JPWO2009011148A1 - 圧電薄膜共振素子及びこれを用いた回路部品 - Google Patents
圧電薄膜共振素子及びこれを用いた回路部品 Download PDFInfo
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- JPWO2009011148A1 JPWO2009011148A1 JP2009523557A JP2009523557A JPWO2009011148A1 JP WO2009011148 A1 JPWO2009011148 A1 JP WO2009011148A1 JP 2009523557 A JP2009523557 A JP 2009523557A JP 2009523557 A JP2009523557 A JP 2009523557A JP WO2009011148 A1 JPWO2009011148 A1 JP WO2009011148A1
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- 239000010408 film Substances 0.000 claims abstract description 261
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- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
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- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
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- 239000010937 tungsten Substances 0.000 description 1
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Abstract
Description
Claims (11)
- 所定の平面形状を有する圧電膜と、この圧電膜の下面に形成され、外周に膜面に対して所定の角度で傾斜した傾斜部を有する下面電極と、前記圧電膜の上面に形成される上面電極との積層構造からなる共振部を具備した圧電薄膜共振素子であって、
前記傾斜部の角度が25°から55°の範囲に設定されていることを特徴とする圧電薄膜共振素子。 - 前記傾斜部は、前記下面電極の外周の一部に設けられていることを特徴とする請求項1に記載の圧電薄膜共振素子。
- 所定の平面形状を有する圧電膜と、この圧電膜の下面に形成され、外周に膜面に対して所定の角度で傾斜した傾斜部を有する下面電極と、前記圧電膜の上面に形成される上面電極との積層構造からなる共振部を具備し、前記共振部の前記下面電極の傾斜部における積層領域の一部の音響インピーダンスが前記共振部の前記下面電極の傾斜部より内側の積層領域の音響インピーダンスよりも大きく設定されていることを特徴とする圧電薄膜共振素子。
- 所定の平面形状を有する圧電膜と、この圧電膜の下面に形成され、外周に膜面に対して所定の角度で傾斜した傾斜部を有する下面電極と、前記圧電膜の上面に形成される上面電極との積層構造からなる共振部を具備し、前記上面電極の前記傾斜部が対向する位置の一部に付加膜を設けることにより、前記共振部の前記下面電極の傾斜部における積層厚のうち一部の積層厚が前記共振部の前記下面電極の傾斜部より内側部分における積層厚よりも厚くなっていることを特徴とする圧電薄膜共振素子。
- 前記上面電極には外部接続用の端子電極が延設されており、前記付加膜は前記上面電極の上面の前記傾斜部が対向する位置から前記端子電極に渡って設けられていることを特徴とする請求項4に記載の圧電薄膜共振素子。
- 前記上面電極には外部接続用の端子電極が延設されており、前記付加膜は、前記上面電極の前記下面電極の傾斜部よりも内側から当該傾斜部が対向する位置を通って前記上面電極の前記端子電極に渡って設けられていることを特徴とする請求項4に記載の圧電薄膜共振素子。
- 前記付加膜に代えて、前記上面電極の当該付加膜が設けられる部分の膜厚をそれ以外の部分の膜厚よりも厚くすることにより、前記共振部の前記下面電極の傾斜部における積層厚のうち一部の積層厚が前記共振部の前記下面電極の傾斜部より内側部分における積層厚よりも厚くなっていることを特徴とする請求項4ないし請求項6のいずれかに記載の圧電薄膜共振素子。
- 前記共振部の前記下面電極の傾斜部より内側部分の積層厚と略同一の積層厚を有する前記共振部の外周部分における前記圧電膜に、膜面に対して所定の角度で傾斜した傾斜部が設けられ、前記圧電膜の外周が前記上面電極の外周より内側に設定されていることを特徴とする請求項4ないし請求項6のいずれかに記載の圧電薄膜共振素子。
- 前記傾斜部の角度が25°から55°の範囲に設定されていることを特徴とする請求項4ないし請求項6のいずれかに記載の圧電薄膜共振素子。
- 前記圧電膜は、(002)方向を主軸とする配向性を有する窒化アルミニウムまたは酸化亜鉛であることを特徴とする請求項1ないし請求項6のいずれかに記載の圧電薄膜共振素子。
- 請求項1ないし請求項6のいずれかに記載の圧電薄膜共振素子を少なくとも一つ含むことを特徴とする回路部品。
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JP2009523557A JP5009369B2 (ja) | 2007-07-13 | 2008-03-05 | 圧電薄膜共振素子及びこれを用いた回路部品 |
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PCT/JP2007/064015 WO2009011022A1 (ja) | 2007-07-13 | 2007-07-13 | 圧電薄膜共振素子及びこれを用いた回路部品 |
JPPCT/JP2007/064015 | 2007-07-13 | ||
JP2009523557A JP5009369B2 (ja) | 2007-07-13 | 2008-03-05 | 圧電薄膜共振素子及びこれを用いた回路部品 |
PCT/JP2008/053920 WO2009011148A1 (ja) | 2007-07-13 | 2008-03-05 | 圧電薄膜共振素子及びこれを用いた回路部品 |
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US20030141946A1 (en) * | 2002-01-31 | 2003-07-31 | Ruby Richard C. | Film bulk acoustic resonator (FBAR) and the method of making the same |
JP2005073175A (ja) * | 2003-08-27 | 2005-03-17 | Fujitsu Media Device Kk | 圧電薄膜共振子及びその製造方法 |
JP2006050021A (ja) * | 2004-07-30 | 2006-02-16 | Toshiba Corp | 薄膜圧電共振器及びその製造方法 |
JP4435049B2 (ja) * | 2005-08-08 | 2010-03-17 | 株式会社東芝 | 薄膜圧電共振器及びその製造方法 |
JP4756461B2 (ja) * | 2005-10-12 | 2011-08-24 | 宇部興産株式会社 | 窒化アルミニウム薄膜およびそれを用いた圧電薄膜共振子 |
KR100904621B1 (ko) * | 2005-11-04 | 2009-06-25 | 가부시키가이샤 무라타 세이사쿠쇼 | 압전 박막 공진자 |
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