200921070 六、發明說明： 【發明所屬之技術領域3 發明領域 本發明係有關於位置檢測裝置及位置計測裝置、力檢 5 測裝置及力計測裝置、速度檢測裝置及速度計測裝置、加 速度檢測裝置及加速度計測裝置等力學物理量之檢測裝置 或計測裝置，特別是適合適用於檢測微弱力之變化之精密 力計測裝置或力覺檢測感測器者。 【先前技術3 10 發明背景 以壓力之檢測為例來說明，習知在急遽地施加壓力之 使用狀況下亦可正確檢測之壓力感測器已知有薄膜式壓力 感測器。於第22圖顯示此種習知技術之壓力感測器。 如第22圖所示，此壓力感測器100係在端部形成有薄厚 15 度之薄膜部101之筒狀壓力承受室102内，將具有與薄膜部 103之内壁103b幾乎全面密合接觸之加壓板109之受壓體 108在藉由彈簧110使加壓部板109密合於薄膜部103之内壁 103b之狀態下收容而構成。為薄膜部103藉由受壓體108承 受壓力，從應變規107獲得壓力信號之結構（參照專利文獻 20 2)。 樑柱式負載感測器已提出專利文獻3所記載者。於第23 圖顯示此樑柱式負載感測器。 即，樑柱式負載感測器200具有固定於基礎部之固定部 201、載重部202、上下樑柱(樑）203、204、隔著間隔為上 3 200921070 下樑柱203、204夾持之中間部205、206、固定於載重部202 之矩形式施加載重部207。又，應變規208設置於中間部 205、206間之薄壁之一面。應變規208以薄膜晶片構成。 此應變規208於樑柱203、204之長度方向，在樑柱203、 5 204之中央部，設置於矩形式施加載重部207之中央。又， 應變規208於樑柱203、204之厚度方向，設置於作為從樑柱 式負載感測器之構成要件全體之形狀尺寸與中間部205及 中間部206間之薄壁厚度以及形狀尺寸之關聯求出之樑柱 203、204的扭力中心之力矩零位線上。 10 該等壓力感測器或樑柱式負載感測器200除了工業 用以外，其應用發展有家庭用途、看護用途、醫療用途。 因此，需實現低價且堅固之感測器作為市場之要求。 然而’上述使用習知應變規之壓力感測器或負載感測 器等所謂稱為荷重元之力覺感測裝置有構造上之問題或應 15 變規之問題。 即’構造上之問題點係為使預定軸上之力不影響其他 軸，需非常複雜之樑構造體。由於樑構造體之位移量為力 覺檢測對象，故S/N比降低。再者，由於樑構造體之位移量 為力覺檢測對象，故積存應變等之誤差。 2〇 應變規上之問題點係由於以手作業對檢查器進行接 著，故精確度因作業員而不均―，作業、檢測、校正工數 等為必要，而有高成本化之問題。且因該等問題，而有抗 振動、衝擊、溫度等干擾弱之問題。 專利文獻1 :曰本專利公開公報2007-187596號 200921070 專利文獻2:日本專利公開公報平ι〇_〇62279號 專利文獻3:日本專利公開公報平〇7_229799號 L發明内容】 發明揭示 5 發明欲解決之課題 因而’本發明之目的係在於提供對作用之力，僅抽出 沿預定方向之力等力學物理量，而可更正確地進行檢測， 縮小在沿預定方向以外之方向之應變，並且可謀求製品製 造之低成本化的力學物理量之檢㈣置及計測裝置。 10 用以欲解決課題之手段 為達成上述目的，本發明第i發明係—種檢測裝置，其 包含有構造成可於預定之方向相互相對運動之第i移動體 及第2移動體、設置於前述第1移動體，輸出根據磁場大小 t電壓,磁電轉換元件、設置於前述第2移動體，可產生磁 15场之磁场產生機構。該檢測襄置藉前述第2移動體對前述第 1移動體之相對位移，從前述磁電轉氣件輸出對應於以前 述磁场產生機構形成之磁場中之前述磁電轉換元件附近之 磁㈣化的信號，並藉此計測前述相對位移量。又’前述 磁场產生機構係連結前述磁場產生機構之3極及職之磁極 2〇之方向相對於前述預定之運動方向構成角度而設置。 …本發明第2發明係-種檢測裝置，其包含有構造成可於 預^方向相互相對運動之第1移動體及第2移動體、輸出 根據前，第1移動體及前述第2移動體沿前述預定方向之相 對位移置之信號的檢測機構、及使復原力於使前述相對位 5 200921070 移量減少之方向對前述第1移動體與第2移動體之至少一移 動體作用之復原機構。該檢測裝置依據隨著從外部作用於 前述第2移動體之外力之前述第2移動體對前述第1移動體 之相對位移量，從前述檢測機構輸出信號。 5 本發明之第3發明係前述檢測機構具有設置於前述第1 移動體，依磁場之大小輸出電壓之磁電轉換元件；及設置 於前述第2移動體，可產生磁場之磁場產生機構。該檢測裝 置藉隨著從外部作用於前述第2移動體之外力之前述第2移 動體對前述第1移動體之相對位移量，從前述磁電轉換元件 10 輸出對應於以前述磁場產生機構形成之磁場中之前述磁電 轉換元件附近之磁場之變化的信號，並藉此從前述檢測機 構輸出根據前述相對位移量之信號。 藉此，將以外力之作用移動之所謂樑構造體及檢測樑 構造體之位移量之位移量檢測部分開設置，樑構造體之應 15 變不致對檢測裝置造成影響，可獲得較以應變規之應變測 量外力之大小之習知技術之檢測裝置更堅固且再現性高之 力學物理量之檢測裝置。此外，本發明之力學物理量可為 力、速度、加速度、位置等。 又，本發明前述復原機構亦可具有彈性構件，前述第1 20 移動體及前述第2移動體以前述彈性構件相互結合，且藉以 前述彈性構件使互相對向之復原力分別作用於前述第1移 動體及前述第2移動體，復原力作用於前述相對位移量減少 之方向。 又，本發明前述磁電轉換元件亦可設置一對，且前述 200921070 磁場產生機構以磁鐵構成’連結纟!)述磁鐵之S極及N極之磁 極之方向相對於前述一對磁電轉換元件之配置方向構成 45。以上、70。以下之角度。 又，本發明前述第1移動體及前述第2移動體亦可藉由 5 轉動體限制成可相互相對運動。 又，本發明前述磁電轉換元件亦可為霍爾元件。 又，本發明前述檢測機構亦可具有應變規，且構造成 使前述應變規因前述第2移動體之相對位移而應變，並依前 述應變規之應變，輸出前述信號。 10 又，本發明前述復原機構亦可具有彈性構件，該檢測 裝置更包含有在前述彈性構件與前述第2移動體之間相互 傳達力之力傳達機構，且前述應變規固定於前述彈性構 件，藉伴隨前述第2移動體對前述第1移動體之相對運動之 相對位移，力經由前述力傳達機構從前述第2移動體傳達至 15 前述彈性構件，使前述應變規應變。 又，本發明前述復原機構亦可設置於前述第1移動體及 前述第2移動體，藉在各個配置成相同極性之磁極相對之磁 鐵間產生之斥力，使前述復原力作用。 又，本發明前述第2移動體亦可從前述預定方向觀看， 20 在複數處藉由轉動球列，與前述第1移動體可相移動地結 合，且前述檢測機構具有在與包含前述複數處中特定2處之 轉動球列之平面垂直且與前述預定方向平行之平面中，排 列於前述第1移動體及前述第2移動體之其中一者，同時N 極及S極於前述預定方向交互排列之複數個磁場產生機 7 200921070 構；及設置於前述第1移動體及前述第2移動體之另—， 磁場大小之電壓之磁電轉m該檢測襄^ 軸料前述第丨移㈣之⑽位移，從前述料 、7L件輸出對應於以前述磁場產生機構形成之磁j 月1J述磁電轉換元件附近之磁場的信號。 t .........../ϋ丨卞力、1於相對於前述福數 個磁場產生機構之排列方向垂直之方向以2個相同姿勢排 之η前述2個磁電轉換元件之輸出的差作為前述檢BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position detecting device and a position measuring device, a force detecting device 5 and a force measuring device, a speed detecting device, a speed measuring device, and an acceleration detecting device. A detecting device or measuring device for mechanical and physical quantities such as an accelerometer is particularly suitable for a precision force measuring device or a force detecting sensor that is suitable for detecting a change in weak force. [Prior Art 3 10 Background of the Invention Taking the detection of pressure as an example, it is known that a pressure sensor which is also correctly detected under the use condition in which pressure is applied eagerly is known as a film pressure sensor. A pressure sensor of this prior art is shown in Fig. 22. As shown in Fig. 22, the pressure sensor 100 is formed in the cylindrical pressure receiving chamber 102 in which the film portion 101 having a thickness of 15 degrees is formed at the end portion, and has almost completely in close contact with the inner wall 103b of the film portion 103. The pressure receiving body 108 of the pressure plate 109 is housed in a state in which the pressing portion plate 109 is brought into close contact with the inner wall 103b of the thin film portion 103 by the spring 110. The structure in which the pressure is applied to the film portion 103 by the pressure receiving body 108 and the pressure signal is obtained from the strain gauge 107 (see Patent Document 20 2). A beam-column type load sensor has been proposed as described in Patent Document 3. This beam-column load sensor is shown in Figure 23. That is, the beam-column load sensor 200 has the fixed portion 201 fixed to the base portion, the load portion 202, the upper and lower beam columns (beams) 203, 204, and the lower beam members 203, 204 sandwiched by the upper 3 200921070. The intermediate portions 205 and 206 and the rectangular application load portion 207 fixed to the load portion 202. Further, the strain gauge 208 is disposed on one of the thin walls between the intermediate portions 205 and 206. The strain gauge 208 is constructed of a thin film wafer. The strain gauge 208 is disposed at the center of the rectangular load applying portion 207 at the center of the beams 203 and 5 204 in the longitudinal direction of the beams 203 and 204. Further, the strain gauge 208 is provided in the thickness direction of the beam and column 203, 204 in a thin wall thickness and a shape size between the shape of the entire constituent member of the beam-column load sensor and the intermediate portion 205 and the intermediate portion 206. Correlate the torque zero center line of the torsion center of the beam and column 203, 204. 10 In addition to industrial applications, these pressure sensors or beam-column load sensors 200 have been developed for home use, care use, and medical use. Therefore, it is required to realize a low-cost and robust sensor as a market requirement. However, the above-mentioned force sensing device called a load cell such as a pressure sensor or a load sensor using a conventional strain gauge has a problem of construction or a problem. That is, the problem in the construction is that the force on the predetermined axis does not affect the other axes, and a very complicated beam structure is required. Since the displacement amount of the beam structure is the object of the force detection, the S/N ratio is lowered. Further, since the displacement amount of the beam structure is the object of the force detection, an error such as strain is accumulated. 2〇 The problem with the strain gauge is that the inspection is carried out by hand work, so the accuracy is uneven due to the operator, and the work, the inspection, the correction work number, etc. are necessary, and there is a problem of high cost. Because of these problems, there are problems such as resistance to vibration, shock, and temperature. Patent Document 1: Japanese Laid-Open Patent Publication No. 2007-187596 No. 200921070 Patent Document 2: Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. SUMMARY OF THE INVENTION Therefore, the object of the present invention is to provide a force for action, extracting only mechanical and physical quantities such as forces in a predetermined direction, and more accurately detecting and reducing strain in a direction other than a predetermined direction, and The low-cost mechanical and physical quantity inspection (four) setting and measuring device for product manufacturing. In order to achieve the above object, an object of the invention is to provide an ith moving body and a second moving body configured to move relative to each other in a predetermined direction, and to provide the above object. The first moving body outputs a magnetic field generating means that generates a magnetic field of 15 fields in accordance with a magnetic field magnitude t voltage, a magnetoelectric conversion element, and a second movable body. The detection device outputs a magnetic (four) signal corresponding to the vicinity of the magnetoelectric conversion element in the magnetic field formed by the magnetic field generating means from the magnetoelectric gas-converter by the relative displacement of the second movable body to the first movable body And thereby measuring the aforementioned relative displacement amount. Further, the magnetic field generating means is provided to connect the three poles of the magnetic field generating means and the direction of the magnetic pole 2' of the magnetic field generating means so as to form an angle with respect to the predetermined moving direction. In the second aspect of the invention, the first detecting body and the second moving body are configured to be movable relative to each other in the pre-direction, and the first moving body and the second moving body are output before a detecting means for transmitting a signal in a relative displacement in the predetermined direction, and a restoring mechanism for causing a restoring force to act on at least one moving body of the first moving body and the second moving body in a direction in which the shift amount of the relative position 5 200921070 is reduced . The detecting device outputs a signal from the detecting means in accordance with a relative displacement amount of the second moving body to the first moving body with a force acting outside the second moving body from the outside. According to a third aspect of the invention, the detecting means includes a magnetoelectric conversion element provided in the first movable body and outputting a voltage according to a magnitude of a magnetic field, and a magnetic field generating means provided in the second movable body to generate a magnetic field. The detection device outputs a relative displacement amount of the second movable body to the first movable body from a force external to the second movable body, and the output from the magnetoelectric conversion element 10 corresponds to the magnetic field generating mechanism. A signal of a change in a magnetic field in the vicinity of the magnetoelectric conversion element in the magnetic field, and thereby outputting a signal according to the relative displacement amount from the detecting means. Thereby, the displacement detecting portion of the displacement amount of the so-called beam structure and the detecting beam structure that moves the action of the external force is set, and the beam structure does not affect the detecting device, and the strain gauge can be obtained. A detecting device for a mechanical and physical quantity which is more robust and highly reproducible by a conventional detecting device for measuring the magnitude of an external force. Further, the mechanical and physical quantities of the present invention may be force, speed, acceleration, position, and the like. Further, the restoration mechanism of the present invention may further include an elastic member, and the first 20 moving body and the second moving body are coupled to each other by the elastic member, and the restoring force against each other is applied to the first member by the elastic member. In the moving body and the second moving body, the restoring force acts on the direction in which the relative displacement amount decreases. Further, in the above-described magnetoelectric conversion element of the present invention, a pair of magnetic and magnetic conversion elements may be provided, and the magnetic field generating means of the present invention may be configured by a magnet. The arrangement of the magnetic poles of the S pole and the N pole of the magnet with respect to the arrangement of the pair of magnetoelectric conversion elements The direction constitutes 45. Above, 70. The following angles. Further, the first movable body and the second movable body of the present invention may be restricted from being movable relative to each other by the fifth rotating body. Further, the magnetoelectric conversion element of the present invention may be a Hall element. Further, the detecting mechanism of the present invention may have a strain gauge, and is configured such that the strain gauge is strained by the relative displacement of the second movable body, and the signal is output according to the strain of the strain gauge. Further, the restoration mechanism of the present invention may further include an elastic member, and the detection device further includes a force transmission mechanism that transmits a force between the elastic member and the second movable body, and the strain gauge is fixed to the elastic member. The force is transmitted from the second movable body to the elastic member via the force transmitting means via the force transmitting means by the relative displacement of the second moving body to the relative movement of the first moving body, and the strain gauge is strained. Further, the restoration mechanism of the present invention may be provided in the first movable body and the second movable body, and the restoring force acts by a repulsive force generated between the magnetic poles of the same polarity. Further, the second movable body of the present invention may be viewed from the predetermined direction, and 20 may be movably coupled to the first movable body by rotating the ball row at a plurality of points, and the detecting mechanism has and includes the aforementioned plural One of the first moving body and the second moving body is arranged in a plane perpendicular to the plane of the rotating ball row and parallel to the predetermined direction, and the N pole and the S pole interact with each other in the predetermined direction. a plurality of magnetic field generators 7 200921070 arranged; and a magnetic field that is disposed between the first moving body and the second moving body, and the magnetic field of the magnetic field is converted to the first (4) (10) The displacement outputs a signal corresponding to the magnetic field in the vicinity of the magnetoelectric conversion element formed by the magnetic field generating mechanism from the aforementioned material and 7L. t .........../ϋ丨卞 force, 1 is arranged in two identical positions in a direction perpendicular to the arrangement direction of the plurality of magnetic field generating means η, the two magnetoelectric conversion elements The difference in output as the aforementioned check
UJ 15 20 在本發”’前述檢測機構亦可具有在與前述預 疋方向平行之平面中，排列於前述第丨 動體之其巾—者，賴極及嫩咖UJ 15 20 in the present invention, the detecting mechanism may have a towel arranged in the plane parallel to the pre-twisting direction, and arranged in the first movable body, Laiji and Yongcai
