JPWO2008050638A1 - Color filter for transflective liquid crystal display device and manufacturing method thereof - Google Patents

Color filter for transflective liquid crystal display device and manufacturing method thereof Download PDF

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JPWO2008050638A1
JPWO2008050638A1 JP2008540948A JP2008540948A JPWO2008050638A1 JP WO2008050638 A1 JPWO2008050638 A1 JP WO2008050638A1 JP 2008540948 A JP2008540948 A JP 2008540948A JP 2008540948 A JP2008540948 A JP 2008540948A JP WO2008050638 A1 JPWO2008050638 A1 JP WO2008050638A1
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resin layer
colored resin
transparent
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liquid crystal
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松政 健司
健司 松政
昌広 多田
昌広 多田
伊知郎 舛田
伊知郎 舛田
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Toppan Inc
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133553Reflecting elements
    • G02F1/133555Transflectors
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133371Cells with varying thickness of the liquid crystal layer

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Filters (AREA)
  • Liquid Crystal (AREA)

Abstract

透明基板上に着色画素を形成してなる半透過型液晶表示装置用カラーフィルタであって、前記着色画素は、透過部と、前記透過部に隣接する反射部とを有し、前記反射部の前記着色樹脂層の膜厚は、前記透過部の着色樹脂層の膜厚の40%以下であることを特徴とする半透過型液晶表示装置用カラーフィルタ。A color filter for a transflective liquid crystal display device, in which colored pixels are formed on a transparent substrate, wherein the colored pixels include a transmissive portion and a reflective portion adjacent to the transmissive portion. The color filter for a transflective liquid crystal display device, wherein the thickness of the colored resin layer is 40% or less of the thickness of the colored resin layer of the transmission portion.

Description

本発明は、半透過型液晶表示装置用カラーフィルタ及びその製造方法に関する。   The present invention relates to a color filter for a transflective liquid crystal display device and a manufacturing method thereof.

携帯電話やデジタルカメラ等に使用される液晶パネルとしては、室内でも屋外でも鮮明な画像を表示できる半透過型液晶パネルが一般的である。半透過型液晶パネルには、バックライトで表示する透過部と外光を用いて表示する反射部があり、反射部では外光が液晶パネルを2回透過するため、その部分のカラーフィルタには、透過部におけるカラーフィルタよりも薄くて明るい色が要求されている。   As a liquid crystal panel used for a mobile phone or a digital camera, a transflective liquid crystal panel that can display a clear image both indoors and outdoors is common. The transflective liquid crystal panel has a transmissive part for displaying with backlight and a reflective part for displaying with external light. Since the external light is transmitted twice through the liquid crystal panel in the reflective part, Therefore, a lighter and lighter color is required than the color filter in the transmission part.

半透過型液晶パネル用のカラーフィルタとしては、透過部と反射部のRGBをそれぞれ2回づつ作製する6色CFや、反射部にスルーホールをあける構造が一般的であるが、前者は製造コストが上昇するという問題があり、後者は前者に比べ反射部の色が劣化するという問題がある。   As color filters for transflective liquid crystal panels, 6-color CF, in which RGB of the transmissive part and the reflective part are produced twice each, and a structure in which a through hole is formed in the reflective part, are generally used. The latter has a problem that the color of the reflecting portion is deteriorated as compared with the former.

そこで、RGBをそれぞれ1工程で(計3色)形成し、6色CFと同等の性能を有するカラーフィルタを開発することが望まれている。そのための技術として、ハーフトーンマスクを用いて反射部を形成する方式(例えば、特開2004−258161号公報、特開2006−201433号公報参照)や、透明膜を形成し、その透明膜の上にRGB膜を乗り上げて薄いRGB膜を形成する方式(例えば、特許第3465695号公報参照)が、近年研究されている。   Therefore, it is desired to develop a color filter having the same performance as six-color CF by forming RGB in one process (total three colors). As a technique for that purpose, a method of forming a reflection portion using a halftone mask (see, for example, Japanese Patent Application Laid-Open Nos. 2004-258161 and 2006-201433), a transparent film, and an upper surface of the transparent film are formed. In recent years, a method of forming a thin RGB film on the RGB film (see, for example, Japanese Patent No. 3465695) has been studied.

