2b. Here, this angle θ is, for example, 30 ° (θ = 30 °).

The block 1 has a recess 1b. A pair of Hall elements 5 are disposed in the recess 1b so as to face each other. That is, the pair of hall elements 5 are arranged so that the arrangement direction thereof is perpendicular to the movement direction of the block 1 so as to be interlocked with the movement of the block 1.

The output from the Hall element 5 is supplied to the connector 6 through the output line 5a. Although the output terminals of the Hall element 5 used in the first embodiment are, for example, four terminals, it goes without saying that Hall elements other than the Hall element 5 may be employed. Then, a conductor terminal (not shown) is connected to the connector 6 and connected to the amplifier 20 shown in FIG. 1 through this conductor, so that an output signal from the force detection device 10 can be supplied to the amplifier 20. Yes.

Further, the leaf spring 9 as an elastic member is provided on the end surface in the moving direction of the block 1 and the rail 2 using a fixing screw 8 so as to resist the movement of the block 1 and the rail 2. Further, as shown in FIG. 2C, the leaf spring 9 has a portion that follows the shape of both sides of the U-shaped block 1 and a portion that follows the rectangular shape of the rail 2 compared to these portions. And connected by thin portions. According to the knowledge of the present inventor, it is possible to maintain high reproducibility of the restoration of the spring by making the leaf spring 9 into the shape shown in FIG. 2C. The leaf spring 9 is fixed to the block 1 and the rail 2 by a fixing screw 8. That is, the block 1 and the rail 2 are fixed to each other by the fixing screw 8 and the leaf spring 9.

In addition, the spacer 11 is provided so that the length along the longitudinal direction of the rail 2, that is, the length along the movement direction is longer than the length along the longitudinal direction of the block 1. In the first embodiment, as shown in FIG. 2A, spacers 11 are provided on both sides so as to be about 100 μm long, for example. It is also possible to obtain a similar configuration by forming the rail 2 longer than the block 1 without providing the spacer 11.

Thus, by providing, for example, the spacer 11 so that the rail 2 is longer than the block 1, a pair of pressing forces directed inward along the moving direction from the leaf springs 9 on both sides acts on the rail 2. Thus, when the pressing force from the leaf springs 9 on both side end surfaces is applied to the rail 2 and the resultant force of these applied forces becomes zero, the block 1 and the rail 2 are in a relatively stable state.

In other words, in the stable state, the pressing force in the moving direction acts on the rail 2 from both sides, so that the force acting on the rail 2 becomes 0, and the rail 2 moves relative to the block 1 and is displaced. In the displacement state, a force (restoring force) is applied in the direction opposite to the moving direction.

At this time, the configuration is such that a pressing force is applied from each leaf spring 9 even in a stable state, thereby preventing output disturbance from the Hall element 5 based on the amount of movement of the rail 2. It becomes possible.

That is, if the block 1 and the rail 2 are made the same length without providing the spacer 11, the pressing force from the leaf spring 9 is applied when the both ends of the block 1 and the rail 2 are on the same plane. Although it disappears and becomes stable, the response of the magnetoelectric conversion in the Hall element 5 when the rail 2 is moved minutely becomes slow, so that the output is disturbed. On the other hand, by providing the spacer 11 as in the first embodiment, a force is always applied to the rail 2 by the leaf springs 9 on both side end surfaces, and therefore a restoring force is always applied even if the movement is minute. As a result, the output from the Hall element 5 is stabilized.

(Force detection principle)

Next, the principle of force detection using the force detection device 10 based on the above configuration will be described.

That is, it is assumed that a force (external force) other than the force by the leaf spring 9 is applied to the rail 2 in a state where the block 1 is fixed. In this case, of the external force, the rail 2 is moved along the force component along the relative movement direction of the block 1 and the rail 2. As a result, one pole of the magnet 4 approaches the Hall element 5 and the other pole moves away. For example, when the rail 2 moves to the right in FIG. 2A, the N pole of the magnet 4 approaches the Hall element 5 and the S pole moves away.

As the rail 2 moves, the magnetic field around the pair of Hall elements 5 changes. The Hall effect is generated by the change in the magnetic field, and a voltage value based on the movement amount (hereinafter referred to as the feed amount) of the rail 2 from the Hall element 5 is output as a signal. The dependency of the output voltage on the amount of feed when the magnet 4 having the magnetic pole inclined with respect to the moving direction is displaced relative to the pair of Hall elements 5 will be described later.

The output signal is supplied to the connector 6 through the output line 5 a and input to the amplifier 20. The signal amplified in the amplifier 20 is supplied to the external signal detector 30, and the magnitude of the moving direction component of the external force described above is displayed on the display unit 30a based on the voltage value of this signal.

As described above, when an external force is applied to the rail 2, the force component along the relative movement direction of the rail 2 and the block 1 can be selectively measured. In this embodiment, the detection means includes the Hall element 5 and the magnet 4. The restoring means includes a leaf spring 9.

(Dependence of feed amount on Hall element output voltage for each magnet mounting angle)

Next, discussion will be made on the arrangement method of the Hall element as a kind of magnetoelectric conversion element and the attachment angle θ of the magnet by the present inventor who came to recall the above-described force detection principle. 3A and 3B show the positional relationship between the Hall element and the magnet in the experiments and considerations of the present inventors.

As shown in FIG. 3A, in the experiment on the feed amount dependency on the output voltage of the Hall element 5, the two Hall elements 5 are paired with a predetermined distance D (mm) (D = 3.2 in this case). The magnet 4 is provided at a position separated by d (mm) (here, d = 1.0) from the direction in which the two Hall elements 5 are arranged. And a magnet uses three types of magnets.

That is, a rectangular rubber magnet (solid line in FIG. 3) having a width W of 10 mm and a length L of 10 mm is used as the first magnet, and a rubber magnet having a width W of 3 mm and a length L of 10 mm as the second magnet. (The two-dot chain line in FIG. 3) is used, and a neodymium magnet (dotted line in FIG. 3) having a cylindrical shape, a circular diameter of φ3.2 mm, and a thickness of 2 mm is used as the third magnet. Each magnet 4 is tilted by an angle θ (mounting angle θ) shown in FIG. 3B with respect to the arrangement direction of the two Hall elements 5 and is moved relatively in the arrow direction in FIG. 3B. In this experiment, the output is adjusted so that the output voltage becomes 0 when the attachment angle θ of the magnet 4 (second magnet) is 0 °.

In the experiment with the above configuration, the first magnet, the second magnet, and the third magnet are used to determine the output voltage dependence of the Hall element 5 depending on the amount of movement (feed amount) (μm), and the respective angle θ. The changed results are shown in FIGS. 4, 5, and 6, respectively.