Hi數體個磁場產生機構；及設置於前述第1移動體及前述 之另一者，且輸出根據磁場大小之電麼之磁電轉 換几件。錢測裝置藉前述第2移動體對前述第丨 相對位移’從前述磁電轉換元件輪出對應於以前述磁場產 生機構形成之磁場中之前述磁電 號。前述磁電轉料件㈣^ 彳权磁場的信 之排#^ _複數個磁場產生機構 排歹J方向垂直之方向以2個相同姿勢排列配置 個磁電轉換元件之輸出之差作為前述檢測機構之輪出 、又’本發明亦可為-種計測裝置，其包含有 Π 置有::前述檢測裝置輸*之信號放大之放大機 出部’且該輸出部依從前述檢測裝置輸出之 ^將以W述檢測裝置所檢測之物理量預定方向之成份 200921070 大小輸出至外部之信號檢測機構。 在此發明中，典型為第丨移動體及第2移動體相互料 限制，第i移動體及第2移動體之相對運動為直線運動。即° 在此發明中，預定方向之相對運動為相對之直線運動 時’具有第！移動體及第2移動體，構成直線運動引導裝置。 此外，亦可構成具有第i移動體及第2移動體之曲線軸引The Hi number of magnetic field generating means; and the other one of the first moving body and the other one, and outputting a plurality of magnetoelectric conversions according to the magnitude of the magnetic field. The money measuring device rotates the aforementioned magnetoelectric number in the magnetic field formed by the magnetic field generating mechanism from the magnetoelectric conversion element by the second moving body to the aforementioned relative displacement θ. The magnetoelectric material transfer member (4) is the row of the magnetic field of the magnetic field conversion mechanism. Further, the present invention may also be a measuring device including: a: amplifying machine output portion of the signal amplifying by the detecting device, and the output portion is outputted by the detecting device; The component of the predetermined direction of the physical quantity detected by the detecting device 200921070 is output to an external signal detecting mechanism. In the present invention, typically, the second moving body and the second moving body are mutually restricted, and the relative movement of the i-th moving body and the second moving body is linear motion. That is, in this invention, the relative motion of the predetermined direction is the relative linear motion when it has the first! The moving body and the second moving body constitute a linear motion guiding device. In addition, a curved axis guide having an ith moving body and a second moving body may be formed
1〇 is1〇 is
導震置’將預先方向之相對運動作為圓運動或圓狐 之曲線運動。 在此發明中，典型為於第1移動體設置磁電轉換元件 並且於第2移動體設置磁鐵，構成檢測機構，藉伴隨第味 動體及第2移動體之相對運動之磁電轉換元件附近之磁鐵 的場場變化’從磁電轉換元件輸出信號。χ，典型為當檢 ，構使用磁電轉換^件時，典型為採用利用霍爾效應之 嘴電轉換元件之霍爾元件，亦可採用雜型元件(mr元件) 等其就件。根據此結構，藉❹霍爾元件等磁電轉換元 件及磁鐵，進行力之檢測，可分為位移量檢測部及樑構造 題而構成，故可提高力檢測之再現性（反覆性）。 在此發明中，較佳為磁電轉換元件設置一對，且前述 噶場產生機構以磁鐵構成，連結磁鐵之s極及N極之磁極之 方向相對於一對霍爾元件等磁電轉換元件之配置方向，僅 員斜預疋角度（90 - 0 )而設置（例如構成45〇以上 、70°以下 角度）。即’根據預定方向為與磁電轉換元件之配置方向 鸯直之方向之結構’將作為磁場產生機構之磁鐵配置成相 對於預定方向，磁鐵之磁極僅傾斜〇。。根據此結構，藉使 9 200921070 用複數個使磁鐵傾斜之磁雷 可择m 1 _之_轉換元件， 了獲4使用補(1個)磁電轉換元件之情 外，磁鐵可採用-般之固定磁鐵或電磁鐵。輪出°此 在此毛明t，典型為第丨移動體係線性 5 15 2移動體係線性導件之勒指 體’第 移動體為塊體h 第1移動體為軌道，第2 移動體為塊體亦可。即，宜為具 行設置之-對側壁之第“一者預疋間隔相互平 之弟1移動體及插入第丨移動俨 間，設置成於第！移動體之長向㈣_自^^ 之結構。…般計測外力時，宜使與外力作用之移動體 不同側之㈣體以。纽發明中，較佳 == 2移動體藉由轉動體限制成可相互相對運動。動體及第 在此發明令，其他典型之一 應變規，應變規因第2移動體位：:測:構具有 之應變，輸出信號。 移而應變，依應變規 在此發明中，較佳為構造成第i移動體 彈性構件相互結合’藉以彈性m 多動體以 楮以彈(·生構件反向之復原力作 移動體及第2移動體，復原力作用於相對位移量減少之方 向0 又，本發明亦可為-種力檢測裝置，其包含有構造成 Μ二於預定之方向相互相對運動之第i移動體及第2移動體； 设置於前述第1移動體’輸出根據磁場之大小之電壓之磁電 轉換元件；及設置於前述第2移動體，可產生磁場之磁場產 生機構及力仏測裝置藉前述第2移動體對前述第】移動體 之相對位移，從前述磁電轉換元件輪出對應於以前述磁場 200921070 5 10 15 20 機構形成之磁場中之前述磁電轉換元件附近之磁場變 化之仏破，並精此計測前述相對位移量。前述磁場產生 構係連結前述磁場產生機構之3極及_之磁極 於前述預定之運動方向構成角度而設置。 白相對 可於予==可為一種力檢測裝置，其包含有構造成 幹出㈣ 對運動之第1移動體及第2移動體； =:述第1移動體及前述第2移動體沿前述預定方向 動體及第2移 少之方向作::彈體於使前述相對位_ 作用於前㈣職倾顧著從外部 移動體之相糾敕 前述第2移動體對前述第1 、立移里，從前述檢測機構輸出信號。 本糾亦Μ上述力㈣裝置， 構具有設置於前料叫以1機 雜二：=，部作用於前述“ 量，從前述磁電轉換元件==第1移動體之相對位移 形成之磁場W述磁 唬，並藉此從前料測機構 π變化的k 號。 轉輸出根據則述相對位移量之信 又，本發明亦可為上述力檢剛襄置， :及前述第2移動體以前述彈性構件相互結合，藉:= ，構件使互相料之復原力分_祕前述第丨移動體Γ 200921070 前述第2移動體，復原力作用於前述相對位移量減少之方 向。 本發明亦可為上述力檢測裝置，其中前述磁電轉換元 件設置一對，且前述磁場產生機構以磁鐵構成，連結前述 5 磁鐵之S極及N極之磁極之方向相對於前述一對磁電轉換元 件之配置方向構成45°以上、70°以下之角度。 又，本發明亦可為上述力檢測裝置，其中前述第1移動 體及前述第2移動體藉由轉動體限制成可相互相對運動。 又，本發明亦可為上述力檢測裝置，其中前述磁電轉 10 換元件為霍爾元件。 又，本發明亦可為上述力檢測裝置，前述檢測機構具 有應變規，且構造成前述應變規因前述第2移動體之相對位 移而應變，並依前述應變規之應變，輸出前述信號。 又，本發明亦可為上述力檢測裝置，更包含有在前述 15 彈性構件與前述第2移動體之間相互傳達力之力傳達機 構，且前述應變規固定於前述彈性構件，藉伴隨前述第2移 動體對前述第1移動體之相對運動之相對位移，力經由前述 力傳達機構從前述第2移動體傳達至前述彈性構件，使前述 應變規應變。 20 又，本發明亦可為力計測裝置，其包含有上述力檢測 裝置；將從前述力檢測裝置輸出之信號放大之放大機構； 及設有依從前述力檢測裝置輸出之信號，顯示作用於前述 力檢測裝置之外力預定方向之成份之大小之顯示部之信號 檢測機構。 12 200921070 發明效果 如以上所說明，根據本發明，對作用之力，僅抽出沿 預定方向之力學物理量，而可更正確地進行檢測，縮小對 在沿預定方向以外之方向之應變，並且可謀求低成本化。 5圖式簡單說明 第1圖係顯示本發明第1實施形態之力計測裝置全體結 構之方塊圖。 第2圖係顯示本發明第丨實施形態之力檢測裝置之上面 圖（第2A圖）、側截面圖（第2B圖）、橫截面圖（第2C圖）。 10 第3圖係用以明使用本發明實施形態之霍爾元件時之 霍爾元件之配置與永久磁鐵之傾斜之實驗方法的側面圖 (第3A圖）及平面圖（第30圖）。 第4圖係顯示正方形磁鐵（wl〇xL1〇)相對於霍爾元件 之配置之各安裝角度輸出電壓之進給量關聯性之圖表。 15 第5圖係顯示薄長方形磁鐵(W3xL10)相對於霍爾元件 之配置之各安裝角度輸出電壓之進給量關聯性之圖表。 V " ^ 第6圖係顯示鉉磁鐵(φ3 2χ2)相對於霍爾元件之配置之 各安裝角度輸出電壓之進給量關聯性之圖表。 第7圖係顯示本發明第2實施形態之力檢測裝置之上面 -20圖（第7A圖）、側截面圖（第7B圖）、橫截面圖（第7C圖）。 ， 第8圖顯示本發明第3實施形態之力檢測裝置之上面圖 (第8A圖）、側截面圖（第8B圖）、橫載面圖（第8C圖）。 第9圖係顯示本發明第4實施形態之力檢測裝置之上面 圖（第9A圖）、側截面圖（第9B圖）、橫截面圖（第9CBI)。 13 200921070 第10圖係顯示本發明第4實施形態之力檢測裝置之另 一例之側截面圖（第10Α圖）、挑出上面圖之一部份者（第10Β 圖）。 第11圖係顯示本發明第5實施形態之力檢測裝置之上 5 面圖（第11Α圖）、側截面圖（第11Β圖）、關於霍爾元件與磁鐵 列之配置之圖（第11C圖）。 第12Α圖、第12Β圖係顯示檢測塊體對軌道之相對位置 之變化時，塊體之傾斜之影響之比較例者。 第13Α圖、第13Β圖係顯示在本發明第5實施形態中， 10 檢測塊體對軌道之相對位置之變化時，塊體之傾斜之影響 者。 第14圖係顯示在本發明第5實施形態中，採用從2個霍 爾元件而得之輸出信號之差，作為塊體對軌道之相對位置 信號之結構者。 15 第15圖係顯示本發明第6實施形態之霍爾元件與磁鐵 列之配置之上面圖（第15Α圖）、側面圖（第15Β圖）、正面圖（第 15C圖）、顯示力檢測裝置之上面圖（第15D圖）。 第16圖係顯示本發明第6實施形態之霍爾元件與磁鐡 列之另一例之上面圖。 20 第17圖顯示本發明第7實施形態之力檢測裝置之上截 面圖（第17Α圖）、側截面圖（第17Β圖）。 第18圖顯示本發明第7實施形態之力檢測裝置之另一 列之側截面圖（第18Α圖、第18Β圖）。 第19圖係顯示本發明第8實施形態之加速度拾取器之 14 200921070 側截面圖（第19A圖、第19B圖）。 第20圖係顯示本發明第9實施形態之力檢測裝置之上 面圖（第20A圖）及板彈簧之立體圖（第20B圖）。 第21圖係顯示本發明參考實施形態之力檢測裝置之上 5 面圖（第21A圖）及橫截面圖（第21B圖）以及規部之平面圖（第 21C圖）。 第2 2圖係顯示習知技術之薄膜式力檢測裝置之截面 圖。 第2 3圖係顯示習知技術之切變（樑柱）式力檢測裝置之 10 立體圖。 【實施方式3 用以實施發明之最佳形態 以下，參照圖式，就本發明之實施形態作說明。此外， 以下之實施形態之所有圖式，相同或對應之部份附上同一 15 標號。 (第1實施形態） 首先，就本發明第1實施形態之力計測裝置作說明。於 第1圖顯示此第1實施形態之力計測裝置之全體結構。 (力檢測裝置） 20 如第1圖所示，在此第1實施形態之力計測裝置中，具 有檢測外力，輸出根據此外力大小之信號之力檢測裝置10 而構成。力計測裝置包含有使從此力檢測裝置10輸出之信 號放大，作為放大機構之放大器20、檢測經此放大器20放 大之信號之電壓值，作為信號檢測機構之外部信號檢測器 15 200921070 3〇。又，於此外部信號檢測器30設置顯示根據電廢值之外 力之大小作為根據電壓值之值而輸出至外部，作為輸出部 之顯示部30a。 在如以上構成之力檢測裝置中，以力檢測裝置10計測 5 之外力作為對應於此外外力之電壓值而輸出，以放大器20 放大後，在外部信號檢测器30，轉換成以N(牛頓）或kg(kg 重）之單位表示之力之值，顯示於顯示部30a。此外，如後 述，由迟力檢測裝置10之輸出為磁電轉換元件之輸出，故 多為微弱電流’為減低雜訊，在放大器20或外部信號檢測 10器3〇中，設置低通濾波器（LPF)，以謀求雜訊之減低。在上 述中，輸出部作為將力之值與N(牛頓）或kg(kg重）一同顯示 之顯示部30a，輸出部不限於以在視覺上可辨識之形式輸出 力之大小者。亦包含所有具有將力之大小輸出至另外準備 之顯示器或LED、其他機器等之功能者。 15 (力檢測裝置10) 顯示此第1實施形態之力檢測裝置丨〇 如第2圖所示，在此以實施形態之力檢測裝置， 20 元件= 1、:： \保持器3、磁鐵4、作為—對，轉換 隹爾70件5、連接器6及板彈簧9而構成。 周部字形塊體1與矩形軌道2係塊體1之内 及保持;^ 部糟由設置於軌道2之側壁之轉動俨2a 以 '、、；保持器3之轉動體3a，構 豆 塊體1及執心α 知成可相對運動。即， ，構成可相對地進行直線運動之線性導件 200921070 此外，在此發明中，將塊體1作為第1移動體，執道2作為第 2移動體，亦可將塊體1作為第1移動體，將執道2作為第 動體。 又，如第2A圖及第2B圖所示，於軌道2上面形成有溝 5 2b。此溝2b形成可使作為磁場產生機構之磁鐵4相對於轨道 2之長向傾斜，且保持。即，磁鐵4構成與軌道2之運動連動。 在此第1實施形悲中，磁鐵4之N-S之磁極方向相對於軌道2 之長向、亦即塊體1與軌道2之相對運動方向構成角度0， 配置於溝2b之内部。在此，此角度θ為30。（ 0=3〇。）。 10 又，於塊體1形成凹部1 b。一對霍爾元件5相對配置於 此凹部lb内。即，一對霍爾元件5配置成其配置方向與塊體 1之運動方向垂直’以與塊體1之運動連動。 又，霍爾元件5之輸出經由輸出線5a，分別供給至連接 器6。在此第1實施形態中使用之霍爾元件5之輸出端子為4 15個端子’亦可採用此霍爾元件5以外之霍爾元件是無須贅言 的。於此連接器6連接導線之端子（圖中未示），經由此導線， 連接於第1圖所示之放大器20，藉此，可將力檢測裝置1〇之 輸出信號供給至放大器20。 又，作為彈性構件之板彈簧9使用固定用螺絲8，設置 20於塊體1與軌道2之移動方向之端面，以與塊體1及轨道2之 移動抗衡。如第2C圖所示，此板彈簧9之仿照〕字型塊體！ 兩側之形狀之部份與仿照軌道2之矩形之部份具有以較該 等部份細之部份連結之形狀。根據本發明人之見解，藉使 板彈簧9呈第2C圖所示之形狀，可將彈簧之復原之再現性維 17 200921070 持高度。此板彈簧9以固定用螺絲8固定於塊體丄及轨道2。 即，以固定用螺絲8及板彈箐9將塊體i及軌道2相互固定。。 又，設置間隔件11 ’以使沿軌道2之長向之長度 ' 亦即 沿運動方向之長度大於沿塊體i之長向之長度。在此心實 5施形態中，如第2A圖所示，於兩側設置間隔件11，以增長 約⑺卟!!!左右。此外，在不設置間隔件丨丨下，藉使執道^形 成較塊體1長’亦可獲得相同之結構。 〆 如此，藉設置間隔件丨丨，以使執道2長於塊體丨，沿兩 側之板彈簧9朝向内側之一對按壓力對軌道2作用。如此， 10來自在兩端側面之板彈簧9之按壓力作用於軌道2，當該等 作用之力之合力為〇時，塊體1與執道2呈相對穩定之狀態。 換言之，在穩定狀態下，移動方向之按壓力從兩側面 作用於軌道2 ’作用於軌道2之力變成〇，呈軌道2相對於塊 體1相對移動而位移之位移狀態時，力作用於與移動方向相 15 反側之方向（復原力）。 此時，藉構造成即使在穩定狀態下，按壓力從各板彈 簧9作用，可防止因執道2之移動量之霍爾元件5之輸出混亂 之發生。 即，在不設置間隔件11下，令塊體丨與軌道2為相同長 度時，塊體1與軌道2之兩端部在同一面上之階段，板彈菁9 之按壓力不作用’而呈穩定狀態，而軌道2稱微移動時，霍 爾元件5之磁電轉換之反應緩慢，故輸出產生混亂。針對 此，藉如第1實施形態般，設置間隔件U，藉兩側端面之板 彈簧9，力平常作用於軌道2，故即使移動微小，復原力平 18 200921070 常即作用，而可使霍爾元件5之輸出穩定。 (力檢測原理） 接著，就使用以上述結構為前提之此力檢測裝置丨〇之 力檢測原理作說明。 5 即’在固定塊體1之狀態下，板彈簧9之力以外之力對 軌道2作用。此時，軌道2隨著沿著此外力中塊體丨與軌道2 之相對移動方向之力成份移動。藉此，磁鐵4其中—極靠近 霍爾元件5，同時，另一極遠離。舉例言之，當執道2移動 至第2A圖中之右向時，磁鐵4之N極接近霍爾元件5,同時， 10 s極遠離。 藉此軌道2之移動，一對霍爾元件5周圍之磁場產生變 化。因此磁場之變化’產生霍爾效應，從霍爾元件5將根據 軌迢2之移動量（以下稱為進給量）之電壓值作為信號而輪 出。此外，關於使磁極相對於移動方向傾斜之磁鐵4相對於 15 一對霍爾元件5相對位移時之輪出電壓的進給量關聯性後 述之。 所輸出之信號經由輪出線5a，供給至連接器6，輸入至 放大器2〇。將在放大器2〇經放大之信號供給至外部信號檢 測部30,依此信號之電塵值，於顯示部3〇a顯示上述外力之 20 移動方向成份之大小。 如以上進行，當外力作用於執道2時，可選擇性地計剛 沿此軌道2與制丨之相對義方向之成份。料，在本實 施例中，檢測機構具有霍爾元件5及磁鐵4而構成。復原機 構具有板彈簣9而構成。 19 200921070 (與磁鐵之各安裝角度之霍爾元件之輸出電壓相關的進給 量關聯性） 接著’就終至想出上述力檢測原理之本發明人之關於 一種磁電轉換元件之霍爾元件之配置方法及磁鐵之安裝角 5度0的考察作說明。於第3A圖及第3B圖顯示本發明人之實 驗及考察之霍爾元件與磁鐵之位置關係。 如第3A圖所示，在與霍爾元件5之輸出電壓相關之進給 量關聯性之實驗中，將2個霍爾元件5隔著預定間隔D (mm)(在此，d=3.2) ’設置一對，於在此中間，且距離配置 10 2個霍爾元件5之方向d(mm)(在此，d=l.〇)之位置設置磁鐵 4。磁鐵使用3種磁鐵。 即’第1磁鐵使用寬度W為l〇mm、長度L為10mm之矩 形橡膠磁鐵（在第3圖中為實線），第2磁鐵使用寬度W為 3mm、長度[為1〇111111之橡膠磁鐵(在第3圖中為二點鏈線）， 15第3磁鐵使用圓柱形，且圓之直徑為φ3.2mm，厚度2mm之 1 女磁鐵(在第3圖中為點線）。將各磁鐵4相對於2個霍爾元件5 之配置方向傾斜第3B圖中顯示之角度0(安裝角度0)，於 第3B圖中箭號方向相對移動。此外，在此實驗中，當令磁 鐵4(第2礙鐵)之安裝角度0為〇。時，調整輸出，以使輸出電 20 壓為0。 在以上結構之實驗中，分別於第4圖、第5圖、第6圖顯 不依第1磁鐵、第2磁鐵、第3磁鐵分別將移動量（進給量）(μηι) 之霍爾元件5之輸出電壓關聯性改變角度0之結果。 根據第4圖、第5圖、第6圖之測量，確認了藉將2個霍 20 200921070 爾元件並列配置成在磁鐵4之兩側相對於NS磁極之方向構 成角度（90。- 0 )之直線狀’相較於使用1個霍爾元件之情 形，可使霍爾元件5之輸出電壓為4倍。即，設置2個霍爾元 件5，同時，在各霍爾元件5，N極之影響及s極之影響分別 5影響輸出，故以（霍爾元件)2個x(N極之磁變動+ S極之磁變 動）獲得4倍之電壓輸出。 從第4圖〜第6圖可知，當安裝角度θ小時，不論為第} 磁鐵(磁鐵(WlOxLlO))、第2磁鐵(磁鐵(w3xLl〇))及第3磁鐵 (磁鐵)之任一者’進給量（μ m)相對於輸出電壓特性之直線性 1〇皆為良好。再者，從第4圖及第5圖可知，在範圍之中央附 近可獲得良好之直線性，且藉與第4圖比較，可知不論為橡 膠磁鐵或鈥磁鐵，特性皆不變。 又，本發明人依以上之實驗結果，進行各種考察，致 力進行檢讨。結果，終於得知關於各磁鐵4之安裝角度及輸 15出電壓，隨著磁鐵4之磁力増強，或霍爾元件5與磁鐵之距 離接近，明顯地反映於曲線之傾斜。 又，本發明人亦終於得知，由於磁鐵之形狀為矩形， 輸出電壓因磁力線與空隙之相關關係而穩定，以45度之角 度安裝第1磁鐵及第2磁鐵時，輸出電壓之進給量依賴特性 2〇 為極穩定之輸出。 即，設置一對霍爾7L件5，使磁鐵4相對於塊體丨之移動 方向傾斜角度Θ而設置，使一對霍爾元件5與磁鐵4靠近配 置，藉此，可提高輸出電壓之進給量依賴特性之線形性及 計測範圍。藉將此線形區域利用於力檢測，力之移動方向 21 200921070 成份反映於進給量，此進給量以線性反應於輸出電壓值， 故可依輸出電壓值，檢測外力之移動方向成份。 依以上本發明之實驗及檢討，在此發明中，使用第2磁 鐵(橡膠磁鐵(W3xL10))作為磁鐵4，從輸出電壓之進給量關 5 聯性，令安裝角度0為30°。此外，依需要，亦可採用低價 之橡膠磁鐵之第1磁鐵或鈥磁鐵之第3磁鐵。又，亦可令磁 鐵之安裝角度0為30°以外之角度、例如0°或45°。此點根據 本發明人之見解，安裝角度0典型為0°以上、90°以下，較 佳為0。以上、45。以下，更佳為20。以上、45。以下。 10 又，根據本發明人之檢討，計測電路以採用前段之運 算放大器（operation amplifier)作為計測用放大器，後段採用 低增益放大器為佳。電源宜藉採用線性電源（線性調節器）， 將一定電壓供給至霍爾元件5。 如以上所說明，根據此第1實施形態，當外力對塊體1 15 或軌道2作用時，從該外力之向量成份抽出所期方向之力成 份，而可測量其大小。又，由於使用高剛性之線性導件， 故可有效縮小對所期方向以外之力成份之應變。 (第2實施形態） 接著，就本發明第2實施形態之力計測裝置之力檢測裝 20 置10作說明。此外，力檢測裝置10以外之結構皆與第1實施 形態相同。於第7圖顯示此第2實施形態之力檢測裝置10。 如第7A圖及第7B圖所示，在此力檢測裝置10中，與第 1實施形態不同，於沿塊體1之移動方向之兩側端面設置停 止器12取代板彈簣9。於此停止器12之内側側面之軌道2之 22 200921070 移動方向兩端側面分別設置使復原力作用之作為彈性構 作之彈性材7。此彈性材7設置成在穩定狀態，朝沿行進方 向之内側使按壓力對執道2作用。然後，如第7圖所示，由 於其他之結構與第1實施形態相同，故省略說明。 在此第2實施形態中，除了作為復原機構之彈性構件 外，其餘具有與第1實施形態相同之結構，而可獲得與第i 實施形態相同之效果。 (第3實施形態） 10 15 20 接著，就本發明第3實施形態之力計測裝置之力檢測裝 置10作說明。此外，力檢測裝置1〇以外之結構與第丨實施形 態相同。於第8圖顯示此第3實施形態之力檢測裝置1〇。 如第8A圖及第8B圖所示，在此力檢測裝置1〇中，與第 1及第2實施形態不同’於軌道2上面固^作為彈性構件之彈 性材料13之-面’同時，於與軌道2之上面相對之位置之塊 體1之内周部下面湘定彈性材料13之另—面。在此，使在 舞性材料13之穩定狀態之固定位置比起偏向軌道】，更稱微 ，向塊請，而使彈性材料13變形。藉此，在穩定狀態下， 精無性材料13，朝向移動方向内側之力作用於軌道2，朝向 移動方向外側之力作用於塊則。然後，構造成各塊則及 軌道2之合力在穩定狀態為0。藉此，以彈性材料13作用於 執道2之力與第丨及第2實施形態相㈤。由於其他之結構與第 1實施形態相同，故省略說明。 在此第3實施形態中’因作為復原機構之彈性材13之結 構以外具有與第1實施形態相同之結構，而可獲得與第1 23 200921070 施形態相同之效果。 (第4實施形態） 接著，就本發明弟4貫施形態之力檢測裝置1 〇作說明。 本實施形態係使執道2復原至穩定位置之復原力以磁彈簧 5作用於軌道2之形態。於第9圖顯示此第4實施形態之力檢測 裝置10。第9A圖係力檢測裝置1〇之上面圖，第9B圖係γ_γ 箭視圖，第9C圖顯示χ-χ箭視圖。此外，在力檢測裝置1〇 中，以下說明之結構以外之結構與第1實施形態相同。因 而，在第9圖中，省略不需本實施形態之說明之結構。 10 如第9Α圖及第9Β圖所示，在此力檢測裝置1〇中，與第 1實施形態不同’於沿塊體1之移動方向之兩側端面設置以 軟磁性不鏽鋼形成軛停止器20取代板彈簧9。於2個軛停止 器2 0之軌道2側之面分別設置塊體側磁鐵組2 2。此塊體側磁 鐵組22在本實施形態中係將直徑φ為2mm、厚度t為1 mm之 15圓板狀磁鐵22a、22b排列配置者。在此，各塊體側磁鐵組 22之磁鐵22a與22b在不同側之磁極，固定於軛停止器20， 不同側之磁極與轨道2相對。 另一方面，於執道2之移動方向之兩端面設置以軟磁性 不鏽鋼形成之軛21。於2個軛21分別設置軌道側磁鐵組23。 20 此軌道側磁鐵組2 3亦係將與塊體側磁鐵組2 2相同之圓板狀 磁鐵23a及23b排列配置者。磁鐵23a與23b在不同側之磁極 固定於軛21。磁鐵22a及23a、22b及23b配置成分別與不同 之磁極相對。 以下，就採用本實施形態之結構之情形之效果作說 24 200921070 明。在此，首先考庳 心U機械彈簧產生使軌道2復原至穩定位 置之復原力之情形。仏 此時’由於彈簧之特性具有滯後現象， 故有不易在短衝程以* 艮好精確度測量對軌道2或塊體1從移 動方向施加之力譽次— 見貝訊之情形。測量數gf左右之微小力 5時@彈汽特性之滞後現象之影響，而無法進行正常之力 覺資訊之測量。 針對此’根據本實施形態之結構，利用相反極之磁鐵 之斥力’獲付復原力’故滞後現象之影響少，而以執道2或 塊體1之短衝权(例如1〇〇μηι以内）之移動量，測量微小之力 1〇時，亦可以更良好之精確度測量力覺資訊。又由於在與 移動方向相反之方向’斥力不易對軌道2或塊體j作用，故 可構成除了滚動阻力外，阻力極少之測量系统。在此，本 .實施形態之復原機構包含軌道側磁鐵組23、塊體側磁鐵組 22而構成。 15 此外’在上述說明之實施形態中，塊體側磁鐵組22之 鈥磁鐵22a、22b與軌道側磁鐵組23之鉉磁鐵23a、23b如第9 圖所示，配置成相對之磁鐵中心一致。對此，亦可配置成 使相對之磁鐵之中心錯開。以下，使用第1〇圖，就此例作 說明。 -0 此時’如第10A圖所示，構成軌道側磁鐵組23之鈥磁鐵 23a、23b之磁極中心亦可位移至軌道2之上面側，構成塊體 側磁鐵組22之鈦磁鐵22a、22b之磁極中心亦可位移至與塊 體1之内周部下面分離之方向，而使各磁極中心偏移。如此 進行，可以諸磁鐵之斥力，賦與使軌道2與塊體1内周部下 25 200921070 面側附勢之增壓。藉此，可以簡單之構造，抑制塊體丨與軌 道2之偏差，使相對移動更順利。 又，如第10B圖所不，亦可使構成塊體側磁鐵組22之錢 磁鐵22a、22b之磁極中心相對於軌道2之中心軸，位移至外 5側，而使各磁鐵中心錯開。此時，以諸敍磁鐵之斥力，賦 與使軌道2從兩側於中心軸側附勢之增壓。如此進行，可抑 制塊體1與軌道2間之滾動阻力，而使兩者之相對移動更平 順。此外，構成上述塊體側磁鐵組22、執道側磁鐵組23之 磁鐵不限於鈥磁鐵。當然亦可為肥粒鐵系磁鐵等其他種類 10 之磁鐵。 (第5實施形態） 接著，就本發明第5實施形態作說明。在本實施形態 中，就軌道2對塊體1之相對位置之檢測的磁鐵及霍爾元件 之新配置作說明。第11圖係顯示本實施形態之力檢測裝置 15者。 第11A圖係從塊體1側觀看力檢測裝置1〇者，第UB圖 係遠離塊體1及執道2，且從力檢測裝置1〇之側面側觀看 者，第11C圖係用以說明霍爾元件25a及25b、磁鐵列26及27 之配置者。 20 在本實施形態中，如第lie圖所示，塊體1相對於軌道2 之相對位置資訊可藉以霍爾元件檢測以配置於執道2之磁 鐵產生之磁場而檢測。在本實施形態中，霍爾元件25a及霍 爾7L件25b以安裝姿勢相同’相對於塊體丨之行進方向垂 直，遠離水平方向排列之狀態安裝於磁檢測基板24。此磁 26 200921070 檢測基板24嵌入至設置於塊體！之基板用溝⑴，使用固定孔 24a 24b螺固於塊體卜又，霍爾元件、祝固定於設 在等間之樹月曰製強化板26，相互之相對位置穩定，且 抑制振動。 於軌道2上面形成磁鐵配置溝2(^藉於與磁鐵配置 溝c之塊體1之行進方向平行之側面之其中一者設置2個磁 鐵27a 27b，形成磁鐵列27。又，於與磁鐵配置溝&之塊 體1之行進方向平行之側面之另_者配置2個磁鐵挪、 28b，形成磁鐵列28。形成有此磁鐵列27、28之平面為與包 含將麟2與频〖結合之2處之轉树狀平㈣直，且與 在本實知开九悲中預定之方向（塊體丨之行進方向）平行之平 面。 在將磁檢測基板24安裝於塊體丨之狀態下，霍爾元件 25a及25b進入至磁鐵配置溝2c内，塊體丨相對於執道2相對 15移動，在霍爾元件253及2%在磁配置溝2c内為磁鐵列27、 28從兩側夾持之狀態下，於磁鐵之排列方向移動。 在此’在磁鐵列27之磁鐵27a與磁鐵27b，與霍爾元件 25b相對之磁極相反。在磁鐵28a與磁鐵28b，與霍爾元件25a 相對之磁極相反。再者’磁鐵27a與磁鐵28a在相反之磁極 2〇 相對，磁鐵27b與磁鐵28b亦在相反之磁鐵相對。藉此，於 塊體1施加力，塊體1相對於軌道2相對移動時，霍爾元件25a 及霍爾元件25b檢測從磁鐵列27、28產生之磁場之變化，而 可以良好精確度檢測塊體2之位置。 接著，使用第12圖及第13圖，就採用本實施形態之結 27 200921070 構之作帛、效果作說明。於第12圖顯示將塊體！安裝於單一 之霍爾7G件29，並且，使用在執道2之上面，排列成磁極與 塊體1之關部下面相對之磁鐵池、鳩檢測塊體⑼軌 道2之相對位置之變化時，塊體丨傾斜之影響，以作為比較 5例。於第13圖顯*採用本實施形態之結構時之塊體丄之傾斜 之影響。 、 10 15 首先，考慮第12圖所示之情形。在此，在本實施形態 之力mi〇中’塊體1相對於軌道2，以作為轉動球列 之保持於保持器之轉動體，相對於軌道2之行進方向在左右 兩側結合。因此，形成易於第12B圖中箭號方向傾斜之構 造’有因箭號方向之力之成份，產生微米階之位移(傾斜) ϋ彡圖所示傾斜時，由於霍爾元件29與 磁鐵3〇a之距離D1增長，霍爾元件29與磁鐵働之距離脚 短故於D1與D2間產生差，在霍爾元件29檢測之磁場強度 之值易變動’而不易進行精確度良好之檢測。 又為抑制此’而若提高塊體1與軌道2間之剛性時， 、曰大於進行微小力之測量或微小位移之測量時，出 見’’’、感區或現象，因此，有不易進行精確度良好之檢 測之情形。 :針對此，如第13圖所示，根據本實施形態，當塊體刚 斜寺*爾το件25仍在維持對磁鐵％、27b之距離之狀態， 相^對於磁鐵列27之扭轉角Θ變化。此時，實際上’由於 在霍爾7L件25b’檢測磁場之區域為相當小之部份，故即使 Θ變化’對霍爾元件25b之輪出幾乎無影響。又，由於霍爾 28 200921070 元件25b與磁鐵27a間之扭轉角 27b間之扭轉角6» 2相對， 姿勢之變化之影響。 ®轉角01與霍爾元件25b及磁鐵 故易消除各磁鐵對霍爾元件25b之 如此糟知用本實施形態之結構，相對於塊體1易傾斜 5 =方向’使對霍爾元件25a'说之輸出信號之傾斜之影響 又降低因此，塊體1相對於轨道2傾斜時，亦可將力之檢 測精精確度維持在高精確度。此外，在本實施形態中，設 定了塊體1相對於軌道2，以保持於保持器之轉動體，相對 ;k之行進方向以左右兩側結合之情形而說明，適用本 1〇發明之結财限於塊«由2條機球列，與簡結合之結 亦可L用於以4條或6條轉動球列，與塊體及軌道結合 之-構。此對包含最易傾斜之組合之特定2條球列之平 面之傾斜應用本實施形態即可。 接著，就本實施形態之霍爾元件之輸出之檢測方法作 15說明。在本實施形態中，霍爾元件25a及霍爾元件25b如前 述使姿勢相同，排列固定於磁檢測基板24。以磁鐵列π、 磁鐵列28產生之磁場為相互相反之方向。因而，電從洞元 件25a產生之輸出信號與從霍爾元件25b產生之輸出信號為 正負完全逆轉之信號。 2〇 是故，在本實施形態中，如第14圖所示，採用從霍爾 兀件25a取得之輸出信號與從霍爾元件25b取得之輪出信號 之差，將之作為塊體1對軌道2之相對位置信號。如此進行Y 藉磁鐵列27及磁鐵列28，使因磁場而應以各霍爾元件輸出 之信號增大約2倍，而可以更良好之精確度檢測塊體丨之位 29 200921070 置。又，當作為干擾之磁場作用時，如第14圖所示 除因干擾磁場造叙各_元件之 / 擾更強之測量系統。 叫干 151 ΠΤ3 10 15 20 ;衣罝附近配置電磁鐵(馬達)或永久磁鐵 時，亦可抑制測#精確度因從該等產生之磁場惡化。又， 在上述結構中，藉在霍爾元件25a、25b與放大器2Q間進行2 個霍爾元件之差動信號之類比通信，而不fCPU之運算， 而可以簡單之結構’減低干擾磁場之影響。在本實施形態 中，汉疋干擾磁場之雜m檢測之磁場強度，檢測之硬 體準備2個系統’通信亦準備2個大系統可謂大特徵。 此外’在上述實施形態中，為檢測微小移動量，亦可 使各矩形磁鐵27a、27b、28a、28b之安裝角度相對於霍爾 元件25a、25b傾斜。又’為擴大測量_ (最讀程），根據 發明人等之研究可知，亦可於磁鐵27a與咖間及磁鐵施與 28b間設置某程度以上之間隔。在上述中，設置^麵之間 隔。此外’在本實施形態中，檢測機構具有霍爾元件2心 洞元件25b、磁鐵列27、磁鐵列28而構成。又，在本實施形 態中，採麟從㈣元件25a獲得之輸出錢能霍爾元件 25b獲得之彳5號之差，將之作為塊體丨對轨道2之相對位置信 號之結構，同時，藉於塊體丨之特別是磁檢測基板24之外側 施行磁遮蔽，可更確實地抑制干擾磁場之影響。又，關於 採從隹爾元件25a獲得之輸出信號與從霍爾元件25b獲得之 信號之差，抑制干擾磁場之影響之結構，並非僅可適用於 如本實施形態之磁鐵列27、28之磁鐵排列。亦可適用在第 30 200921070 14圖中’磁鐵27a、27b、28a、28b之磁極方向為分別垂直 於紙面之方向之排列之磁鐵列。 ' (第6實施形態） - 接著’就第6實施形態作說明。本實施形態為變更上述 5第5實施形態說明之霍爾元件及磁鐵之配置之形態。關於其 他之結構，與在第5實施形態說明之内容相同。 於第15圖顯示本實施形態之結構例。第丨5 a圖係本實施 形態之霍爾元件附近之上面圖，第15B圖係正面圖，第15c 圖係側面圖。在本實施形態中，與第5實施形態同樣地，霍 1〇爾元件31a&31b姿勢相同，固定於磁場檢測基板24上。在 第5實施形態中，2列磁石列以隔著2個霍爾元件之狀態形 成，而在本實施形態中，於霍爾元件313與3113間設置有磁 鐵33a、33b構成之1列磁鐵列。在此，磁鐵列33a與磁鐵33b 之磁極與霍爾元件3ia及31b之排列方向平行地形成，為相 15 互相反之方向。於第15D圖顯示將本實施形態之磁場檢測基 V) 板24安裝於塊體1之狀態。 根據此結構，亦與第5實施形態說明之結構相同，可抑 制起塊體1之傾斜引起之檢測精確度之降低。又，藉採霍爾 2〇 2件3U之輸出與霍爾元件31b之輸出之差，可使輸出信號 '曰加約2倍，消除干擾磁場之影響，而可抑制因干擾磁場造 成之檢測精確度之降低。 又’此時’構成磁鐵列之磁鐵數亦可為2個以外。又 备爾元件數亦可為2個以外。舉例言之，如第16圖所示，構 成礤鐵列33之磁鐵數不為2個，可藉排列更多之磁鐵33丑、 31 200921070 33b··.，增加塊體丨對執道2之相對位置檢測之衝程。 又，霍爾元件之數亦可不為2個，可藉於塊體}之行進 方向設置霍爾元件32a，於霍爾元件31b之塊體！之行進方向 設置霍爾元件32b，以4個霍爾元件檢測磁場。藉此，可將 5各雈爾元件之輸出之不均平均化，而可進行精確度更佳之 位置檢測。又，此時之裝置，可使用作檢測塊體丨與軌道2 間之相對位置變化之磁編碼器，除了力檢測裝置外，亦可 利用作為位置檢測裝置、速度檢測裝置或加速度檢測裝 置。此外，在本實施形態中，檢測機構具有霍爾元件31a、 10 31b、32a、32b、磁鐵列33而構成。 (第7實施形態） 接著，就本發明第7實施形態作說明。本實施形態係將 本發明應用於由線性軸襯及轴構成之直接聯動系統之實施 形態。