しかし、透明膜の上にRGB膜を乗り上げて薄いRGB膜を形成する方式では、透明膜のサイズや形状により透明膜上のRGB膜の膜厚を減少させるため、レジスト材料を変更しなければならないという問題がある。   However, in the method of forming a thin RGB film by riding an RGB film on the transparent film, the resist material must be changed in order to reduce the film thickness of the RGB film on the transparent film depending on the size and shape of the transparent film. There is a problem.

これに対し、ハートーンマスクを用いて反射部を形成する方式では、露光条件や現像条件を変更して反射部のRGB膜を薄くすることが可能であるが、透過部と反射部のRGB膜の膜厚の差を大きくした場合には、プロセス条件のバラツキにより、膜厚のバラツキが大きくなるという欠点がある。   On the other hand, in the method of forming the reflection part using the Hearton mask, it is possible to change the exposure condition and development condition to make the RGB film of the reflection part thin, but the RGB film of the transmission part and the reflection part. When the difference in film thickness is increased, there is a disadvantage that the film thickness varies due to variations in process conditions.

本発明は、以上のような事情の下になされ、レジスト材料の変更を必要とせず、かつ反射部の着色樹脂層の膜厚のバラツキを低減することの可能な、半透過型液晶表示装置用カラーフィルタ及びその製造方法を提供することを目的とする。   The present invention is for a transflective liquid crystal display device that is made under the circumstances as described above, does not require a change in resist material, and can reduce the variation in the thickness of the colored resin layer in the reflective portion. An object of the present invention is to provide a color filter and a manufacturing method thereof.

本発明の第1の態様によると、透明基板上に着色画素を形成してなる半透過型液晶表示装置用カラーフィルタであって、前記着色画素は、透過部と、前記透過部に隣接する反射部とを有し、前記反射部の前記着色樹脂層の膜厚は、前記透過部の着色樹脂層の膜厚の40%以下であることを特徴とする半透過型液晶表示装置用カラーフィルタが提供される。   According to a first aspect of the present invention, there is provided a color filter for a transflective liquid crystal display device in which colored pixels are formed on a transparent substrate, wherein the colored pixels include a transmissive part and a reflection adjacent to the transmissive part. A color filter for a transflective liquid crystal display device, characterized in that the thickness of the colored resin layer of the reflective portion is 40% or less of the thickness of the colored resin layer of the transmissive portion Provided.

本発明の第2の態様によると、透明基板上に着色画素を形成してなる半透過型液晶表示装置用カラーフィルタであって、前記着色画素は、透過部と、前記透過部に隣接する反射部とを有し、前記透過部は、前記透明基板上に形成された着色樹脂層からなり、前記反射部は、前記透明基板上に形成された透明樹脂層と、前記透過部の着色樹脂層から延びて前記透明樹脂層上に乗り上げるように形成された着色樹脂層とからなり、前記反射部の前記着色樹脂層の膜厚は、前記透過部の着色樹脂層の膜厚の40%以下であることを特徴とする半透過型液晶表示装置用カラーフィルタが提供される。   According to a second aspect of the present invention, there is provided a color filter for a transflective liquid crystal display device in which a colored pixel is formed on a transparent substrate, wherein the colored pixel includes a transmissive part and a reflection adjacent to the transmissive part. The transmission part is made of a colored resin layer formed on the transparent substrate, and the reflection part is a transparent resin layer formed on the transparent substrate, and a colored resin layer of the transmission part A colored resin layer formed so as to extend on the transparent resin layer, and the thickness of the colored resin layer of the reflective portion is 40% or less of the thickness of the colored resin layer of the transmissive portion. There is provided a color filter for a transflective liquid crystal display device.