In parallel with the measurements in FIGS. 4, 5, and 6, two Hall elements 5 are arranged side by side in a straight line that forms an angle (90 ° −θ) with respect to the direction of the NS magnetic pole on both sides of the magnet 4. It has been confirmed that the output voltage from the Hall element 5 can be quadrupled as compared with the case of using one Hall element with a single magnetic pole. That is, two Hall elements 5 are provided, and in each Hall element 5, the influence from the N pole and the influence from the S pole respectively affect the output voltage. 4 times the voltage output was obtained.

4 to 6, when the mounting angle θ is reduced, the first magnet (rubber magnet (W10 × L10)), the second magnet (rubber magnet (W3 × L10)), and the third magnet (neodymium). It can be seen that the linearity of the output voltage characteristic with respect to the feed amount (μm) is good in any case of the magnet). Further, from FIGS. 4 and 5, it can be seen that good linearity is obtained near the center of the range, and by comparing with FIG. 4, the characteristics of the rubber magnet and the neodymium magnet are good. You can see that it does n’t change.

Furthermore, the present inventor has made various studies based on the above experimental results and has conducted intensive studies. As a result, the mounting angle and output voltage of each magnet 4 are significantly reflected in the inclination of the graph as the magnetic force of the magnet 4 increases or the distance between the Hall element 5 and the magnet decreases. It came to know.

In addition, since the magnet has a rectangular shape, the output voltage becomes gentle due to the correlation between the lines of magnetic force and the air gap, and when the first magnet or the second magnet is attached at an angle of 45 degrees, The inventors have also found that the voltage feed rate dependence characteristics are extremely gentle.

That is, a pair of Hall elements 5 are provided, the magnet 4 is inclined by an angle θ with respect to the moving direction of the block 1, and the pair of Hall elements 5 and the magnet 4 are arranged close to each other, whereby the output voltage The linearity of the feed rate dependency characteristic and the measurement range are improved. Then, by using this linear region for force detection, the force moving direction component is reflected in the feed amount, and this feed amount is reflected linearly in the output voltage value. Therefore, based on the output voltage value, the external force It is possible to detect the moving direction component.

Based on the above experiments and examinations of the present inventors, in the present invention, the second magnet (rubber magnet (W3 × L10)) is used as the magnet 4, and the mounting angle θ is determined from the feed rate dependency of the output voltage. The angle was 30 °. If necessary, an inexpensive rubber magnet first magnet or neodymium magnet third magnet may be employed. Furthermore, the magnet attachment angle θ can be set to an angle other than 30 °, for example, 0 ° or 45 °. In this regard, based on the knowledge of the present inventor, the attachment angle θ is typically 0 ° to 90 °, preferably 0 ° to 45 °, and more preferably 20 ° to 45 °. It is.

Further, according to the study of the present inventor, it is desirable to employ a low gain amplifier in the subsequent stage while employing the operational amplifier (operation amplifier) in the previous stage as the measurement amplifier as the measurement circuit. Further, it is desirable to supply a constant voltage to the Hall element 5 by adopting a linear power source (linear regulator) as a power source.

As described above, according to the first embodiment, when an external force is applied to the force detection device 10, the block 1, or the rail 2, a force in a desired direction is obtained from the vector component of the external force. It is possible to extract components and measure their sizes. In addition, since a highly rigid linear guide is used, it is possible to effectively reduce the distortion with respect to force components other than the desired direction.

(Second Embodiment)

Next, a force detection device 10 in the force measurement device according to the second embodiment of the present invention will be described. The configuration other than the force detection device 10 is the same as that in the first embodiment. FIG. 7 shows a force detection device 10 according to the second embodiment.

As shown in FIGS. 7A and 7B, in the force detection device 10, unlike the first embodiment, stoppers 12 are provided instead of the leaf springs 9 on both side end surfaces along the moving direction of the block 1. ing. And the elastic material 7 as an elastic member which makes a restoring force act on the movement direction of the rail 2 in the inner side surface of this stopper 12 is provided, respectively. The elastic material 7 is provided so as to exert a pressing force toward the inside along the traveling direction with respect to the rail 2 in a stable state. And as shown to FIG. 7C, since it is the same as that of 1st Embodiment about another structure, the description is abbreviate | omitted.

Also in the second embodiment, the same effects as in the first embodiment can be obtained by having the same configuration as in the first embodiment except for the elastic member as the restoring means.

(Third embodiment)

Next, a force detection device 10 in a force measurement device according to a third embodiment of the present invention will be described. The configuration other than the force detection device 10 is the same as that in the first embodiment. FIG. 8 shows a force detection device 10 according to the third embodiment.

As shown in FIGS. 8A and 8B, in the force detection device 10, unlike the first and second embodiments, one surface of the elastic member 13 as an elastic member is fixed to the upper surface of the rail 2, The other surface of the elastic member 13 is fixed to the lower surface side of the inner peripheral portion of the block 1 at a position facing the upper surface of the rail 2. Here, the elastic material 13 is distorted by slightly shifting the fixing position of the elastic material 13 in the stable state to the block 1 side from the rail 2. Thereby, in a stable state, the elastic material 13 applies a force acting on the rail 2 toward the inner side in the moving direction and on the block 1 toward the outer side in the moving direction. And it is comprised so that the resultant force in each block 1 and rail 2 may become 0 in a stable state. As a result, the force acting on the rail 2 by the elastic member 13 is the same as in the first and second embodiments. Since other configurations are the same as those in the first embodiment, description thereof is omitted.

Also in the third embodiment, the same effect as in the first embodiment can be obtained by having the same configuration as the first embodiment except for the configuration of the elastic member 13 as the restoring means. Can do.

(Fourth embodiment)

Next explained is a force detection apparatus 10 according to the fourth embodiment of the invention. In the present embodiment, a restoring force that restores the rail 2 to a stable position is applied to the rail 2 by a magnetic spring. FIG. 9 shows a force detection device 10 according to the fourth embodiment. 9A is a top view of the force detection device 10, FIG. 9B is a view taken in the direction of arrows YY, and FIG. 9C is a view taken in the direction of arrows XX. Note that the configuration of the force detection device 10 other than the configuration described below is the same as that of the first embodiment. Therefore, in FIG. 9, the configuration unnecessary for the description of the present embodiment is omitted.

As shown in FIGS. 9A and 9B, unlike the first embodiment, the force detection device 10 is formed of soft magnetic stainless steel instead of the leaf springs 9 on both side end surfaces along the moving direction of the block 1. A yoke stopper 20 is provided. And the block side magnet set 22 is provided in the surface at the side of the rail 2 in the two yoke stoppers 20, respectively. In this embodiment, the block-side magnet set 22 is configured by arranging disc-shaped neodymium magnets 22a and 22b having a diameter φ of 2 mm and a thickness t of 1 mm. Here, the neodymium magnets 22 a and 22 b in each block-side magnet set 22 are fixed to the yoke stopper 20 at magnetic poles on different sides, and the magnetic poles on different sides are opposed to the rail 2.