於第17圖顯示本實施形態之力檢測裝置之概略結 15構。此力檢測裝置40構造成以4條霍爾列43〜46將線性轴襯 之外筒41與軸42間結合，軸42可相對於外筒41於軸方向來 回移動。 在4條霍爾列43〜46中’ 43a〜46a作為負重球列，存在於 外筒41與軸42間，通過此負重球列43a〜46a之轉動體（球)在 20 離隙球列43b〜46b循環。外筒41之兩端以前端蓋41a及後端 蓋41b封閉，軸42相對於後端蓋41b，以附勢彈簧49於前端 蓋41a側附勢。又，於前端蓋41a之中央部附近設置孔部 41c，軸42之檢測突起42a從孔部41c突出至外側。藉此，當 力作用於檢測突起42a時，附勢彈簧49彈性變形，軸42相對 32 200921070 於外筒41相對移動。 ;軸42之内部插入從後端蓋41b延伸設置之圓柱狀磁 鐵部47。此磁鐵部47由在從軸方向觀看之截面中央分為二 之2個形成’各部份分別磁化成相反極性。又，在轴方 5向亦由在中央分為二之2個部份形成，軸方向之各部份亦磁 化成不同磁性。再者，於軸42之内部設置霍爾元件 48a〜48d，可以霍爾元件48a〜48d之輸出信號檢測軸42相對 於外筒41之相對位移。 根據此結構，由於軸42以4條球列43〜46對外筒41結 10合，故抗力矩強，而可使磁鐵部47之各磁極與霍爾元件 48a〜48d之距離穩定化。因而，藉檢測軸42對外筒41之相對 位移’可以更良好之精確度檢測作用於檢測突起42a之力。 又，根據本實施形態，由於可以外筒41，將可動部份及霍 爾元件之驅動用基板部份（圖中未示）密閉，故有可提高耐環 15境性，可使外筒41兼具磁遮蔽等之優點。又，當令力檢測 裝置40全體為在後端蓋41b支撐固定於其他構件之結構 時’可對齊安裝方向與軸42之位移方向，故可抑制裝置之 變形或傾斜，而可易利用於重量測量。又，在本實形態中， 檢測機構具有磁鐵部47、霍爾元件48a〜48d而構成。復原機 20 構具有附勢彈簧49而構成。 於第18A圖及第18B圖顯示將本發明應用於由線性軸 襯及軸構成之直接聯動動系統之另一實施形態。首先，就 第18A圖所示之力檢測裝置50作說明。此實施形態亦係以4 條霍爾列將線性軸襯之外筒51與軸52結合，轴52可於外筒 33 200921070 51之軸方向來回移動。在第18A圖中，僅顯示4條球列53〜56 之負重球列53a及55a。 外筒51之前端以前端蓋51a覆蓋，於前端蓋51a之中央 部設置檢測突起51b。又，於外筒51之後端設置用以提高密 5閉性之後端蓋51c，而減少與軸52間之間隙。又，在本形態 中’磁鐵部57從前端蓋51 a之中央部延伸設置至後端蓋51 c 側。此磁鐵部57在從軸方向觀看之截面，且在軸方向由2個 部份形成’各部份磁化成相反極性之點與第17圖說明之形 態相同。 10 又，軸52之後端以軸後端蓋52b封閉。又，軸52之前端 没有軸岫端蓋52a ’此軸前端蓋52a之中央部在軸孔部52c開 口，磁鐵部57從刖端側插入至此軸孔部52c。於外筒51之前 端蓋51a之内側與軸前端蓋52a間設置附勢彈簣，力作用於 外筒51，外筒51接近軸52時，阻力因附勢彈簧59之彈性變 15形而作用。於軸52之内部設置霍爾元件58a〜58d,當力施加 於檢測突起51b時，藉以霍爾元件58a〜58d檢測從磁鐵部57 產生之磁場，可檢測外筒51對軸52之相對位移。 根據此結構，由於抗力矩強，可使磁鐵部57之各磁極 與霍爾tl件58a〜58d之距離穩定化，故可以更良好精確度檢 20測外筒51對軸52之相對位移。此外，在此形態中，檢測機 構具有磁鐵部57、霍爾元件58a〜58d而構成。復原機構具有 附勢？餐59而構成。 接著，就第18B圖顯示之力檢測裝置6〇作說明。此實施 形態亦以4條球列將線性軸襯之外筒61與軸6 2結合，軸6 2可 34 200921070 於外筒61之轴方向來回相對移動。在第18B圖中，僅顯示4 條球列63〜66之負重球列63a及65a。 外筒61之後端以後端蓋61a封閉，於前端部61b之中央 部設置磁鐵插入孔部61c。對此磁鐵插入孔部61c插入軸62 5 之磁鐵部67。4條球列63〜66之負重球列63a〜66a存在於磁鐵 插入孔部61c與軸62間。於軸62之前端侧設置圓盤狀前端板 62a。在此前端板62a之中央部，檢測突起62b突出至外部。 前端板62a在外周部62c中，抵接於外筒61之前端部61b。於 前端板62a從軸方向觀看，設有圓形溝62d及62e。當力作用 10 於檢測突起62b時，在此溝62d及62e，前端板62a彈性變形， 產生阻力。 又，於軸62之後端設置圓柱狀磁鐵部67。此磁鐵部67 在從軸方向觀看之截面，且在軸方向，由2個部份形成，各 部份磁化成相反極性之點與第17圖說明之形態相同。於外 15 筒61之内周面61d設置霍爾元件68a〜68d。 根據此結構，由於轴62亦以4條球列63〜66對外筒61結 合，故抗力矩強’而可使磁鐵部67之各磁極與霍爾元件 68a〜68d之距離穩定化。因而，藉檢測軸62對外筒61之相對 位移’可以更良好之精確度檢測作用於檢測突起62b之力。 20 此外，在此形態中，檢測機構具有磁鐵部67、霍爾元件 68a〜68d而構成。復原機構具有於前端板62a設有圓形溝62d 及62e之構造而構成。 此外’在本實施形態中，說明了軸與外筒以4條球列結 合之例，球列不限4條。可為5條、6條等，依設定之力矩， 35 200921070 適當變更球列之數 截面， 又，說明了磁鐵部在從軸方向觀看之 且在軸方向由2個 部份形成，各部分磁化成相反極性 之例Λ⑹1¼式可配合霍爾元件之配置、數，適當訂定。 (第8實施形態） 5 接著’ 尤本發明第8實施形態作說明。本實施形態係將 Μ明應用於由、線性轴襯及軸構成之直接聯動系統，為構 之形態。於第19Α圖顯示本實施形態之加速 度&取& 7 0之概略結構。此加速度拾取器7 〇以4條球列將線 &軸襯之外筒71與轴72間結合，轴72安裝成可於軸方向來 10 回移動。 在第19Α圖中’顯示4條球列中2個球列之負重球列73a 及75a。外筒71之兩端以前端蓋7U與後端蓋爪封閉，而形 &密閉構造。又，於前端蓋71a與後端蓋71b設置支樓後述 之附勢彈簧及洞元件之前端側保持 器71c及後端側保持器 15 71d。於岫端側保持器71c及後端側保持器71d安裝附勢彈簧 79a及附勢彈簧7外。軸72對後端蓋71b，以附勢彈簧79b於 刖端側附勢’同時，亦對前端蓋71a，以附勢彈簧79a於後 端側附勢。 又’於轴72之前端側及後端側設置圓柱狀磁鐵部77a及 20 77b。此磁鐵部及77b在從軸方向觀看之截面分割為二， 所分副之各部份磁化成相反極性。在軸方向，亦分割為二， 分割之部份分別著磁為相反極性。再者，在前端側保持器 71c及後端側保持器71d中’於與磁鐵部77a及77b之各磁極 相對之部份設置霍爾元件78a〜78d，而可以霍爾元件 36 200921070 78a〜78d之輸出信號檢測軸72對外筒71之相對位移。 在此，於加速度檢測裝置70施加加速度時，軸72相對 於外筒71相對移動，可以霍爾元件78a〜78d之輸出檢測該位 移。根據此結構，由於軸72可以4條球列對外筒71結合，故 5抗力矩強，而可使磁鐵部Wa、77b之各磁鐵之對霍爾元件 78a〜78d之位移均等化、穩定化，而可以更良好之精確度檢 測72對外筒71之加速度。此外’在此形態中，檢測機構具 有磁鐵邛77a、77b、霍爾元件78a〜78d而構成。復原機構具 有附勢彈簧79a、79b而構成。 10 接著’於第19B圖顯示同樣地將本發明應用於由線性軸 襯及轴構成之直接聯動系統，構成加速度拾取器之另一 例。第19B圖顯示之加速度拾取器8〇以4條球列將線性軸襯 之外茼81與軸82間結合’轴82安裝成可於轴方向來回移動。 在第19B圖中’顯示4條球列中2個球列之負重球列83a 15及85a。外筒81之兩端以前端蓋81a與後端蓋81b封閉，而形 成密閉構造。又，於軸82之前端部82a及後端部82b藉由前 端側球87a及後端側球87b ’設置前端側板彈簧88a及後端側 板彈簧88b。軸82以後端側板彈簧88b附勢於前端侧，並且 以前端側板彈簧88a附勢於後端側。前端側板彈簧87a及後 20编側板彈黃87b係使前端側板彈簧88a及後端側板彈簧88b 之變形模式均一化者。藉附勢於此前端惻板彈簧88a及後端 側板彈簧88b，軸82於穩定位置停止。於前端側板彈簧88a 及後端側板彈簧88b分別固定前端側壓電元件89a及後端側 壓電元件89b。 37 200921070 在此於加速度拾取器8〇施加加速度時，軸82相對於 外筒81相對移動’可以前端側壓電元件的&及後端側壓電元 件8%之輸出檢測對應於該位移之前端側板彈 簧88a及後端 側板彈簧88b之變形。 5 根據此結構’由於軸82可以4條球列對外筒81結合，故 抗力矩強，而可使前端側板彈簧88a及後端側板彈簧88b之 變形模式均等化、穩定化，而可以更良好之精確度檢測軸 82對外筒81之加速度。在此形態巾，檢測機構具有前端側 板彈簧88a、後端側板彈簧88b、前端側壓電元件89a、後端 10側壓電元件8%而構成。復原機構具有前端側板彈簧88a、 後端側板彈簧88b而構成。 此外’在本實施形態中，說明了與外筒以4條球列結合 之例。球列不限4條。可為5條、6條等，依設定之力矩，適 當變更球列之數。又，在第19A圖中，說明了圓柱狀磁鐵部 15 77a、77b在從軸方向觀看之截面’且在軸方向分割為二， 分割之部分磁化成相反極性之例，此磁化模式可配合霍爾 元件之配置、數，適當訂定。又，亦可於軸72之前端部及 後端部之霍爾元件78a〜78d相對之部份設置磁鐵，使各相鄰 之磁鐵之磁極為相反磁性。 20 (第9實施形態） 接著，就本發明第9實施形態作說明。本實施形態係變 更第1實施形態之板彈簧之形態。於第20圖顯示本實施形態 之力檢測裝置90之概略結構。 如第20A圖所示，在此第8實施形態之力檢測裝置90 38 200921070 中，具有塊體91、軌道92、保持器93、保持於保持器之轉 動體(球)州及板彈簧96而構成。由於其他之結構與扪實施 形態相同’故省略圖式及說明。 在本實施形態中’〕字型塊體91與矩形軌道％係構造 5成塊體9!之内周部及軌道92之外周部藉由設置於軌道乂 側壁之圖中未示轉動體及保持於保持器93之轉動體 (球)93a，可相對運動。即’以塊體91及軌道92，構成相對 地進行直線運動之線性導件。 在此力檢測裝置90中，於沿塊體91之移動方向之兩側 10端面設置停止器94。此停止器94以固定用螺絲咖定於塊 體9卜於此停止器94内側側面之軌道2之移動方向兩端面側 设置作為用以使復原力作用之彈性構件之板彈簣％。此板 彈簧96之外側端面96a接著於停止！！94，内側端面嶋接著 於執道92。纟第20A圖中之2個板彈簧96設置成在穩定狀態 15下，按壓力朝沿行進方向之内側對軌道92作用。 第20B圖係板彈簧96之立體圖。此板彈簧％係於外側端 面96a與内側端面96b間形成有可彈性變形之彈簧部96c 者，在與第20A圖之紙面垂直之方向，截面固定。 藉使作為彈性構件之板彈簧96呈此種形狀，可使按壓 20力一致地對軌道92之端面全體作用。藉此，執道92相對於 塊體91相對移動時，可抑制如第12圖、第13圖所示之力矩 (俯仰方向之力矩）對執道92作用，而可抑制執道92之傾斜。 藉此，當檢測微小之力、微小之位移量時，可使執道92更 平順地於轉動體(球)93a之排列方向移動，而可更正確地檢 39 200921070 測位移量。在本實施形態中，復原機構具有板彈菁％而構 成。此外，板彈簧96之材質只要確認有彈性，可使用彈簧 鋼專金屬材料，亦可使用非金屬材料。 > (參考實施形態） 5 接著，就本發明參考實施形態之力計測裝置之力檢測 裝置10作說明。此外，力檢測裝置1〇以外之結構與第丨實施 形態相同。於第21圖顯示此參考實施形態之力檢測装置1〇。 如第21A圖所示，在此力檢測裝置1〇中，與第丨至第3 實施形態不同，為不設置霍爾元件5及磁鐵4，利用應變規 1〇之結構。於沿軌道2之長向之兩端側形成凹部2c，於此凹部 2cs史置作為力傳達機構，由陶瓷或金屬構成之球體Η。 又，如第21B圖所示，為將塊體丨與執道2結合，於該等 長向之兩側端面設置結合板14，同時，於其外側表面固定 排列配置有複數個、在此為3個之應變規16，作為彈性構件 15之規板15。即，軌道2構造成藉由作為力傳達機構之球體 17，彈簧力從規板15作用。從該等4個應變規16連接輸出線 (圖中未示），輸出根據應變規16之應變之電壓。 使此應變規16應變之方法與第丨至第3實施形態同樣 地，係根據塊體1與軌道2之相對移動(相對運動）之移動量。 2〇舉例言之，使塊體1固定，使外力作用於軌道2時，軌道2以 沿與軌道2之移動方向之成份而移動。此軌道2移動之力藉 由作為傳達機構之球體17，對規板15，在丨點作用，藉此， 使應變規16應變。依此應變，從複數個（在此為3個）應變規 K輸出電壓。依從此應變規丨6輸出之電壓，檢測作用於執 200921070 道2之外力之特定方向（軌道2之移動方向）之力成份之大 小。此外，關於利用應變規16自身之力檢測原理為眾所周 知’故省略該說明。 在以上說明之參考實施形態中，亦與第1至第3實施形 5悲同樣地’藉分為用以實際計測力之力檢測之應變規板15 之、会口構及僅將作用之外力之特性方向成份抽出作為位移成 份之塊體1及執道2之結構，而為與第1至第3實施形態相同 之結構，可獲得相同之效果。 以上，具體地說明了本發明之實施形態，本發明不限 1〇於上述實施形態’可進行根據本發明技術思想之各種變 形。舉例言之’在上述實施形態所舉出之數值僅為例子， 可依需要，使用與其不同之數值。 舉例言之’在上述實施形態之力檢測裝置中，使用永 久磁鐵’亦可使用電磁鐵。本發明藉將此構成之相對運動 15封裂於尺導件’可僅檢測旋轉方向之力。又，由於為高剛性 且為高靈敏度’故可直接組裝於機器人之臂等。可以磁鐵 及檢測部之相對配置，構成多軸力覺感測器。藉使可動部 更輕量化，可具有作為加速度感測器之功能。從此觀點， 本發明可適用於用以進行骨折等復位手術之輔助之裝置、 20 直接聯動引導裝置、栓槽、螺絲或引動器所有相關製品。 在上述實施形態中，使用利用霍爾效應之霍爾元件作 為磁電轉換元件，只要為可將其他之磁力轉換成電力之機 構，可利用各種元件。磁電轉換元件之其他例有MR元件、 磁應變元件等。 200921070 在上述第1實施形態中，構造成使沿軌道2之長向之長 度長於沿塊體1之長向之長度，反之，使沿塊體1之長向之 長度長於沿軌道2之長向之長度亦可。此時，平常沿移動方 向朝向兩外側之斥力作用於執道2，靜止時，作用於軌道2 5 之力為0，軌道2相對於塊體1相對移動時，可產生復原力。 此外，在上述各實施形態中，以力檢測裝置、加速度拾取 器等一種裝置為例，說明了本發明。然而，根據與各實施 形態相同之結構或原理，構成位置檢測裝置、速度檢測裝 置、力檢測裝置、加速度拾取器（檢測裝置）等任一力學物理 10 量之檢測裝置皆可。 【圖式簡單說明3 第1圖係顯示本發明第1實施形態之力計測裝置全體結 構之方塊圖。 第2圖係顯示本發明第1實施形態之力檢測裝置之上面 15 圖（第2A圖）、側截面圖（第2B圖）、橫截面圖（第2C圖）。 第3圖係用以明使用本發明實施形態之霍爾元件時之 霍爾元件之配置與永久磁鐵之傾斜之實驗方法的側面圖 (第3A圖）及平面圖（第3B圖）。 第4圖係顯示正方形磁鐵（WlOxLlO)相對於霍爾元件 20 之配置之各安裝角度輸出電壓之進給量關聯性之圖表。 第5圖係顯示薄長方形磁鐵(W3xL10)相對於霍爾元件 之配置之各安裝角度輸出電壓之進給量關聯性之圖表。 第6圖係顯示鈦磁鐵(φ3·2><2)相對於霍爾元件之配置之 各安裝角度輸出電壓之進給量關聯性之圖表。 42 200921070 第7圖係顯示本發明第2實施形態之力檢測裝置之上面 圖（第7AB1)、側截面圖（第7BSI)、橫截面圖（第7CB1)。 第8圖顯示本發明第3實施形態之力檢測裝置之上面圖 (第8A圖）、側截面圖（第8B圖）、橫戴面圖（第sc圖）。 第9圖係顯示本發明第4實施形態之力檢測裝置之上面 圖（第9A圖）、侧截面圖（第犯圖）、橫截面圖（第9C圖）。 第10圖係顯示本發明第4實施形態之力檢測裝置之另The "seismic movement" acts as a circular motion or a circular fox curve relative motion. In the present invention, a magnetoelectric conversion element is provided in the first movable body, and a magnet is provided in the second movable body to constitute a detecting means. The magnet in the vicinity of the magnetoelectric conversion element accompanying the relative movement of the first and second moving bodies The field change 'outputs a signal from the magnetoelectric conversion element. χ Typically, when a magnetoelectric conversion device is used for the inspection, a Hall element using a Hall-effect electric conversion element is typically used, and a hetero element (mr element) or the like may be used. According to this configuration, the magnetoelectric conversion element such as the Hall element and the magnet can be used to detect the force, and can be classified into the displacement amount detecting unit and the beam structure. Therefore, the reproducibility (repetitiveness) of the force detection can be improved. In the invention, it is preferable that a pair of magnetoelectric conversion elements are provided, and the field generating means is constituted by a magnet, and a direction of a magnetic pole connecting the s pole and the N pole of the magnet with respect to a magnetoelectric conversion element such as a pair of Hall elements The direction is set only by the oblique pre-angle (90 - 0) (for example, an angle of 45 〇 or more and 70° or less). Namely, the magnet as the magnetic field generating means is disposed in a structure in which the predetermined direction is the direction in which the arrangement direction of the magnetoelectric conversion elements is straightened. The magnetic pole of the magnet is inclined only with respect to the predetermined direction. . According to this structure, if 9 200921070 uses a plurality of magnetic mines that tilt the magnet to select the m 1 _ _ conversion element, and 4 uses the complementary (1) magnetoelectric conversion element, the magnet can adopt a general fixed magnet. Or an electromagnet. The wheel is in this case, the hair is t, typically the second moving system linear 5 15 2 moving system linear guides, the first moving body is the block h, the first moving body is the orbit, and the second moving body is the block. The body is also available. That is, it is preferable to set the line to the "the one side of the side wall" which is mutually flat and the first moving body and the insertion of the second moving part, and is set to the long direction of the second moving body (four)_from ^^ Structure. When measuring the external force, it is preferable to make the (four) body different from the moving body acting on the external force. In the invention, it is preferable that the moving body is restricted by the rotating body so as to be movable relative to each other. This invention makes one of the other typical strain gauges, strain gauges due to the second moving body position:: measured: the strain that the structure has, the output signal. The strain and the strain gauge are preferably configured to be the i-th moving in the invention. The body elastic members are coupled to each other' by the elastic m. The multi-moving body is elastically moved (the restoring force of the raw member is the moving body and the second moving body, and the restoring force acts on the direction in which the relative displacement is reduced. a seed force detecting device comprising: an i-th moving body and a second moving body configured to move relative to each other in a predetermined direction; and a magnetoelectric conversion provided in the first moving body to output a voltage according to a magnitude of a magnetic field Component; and set in the aforementioned second movement a magnetic field generating mechanism and a force detecting device for generating a magnetic field, wherein the relative displacement of the second movable body to the movable body is rotated from the magnetoelectric conversion element to a mechanism formed by the magnetic field 200921070 5 10 15 20 The magnetic field change in the vicinity of the magnetoelectric conversion element in the magnetic field is broken, and the relative displacement amount is measured in detail. The magnetic field generating structure connects the three poles of the magnetic field generating mechanism and the magnetic pole of the magnetic field generating body to form an angle in the predetermined moving direction. The white relative can be a == can be a force detecting device including a first moving body and a second moving body configured to dry out (4) to move; =: the first moving body and the second moving body In the direction of the predetermined direction, the moving body and the second movement are: the elastic body is configured to align the second moving body with respect to the first moving body by the relative position _ acting on the front (four) position In the vertical shift, the signal is outputted from the aforementioned detecting mechanism. The correcting device also has the above-mentioned force (4) device, which has a device set in the front material called a machine 2:=, the portion acts on the aforementioned amount, from the aforementioned magnetoelectric conversion element == 1 The magnetic field formed by the relative displacement of the moving body is the magnetic enthalpy, and the k number which is changed from the front material measuring mechanism π. The output is based on the relative displacement amount, and the present invention can also be the above-mentioned force detecting device. And the second movable body is coupled to each other by the elastic members, and the member is used to divide the restoring force of the mutual material into the second moving body. The second moving body has a restoring force acting on the relative displacement amount. The present invention may be directed to the above-described force detecting device, wherein the pair of magnetoelectric conversion elements are provided, and the magnetic field generating mechanism is formed of a magnet, and the direction of the magnetic poles connecting the S pole and the N pole of the five magnets with respect to the pair is The arrangement direction of the magnetoelectric conversion elements is an angle of 45° or more and 70° or less. The present invention may be the above-described force detecting device, wherein the first moving body and the second moving body are restricted by the rotating body so as to be mutually opposite to each other. motion. Furthermore, the present invention may be the above-described force detecting device, wherein the magnetoelectric transducer is a Hall element. Furthermore, the present invention may be the above-described force detecting device, wherein the detecting mechanism has a strain gauge, and is configured such that the strain gauge is strained by the relative displacement of the second movable body, and the signal is output according to the strain of the strain gauge. Furthermore, the present invention may further include the force detecting device that further transmits a force transmitting force between the 15 elastic member and the second movable body, and the strain gauge is fixed to the elastic member. (2) The relative displacement of the moving body to the relative movement of the first moving body, and the force is transmitted from the second moving body to the elastic member via the force transmission mechanism, and the strain gauge is strained. Further, the present invention may be a force measuring device including the above-described force detecting device, an amplifying mechanism that amplifies a signal output from the force detecting device, and a signal that is outputted in accordance with the force detecting device, and the display acts on the foregoing The signal detecting mechanism of the display unit of the magnitude of the component of the force detecting device in the predetermined direction. 12 200921070 Effect of the Invention As described above, according to the present invention, only the mechanical and physical quantities in a predetermined direction are extracted for the force of action, and the detection can be performed more accurately, and the strain in the direction other than the predetermined direction can be reduced, and the strain can be obtained. Cost reduction. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a block diagram showing the overall configuration of a force measuring device according to a first embodiment of the present invention. Fig. 2 is a top view (Fig. 2A), a side cross-sectional view (Fig. 2B), and a cross-sectional view (Fig. 2C) of the force detecting device according to the embodiment of the present invention. 10 is a side view (Fig. 3A) and a plan view (Fig. 30) of an experimental method for arranging the arrangement of the Hall elements and the inclination of the permanent magnets when the Hall element of the embodiment of the present invention is used. Fig. 4 is a graph showing the correlation of the feed amount of the output voltage of each of the mounting angles of the square magnets (wl 〇 x L1 〇) with respect to the arrangement of the Hall elements. 15 Fig. 5 is a graph showing the correlation of the feed amount of the output voltage of each of the mounting angles of the thin rectangular magnet (W3xL10) with respect to the arrangement of the Hall elements. V " ^ Figure 6 shows the correlation of the feed rate of the output voltage of each mounting angle of the neodymium magnet (φ3 2χ2) with respect to the configuration of the Hall element. Fig. 7 is a view showing a top surface -20 (Fig. 7A), a side cross-sectional view (Fig. 7B), and a cross-sectional view (Fig. 7C) of the force detecting device according to the second embodiment of the present invention. Fig. 8 is a top view (Fig. 8A), a side cross-sectional view (Fig. 8B), and a cross-sectional view (Fig. 8C) of the force detecting device according to the third embodiment of the present invention. Fig. 9 is a top view (Fig. 9A), a side cross-sectional view (Fig. 9B), and a cross-sectional view (9th CBI) of the force detecting device according to the fourth embodiment of the present invention. 13 200921070 Fig. 10 is a side cross-sectional view (Fig. 10) showing another example of the force detecting device according to the fourth embodiment of the present invention, and a part of the above figure is selected (Fig. 10). Fig. 11 is a view showing a five-side view (11th drawing) and a side sectional view (11th drawing) of the force detecting device according to the fifth embodiment of the present invention, and a view of the arrangement of the Hall element and the magnet array (Fig. 11C). ). Fig. 12 and Fig. 12 show a comparison example of the influence of the inclination of the block when the relative position of the block to the track is changed. Fig. 13 and Fig. 13 show the influence of the inclination of the block when the relative position of the block to the track is changed in the fifth embodiment of the present invention. Fig. 14 is a view showing the structure of the relative position signal of the block to the track using the difference between the output signals obtained from the two Hall elements in the fifth embodiment of the present invention. 15 is a top view (Fig. 15), a side view (Fig. 15), a front view (Fig. 15C), and a display force detecting device for arranging the Hall element and the magnet array according to the sixth embodiment of the present invention. The above picture (Fig. 15D). Fig. 16 is a top view showing another example of the Hall element and the magnetic yoke according to the sixth embodiment of the present invention. Fig. 17 is a cross-sectional view (17th drawing) and a side sectional view (17th drawing) of the force detecting device according to the seventh embodiment of the present invention. Fig. 18 is a side sectional view showing another column of the force detecting device according to the seventh embodiment of the present invention (Fig. 18, Fig. 18). Fig. 19 is a side cross-sectional view (Fig. 19A, Fig. 19B) showing an acceleration picker of the eighth embodiment of the present invention. Fig. 20 is a perspective view (Fig. 20B) showing a top view (Fig. 20A) and a leaf spring of the force detecting device according to the ninth embodiment of the present invention. Fig. 21 is a plan view (Fig. 21A) and a cross-sectional view (Fig. 21B) and a plan view (Fig. 21C) of the force detecting device of the reference embodiment of the present invention. Fig. 2 is a cross-sectional view showing a conventional film type force detecting device of the prior art. Fig. 2 is a perspective view showing a shearing (beam-column) type force detecting device of the prior art. [Embodiment 3] Best Mode for Carrying Out the Invention Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In addition, in all the drawings of the following embodiments, the same or corresponding parts are attached with the same reference numerals. (First Embodiment) First, a force measuring device according to a first embodiment of the present invention will be described. The overall configuration of the force measuring device according to the first embodiment is shown in Fig. 1. (force detecting device) As shown in Fig. 1, the force measuring device according to the first embodiment has a force detecting device 10 that detects an external force and outputs a signal according to the magnitude of the additional force. The force measuring device includes an amplifier 20 that amplifies the signal output from the force detecting device 10, an amplifier 20 as an amplifying mechanism, and a voltage value for detecting a signal amplified by the amplifier 20, as an external signal detector 15 of the signal detecting mechanism. Further, the external signal detector 30 is provided with a display portion 30a as an output portion for displaying the magnitude of the external force based on the electric waste value as a value based on the voltage value. In the force detecting device constructed as above, the force detecting device 10 measures the external force 5 as a voltage value corresponding to the external force, and after being amplified by the amplifier 20, the external signal detector 30 is converted to N (Newton). The value indicated by the unit of kg or kg (kg weight) is displayed on the display unit 30a. Further, as will be described later, the output of the hysteresis detecting device 10 is the output of the magnetoelectric conversion element, so that the weak current is mostly a noise reduction, and a low-pass filter is provided in the amplifier 20 or the external signal detecting device 10 ( LPF), in order to reduce the noise. In the above description, the output portion is a display portion 30a that displays the value of the force together with N (Newton) or kg (kg weight), and the output portion is not limited to the size of the output force in a form that is visually identifiable. It also includes all functions that output the force to a separately prepared display or LED, other machines, and the like. 15 (force detecting device 10) The force detecting device according to the first embodiment is shown as shown in Fig. 2. Here, the force detecting device of the embodiment is 20 elements = 1, :: \ holder 3, magnet 4 And, as a pair, a 70-piece 5, a connector 6, and a leaf spring 9 are converted. The peripheral block 1 and the rectangular track 2 are inside and held by the block 1; the portion is rotated by the rotation 俨 2a provided on the side wall of the track 2, and the rotating body 3a of the holder 3 is constructed. 1 and the mind α knows that it can move relative to each other. In other words, the linear guide 200921070 is configured to be relatively linearly movable. In addition, in the present invention, the block 1 is used as the first moving body, and the road 2 is used as the second moving body, and the block 1 can be used as the first For the moving body, the road 2 is used as the first moving body. Further, as shown in Figs. 2A and 2B, a groove 5 2b is formed on the upper surface of the rail 2. This groove 2b is formed so that the magnet 4 as a magnetic field generating means can be inclined with respect to the longitudinal direction of the rail 2 and held. That is, the magnet 4 is configured to interlock with the movement of the rail 2. In the first embodiment, the magnetic pole direction of the N-S of the magnet 4 forms an angle of 0 with respect to the longitudinal direction of the rail 2, that is, the relative movement direction of the block 1 and the rail 2, and is disposed inside the groove 2b. Here, the angle θ is 30. (0=3〇.). Further, a recess 1b is formed in the block 1. A pair of Hall elements 5 are disposed opposite to each other in the recess lb. That is, the pair of Hall elements 5 are arranged such that their arrangement directions are perpendicular to the direction of movement of the block 1 to interlock with the movement of the block 1. Further, the output of the Hall element 5 is supplied to the connector 6 via the output line 5a. The output terminal of the Hall element 5 used in the first embodiment is 4 15 terminals. It is needless to say that the Hall element other than the Hall element 5 can be used. The connector 6 is connected to a terminal (not shown) of the wire, and is connected to the amplifier 20 shown in Fig. 1 via the wire, whereby the output signal of the force detecting device 1 can be supplied to the amplifier 20. Further, the leaf spring 9 as the elastic member is provided with a fixing screw 8 and is provided at an end surface of the block 1 and the rail 2 in the moving direction to compete with the movement of the block 1 and the rail 2. As shown in Fig. 2C, the leaf spring 9 is modeled after the font block! The portion of the shape on both sides and the portion of the rectangle which imitates the track 2 have a shape which is joined to the thin portion of the portion. According to the inventor's opinion, if the leaf spring 9 has the shape shown in Fig. 2C, the reproducibility of the spring can be restored. This leaf spring 9 is fixed to the block body and the rail 2 with fixing screws 8. That is, the block i and the rail 2 are fixed to each other by the fixing screw 8 and the plate magazine 9. . Further, the spacer 11' is provided such that the length along the length of the track 2, that is, the length in the moving direction is greater than the length along the length of the block i. In this embodiment, as shown in Fig. 2A, the spacers 11 are provided on both sides to increase by about (7) 卟!!!. Further, the same structure can be obtained by providing the spacers to be formed longer than the bulk 1 without providing the spacers.如此 In this way, by providing the spacers 以 so that the road 2 is longer than the block 丨, the plate springs 9 on both sides are directed toward the inner side against the pressing force 2 to act on the track 2 . Thus, 10 the pressing force from the leaf spring 9 on the side faces at both ends acts on the rail 2, and when the resultant force of these forces is 〇, the block 1 and the road 2 are relatively stable. In other words, in the steady state, the pressing force in the moving direction acts on the rail 2 from the two sides, and the force acting on the rail 2 becomes 〇. When the rail 2 is displaced relative to the block 1 and displaced, the force acts on Move the direction of the opposite phase 15 (recovery). At this time, by the action of the pressing force from the respective plate springs 9 even in the steady state, it is possible to prevent the output of the Hall element 5 due to the amount of movement of the road 2 from being disturbed. That is, when the spacer 11 is not provided with the spacer 11, and the block 丨 is the same length as the track 2, the pressing force of the slab 9 does not act when the both ends of the block 1 and the track 2 are on the same surface. When the track 2 is said to move slightly, the magneto-electric conversion of the Hall element 5 is slow, so the output is confusing. In view of this, as in the first embodiment, the spacer U is provided, and the plate spring 9 on both end faces is used to apply the force to the rail 2, so that even if the movement is small, the restoring force flat 18 200921070 often acts, and The output of element 5 is stable. (Principle of Force Detection) Next, the principle of the force detection of the force detecting device 为 based on the above configuration will be described. 5 That is, the force other than the force of the leaf spring 9 acts on the rail 2 in the state in which the block 1 is fixed. At this time, the track 2 moves along the force component along the relative moving direction of the block body and the track 2 in the additional force. Thereby, the magnet 4 has a pole close to the Hall element 5 while the other pole is far away. For example, when the way 2 is moved to the right direction in Fig. 2A, the N pole of the magnet 4 is close to the Hall element 5, and at the same time, 10 s is far away. Thereby, the magnetic field around the pair of Hall elements 5 changes due to the movement of the track 2. Therefore, the change in the magnetic field produces a Hall effect, and the Hall element 5 rotates the voltage value according to the amount of movement of the track 2 (hereinafter referred to as the feed amount) as a signal. Further, the correlation of the feed amount of the wheel-out voltage when the magnet 4 inclined with respect to the moving direction with respect to the moving direction is relatively displaced with respect to the pair of Hall elements 5 is described later. The output signal is supplied to the connector 6 via the wheel output line 5a, and is input to the amplifier 2A. The amplified signal from the amplifier 2 is supplied to the external signal detecting unit 30, and based on the electric dust value of the signal, the magnitude of the moving direction component of the external force is displayed on the display unit 3a. As described above, when an external force acts on the road 2, the component in the direction opposite to the direction of the track 2 can be selectively selected. In the present embodiment, the detecting mechanism has a Hall element 5 and a magnet 4. The restoration mechanism is constructed with a plate magazine 9. 19 200921070 (feed amount correlation related to the output voltage of the Hall element at each mounting angle of the magnet) Next, the inventor of the present invention proposes the Hall element of a magnetoelectric conversion element The configuration method and the installation angle of the magnet 5 degrees 0 are explained. The positional relationship between the Hall element and the magnet of the inventors' experiments and investigations is shown in Figs. 3A and 3B. As shown in Fig. 3A, in the experiment of the correlation of the feed amount related to the output voltage of the Hall element 5, the two Hall elements 5 are separated by a predetermined interval D (mm) (here, d = 3. 2) 'Set a pair, in the middle, and the distance d (mm) of the distance of 10 2 Hall elements 5 (here, d = l. 磁铁) Set the magnet 4 at the position. The magnet uses three types of magnets. In other words, the first magnet uses a rectangular rubber magnet having a width W of 10 mm and a length L of 10 mm (solid line in Fig. 3), and the second magnet uses a rubber magnet having a width W of 3 mm and a length [1〇111111]. (In Figure 3, the two-point chain line), 15 the third magnet uses a cylindrical shape, and the diameter of the circle is φ3. 2mm, thickness 2mm 1 Female magnet (dotted line in Figure 3). The magnets 4 are inclined with respect to the arrangement direction of the two Hall elements 5 by an angle 0 (mounting angle 0) shown in Fig. 3B, and relatively moved in the direction of the arrow in Fig. 3B. Further, in this experiment, the mounting angle 0 of the magnet 4 (the second obstructed iron) was 〇. When adjusting, the output is adjusted so that the output voltage 20 is zero. In the experiment of the above configuration, the Hall element 5 in which the amount of movement (feed amount) (μηι) is not changed depending on the first magnet, the second magnet, and the third magnet, respectively, is shown in FIG. 4, FIG. 5, and FIG. The output voltage correlation changes the result of angle 0. According to the measurement of FIG. 4, FIG. 5, and FIG. 6, it was confirmed that the two Huo 20 200921070 elements were arranged side by side so as to form an angle (90.- 0) with respect to the direction of the NS magnetic pole on both sides of the magnet 4. The linear shape can make the output voltage of the Hall element 5 four times as compared with the case of using one Hall element. That is, two Hall elements 5 are provided, and at the same time, the influence of the N-pole and the influence of the s-pole on each of the Hall elements 5 affect the output, respectively, so that (Hall elements) are two x (magnetic variations of the N-pole + The magnetic variation of the S pole) obtains a voltage output of 4 times. As can be seen from Fig. 4 to Fig. 6, when the mounting angle θ is small, either the magnet (the magnet (WlOxL10)), the second magnet (the magnet (w3xLl)), and the third magnet (the magnet) The linearity of the feed amount (μm) with respect to the output voltage characteristics is good. Further, as is apparent from Figs. 4 and 5, good linearity can be obtained in the vicinity of the center of the range, and it can be seen from the comparison with Fig. 4 that the characteristics are the same regardless of the rubber magnet or the neodymium magnet. Further, the inventors conducted various investigations based on the results of the above experiments and made efforts to conduct a review. As a result, it is finally known that the mounting angle and the output voltage of each of the magnets 4 are remarkably reflected in the inclination of the curve as the magnetic force of the magnet 4 is weak, or the distance between the Hall element 5 and the magnet is close. Moreover, the inventors have finally learned that since the shape of the magnet is rectangular, the output voltage is stabilized by the correlation between the magnetic lines of force and the gap, and the output voltage is fed when the first magnet and the second magnet are attached at an angle of 45 degrees. Dependent feature 2 is an extremely stable output. That is, a pair of Hall 7L members 5 are provided, and the magnets 4 are disposed at an oblique angle Θ with respect to the moving direction of the block body, so that the pair of Hall elements 5 and the magnets 4 are arranged close to each other, whereby the output voltage can be increased. The linearity and measurement range of the quantity-dependent characteristics. By using this linear region for force detection, the direction of force movement 21 200921070 The composition is reflected in the feed amount. This feed rate is linearly reflected in the output voltage value, so the direction of movement of the external force can be detected according to the output voltage value. According to the experiment and review of the present invention, in the present invention, the second magnet (rubber magnet (W3xL10)) is used as the magnet 4, and the feed amount from the output voltage is turned off, so that the mounting angle 0 is 30°. Further, a first magnet of a low-cost rubber magnet or a third magnet of a neodymium magnet may be used as needed. Further, the mounting angle 0 of the magnet may be an angle other than 30, for example, 0 or 45. From this point, according to the inventors' knowledge, the mounting angle 0 is typically 0° or more and 90° or less, and more preferably 0. Above, 45. Below, it is more preferably 20. Above, 45. the following. Further, according to the review by the present inventors, the measurement circuit uses an operation amplifier of the front stage as a measurement amplifier, and a low gain amplifier is preferable in the latter stage. The power supply should supply a certain voltage to the Hall element 5 by using a linear power supply (linear regulator). As described above, according to the first embodiment, when the external force acts on the block 1 15 or the track 2, the force component in the desired direction is extracted from the vector component of the external force, and the size can be measured. Moreover, since a highly rigid linear guide is used, the strain of the force component other than the desired direction can be effectively reduced. (Second Embodiment) Next, a force detecting device 20 of the force measuring device according to the second embodiment of the present invention will be described. Further, the configuration other than the force detecting device 10 is the same as that of the first embodiment. The force detecting device 10 of the second embodiment is shown in Fig. 7. As shown in Figs. 7A and 7B, in the force detecting device 10, unlike the first embodiment, the stopper 12 is provided in place of the plate magazine 9 on both end faces in the moving direction of the block 1. The rail 2 of the inner side surface of the stopper 12 is 22, 200921070. The elastic material 7 which is an elastic structure which acts as a restoring force is respectively provided in the both ends of the moving direction. This elastic member 7 is disposed in a stable state, and exerts a pressing force on the inside of the traveling direction toward the inside of the traveling direction. Incidentally, as shown in Fig. 7, the other configurations are the same as those of the first embodiment, and thus the description thereof will be omitted. In the second embodiment, the same configuration as that of the first embodiment is applied except for the elastic member as the restoring mechanism, and the same effects as those of the i-th embodiment can be obtained. (Third Embodiment) 10 15 20 Next, the force detecting device 10 of the force measuring device according to the third embodiment of the present invention will be described. Further, the structure other than the force detecting device 1 is the same as that of the third embodiment. The force detecting device 1 of the third embodiment is shown in Fig. 8. As shown in Figs. 8A and 8B, in the force detecting device 1A, unlike the first and second embodiments, the 'surface of the elastic material 13 on the upper surface of the rail 2 is fixed. The other side of the inner peripheral portion of the block 1 at a position opposite to the upper surface of the rail 2 is a further surface of the elastic material 13. Here, the fixed position of the dance material 13 in a stable state is made smaller than that of the deflected track, and the elastic material 13 is deformed. Thereby, in the steady state, the force of the fine material 13 toward the inner side in the moving direction acts on the rail 2, and the force directed to the outside in the moving direction acts on the block. Then, the resultant force of each block and track 2 is set to 0 at a steady state. Thereby, the force acting on the road 2 by the elastic material 13 is the same as that of the second embodiment and the second embodiment (5). Since the other configurations are the same as those of the first embodiment, the description thereof is omitted. In the third embodiment, the configuration of the elastic material 13 as the restoring mechanism has the same configuration as that of the first embodiment, and the same effects as those of the first embodiment of the first embodiment can be obtained. (Fourth Embodiment) Next, a description will be given of a force detecting device 1 of the present invention. In the present embodiment, the restoring force for restoring the road 2 to the stable position is such that the magnetic spring 5 acts on the rail 2. The force detecting device 10 of the fourth embodiment is shown in Fig. 9. Fig. 9A is a top view of the force detecting device 1 ,, Fig. 9B is a γ_γ arrow view, and Fig. 9C is a χ-χ arrow view. Further, in the force detecting device 1A, the configuration other than the configuration described below is the same as that of the first embodiment. Therefore, in Fig. 9, the configuration that does not require the description of the embodiment is omitted. In the force detecting device 1A, as shown in the ninth and ninth drawings, the yoke stopper 20 is formed of soft magnetic stainless steel on both end faces in the moving direction of the block 1 in the first embodiment. Replace the leaf spring 9. The block side magnet group 2 2 is provided on the side of the rail 2 side of the two yoke stoppers 20, respectively. In the present embodiment, the block-side magnet group 22 is arranged such that the disk-shaped magnets 22a and 22b having a diameter φ of 2 mm and a thickness t of 1 mm are arranged. Here, the magnetic poles on the different sides of the magnets 22a and 22b of the respective block side magnet groups 22 are fixed to the yoke stopper 20, and the magnetic poles on the different sides face the rail 2. On the other hand, yokes 21 formed of soft magnetic stainless steel are provided on both end faces of the moving direction of the road 2. The track side magnet group 23 is provided in each of the two yokes 21 . The track-side magnet group 23 is also arranged in such a manner that the disk-shaped magnets 23a and 23b which are the same as the block-side magnet group 2 2 are arranged. The magnetic poles on the different sides of the magnets 23a and 23b are fixed to the yoke 21. The magnets 22a and 23a, 22b, and 23b are disposed to face the different magnetic poles, respectively. Hereinafter, the effect of the case of the configuration of the present embodiment will be described. Here, first, the U mechanical spring generates a resilience that restores the track 2 to a stable position.仏 At this time, due to the hysteresis of the characteristics of the spring, it is difficult to measure the force exerted on the track 2 or the block 1 from the moving direction in the short stroke with a good precision—see the case of Beixun. The small force around the number gf is measured. The influence of the hysteresis of the @汽汽 characteristic is not possible, and the measurement of the normal force information cannot be performed. According to the structure of the present embodiment, the repulsive force of the magnet of the opposite pole is used to obtain the restoring force, so that the influence of the hysteresis phenomenon is small, and the short-cutting right of the obstruction 2 or the block 1 (for example, 1〇〇μηι) Within the amount of movement, when measuring a small force of 1 ,, the force sense information can also be measured with better precision. Further, since the repulsive force does not easily act on the rail 2 or the block j in the direction opposite to the moving direction, it is possible to constitute a measuring system in which the resistance is extremely small in addition to the rolling resistance. Here, this. The restoration mechanism of the embodiment includes a rail side magnet group 23 and a block side magnet group 22. Further, in the embodiment described above, the neodymium magnets 22a and 22b of the block-side magnet group 22 and the neodymium magnets 23a and 23b of the track-side magnet group 23 are arranged to match the center of the magnet as shown in Fig. 9. In this regard, it is also possible to arrange the centers of the opposing magnets to be staggered. In the following, the first diagram is used to explain this example. -0 At this time, as shown in Fig. 10A, the magnetic pole centers of the neodymium magnets 23a, 23b constituting the track side magnet group 23 can also be displaced to the upper side of the rail 2, and the titanium magnets 22a, 22b constituting the block side magnet group 22 are formed. The center of the magnetic pole can also be displaced to a direction separating from the lower portion of the inner circumference of the block 1, and the centers of the magnetic poles are shifted. In this way, the repulsive force of the magnets can be applied to pressurize the rail 2 and the inner side of the block 1 at the side of the 200921070 side. Thereby, the configuration can be simplified, the deviation between the block body and the track 2 can be suppressed, and the relative movement can be made smoother. Further, as shown in Fig. 10B, the magnetic pole centers of the money magnets 22a and 22b constituting the block-side magnet group 22 can be displaced to the outer side 5 with respect to the central axis of the rail 2, and the centers of the magnets can be shifted. At this time, with the repulsive force of the magnets, the rail 2 is pressurized from both sides on the central axis side. By doing so, the rolling resistance between the block 1 and the track 2 can be suppressed, and the relative movement of the two can be made smoother. Further, the magnets constituting the block side magnet group 22 and the road side magnet group 23 are not limited to the neodymium magnets. Of course, it can be a magnet of other types such as a ferrite iron magnet. (Fifth Embodiment) Next, a fifth embodiment of the present invention will be described. In the present embodiment, a new arrangement of the magnet and the Hall element for detecting the relative position of the block 1 by the track 2 will be described. Fig. 11 is a view showing the force detecting device 15 of the present embodiment. 