On the other hand, yokes 21 made of soft magnetic stainless steel are provided on both end surfaces of the rail 2 in the moving direction, and rail-side magnet sets 23 are provided on the two yokes 21, respectively. This rail-side magnet set 23 is also configured by arranging the same discoid neodymium magnets 23 a and 23 b as the block-side magnet set 22. The neodymium magnets 23a and 23b are fixed to the yoke 21 at magnetic poles on different sides. Further, the neodymium magnets 22a and 23a, 22b and 23b are arranged so that different magnetic poles face each other.

Below, the effect at the time of employ | adopting the structure of this embodiment is demonstrated. First, consider a case where a restoring force for restoring the rail 2 to a stable position is generated by a mechanical spring. In such a case, since the spring characteristic has hysteresis, it may be difficult to accurately measure the force information applied to the rail 2 or the block 1 from the moving direction in a short stroke. For example, when a minute force of about several gf is measured, normal force information may not be measured due to the hysteresis of the spring characteristic.

On the other hand, according to the configuration of the present embodiment, since the restoring force is obtained by utilizing the repulsive force of the magnets having the opposite poles, the influence of hysteresis is small, and the short stroke of the rail 2 or the block 1 (for example, within 100 μm). Even when a minute force is measured based on the amount of movement, it is possible to measure force information more accurately. In addition, since a repulsive force does not easily act on the rail 2 or the block 1 in a direction different from the moving direction, it is possible to configure a measurement system with very little resistance other than rolling resistance. Here, the restoring means in the present embodiment includes the rail-side magnet set 23 and the block-side magnet set 22.

In the embodiment according to the above description, the neodymium magnets 22a and 22b in the block-side magnet set 22 and the neodymium magnets 23a and 23b in the rail-side magnet set 23 have the centers of the opposing magnets as shown in FIG. They are arranged to match. On the other hand, you may arrange | position so that the center of the magnet which opposes may be shifted. Hereinafter, such an example will be described with reference to FIG.

In this case, for example, as shown in FIG. 10A, the magnetic pole centers of the neodymium magnets 23a and 23b constituting the rail-side magnet set 23 are shifted to the upper surface side of the rail 2, and the neodymium magnets constituting the block-side magnet set 22 are formed. The magnetic pole centers of 22a and 22b may be biased by shifting in a direction away from the lower surface of the inner peripheral portion of the block 1. If it carries out like this, it will become possible to give the pressurization which urges the rail 2 to the block 1 inner peripheral part lower surface side by the repulsive force of a neodymium magnet. Thereby, with a simple structure, it becomes possible to suppress backlash between the block 1 and the rail 2 and to make the relative movement smoother.

Further, as shown in FIG. 10B, the magnetic pole centers of the neodymium magnets 22a and 22b constituting the block-side magnet set 22 are shifted outward with respect to the central axis of the rail 2, thereby biasing each magnetic pole center. Also good. In this case, the repulsive force between the neodymium magnets can apply a pressure that biases the rail 2 from both sides toward the central axis. If it carries out like this, the rolling resistance between the block 1 and the rail 2 can be suppressed, and it becomes possible to make both relative movement smoother. In addition, the magnet which comprises said block side magnet set 22 and said rail side magnet set 23 is not restricted to a neodymium magnet. Of course, other types of magnets such as ferrite magnets may be used.

(Fifth embodiment)

Next, a fifth embodiment of the present invention will be described. In the present embodiment, a new arrangement of magnets and Hall elements for detecting the relative position of the rail 2 to the block 1 will be described. FIG. 11 is a diagram showing the force detection device in the present embodiment.

11A is a diagram of the force detection device 10 as viewed from the block 1 side, and FIG. 11B is a diagram of the force detection device 10 as viewed from the side surface after the block 1 and the rail 2 are separated. FIG. 11C is a diagram for explaining the arrangement of the hall elements 25 a and 25 b and the magnet arrays 26 and 27.

In this embodiment, as shown in FIG. 11C, the relative position information of the block 1 with respect to the rail 2 is detected by detecting the magnetic field generated by the magnet arranged on the rail 2 by the Hall element. In the present embodiment, the Hall element 25a and the Hall element 25b are attached to the magnetic detection substrate 24 so that they are arranged in the same mounting posture so as to be arranged perpendicularly to the traveling direction of the block 1 and horizontally. It has been. The magnetic detection substrate 24 is fitted into a substrate groove 1C provided in the block 1, and is screwed to the block 1 using fixing holes 24a and 24b. The hall elements 25a and 25b are fixed to a resin-made reinforcing plate 26 provided therebetween, and are configured so that their relative positions are stable and vibrations are suppressed.

A magnet arrangement groove 2 c is formed on the upper surface of the rail 2. And the magnet row | line | column 27 is formed by arrange | positioning the two magnets 27a and 27b in one of the side surfaces parallel to the advancing direction of the block 1 in the magnet arrangement | positioning groove | channel 2c. Moreover, the magnet row | line | column 28 is formed by arrange | positioning two magnets 28a and 28b to the other of the side surfaces parallel to the advancing direction of the block 1 in the magnet arrangement | positioning groove | channel 2c. The plane on which the magnet rows 27 and 28 are formed is perpendicular to the plane including the rolling ball rows at two locations where the rail 2 and the block 1 are coupled, and the direction predetermined in the present embodiment (block 1). It is a plane parallel to the direction of travel.

When the magnetic detection substrate 24 is attached to the block 1, the Hall elements 25 a and 25 b enter the magnet arrangement groove 2 c and the block 1 moves relative to the rail 2. And 25b move in the magnet arrangement groove 2c in the magnet arrangement direction with the magnet rows 27 and 28 sandwiched from both sides.

Here, in the magnet 27a and the magnet 27b in the magnet row 27, the magnetic poles facing the hall element 25b are opposite to each other. In the magnet 28a and the magnet 28b, the magnetic poles facing the hall element 25a are opposite to each other. Further, the magnet 27a and the magnet 28a are opposed to each other with opposite magnetic poles, and the magnet 27a and the magnet 28a are also opposed to each other with opposite magnetic poles. Thereby, when a force is applied to the block 2 and the block 2 moves relative to the rail 1, the Hall element 25a and the Hall element 25b detect a change in the magnetic field generated from the magnet arrays 27 and 28. Thus, the position of the block 2 can be detected with high accuracy.