11A is a view of the force detecting device 1 viewed from the block 1 side, and the UB drawing is away from the block 1 and the road 2, and is viewed from the side of the force detecting device 1 side, and the 11C is for explaining Arrangement of Hall elements 25a and 25b and magnet arrays 26 and 27. In the present embodiment, as shown in the lie diagram, the relative positional information of the block 1 with respect to the track 2 can be detected by the Hall element detecting the magnetic field generated by the magnet disposed on the track 2. In the present embodiment, the Hall element 25a and the Hall 7L member 25b are mounted on the magnetic detecting substrate 24 in a state in which the mounting posture is the same as that in the traveling direction of the block , and is arranged away from the horizontal direction. This magnetic 26 200921070 detects that the substrate 24 is embedded in the block body! The substrate groove (1) is screwed to the block using the fixing holes 24a to 24b, and the Hall element is fixed to the tree-shaped reinforcing plate 26 provided between the blocks, and the relative positions of the elements are stabilized, and the vibration is suppressed. A magnet arrangement groove 2 is formed on the upper surface of the rail 2 (two magnets 27a to 27b are provided by one of the side surfaces parallel to the traveling direction of the block 1 of the magnet arrangement groove c, and the magnet array 27 is formed. Two rows of magnets 28b are arranged on the side surfaces of the groove 1 in which the traveling direction of the block 1 is parallel, and the magnet array 28 is formed. The plane in which the magnet rows 27 and 28 are formed is combined with the inclusion of the Lin 2 and the frequency. The rotation of the tree is flat (four) straight, and is parallel to the direction in which the predetermined direction (the traveling direction of the block 丨) is in the state of the ninth sorrow. In the state where the magnetic detecting substrate 24 is mounted on the block 丨The Hall elements 25a and 25b enter the magnet arrangement groove 2c, and the block body 移动 moves relative to the channel 2, 15 in the Hall element 253 and 2% in the magnetic arrangement groove 2c. In the state of being clamped, it moves in the direction in which the magnets are arranged. Here, the magnets 27a and 27b of the magnet array 27 are opposite to the magnetic poles facing the Hall element 25b. The magnets 28a and 28b are opposed to the Hall elements 25a. The magnetic poles are opposite. In addition, the magnet 27a and the magnet 28a are opposite to each other. The magnet 27b and the magnet 28b are also opposed to each other by the opposite magnet. Thereby, when a force is applied to the block 1 and the block 1 relatively moves relative to the track 2, the Hall element 25a and the Hall element 25b detect the slave magnet arrays 27, 28 The position of the block 2 can be detected with good accuracy. Next, using Fig. 12 and Fig. 13, the structure and effect of the structure 27 200921070 of the present embodiment will be described. The figure shows that the block body is mounted on a single Hall 7G piece 29, and is used on the upper side of the road 2, and is arranged such that the magnetic pole and the magnet pool opposite to the closed portion of the block 1 and the cymbal detection block (9) track 2 When the relative position changes, the influence of the tilt of the block is compared as 5 cases. In the 13th figure, the influence of the tilt of the block when the structure of the embodiment is used is used. 10 15 First, consider the 12th figure. In the case of the force mi〇 of the present embodiment, the block 1 is held by the rotor of the holder as a rotating ball row with respect to the track 2, and the traveling direction with respect to the track 2 is on the left and right. Side combination. Therefore, it is easy to form Figure 12B The structure of the arrow direction is inclined. The component of the force of the arrow direction produces a displacement of the micrometer order (tilt). When the tilt is shown in the figure, the distance D1 between the Hall element 29 and the magnet 3〇a increases, Hall The distance between the element 29 and the magnet 短 is short, so that a difference is generated between D1 and D2, and the value of the magnetic field strength detected by the Hall element 29 is easily changed, and it is not easy to perform accurate detection. When the rigidity between the body 1 and the track 2 is greater than the measurement of the minute force or the measurement of the minute displacement, the ''', the sense zone or the phenomenon is seen. Therefore, it is difficult to perform the detection with good accuracy. In view of this, as shown in Fig. 13, according to the present embodiment, when the block body is still in the state of maintaining the distance to the magnets %, 27b, the twist angle of the magnet row 27 is Θ Variety. At this time, actually, since the area where the magnetic field is detected by the Hall 7L member 25b' is a relatively small portion, even the Θ change 'has little effect on the rounding of the Hall element 25b. Further, due to the torsion angle 6»2 between the torsion angle 27b between the member 25b and the magnet 27a of Hall 28 200921070, the influence of the change in posture is affected. ® corner 01 and Hall element 25b and magnets are easy to eliminate such a difference between the magnets and the Hall element 25b. With the configuration of the present embodiment, it is easy to tilt 5 = direction ' with respect to the block 1 to make the Hall element 25a' The influence of the inclination of the output signal is further lowered. Therefore, when the block 1 is tilted with respect to the track 2, the precision of the detection of the force can be maintained at a high accuracy. Further, in the present embodiment, the block 1 is set to be held by the rotator of the holder with respect to the rail 2, and the traveling direction of k is coupled to the left and right sides, and the knot of the invention is applied. The financial limit is limited to the block «from two ball rows, and the knot combined with the simple one can also be used to rotate the ball column with 4 or 6 pieces, and combine with the block body and the track. This embodiment may be applied to the inclination of the plane of the specific two ball rows including the most easily inclined combination. Next, a description will be given of a method of detecting the output of the Hall element of the present embodiment. In the present embodiment, the Hall element 25a and the Hall element 25b are aligned and fixed to the magnetic detecting substrate 24 in the same manner as described above. The magnetic fields generated by the magnet array π and the magnet array 28 are opposite to each other. Therefore, the output signal generated from the hole element 25a and the output signal generated from the Hall element 25b are signals which are completely reversed by positive and negative. In the second embodiment, as shown in Fig. 14, the difference between the output signal obtained from the Hall element 25a and the round-out signal obtained from the Hall element 25b is used as the block 1 pair. The relative position signal of track 2. By performing the Y magnet column 27 and the magnet array 28 in this manner, the signal output from each Hall element is increased by about 2 times due to the magnetic field, and the block position can be detected with better accuracy 29 200921070. Further, when acting as a magnetic field of interference, as shown in Fig. 14, a measurement system in which each of the elements is more disturbed by the disturbing magnetic field is described. Called 151 ΠΤ3 10 15 20; When an electromagnet (motor) or permanent magnet is placed near the placket, it is also possible to suppress the measurement # accuracy due to the deterioration of the magnetic field generated from the above. Further, in the above configuration, the analog communication of the differential signals of the two Hall elements is performed between the Hall elements 25a and 25b and the amplifier 2Q without the operation of the fCPU, and the structure can be simplified to reduce the influence of the disturbing magnetic field. . In the present embodiment, the magnetic field strength of the detection of the miscellaneous m of the interference magnetic field, and the detection of the hardware preparation for the two systems' communication are also required to be two large systems. Further, in the above embodiment, in order to detect the amount of minute movement, the attachment angle of each of the rectangular magnets 27a, 27b, 28a, and 28b may be inclined with respect to the Hall elements 25a and 25b. Further, in order to expand the measurement _ (the most read course), it has been found that the interval between the magnet 27a and the coffee and the magnet application 28b can be set to a certain degree or more. In the above, the interval between the faces is set. Further, in the present embodiment, the detecting means includes the Hall element 2 core element 25b, the magnet array 27, and the magnet array 28. Further, in the present embodiment, the difference between the No. 5 obtained by the output money energy Hall element 25b obtained by the (4) element 25a is taken as the structure of the relative position signal of the block 丨 to the track 2, and at the same time, Magnetic shielding is performed on the outer side of the bulk detecting unit 24, particularly the magnetic detecting substrate 24, so that the influence of the disturbing magnetic field can be more reliably suppressed. Further, the configuration for suppressing the influence of the disturbance magnetic field by the difference between the output signal obtained from the Mol component 25a and the signal obtained from the Hall element 25b is not only applicable to the magnets of the magnet arrays 27 and 28 of the present embodiment. arrangement. It is also applicable to the magnet array in which the magnetic pole directions of the magnets 27a, 27b, 28a, and 28b are arranged perpendicularly to the direction of the paper surface in Fig. 30 200921070. (Sixth embodiment) - Next, the sixth embodiment will be described. This embodiment is an embodiment in which the arrangement of the Hall element and the magnet described in the fifth and fifth embodiments is changed. The other configurations are the same as those described in the fifth embodiment. A configuration example of this embodiment is shown in Fig. 15. Fig. 5a is a top view of the vicinity of the Hall element of the present embodiment, Fig. 15B is a front view, and Fig. 15c is a side view. In the present embodiment, similarly to the fifth embodiment, the Haller elements 31a & 31b have the same posture and are fixed to the magnetic field detecting substrate 24. In the fifth embodiment, the two rows of magnet rows are formed in a state in which two Hall elements are interposed. In the present embodiment, one column of magnets including magnets 33a and 33b is provided between the Hall elements 313 and 3113. . Here, the magnetic poles of the magnet array 33a and the magnet 33b are formed in parallel with the arrangement direction of the Hall elements 3ia and 31b, and the phases 15 are opposite to each other. The state in which the magnetic field detecting base V) plate 24 of the present embodiment is attached to the block 1 is shown in Fig. 15D. According to this configuration, as in the configuration described in the fifth embodiment, the detection accuracy due to the inclination of the block 1 can be suppressed. Moreover, by using the difference between the output of the 2 〇 2 3U and the output of the Hall element 31b, the output signal can be increased by about 2 times to eliminate the influence of the disturbing magnetic field, and the detection due to the disturbing magnetic field can be suppressed. Decrease in degree. Further, the number of magnets constituting the magnet array may be two or more. The number of components of the spare device may be two or more. For example, as shown in Fig. 16, the number of magnets constituting the yttrium iron column 33 is not two, and more magnets 33 can be arranged, ugly, 31 200921070 33b··. Increase the stroke of the relative position detection of the block 执2. Further, the number of Hall elements may not be two, and the Hall element 32a may be provided in the traveling direction of the block body, and the block of the Hall element 31b! The direction of travel The Hall element 32b is provided, and the magnetic field is detected by four Hall elements. Thereby, the unevenness of the output of each of the 5 elements can be averaged, and the position detection with better accuracy can be performed. Further, at this time, the magnetic encoder which is used for detecting the relative positional change between the block body and the track 2 can be used as a position detecting means, a speed detecting means or an acceleration detecting means in addition to the force detecting means. Further, in the present embodiment, the detecting means is constituted by the Hall elements 31a, 10 31b, 32a, 32b and the magnet array 33. (Seventh embodiment) Next, a seventh embodiment of the present invention will be described. This embodiment is an embodiment in which the present invention is applied to a direct linkage system composed of a linear bushing and a shaft. Fig. 17 is a view showing a schematic configuration of the force detecting device of the embodiment. The force detecting device 40 is configured to couple the linear bushing outer cylinder 41 and the shaft 42 with four Hall rows 43 to 46, and the shaft 42 is movable back relative to the outer cylinder 41 in the axial direction. In the four Hall columns 43 to 46, '43a to 46a are used as the weight ball rows, and exist between the outer cylinder 41 and the shaft 42, and the rotating body (ball) passing through the weight ball rows 43a to 46a is at 20 the clearance ball column 43b. ~46b loop. Both ends of the outer cylinder 41 are closed by a front end cover 41a and a rear end cover 41b, and the shaft 42 is attached to the front end cover 41a side with a retaining spring 49 with respect to the rear end cover 41b. Further, a hole portion 41c is provided in the vicinity of the center portion of the distal end cover 41a, and the detection projection 42a of the shaft 42 protrudes from the hole portion 41c to the outside. Thereby, when the force acts on the detecting projection 42a, the biasing spring 49 is elastically deformed, and the shaft 42 relatively moves relative to the outer cylinder 41 with respect to 32 200921070. The inside of the shaft 42 is inserted into the cylindrical magnet portion 47 extending from the rear end cover 41b. The magnet portion 47 is divided into two by the center of the cross section viewed from the axial direction. The respective portions are magnetized to have opposite polarities. Further, the direction of the axis 5 is also formed by two portions divided into two at the center, and the portions in the axial direction are also magnetized to different magnetisms. Further, by providing the Hall elements 48a to 48d inside the shaft 42, the relative displacement of the shaft 42 with respect to the outer cylinder 41 can be detected by the output signals of the Hall elements 48a to 48d. According to this configuration, since the shaft 42 is joined to the outer cylinder 41 by the four ball rows 43 to 46, the torque resistance is strong, and the distance between the magnetic poles of the magnet portion 47 and the Hall elements 48a to 48d can be stabilized. Therefore, the force acting on the detecting projection 42a can be detected with better accuracy by the relative displacement of the detecting shaft 42 to the outer cylinder 41. Further, according to the present embodiment, since the movable portion and the driving substrate portion (not shown) of the Hall element can be sealed by the outer tube 41, the ring-like property can be improved, and the outer tube 41 can be made. It has the advantages of magnetic shielding and the like. Further, when the force detecting device 40 is configured to be able to align the mounting direction with the displacement direction of the shaft 42 when the rear end cover 41b is supported and fixed to other members, the deformation or tilt of the device can be suppressed, and the weight measurement can be easily utilized. . Further, in the present embodiment, the detecting mechanism includes the magnet portion 47 and the Hall elements 48a to 48d. The restoration machine 20 is constructed by attaching a spring 49. Another embodiment in which the present invention is applied to a direct linkage system composed of a linear bushing and a shaft is shown in Figs. 18A and 18B. First, the force detecting device 50 shown in Fig. 18A will be described. In this embodiment, the linear bushing outer cylinder 51 is coupled to the shaft 52 by four Hall trains, and the shaft 52 is movable back and forth in the axial direction of the outer cylinder 33 200921070 51. In Fig. 18A, only the weight ball rows 53a and 55a of the four ball rows 53 to 56 are displayed. The front end of the outer cylinder 51 is covered by the front end cover 51a, and the detection projection 51b is provided at the center of the front end cover 51a. Further, at the rear end of the outer cylinder 51, the end cover 51c for improving the tightness is provided, and the gap with the shaft 52 is reduced. Further, in the present embodiment, the magnet portion 57 is extended from the central portion of the distal end cover 51a to the side of the rear end cover 51c. The magnet portion 57 is formed in a cross section viewed from the axial direction, and is formed by two portions in the axial direction. The portions magnetized to opposite polarities are the same as those described in Fig. 17. 10 Further, the rear end of the shaft 52 is closed by the shaft rear end cover 52b. Further, the front end of the shaft 52 has no shaft end cover 52a'. The center portion of the front end cover 52a of the shaft is opened in the shaft hole portion 52c, and the magnet portion 57 is inserted into the shaft hole portion 52c from the end side. A retaining elastic is disposed between the inner side of the end cap 51a and the front end cover 52a of the outer cylinder 51. The force acts on the outer cylinder 51. When the outer cylinder 51 approaches the shaft 52, the resistance acts due to the elastic shape of the retaining spring 59. . The Hall elements 58a to 58d are provided inside the shaft 52. When a force is applied to the detecting projection 51b, the Hall elements 58a to 58d detect the magnetic field generated from the magnet portion 57, and the relative displacement of the outer cylinder 51 to the shaft 52 can be detected. According to this configuration, since the distance between the magnetic poles of the magnet portion 57 and the Hall t1 pieces 58a to 58d can be stabilized by the strong moment resistance, the relative displacement of the outer cylinder 51 to the shaft 52 can be measured with better accuracy. Further, in this embodiment, the detecting mechanism has a magnet portion 57 and Hall elements 58a to 58d. Is the recovery agency attached? Meal 59. Next, the force detecting device 6 shown in Fig. 18B will be described. In this embodiment, the linear bushing outer cylinder 61 is also coupled to the shaft 6 2 by four ball rows, and the shaft 6 2 can be moved back and forth in the axial direction of the outer cylinder 61 by the 2009 21070. In Fig. 18B, only the load ball rows 63a and 65a of the four ball rows 63 to 66 are displayed. The rear end cover 61a is closed at the rear end of the outer cylinder 61, and a magnet insertion hole portion 61c is provided in the center portion of the front end portion 61b. The magnet insertion hole portion 61c is inserted into the magnet portion 67 of the shaft 62 5. The load ball rows 63a to 66a of the four ball rows 63 to 66 are present between the magnet insertion hole portion 61c and the shaft 62. A disk-shaped front end plate 62a is provided on the front end side of the shaft 62. In the central portion of the front end plate 62a, the detecting projection 62b protrudes to the outside. The front end plate 62a abuts against the front end portion 61b of the outer cylinder 61 in the outer peripheral portion 62c. The front end plate 62a is provided with circular grooves 62d and 62e as viewed from the axial direction. When the force acts on the detecting projection 62b, the front end plate 62a is elastically deformed in the grooves 62d and 62e, and resistance is generated. Further, a cylindrical magnet portion 67 is provided at the rear end of the shaft 62. The magnet portion 67 has a cross section viewed from the axial direction and is formed of two portions in the axial direction, and the portions of the magnet portions magnetized to opposite polarities are the same as those described in Fig. 17. Hall elements 68a to 68d are provided on the inner circumferential surface 61d of the outer cylinder 61. According to this configuration, since the shaft 62 is also joined to the outer cylinder 61 by the four ball rows 63 to 66, the torque resistance is strong, and the distance between the magnetic poles of the magnet portion 67 and the Hall elements 68a to 68d can be stabilized. Therefore, the force acting on the detecting projection 62b can be detected with better accuracy by the relative displacement ' of the detecting shaft 62 to the outer cylinder 61. Further, in this embodiment, the detecting mechanism includes the magnet portion 67 and the Hall elements 68a to 68d. The restoration mechanism has a structure in which the front end plate 62a is provided with circular grooves 62d and 62e. Further, in the present embodiment, an example has been described in which the shaft and the outer cylinder are combined in four ball rows, and the number of balls is not limited to four. 5, 6, etc., depending on the set torque, 35 200921070 Appropriately change the cross section of the ball row, and explain that the magnet portion is viewed from the axial direction and is formed by two parts in the axial direction, and the magnetization of each part The case of the opposite polarity (6) 11⁄4 type can be appropriately set in accordance with the configuration and number of the Hall element. (Eighth Embodiment) 5 Next, the eighth embodiment of the present invention will be described. In the present embodiment, the present invention is applied to a direct linkage system composed of a linear bushing and a shaft. The schematic diagram of the acceleration degree && 70 of this embodiment is shown in Fig. 19. The acceleration picker 7 结合 combines the wire & bushing outer cylinder 71 with the shaft 72 in four ball rows, and the shaft 72 is mounted to be movable 10 times in the axial direction. In the figure 19, the load ball rows 73a and 75a of the two ball rows of the four ball rows are displayed. Both ends of the outer cylinder 71 are closed by the front end cover 7U and the rear end cover claw, and are shaped and sealed. Further, the front end cover 71a and the rear end cover 71b are provided with a retaining spring and a hole element front end side retainer 71c and a rear end side retainer 15 71d which will be described later in the branch. The retaining spring 79a and the attached spring 7 are attached to the distal end side retainer 71c and the rear end side retainer 71d. The shaft 72 is attached to the rear end cover 71b at the rear end side with the attachment spring 79b, and also to the front end cover 71a, with the attachment spring 79a attached to the rear end side. Further, cylindrical magnet portions 77a and 20 77b are provided on the front end side and the rear end side of the shaft 72. The magnet portion and the 77b are divided into two in a cross section viewed from the axial direction, and each of the sub-portions is magnetized to have opposite polarities. In the axial direction, it is also divided into two, and the divided portions are respectively magnetized to opposite polarities. Further, in the front end side holder 71c and the rear end side holder 71d, the Hall elements 78a to 78d are provided in portions opposed to the respective magnetic poles of the magnet portions 77a and 77b, and the Hall elements 36 200921070 78a to 78d can be provided. The output signal detects the relative displacement of the shaft 72 to the outer cylinder 71. Here, when the acceleration detecting means 70 applies the acceleration, the shaft 72 relatively moves with respect to the outer cylinder 71, and the displacement can be detected by the outputs of the Hall elements 78a to 78d. According to this configuration, since the shaft 72 can be coupled to the outer cylinder 71 by four ball rows, the five moments are strong, and the displacement of the magnet elements of the magnet portions Wa and 77b to the Hall elements 78a to 78d can be equalized and stabilized. The acceleration of the outer cylinder 71 can be detected 72 with better accuracy. Further, in this embodiment, the detecting mechanism is constituted by the magnets 77a and 77b and the Hall elements 78a to 78d. The restoration mechanism is constituted by the attached springs 79a and 79b. 10 Next, in the 19B, the present invention is applied to the direct linkage system composed of a linear bushing and a shaft to constitute another example of the acceleration pickup. The acceleration picker 8 shown in Fig. 19B is arranged such that the linear bushing is combined with the shaft 82 by four ball rows. The shaft 82 is mounted to be movable back and forth in the axial direction. In Fig. 19B, 'the load ball rows 83a 15 and 85a of the two ball rows of the four ball rows are displayed. Both ends of the outer cylinder 81 are closed by a front end cover 81a and a rear end cover 81b to form a hermetic structure. Further, the front end side plate portion 88a and the rear end portion 82b of the shaft 82 are provided with a front end side leaf spring 88a and a rear end side plate spring 88b by the front end side ball 87a and the rear end side ball 87b'. The shaft 82 rear end side plate spring 88b is attached to the front end side, and is attached to the rear end side by the front end side plate spring 88a. The front end side leaf spring 87a and the rear side side side plate spring 87b are uniform in the deformation mode of the front end side leaf spring 88a and the rear end side leaf spring 88b. By the front end seesaw spring 88a and the rear end side leaf spring 88b, the shaft 82 is stopped at a stable position. The distal end side plate spring 88a and the rear end side plate spring 88b are fixed to the distal end side piezoelectric element 89a and the rear end side piezoelectric element 89b, respectively. 37 200921070 Here, when acceleration is applied to the acceleration picker 8〇, the shaft 82 relatively moves relative to the outer cylinder 81. The output of the front end side piezoelectric element and the rear end side piezoelectric element 8% can be detected corresponding to the displacement. The front end side leaf spring 88a and the rear end side leaf spring 88b are deformed. According to this configuration, since the shaft 82 can be joined to the outer cylinder 81 by the four ball rows, the torque resistance is strong, and the deformation modes of the front end side plate spring 88a and the rear end side plate spring 88b can be equalized and stabilized, and can be better. The accuracy of the shaft 82 to the outer cylinder 81 is detected. In this configuration, the detecting mechanism includes a front end side leaf spring 88a, a rear end side leaf spring 88b, a front end side piezoelectric element 89a, and a rear end side side piezoelectric element 8%. The restoration mechanism has a front end side plate spring 88a and a rear end side plate spring 88b. Further, in the present embodiment, an example in which the outer cylinder is combined with four ball rows has been described. The ball column is not limited to four. It can be 5 or 6 pieces, and the number of balls can be changed as appropriate according to the set torque. Further, in Fig. 19A, the cross section ' of the cylindrical magnet portions 15 77a and 77b viewed from the axial direction is divided and divided into two in the axial direction, and the divided portions are magnetized to have opposite polarities. This magnetization mode can be matched with Huo. The configuration and number of the components are appropriately set. Further, magnets may be provided on opposite portions of the Hall elements 78a to 78d at the front end portion and the rear end portion of the shaft 72 so that the magnetic properties of the adjacent magnets are extremely magnetic. (Ninth Embodiment) Next, a ninth embodiment of the present invention will be described. This embodiment is a modification of the form of the leaf spring of the first embodiment. Fig. 20 shows a schematic configuration of the force detecting device 90 of the present embodiment. As shown in Fig. 20A, the force detecting device 90 38 200921070 of the eighth embodiment has a block body 91, a rail 92, a retainer 93, a rotating body (ball) state held by the retainer, and a leaf spring 96. Composition. Since the other configurations are the same as those of the embodiment, the drawings and descriptions are omitted. In the present embodiment, the 'U-shaped block body 91 and the rectangular track % structure 5 are formed into a block body 9! The inner peripheral portion and the outer peripheral portion of the rail 92 are not shown in the figure of the side wall of the rail, and the rotor is not shown and held. The rotating body (ball) 93a of the holder 93 is relatively movable. That is, the block 91 and the track 92 constitute a linear guide that linearly moves in a relatively straight line. In this force detecting device 90, a stopper 94 is provided on both side faces 10 of the moving direction of the block 91. The stopper 94 is provided with a fixing screw to the end surface of the block 2 on the inner side of the stopper 2 on the side of the moving direction of the stopper 2, and is provided as a plate magazine % of the elastic member for the restoring force. The outer end surface 96a of the plate spring 96 is then stopped! ! 94, the inner end face is next to the obstruction 92. The two leaf springs 96 in Fig. 20A are arranged to act on the rail 92 in the steady state 15 with the pressing force toward the inner side in the traveling direction. Figure 20B is a perspective view of the leaf spring 96. The leaf spring % is formed by an elastically deformable spring portion 96c between the outer end surface 96a and the inner end surface 96b, and has a fixed cross section in a direction perpendicular to the paper surface of Fig. 20A. If the leaf spring 96 as the elastic member has such a shape, the pressing force 20 can uniformly act on the entire end faces of the rails 92. Thereby, when the lane 92 moves relative to the block 91, the moment (the moment in the pitch direction) as shown in Figs. 12 and 13 can be suppressed from acting on the lane 92, and the inclination of the lane 92 can be suppressed. Thereby, when a small force and a small displacement amount are detected, the obstruction 92 can be moved more smoothly in the arrangement direction of the rotating body (ball) 93a, and the displacement amount of 200921070 can be more accurately detected. In the present embodiment, the restoration mechanism has a plate elastic %. Further, as long as the material of the leaf spring 96 is confirmed to be elastic, a spring steel-specific metal material or a non-metal material may be used. > (Reference Embodiment) Next, a description will be given of the force detecting device 10 of the force measuring device according to the embodiment of the present invention. Further, the configuration other than the force detecting device 1 is the same as that of the second embodiment. The force detecting device 1 of this reference embodiment is shown in Fig. 21. As shown in Fig. 21A, in the force detecting device 1A, unlike the third to third embodiments, the Hall element 5 and the magnet 4 are not provided, and the strain gauge 1 is used. A concave portion 2c is formed on both end sides of the longitudinal direction of the rail 2, and the concave portion 2cs is used as a force transmission mechanism, and a spherical body made of ceramic or metal. Further, as shown in FIG. 21B, in order to combine the block body and the road 2, the joint plates 14 are provided on both end faces of the lengthwise directions, and a plurality of the outer side surfaces are fixedly arranged, and here, Three strain gauges 16 serve as the gauge plate 15 of the elastic member 15. That is, the rail 2 is configured to act from the gauge plate 15 by the ball 17, which is a force transmitting mechanism. Output lines (not shown) are connected from the four strain gauges 16, and the voltage according to the strain gauge 16 is output. The method of straining the strain gauge 16 is based on the amount of movement of the relative movement (relative motion) of the block 1 and the rail 2, similarly to the third to third embodiments. 