Next, operations and effects obtained by employing the configuration of the present embodiment will be described with reference to FIGS. In FIG. 12, as a comparative example, a single Hall element 29 is attached to the block 1, and magnets 30 a and 30 b are arranged on the upper surface of the rail 2 so that the magnetic poles are opposed to the lower surface of the inner peripheral portion of the block 1. The influence of the inclination of the block 1 when detecting a change in the relative position of the block 1 with respect to the rail 2 will be described. FIG. 13 shows the influence of the inclination of the block 1 when the configuration of the present embodiment is adopted.

First, consider the case shown in FIG. Here, in the force detection device 10 as in the present embodiment, the block 1 is moved to the left and right with respect to the traveling direction of the rail 2 by the rolling elements held by the cage as the rolling ball row with respect to the rail 2. Combined on both sides. For this reason, the structure is relatively easy to tilt in the direction of the arrow in FIG. 12B, and displacement (tilt) at the micron level may occur due to the force component in the direction of the arrow. When the block 1 is tilted as shown in FIG. 12B, the distance D1 between the Hall element 29 and the magnet 30a becomes longer and the distance D2 between the Hall element 29 and the magnet 30b becomes shorter. The magnetic field strength value detected by the Hall element 29 is likely to fluctuate due to the difference between the two, and it may be difficult to perform accurate detection.

In addition, if the rigidity between the block 1 and the rail 2 is increased in order to suppress this, the rolling resistance increases, and a dead zone or hysteresis occurs when measuring a minute force or a minute displacement. As a result, accurate detection may be difficult.

On the other hand, as shown in FIG. 13, according to this embodiment, even when the block 1 is tilted, the Hall element 25b is twisted with respect to the magnet row 27 while maintaining the distance to the magnets 27a and 27b. The angle θ changes. In this case, in reality, since the area where the magnetic field is detected in the Hall element 25b is a very small portion, even if the twist angle θ changes, the output of the Hall element 25b is hardly affected. Further, since the torsion angle θ1 between the hall element 25b and the magnet 27a is equal to the torsion angle θ2 between the hall element 25b and the magnet 27b, the influence of the change in the attitude of the hall element 25b on each magnet is cancelled. It becomes easy.

As described above, by adopting the configuration as in this embodiment, the influence of the inclination on the output signals of the Hall elements 25a and 25b is reduced with respect to the direction in which the block 1 is easily inclined. On the other hand, even when the block 1 is inclined, the force detection accuracy can be maintained with high accuracy. In the present embodiment, the block 1 has been described on the assumption that the rail 2 is coupled to both the left and right sides with respect to the traveling direction of the rail 2 by the rolling elements held by the cage. However, the configuration to which the present invention is applied is not limited to the configuration in which the block is coupled to the rail via two rolling ball rows. For example, the present invention can also be applied to a configuration in which a block and a rail are connected by four or six rolling ball rows. In this case, the present embodiment may be applied to the inclination of the plane including the specific two-row ball row related to the combination that is most likely to be inclined.

Next, a method for detecting the output from the Hall element in the present embodiment will be described. In the present embodiment, the Hall element 25a and the Hall element 25b are fixed side by side on the magnetic detection substrate 24 with the same posture as described above. Further, the magnetic fields generated by the magnet array 27 and the magnet array 28 are completely opposite to each other. Therefore, the output signal generated from the Hall element 25a and the output signal generated from the Hall element 25b are signals in which positive and negative are completely reversed.

Therefore, in the present embodiment, as shown in FIG. 14, the difference between the output signal obtained from the Hall element 25a and the output signal obtained from the Hall element 25b is taken, and this is used as the relative position signal of the block 1 with respect to the rail 2. I decided to do that. Then, the signal to be output by each Hall element due to the magnetic field by the magnet array 27 and the magnet array 28 can be increased approximately twice, and the position of the block 1 can be detected more accurately. It becomes. Furthermore, when a magnetic field as a disturbance acts, as shown in FIG. 14, it is possible to cancel a signal from each Hall element caused by the disturbance magnetic field, and a measurement system that is more resistant to disturbance can be obtained. Become.

Therefore, even when an electromagnet (motor), a permanent magnet, or the like is disposed near the apparatus, it is possible to suppress deterioration in measurement accuracy due to a magnetic field generated from them. In the above configuration, analog communication based on differential signals from the two Hall elements is performed between the Hall elements 25a and 25b and the amplifier 20, so that calculation by the CPU and the like are not required, and the configuration is simple. The influence by a disturbance magnetic field can be reduced. In the present embodiment, it is assumed that noise due to a disturbance magnetic field is mixed in the magnetic field intensity to be detected, and it can be said that a major feature is that two systems for detecting hardware and two systems for communication are prepared.

In the above-described embodiment, the attachment angle of each rectangular magnet 27a, 27b, 28a, 28b may be inclined with respect to the hall elements 25a, 25b in order to detect a minute movement amount. Further, in order to increase the measurement range (maximum stroke), it has been found by the inventors' research that a certain distance or more may be provided between the magnets 27a and 27b and between the magnets 28a and 28b. It was. In the above, an interval of 0.5 mm is provided. In the present embodiment, the detection means includes a hall element 25a, a hall element 25b, a magnet row 27, and a magnet row 28. In the present embodiment, the difference between the output signal obtained from the Hall element 25a and the output signal obtained from the Hall element 25b is taken and used as a relative position signal of the block 1 with respect to the rail 2. By applying a magnetic shield to the outside of the magnetic detection substrate 24 of the block 1, the influence of the disturbance magnetic field can be more reliably suppressed. Further, the configuration of taking the difference between the output signal obtained from the Hall element 25a and the output signal obtained from the Hall element 25b and suppressing the influence of the disturbance magnetic field is as in the magnet arrays 27 and 28 of the present embodiment. This does not mean that it can only be applied to magnet arrays. For example, the present invention can also be applied to an array of magnets in which the magnetic pole directions of the magnets 27a, 27b, 28a, and 28b are perpendicular to the paper surface in FIG.

(Sixth embodiment)

Next, a sixth embodiment will be described. This embodiment is a form in which the Hall elements and magnets described in the fifth embodiment are changed. About another structure, it is equivalent to the content demonstrated in 5th Embodiment.

A configuration example of this embodiment is shown in FIG. 15A is a top view in the vicinity of the Hall element in the present embodiment, FIG. 15B is a front view, and FIG. 15C is a side view. Also in the present embodiment, similarly to the fifth embodiment, the Hall elements 31a and 31b are fixed on the magnetic field detection substrate 24 in the same posture. In the fifth embodiment, two rows of magnet rows are formed so as to sandwich the two hall devices. However, in this embodiment, one row of magnets 33a and 33b is provided between the hall devices 31a and 31b. Are provided. Here, the magnetic poles of the magnet 33a and the magnet 33b are formed in parallel to the direction in which the Hall elements 31a and 31b are arranged, and are in opposite directions. FIG. 15D shows a state in which the magnetic field detection board 24 in this embodiment is attached to the block 1.

Also with this configuration, it is possible to suppress a decrease in detection accuracy due to the inclination of the block 1 as in the configuration described in the fifth embodiment. Further, by taking the difference between the output of the Hall element 31a and the output of the Hall element 31b, the output signal can be increased by a factor of approximately 2, canceling the influence of the disturbance magnetic field, and reducing the detection accuracy due to the disturbance magnetic field. It becomes possible to suppress.

In this case, the number of magnets constituting the magnet array may be other than two. Also, the number of Hall elements may be other than two. For example, as shown in FIG. 16, the number of magnets constituting the magnet array 33 is not two, but by arranging a larger number of magnets 33 a, 33 b,. It is possible to increase the stroke.

The number of hall elements is not two, but the hall element 32a is provided in the traveling direction of the block 1 of the hall element 31a, and the hall element 32b is provided in the traveling direction of the block 1 of the hall element 31b. It is good also as detecting a magnetic field by. Thereby, the dispersion | variation in the output of each Hall element can be averaged and a more accurate position detection can be performed. In addition, the device in this case can be used as a magnetic encoder that detects a change in the relative position between the block 1 and the rail 2, and besides the force detection device, the position detection device, the speed detection device, and the acceleration detection device. It can also be used as a device. In the present embodiment, the detection means includes Hall elements 31a, 31b, 32a, 32b, and a magnet array 33.

(Seventh embodiment)

Next, a seventh embodiment of the present invention will be described. The present embodiment is an embodiment in which the present invention is applied to a linear motion system including a linear bush and a shaft. In FIG. 17, schematic structure of the force detection apparatus 40 in this embodiment is shown. In this force detection device 40, the linear bushing outer cylinder 41 and the shaft 42 are coupled by four ball rows 43 to 46, and the shaft 42 can reciprocate in the axial direction with respect to the outer cylinder 41. It is comprised so that it may become.

In the four ball rows 43 to 46, 43a to 46a are interposed as load ball rows between the outer cylinder 41 and the shaft 42, and the rolling elements (balls) passing through the load ball rows 43a to 46a escape. It circulates in the ball rows 43b to 46b. The outer cylinder 41 is closed at both ends by a front end cover 41a and a rear end cover 41b, and the shaft 42 is urged toward the front end cover 41a by a biasing spring 49 with respect to the rear end cover 41b. A hole 41c is provided near the center of the tip cover 41a, and the detection protrusion 42a of the shaft 42 protrudes from the hole 41c. As a result, when a force acts on the detection protrusion 42 a, the biasing spring 49 is elastically deformed and the shaft 42 moves relative to the outer cylinder 41.

A cylindrical magnet portion 47 extending from the rear end cover 41 b is inserted into the shaft 42. The magnet portion 47 is formed of two parts divided into two at the center of the cross section viewed from the axial direction, and each part is magnetized to have opposite polarities. Further, it is formed of two parts divided in the center in the axial direction, and each part in the axial direction is also magnetized so as to have opposite polarities. Further, Hall elements 48a to 48d are provided inside the shaft 42, and the relative displacement of the shaft 42 with respect to the outer cylinder 41 can be detected by the output signals of the Hall elements 48a to 48d.

According to this configuration, since the shaft 42 is coupled to the outer cylinder 41 by the four ball rows 43 to 46, the shaft 42 is strong against moment, and the distance between each magnetic pole of the magnet portion 47 and the Hall elements 48a to 48d is increased. Can be stabilized. Therefore, by detecting the relative displacement of the shaft 42 with respect to the outer cylinder 41, it is possible to detect the force acting on the detection projection 42a with higher accuracy. Further, according to the present embodiment, the outer cylinder 41 can seal the movable part and the board part (not shown) for driving the Hall element, so that the environmental resistance can be improved. Has the advantage that it can also serve as a magnetic shield. Further, if the entire force detection device 40 is supported and fixed to another member in the rear end cover 41b, the mounting direction and the displacement direction of the shaft 42 can be matched, so that deformation and inclination of the device can be suppressed, and It can be easily used for measurement. In the present embodiment, the detection means includes a magnet portion 47 and Hall elements 48a to 48d. The restoring means includes an urging spring 49.

18A and 18B show another embodiment in which the present invention is applied to a linear motion system including a linear bush and a shaft. First, the force detection device 50 shown in FIG. 18A will be described. Also in this embodiment, the outer cylinder 51 of the linear bush and the shaft 52 are coupled by four ball rows so that the shaft 52 can reciprocally move in the axial direction of the outer cylinder 51. In FIG. 18A, only the load ball rows 53a and 55a in the four ball rows 53 to 56 are shown.

The outer cylinder 51 has its tip closed by a tip cover 51a, and a detection projection 51b is provided at the center of the tip cover 51a. In addition, a rear end cover 51 c is provided at the rear end of the outer cylinder 51 in order to improve the sealing performance, and the gap with the shaft 52 is reduced. In the present embodiment, the magnet portion 57 extends from the central portion of the front end cover 51a toward the rear end cover 51c. The magnet portion 57 is formed of two parts in the cross section viewed from the axial direction and in the axial direction, and each part is magnetized to have opposite polarity, similar to the embodiment described in FIG. is there.

The rear end of the shaft 52 is closed by a shaft rear end cover 52b. A shaft tip cover 52a is provided at the tip of the shaft 52. A central portion of the shaft tip cover 52a is opened at a shaft hole 52c, and a magnet portion 57 is inserted into the shaft hole 52c from the tip side. Yes. Further, a biasing spring 59 is provided between the inside of the front end cover 51 a of the outer cylinder 51 and the shaft front end cover 52 a, and a force acts on the outer cylinder 51 so that the outer cylinder 51 approaches the shaft 52. At this time, a resistance force is exerted by elastic deformation of the biasing spring 59. Hall elements 58a to 58d are provided inside the shaft 52, and when a force is applied to the detection projection 51b, the magnetic elements generated from the magnet portion 57 are detected by the Hall elements 58a to 58d. It is possible to detect the relative displacement of the outer cylinder 51 with respect to.

Also with this configuration, the distance between each magnetic pole of the magnet portion 57 and the Hall elements 58a to 58d can be stabilized because of being strong against moment, so that the relative displacement of the outer cylinder 51 with respect to the shaft 52 can be detected with higher accuracy. It becomes possible. In this embodiment, the detection means includes a magnet portion 57 and Hall elements 58a to 58d. The restoring means includes an urging spring 59.

Next, the force detection device 60 shown in FIG. 18B will be described. Also in this embodiment, the outer cylinder 61 of the linear bush and the shaft 62 are coupled by four ball rows so that the shaft 62 can be reciprocally moved in the axial direction of the outer cylinder 61. In FIG. 18B, only the loaded ball rows 63a and 65a in the four ball rows 63 to 66 are shown.