2) For example, the block 1 is fixed so that when an external force acts on the track 2, the track 2 moves in a direction along the moving direction of the track 2. The force of the movement of the orbit 2 is acted upon by the ball 17 as the conveying means, and acts on the gauge plate 15, thereby causing the strain gauge 16 to strain. According to this strain, the voltage is output from a plurality of (here, three) strain gauges. According to the voltage output of the strain gauge 6, the magnitude of the force component acting in the specific direction of the force outside the channel of 200921070 (the moving direction of the track 2) is detected. Further, the principle of force detection using the strain gauge 16 itself is well known. Therefore, the description is omitted. In the reference embodiment described above, the same applies to the strain gauge plate 15 for detecting the force of the actual force, and the external force is only applied to the force of the first to the third embodiment. The characteristic direction component extracts the structure of the block 1 and the channel 2 as the displacement components, and the same effects as those of the first to third embodiments can be obtained. The embodiment of the present invention has been specifically described above, and the present invention is not limited to the above embodiment, and various modifications can be made according to the technical idea of the present invention. For example, the numerical values given in the above embodiments are merely examples, and numerical values different therefrom may be used as needed. For example, in the force detecting device of the above embodiment, an electromagnet may be used as the permanent magnet. The present invention can detect only the force in the direction of rotation by blocking the relative motion 15 of this configuration to the ruler guide. Moreover, since it is highly rigid and highly sensitive, it can be directly assembled to the arm of the robot or the like. A multi-axis force sensor can be constructed by the relative arrangement of the magnet and the detecting portion. By making the movable portion lighter, it can function as an acceleration sensor. From this point of view, the present invention is applicable to all related articles for assisting a reduction surgery such as a fracture, 20 direct linkage guides, bolt grooves, screws or actuators. In the above embodiment, a Hall element using a Hall effect is used as the magnetoelectric conversion element, and various elements can be used as long as it can convert other magnetic forces into electric power. Other examples of the magnetoelectric conversion element include an MR element, a magnetic strain element, and the like. In the first embodiment described above, the length of the length along the track 2 is longer than the length along the length of the block 1, and conversely, the length along the length of the block 1 is longer than the length of the track 2. The length can also be. At this time, the repulsive force which normally moves toward both outer sides in the moving direction acts on the road 2, and when it is stationary, the force acting on the rail 25 is 0, and when the rail 2 moves relative to the block 1, the restoring force is generated. Further, in each of the above embodiments, the present invention has been described by taking a device such as a force detecting device and an acceleration picker as an example. However, any of the mechanical and physical detection devices such as the position detecting device, the speed detecting device, the force detecting device, and the acceleration picker (detecting device) may be configured according to the same configuration or principle as the respective embodiments. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a block diagram showing the overall configuration of a force measuring device according to a first embodiment of the present invention. Fig. 2 is a top view (second AA), a side cross-sectional view (Fig. 2B), and a cross-sectional view (Fig. 2C) of the force detecting device according to the first embodiment of the present invention. Fig. 3 is a side view (Fig. 3A) and a plan view (Fig. 3B) for explaining an experimental method of arranging a Hall element and tilting a permanent magnet when a Hall element according to an embodiment of the present invention is used. Fig. 4 is a graph showing the correlation of the feed amount of each of the mounting angles of the square magnets (W10xL10) with respect to the arrangement of the Hall elements 20. Fig. 5 is a graph showing the correlation of the feed amount of the output voltage of each of the mounting angles of the thin rectangular magnet (W3xL10) with respect to the arrangement of the Hall elements. Figure 6 shows the titanium magnet (φ3·2><2) A graph showing the correlation of the feed amount of the output voltage with respect to each of the mounting angles with respect to the arrangement of the Hall elements. 42 200921070 Fig. 7 is a top view (7AB1), a side cross-sectional view (7BSI), and a cross-sectional view (7CB1) of the force detecting device according to the second embodiment of the present invention. Fig. 8 is a top view (Fig. 8A), a side cross-sectional view (Fig. 8B), and a transverse wear view (sc map) of the force detecting device according to the third embodiment of the present invention. Fig. 9 is a top view (Fig. 9A), a side cross-sectional view (figure map), and a cross-sectional view (Fig. 9C) of the force detecting device according to the fourth embodiment of the present invention. Figure 10 is a view showing another example of the force detecting device of the fourth embodiment of the present invention.
一例之側截面圖（第1〇Α圖）、挑出上面圖之一部份者（第1〇B 圖）。 10 第11圖係顯示本發明第5實施形態之力檢測裝置之上 面圖（第11A圖）、側截面圖（第11B圖）、關於霍爾元件與磁鐵 列之配置之圖（第11C圖）。 第12A圖、第12B圖係顯示檢測塊體對軌道之相對位置 之變化時，塊體之傾斜之影響之比較例者。 15 第13A圖、第13B圖係顯示在本發明第5實施形態中， 檢測塊體對軌道之相對位置之變化時，塊體之傾斜之影響 者。 第14圖係顯示在本發明第5實施形態中，採用從2個霍 爾兀件而得之輸出信號之差，作為塊體對軌道之相對位置 20 信號之結構者。 第15圖係顯示本發明第6實施形態之霍爾元件與磁鐵 列之配置之上面圖（第15A圖）、側面圖（第15B圖）、正面圖（第 15C圖）、顯示力檢測裝置之上面圖（第15D圖）。 第16圖係顯示本發明第6實施形態之霍爾元件與磁鐡 43 200921070 列之另一例之上面圖。 第17圖顯示本發明第7實施形態之力檢測裝置之上截 面圖（第17A圖）、側截面圖（第I%圖）。 第18圖顯示本發明第7實施形態之力檢測裝置之另一 列之側截面圖（第18A圖、第18B圖）。 第19圖係顯示本發明第8實施形態之加速度拾取器之 側截面圖（第19A圖、第19B圖）。 第20圖係顯示本發明第9實施形態之力檢測裝置之上 面圖（第20A圖）及板彈簧之立體圖（第2(^圖）。 第21圖係顯示本發明參考實施形態之力檢測裝置之上 面圖（第21A圖）及橫截面圖（第21B圖）以及規部之平面圖（第 21C圖）。 第22圖係顯示習知技術之薄膜式力檢測裝置之截面 圖。 第23圖係顯示習知技術之切變（樑柱）式力檢測裝置之 立體圖。 【主要元件符號說明】 1...塊體 3a...轉動體 lb...凹部 4...磁鐵 1C…基板用溝 5··.霍爾元件 2...軌道 6...連接器 2a...轉動體 7...彈性材 2c...磁鐵配置溝 8…固定用螺絲 3...保持器 9...板彈簧 44 200921070 ίο...力檢測裝置 11.. .間隔件 12.. .停止器 13.. .彈性材料 14.. .結合板 15.. .規板 16.. .應變規 17.. .球體 20.. .軛停止器 20.. .放大器 21··.輛 22.. .塊體側磁鐵組 22a...鈥磁鐵 22b...鈥磁鐵 23.. .軌道側磁鐵組 23a...鈦磁鐵 23b...鈥磁鐵 24.. .磁檢測基板 24a...固定孔 24b...固定孔 25a...霍爾元件 25b...霍爾元件 26.. .磁鐵列 27.. .磁鐵列 27a...磁鐵 27b...磁鐵 28.. .磁鐵列 28a...磁鐵 28b...磁鐵 29.. .霍爾元件 30.. .外部信號檢測器 30a...顯示部 30a...磁鐵 30b...磁鐵 31a...霍爾元件 31b...霍爾元件 33.. .磁鐵列 33a...磁鐵 33b...磁鐵 40.. .力檢測裝置 41.. .外筒 41 a...如端盖 41b...後端蓋 41c...孔部 42.. .軸 43.. .球列 43a...負重球列 43b...離隙球列 45 200921070 44...球列 53...球列 44a...負重球列 53a...負重球列 44b...離隙球列 54...球列 45...球列 55...球列 45a...負重球列 55a...負重球列 45b...離隙球列 56...球列 46...球列 57...磁鐵部 46a...負重球列 58a...霍爾元件 46b...離隙球列 58b...霍爾元件 47...磁鐵部 58c...霍爾元件 48a...霍爾元件 58d...霍爾元件 48b...霍爾元件 59...附勢彈簧 48c...霍爾元件 60...力檢測裝置 48d...霍爾元件 61...外筒 49...附勢彈簧 61a...後端蓋 50...力檢測裝置 61b...前端部 51...外筒 61c...磁鐵插入孔部 51a...前端蓋 61d...内周面 51b...檢測突起 62...軸 51c...後端蓋 62a...前端板 52..•轴 62b...檢測突起 52...軸前端蓋 62c...外周部 52b...軸後端蓋 62d…溝 52c...轴孔部 62e··.溝 46 200921070 63...球列 78a...霍爾元件 63a...負重球列 78b...霍爾元件 64...球列 78c...霍爾元件 64a...負重球列 78d...霍爾元件 65...球列 79a...附勢彈簧 65a...負重球列 79b...附勢彈簣 66...球列 80...加速度拾取器 66a...負重球列 81...外筒 67...磁鐵部 82...轴 68a...霍爾元件 82a...前端部 68b...霍爾元件 82b...後端部 68c...霍爾元件 83a...負重球列 68d...霍爾元件 85a...負重球列 70...加速度拾取器 87a...前端侧保持器 71...外筒 87b...後端側保持器 71a...前端蓋 88a...前端側板彈簧 71b...後端蓋 88b...後端側板彈簧 71c...前端側保持器 89a...前端側壓電元件 71d...後端側保持器 89b...後端側壓電元件 72...軸 90...力檢測裝置 73a...負重球列 91...塊體 75a...負重球列 92...執道 77a...磁鐵部 93...保持器 77b...磁鐵部 93a....轉動體 47 200921070 94...停止器 110...彈簧 95...固定用螺絲 200...樑柱式負載感測器 96...板彈簧 201...固定部 96a...外側端面 202...載重部 96b...内側端面 203...上下樑柱 100···壓力感測器 204...上下樑柱 101...薄膜部 205...中間部 102··.壓力承受室 206...中間部 103...薄膜部 207...矩形式施加載重部 103b...内壁 208...應變規 107...應變規 0...角度 108...受壓體 D1...距離 109...加壓板部 D2...距離 48For a side cross-sectional view (Figure 1), pick one of the above figures (Figure 1B). 10 is a top view (11A) and a side cross-sectional view (FIG. 11B) of the force detecting device according to the fifth embodiment of the present invention, and a view of the arrangement of the Hall element and the magnet array (FIG. 11C). . Fig. 12A and Fig. 12B show a comparison example of the influence of the inclination of the block when the relative position of the block to the track is changed. 15 Fig. 13A and Fig. 13B show the influence of the inclination of the block when the relative position of the block to the track is detected in the fifth embodiment of the present invention. Fig. 14 is a view showing the structure of the relative position 20 signal of the block to the track using the difference between the output signals obtained from the two Hall elements in the fifth embodiment of the present invention. Fig. 15 is a top view (Fig. 15A), a side view (Fig. 15B), a front view (Fig. 15C), and a display force detecting device of the arrangement of the Hall element and the magnet array according to the sixth embodiment of the present invention. Above picture (Fig. 15D). Fig. 16 is a top view showing another example of the Hall element and the magnetic yoke 43 according to the sixth embodiment of the present invention. Fig. 17 is a cross-sectional view (17A) and a side cross-sectional view (Fig. 1%) of the force detecting device according to the seventh embodiment of the present invention. Fig. 18 is a side sectional view showing another column of the force detecting device according to the seventh embodiment of the present invention (Fig. 18A and Fig. 18B). Fig. 19 is a side sectional view showing the acceleration pickup device according to the eighth embodiment of the present invention (Fig. 19A and Fig. 19B). Fig. 20 is a top view (20A) of a force detecting device according to a ninth embodiment of the present invention, and a perspective view of a leaf spring (second drawing). Fig. 21 is a view showing a force detecting device according to a reference embodiment of the present invention. The top view (Fig. 21A) and the cross-sectional view (Fig. 21B) and the plan view of the gauge (Fig. 21C). Fig. 22 is a cross-sectional view showing a conventional film type force detecting device. A perspective view showing a shearing (beam-column) type force detecting device of the prior art. [Explanation of main component symbols] 1 block 3a...rotor body lb...recess 4... magnet 1C...for substrate Groove 5·. Hall element 2... Track 6... Connector 2a... Rotor 7... Elastic material 2c... Magnet arrangement groove 8... Fixing screw 3...Retainer 9 ...plate spring 44 200921070 ίο... force detecting device 11 .. spacer 12 .. .stop 13 .. . elastic material 14 .. . binding plate 15 .. . regulation board 16 .. . strain gauge 17.. Sphere 20.. yoke stop 20.. Amplifier 21··. 22.. Block side magnet group 22a... Neodymium magnet 22b... Neodymium magnet 23.. Track side magnet Group 23a...titanium magnet 23b...鈥magnetic Iron 24. Magnetic detection substrate 24a... fixing hole 24b... fixing hole 25a... Hall element 25b... Hall element 26.. Magnet column 27.. Magnet column 27a... Magnet 27b... Magnet 28.. Magnet column 28a... Magnet 28b... Magnet 29.. Hall element 30.. External signal detector 30a... Display portion 30a... Magnet 30b. .. magnet 31a... Hall element 31b... Hall element 33.. Magnet column 33a... Magnet 33b... Magnet 40.. Force detecting device 41.. Outer tube 41 a.. For example, the end cover 41b... the rear end cover 41c... the hole portion 42.. the shaft 43.. the ball column 43a... the weight ball column 43b... the clearance ball column 45 200921070 44... Column 53...ball row 44a...load ball column 53a...load ball column 44b...backlash ball column 54...ball column 45...ball column 55...ball column 45a.. The weight ball row 55a...the weight ball row 45b...the clearance ball column 56...the ball column 46...the ball column 57...the magnet portion 46a...the weight ball column 58a...hall Element 46b... Idle ball row 58b... Hall element 47... Magnet part 58c... Hall element 48a... Hall element 58d... Hall element 48b... Hall element 59...attached spring 48c...Hall element 60...force detecting device 48d...hall element 61...outside 49...attached spring 61a...rear end cover 50...force detecting device 61b...front end portion 51...outer cylinder 61c...the magnet insertion hole portion 51a...the front end cover 61d.. Inner peripheral surface 51b...detection projection 62...shaft 51c...rear end cover 62a...front end plate 52..•axis 62b...detection projection 52...shaft front end cover 62c... Outer peripheral portion 52b...shaft rear end cover 62d...groove 52c...shaft hole portion 62e··.groove 46 200921070 63...ball row 78a...hall element 63a...load ball column 78b.. Hall element 64...ball row 78c...Hall element 64a...load ball column 78d...Hall element 65...ball column 79a...attached spring 65a...load ball Column 79b...attached magazine 66...ball 80...accelerator pickup 66a...load ball column 81...outer cylinder 67...magnet portion 82...axis 68a... Hall element 82a... front end portion 68b... Hall element 82b... rear end portion 68c... Hall element 83a... load ball column 68d... Hall element 85a... load ball Column 70: acceleration pickup 87a... front end side holder 71... outer cylinder 87b... rear end side holder 71a... front end cover 88a... front end side plate spring 71b... rear end Cover 88b...rear end side plate spring 71c... front end side retainer 89a... front end side piezoelectric element 71d... rear end side holder 89b... rear end side piezoelectric element 72... shaft 90... force detecting means 73a... load ball column 91.. Block 75a...load ball column 92...Road 77a... Magnet portion 93... Holder 77b... Magnet portion 93a.... Rotor 47 200921070 94... Stopper 110 ...spring 95...fixing screw 200...beam-column load sensor 96...plate spring 201...fixing portion 96a...outer end face 202...loading portion 96b... Inner end surface 203 ... upper and lower beam column 100 · pressure sensor 204 ... upper and lower beam column 101 ... thin film portion 205 ... intermediate portion 102 · pressure receiving chamber 206 ... intermediate portion 103 ...film portion 207... rectangular application load portion 103b... inner wall 208... strain gauge 107... strain gauge 0... angle 108... pressure body D1... distance 109. ..pressure plate section D2...distance 48