The outer cylinder 61 has a rear end closed by a rear end cover 61a, and a magnet insertion hole 61c is provided at the center of the front end 61b. The magnet portion 67 of the shaft 62 is inserted into the magnet insertion hole 61c. The load ball rows 63 a to 66 a of the four ball rows 63 to 66 are interposed between the magnet portion insertion hole portion 61 c and the shaft 62. A disc-shaped tip plate 62 a is provided on the tip side of the shaft 62. A detection projection 62b projects outward from the center of the tip plate 62a. Further, the tip plate 62a is in contact with the tip portion 61b of the outer cylinder 61 at the outer peripheral portion 62c. The tip plate 62a is provided with circular grooves 62d and 62e as viewed from the axial direction. When a force acts on the detection protrusion 62b, the tip plate 62a is elastically deformed in the grooves 62d and 62e to generate a resistance force.

A cylindrical magnet portion 67 is provided at the rear end of the shaft 62. The magnet portion 67 is formed of two portions in the cross section viewed from the axial direction and in the axial direction, and the respective portions are magnetized to have opposite polarities as in the embodiment described in FIG. is there. Furthermore, Hall elements 68 a to 68 d are provided on the inner peripheral surface 61 d of the outer cylinder 61.

Even with this configuration, since the shaft 62 is coupled to the outer cylinder 61 by the four ball rows 63 to 66, the shaft 62 is strong against moment and stabilizes the distance between each magnetic pole of the magnet portion 67 and the Hall elements 68a to 68d. It can be made. Therefore, by detecting the relative displacement of the shaft 62 with respect to the outer cylinder 61, the force acting on the detection protrusion 62b can be detected with higher accuracy. In this embodiment, the detection means includes a magnet portion 67 and Hall elements 68a to 68d. The restoring means includes a structure in which circular grooves 62d and 62e are provided in the tip plate 62a.

In the present embodiment, the example in which the shaft and the outer cylinder are coupled by four ball rows has been described, but the number of ball rows is not limited to four. The number of ball rows can be changed as appropriate depending on the assumed moments, such as 5 and 6. Moreover, although the magnet part was formed in the cross section seen from the axial direction and was formed from two parts in the axial direction, and each part was magnetized by the opposite polarity, about this magnetization pattern Also, it can be determined appropriately according to the arrangement and number of Hall elements.

(Eighth embodiment)

Next, an eighth embodiment of the present invention will be described. In this embodiment, the present invention is applied to a linear motion system including a linear bush and a shaft, and an acceleration pickup is configured. FIG. 19A shows a schematic configuration of the acceleration pickup 70 in the present embodiment. The acceleration pickup 70 is connected to an outer cylinder 71 of a linear bush and a shaft 72 with four ball rows, and the shaft 72 is attached so as to be reciprocally movable in the axial direction.

In FIG. 19A, load ball rows 73a and 75a of two ball rows out of four ball rows are shown. The outer cylinder 71 has a sealed structure in which both ends are closed by a front end cover 71a and a rear end cover 71b. Further, the front end cover 71a and the rear end cover 71b are provided with a front end side holder 71c and a rear end side holder 71d for supporting an urging spring and a Hall element, which will be described later. An urging spring 79a and an urging spring 79b are attached to the front end side holder 71c and the rear end side holder 71d. The shaft 72 is urged toward the front end side by the urging spring 79b with respect to the rear end cover 71b and is also urged toward the rear end side with respect to the front end cover 71a by the urging spring 79a.

In addition, columnar magnet portions 77 a and 77 b are provided on the front end side and the rear end side of the shaft 72. The magnet portions 77a and 77b are divided into two in a cross section viewed from the axial direction, and each of the divided portions is magnetized to have a reverse polarity. Also, it is divided into two parts in the axial direction, and the divided parts are magnetized so as to have opposite polarities. Further, in the front end side holder 71c and the rear end side holder 71d, Hall elements 78a to 78d are provided in portions facing the magnetic poles of the magnet portions 77a and 77b, and the shaft 72 relative to the outer cylinder 71 is provided. The displacement can be detected by the output signals of the Hall elements 78a to 78d.

Here, when acceleration is applied to the acceleration detector 70, the shaft 72 moves relative to the outer cylinder 71, and the displacement can be detected by the outputs of the Hall elements 78a to 78d. According to this configuration, since the shaft 72 is coupled to the outer cylinder 71 by the four ball rows, the shaft 72 is strong against moment, and the displacement of the magnetic poles of the magnet portions 77a and 77b with respect to the Hall elements 78a to 78d is even. The acceleration of the shaft 72 relative to the outer cylinder 71 can be detected with higher accuracy. In this embodiment, the detection means includes magnet portions 77a and 77b and Hall elements 78a to 78d. The restoring means includes urging springs 79a and 79b.

Next, FIG. 19B shows another example in which the present invention is similarly applied to a linear motion system composed of a linear bush and a shaft to constitute an acceleration pickup. An acceleration pickup 80 shown in FIG. 19B has a linear bushing outer cylinder 81 and a shaft 82 coupled by a four-row ball train, and the shaft 82 is attached to be reciprocally movable in the axial direction.

In FIG. 19B, the load ball rows 83a and 85a of two ball rows among the four ball rows are illustrated. The outer cylinder 81 has a sealed structure in which both ends are closed by a front end cover 81a and a rear end cover 81b. A front end side leaf spring 88a and a rear end side leaf spring 88b are provided on the front end portion 82a and the rear end portion 82b of the shaft 82 via a front end side ball 87a and a rear end side ball 87b. The shaft 82 is urged toward the front end side by the rear end side plate spring 88b and is urged toward the rear end side by the front end side plate spring 88a. The front end side ball 87a and the rear end side ball 87b are for making the deformation mode of the front end side leaf spring 88a and the rear end side leaf spring 88b uniform. The shaft 82 stops at a stable position by being biased by the front end side plate spring 88a and the rear end side plate spring 88b. Further, a front end side piezoelectric element 89a and a rear end side piezoelectric element 89b are fixed to the front end side leaf spring 88a and the rear end side leaf spring 88b, respectively.

Here, when acceleration is applied to the acceleration pickup 80, the shaft 82 moves relative to the outer cylinder 81, and the deformation of the front end side leaf spring 88a and the rear end side leaf spring 88b according to the displacement is changed to the front end side piezoelectric element 89a. It is possible to detect by the output of the rear end side piezoelectric element 89b.

According to this configuration, since the shaft 82 is coupled to the outer cylinder 81 by the four rows of balls, the shaft 82 is strong against moment and equalizes and stabilizes the deformation modes of the front end side leaf spring 88a and the rear end side leaf spring 88b. The acceleration of the shaft 82 relative to the outer cylinder 81 can be detected with higher accuracy by the outputs of the front end side piezoelectric element 89a and the rear end side piezoelectric element 89b. In this embodiment, the detection means includes a front end side leaf spring 88a, a rear end side leaf spring 88b, a front end side piezoelectric element 89a, and a rear end side piezoelectric element 89b. The restoring means includes a front end side leaf spring 88a and a rear end side leaf spring 88b.

In this embodiment, the example in which the shaft and the outer cylinder are coupled by four ball rows has been described, but the number of ball rows is not limited to four. The number of ball rows can be changed as appropriate depending on the assumed moments, such as 5 and 6. In FIG. 19A, the cylindrical magnet portions 77a and 77b are divided into two parts in the axial direction and also in the axial direction, and the divided parts are magnetized so as to have opposite polarities. Explained the example. However, this magnetized pattern can also be appropriately determined according to the arrangement and number of Hall elements. In addition, separate magnets may be provided at portions facing the Hall elements 78a to 78d at the front end portion and the rear end portion of the shaft 72, and the magnetic poles of the adjacent magnets may be opposite in polarity.

(Ninth embodiment)

Next, a ninth embodiment of the present invention will be described. In the present embodiment, the leaf spring in the first embodiment is changed. In FIG. 20, schematic structure of the force detection apparatus 90 in this embodiment is shown.

As shown in FIG. 20A, the force detection device 90 according to the eighth embodiment includes a block 91, a rail 92, a retainer 93, rolling elements (balls) 93a retained by the retainer, and a leaf spring 96. Configured. Since other configurations are the same as those of the first embodiment, illustration and description thereof are omitted.

In this embodiment, the U-shaped block 91 and the rectangular rail 92 include a rolling element (not shown) in which an inner peripheral portion of the block 91 and an outer peripheral portion of the rail 92 are provided on the side wall of the rail 2. It is configured to be capable of relative movement via rolling elements (balls) 93 a held by a holder 93. In other words, the block 91 and the rail 92 constitute a linear guide that relatively linearly moves.

In the force detection device 90, stoppers 94 are provided on both end faces along the moving direction of the block 91. The stopper 94 is fixed to the block 91 by a fixing screw 95. In addition, leaf springs 96 as elastic members for applying a restoring force are provided on both side surfaces in the moving direction of the rail 2 on the inner side surface of the stopper 94. The leaf spring 96 has an outer end surface 96 a bonded to the stopper 94 and an inner end surface 96 b bonded to the rail 92. In the stable state, the two leaf springs 96 in FIG. 20A are provided so as to exert a pressing force on the rail 92 toward the inside along the traveling direction.

FIG. 20B shows a perspective view of the leaf spring 96. The leaf spring 96 has a spring portion 96c that is elastically deformable between an outer end surface 96a and an inner end surface 96b, and has a constant cross section in the direction perpendicular to the paper surface of FIG. 20A.

By making the leaf spring 96 as an elastic member into such a shape, a pressing force can be applied uniformly to the entire end surface of the rail 92. Thereby, when the rail 92 moves relative to the block 91, it is possible to suppress the moment (moment in the pitching direction) as shown in FIGS. Can be suppressed. Thereby, when detecting a minute force and a minute displacement amount, the rail 92 can be moved more smoothly in the direction in which the rolling elements (balls) 93a are arranged, and the displacement amount can be detected more accurately. . In the present embodiment, the restoring means includes a leaf spring 96. As the material of the leaf spring 96, a metal material such as spring steel or a non-metal material can be used as long as elasticity is recognized.

(Reference embodiment)

Next, the force detection device 10 in the force measurement device according to the reference embodiment of the present invention will be described. The configuration other than the force detection device 10 is the same as that in the first embodiment. FIG. 21 shows a force detection device 10 according to this reference embodiment.

As shown in FIG. 21A, the force detection device 10 is configured to use a strain gauge without providing the Hall element 5 and the magnet 4 unlike the first to third embodiments. Moreover, the recessed part 2c is formed in the both sides along the longitudinal direction of the rail 2, and the spherical body 17 which consists of ceramics or a metal as force transmission means is provided in this recessed part 2c.

Further, as shown in FIG. 21B, in order to connect the block 1 and the rail 2, a connecting plate 14 is provided on both end faces in the longitudinal direction, and a plurality of strain gauges 16 are provided on the outer surface thereof. In this case, for example, three gauge plates 15 as elastic members arranged in parallel are fixed. That is, the rail 2 is configured such that an elastic force is applied from the gauge plate 15 via a sphere 17 as a force transmission means. The four strain gauges 16 are connected to an output line (not shown), and a voltage based on the strain of the strain gauge 16 is output.

As a method for distorting the strain gauge 16, it is based on the amount of movement by relative movement (relative movement) between the block 1 and the rail 2 as in the first to third embodiments. For example, when the block 1 is fixed and an external force is applied to the rail 2, the rail 2 is moved by a force component along the moving direction with the rail 2. The strain gauge 16 is distorted by the force generated by the movement of the rail 2 acting on the gauge plate 15 at one point via the sphere 17 serving as a force transmission means. Based on this strain, a voltage is output from a plurality of (here, three) strain gauges 16. Based on the voltage output from the strain gauge 16, the magnitude of the force component in the specific direction of the external force acting on the rail 2 (the moving direction of the rail 2) is detected. Since the principle of force detection using the strain gauge 16 itself is conventionally known, the description thereof is omitted.

Also in the reference embodiment described above, as in the first to third embodiments, the configuration of the strain gauge plate 15 for force detection that actually measures force and the component in the characteristic direction of the applied external force By separating the configuration of the block 1 and the rail 2 that extract only as a displacement component, the configuration is the same as in the first to third embodiments, and the same effect can be obtained.

As mentioned above, although embodiment of this invention was described concretely, this invention is not limited to the above-mentioned embodiment, The various deformation | transformation based on the technical idea of this invention is possible. For example, the numerical values given in the above embodiment are merely examples, and different numerical values may be used as necessary.

For example, in the force detection device according to the above-described embodiment, a permanent magnet is used, but an electromagnet can also be used. Moreover, this invention can also detect the force of only a rotation direction by mounting the relative motion in this structure in R guide. Further, since it has high rigidity and high sensitivity, it can be directly incorporated into a robot arm or the like. In addition, a multi-axis force sensor can be configured by the relative arrangement of the magnet and the detection unit. Further, by making the movable part lighter, it is possible to function as an acceleration sensor. For these reasons, the present invention can be applied to reduction devices for assisting reduction operations such as fractures, linear motion guide devices, splines, screws, or actuator-related products in general.

Further, for example, in the above-described embodiment, a Hall element using the Hall effect is used as the magnetoelectric conversion element, but any element can be used as long as it is a means for converting other magnetic force into electric power. . Other examples of magnetoelectric conversion elements include MR elements and magnetostrictive elements.

For example, in the above-described first embodiment, the length along the longitudinal direction of the rail 2 is configured to be longer than the length along the longitudinal direction of the block 1. The length along the longitudinal direction of 1 may be longer than the length along the longitudinal direction of the rail 2. In this case, the rail 2 is always subjected to a repulsive force toward both outer sides along the moving direction, and the force acting on the rail 2 when stationary is 0, and the rail 2 is against the block 1. When it moves relatively, a restoring force can be generated. In each of the above-described embodiments, the present invention has been described by taking one type of device such as a force detection device and an acceleration pickup as an example. However, any mechanical physical quantity detection device such as a position detection device, a speed detection device, a force detection device, and an acceleration pickup (detection device) may be configured by the same configuration or principle as the respective embodiments.

Claims (15)

A first moving body and a second moving body configured to be able to move relative to each other in a predetermined direction;

A magnetoelectric conversion element that is provided in the first moving body and outputs a voltage based on the magnitude of a magnetic field;

Magnetic field generating means provided on the second moving body and capable of generating a magnetic field,

Due to the relative displacement of the second moving body with respect to the first moving body, a signal corresponding to a change in the magnetic field in the vicinity of the magnetoelectric conversion element in the magnetic field formed by the magnetic field generating means is output from the magnetoelectric conversion element. A detecting device for measuring the relative displacement amount,

The magnetic field generator is provided such that the direction of the magnetic pole connecting the S pole and the N pole of the magnetic field generator is at an angle with respect to the predetermined direction of motion.

A detection device characterized by that.

A first moving body and a second moving body configured to be able to move relative to each other in a predetermined direction;

Detecting means for outputting a signal based on a relative displacement amount of the first moving body and the second moving body along the predetermined direction;

Restoring means for applying a restoring force in a direction to reduce the relative displacement amount with respect to at least one of the first moving body and the second moving body;

A signal is output from the detection means based on a relative displacement amount of the second moving body with respect to the first moving body due to an external force applied to the second moving body from the outside.

A detection device characterized by that.

The detection means includes

A magnetoelectric conversion element that is provided in the first moving body and outputs a voltage based on the magnitude of a magnetic field;

Magnetic field generating means provided on the second moving body and capable of generating a magnetic field,

Due to the relative displacement of the second moving body with respect to the first moving body caused by the external force applied to the second moving body from the outside, the vicinity of the magnetoelectric conversion element in the magnetic field formed by the magnetic field generating means A signal based on the amount of relative displacement is output from the detection means by outputting a signal corresponding to a change in the magnetic field from the magnetoelectric transducer.

The detection device according to claim 2.
The restoring means includes an elastic member,

The first moving body and the second moving body are coupled to each other by the elastic member,

When the elastic members apply restoring forces in opposite directions to the first moving body and the second moving body, the restoring forces act in a direction in which the amount of relative displacement decreases.

The detection apparatus according to claim 2 or 3, wherein

The magnetoelectric transducer is provided in a pair, and the magnetic field generating means is a magnet,

The direction of the magnetic pole connecting the S pole and the N pole in the magnet forms an angle of 45 ° or more and 70 ° or less with respect to the arrangement direction of the pair of magnetoelectric transducers.

The detection device according to claim 1 or 3, wherein

The first moving body and the second moving body are regulated to be able to move relative to each other via a rolling element.

The detection device according to claim 1, wherein

The first moving body and the second moving body are coupled to each other and regulated, and the relative motion between the first moving body and the second moving body is a linear motion.

The detection device according to claim 1, wherein

The magnetoelectric conversion element is a Hall element

The detection device according to claim 1, wherein the detection device is one of the following.

The detecting means has a strain gauge;

The strain gauge is distorted by the relative displacement of the second moving body, and the signal is output based on the strain of the strain gauge.

The detection device according to claim 2.

The restoring means includes an elastic member,
Force transmission means for transmitting force between the elastic member and the second movable body;

The strain gauge is fixed to the elastic member;

Due to the relative displacement of the second moving body relative to the first moving body, a force is transmitted from the second moving body to the elastic member through the force transmitting means, and the strain gauge is distorted.

The detection device according to claim 9.

The restoring means is provided on the first moving body and the second moving body, and acts on the restoring force by a repulsive force generated between magnets disposed so that magnetic poles of the same polarity face each other. The detection apparatus according to claim 2, wherein:

The second moving body is coupled to the first moving body through a rolling ball train at a plurality of locations as viewed from the predetermined direction so as to be relatively movable,

The detection means includes

N poles and S poles are alternately arranged in the predetermined direction on a plane that is perpendicular to the plane including the rolling ball rows at specific two of the plurality of locations and parallel to the predetermined direction. A plurality of magnetic field generating means arranged on one of the first moving body and the second moving body,

A magneto-electric conversion element that is provided on the other of the first moving body and the second moving body and outputs a voltage based on the magnitude of the magnetic field,

Due to the relative displacement of the second moving body with respect to the first moving body, a signal corresponding to the magnetic field in the vicinity of the magnetoelectric conversion element in the magnetic field formed by the magnetic field generating means is output from the magnetoelectric conversion element. The detection device according to claim 2.

Two magnetoelectric transducers are arranged in the same posture in the vertical direction with respect to the arrangement direction of the plurality of magnetic field generating means,

The detection apparatus according to claim 12, wherein a difference between outputs from the two magnetoelectric conversion elements is used as an output of the detection unit.

The detection means includes

In a plane parallel to the predetermined direction, a plurality of elements arranged on one of the first moving body and the second moving body so that the N pole and the S pole are alternately arranged in the predetermined direction. Magnetic field generating means;

A magneto-electric conversion element that is provided on the other of the first moving body and the second moving body and outputs a voltage based on the magnitude of the magnetic field,

Due to the relative displacement of the second moving body with respect to the first moving body, a signal corresponding to the magnetic field in the vicinity of the magnetoelectric conversion element in the magnetic field formed by the magnetic field generating means is output from the magnetoelectric conversion element,

Two magnetoelectric transducers are arranged in the same posture in the vertical direction with respect to the arrangement direction of the plurality of magnetic field generating means,

The detection apparatus according to claim 2, wherein a difference between outputs from the two magnetoelectric conversion elements is used as an output of the detection unit.

The detection device according to any one of claims 1 to 14,

Amplifying means for amplifying a signal output from the detection device;

And a signal detection means provided with an output unit for outputting the magnitude of the component in the predetermined direction of the physical quantity detected by the force detection device based on the signal output from the detection device. Have

A measuring device characterized by that.

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