本発明の第3の態様によると、透明基板上に着色樹脂層からなる着色画素を形成してなる半透過型液晶表示装置用カラーフィルタの製造方法であって、前記透明基板の全面に着色樹脂を塗布し、透過部に厚い着色樹脂層を、反射部に薄い着色樹脂層を形成する工程、前記着色樹脂層を、透明部、半遮光部、及び遮光部を有するフォトマスクパターンを用いて露光する工程、及び前記露光された着色樹脂層を現像し、前記フォトマスクパターンの遮光部に対応する着色樹脂層の部分を除去し、半遮光部に対応する着色樹脂層の部分の膜厚を減少させ、フォトマスクパターンの透明部に対応して前記反射部領域での着色樹脂層、及び前記透過部領域に対応する着色樹脂層を形成する工程を具備することを特徴とする半透過型液晶表示装置用カラーフィルタの製造方法が提供される。   According to a third aspect of the present invention, there is provided a method for producing a color filter for a transflective liquid crystal display device in which a colored pixel comprising a colored resin layer is formed on a transparent substrate, wherein the colored resin is applied to the entire surface of the transparent substrate. A step of forming a thick colored resin layer on the transmissive portion and a thin colored resin layer on the reflective portion, and exposing the colored resin layer using a photomask pattern having a transparent portion, a semi-light-shielding portion, and a light-shielding portion. And developing the exposed colored resin layer, removing the portion of the colored resin layer corresponding to the light-shielding portion of the photomask pattern, and reducing the thickness of the portion of the colored resin layer corresponding to the semi-light-shielding portion And a step of forming a colored resin layer in the reflective portion region corresponding to the transparent portion of the photomask pattern and a colored resin layer corresponding to the transmissive portion region. Equipment color Method for producing a filter is provided.

本発明の第4の態様によると、透明基板上に、着色樹脂層からなる透過部と、前記透過部に隣接して透明樹脂層上に形成された、前記透過部の着色樹脂層より膜厚の薄い着色樹脂層からなる反射部とを有する着色画素を備える半透過型液晶表示装置用カラーフィルタの製造方法において、前記透明基板の反射部形成領域に透明樹脂層を形成する工程、前記透明基板の全面に着色樹脂を塗布し、前記透明基板の透過部形成領域に厚い着色樹脂層を、前記透明樹脂層上に薄い着色樹脂層を形成する工程、前記着色樹脂層を、透明部、半遮光部、及び遮光部を有するフォトマスクパターンを用いて露光する工程、及び前記露光された着色樹脂層を現像し、前記フォトマスクパターンの遮光部に対応する着色樹脂層の部分を除去し、半遮光部に対応する着色樹脂層の部分の膜厚を減少させ、フォトマスクパターンの透明部に対応して前記透過部の着色樹脂層、及び前記半遮光部に対応して前記反射部の着色樹脂層を形成する工程を具備することを特徴とする半透過型液晶表示装置用カラーフィルタの製造方法が提供される。   According to the fourth aspect of the present invention, the transparent film has a transparent portion formed of a colored resin layer, and the transparent resin layer formed on the transparent resin layer adjacent to the transparent portion. Forming a transparent resin layer in a reflective portion forming region of the transparent substrate in a method for producing a color filter for a transflective liquid crystal display device comprising a colored pixel having a reflective portion comprising a thin colored resin layer, the transparent substrate A step of forming a colored resin layer on the entire surface of the transparent substrate, forming a thick colored resin layer on a transparent portion forming region of the transparent substrate, and forming a thin colored resin layer on the transparent resin layer; A step of exposing using a photomask pattern having a portion and a light shielding portion, and developing the exposed colored resin layer, removing a portion of the colored resin layer corresponding to the light shielding portion of the photomask pattern, and semi-light-shielding Corresponding to Reducing the film thickness of the colored resin layer, and forming the colored resin layer of the transmissive portion corresponding to the transparent portion of the photomask pattern and the colored resin layer of the reflective portion corresponding to the semi-light-shielding portion A method for manufacturing a color filter for a transflective liquid crystal display device is provided.

本発明によると、反射部の着色樹脂層が、透過部の着色樹脂層から延びて透明樹脂層上に乗り上げるように形成されるとともに、半遮光膜を含むフォトマスクパターンを用いて露光、現像することにより形成されているため、反射部の着色樹脂層の膜厚の低減量を少なくすることができ、それによって反射部の着色樹脂層の膜厚のバラツキを低減することが可能であり、また透明樹脂層のサイズや形状が変わってもレジスト材料を代えることなく、反射部の着色樹脂層の膜厚を調整することが可能な半透過型液晶表示装置用カラーフィルタの製造方法が提供される。   According to the present invention, the colored resin layer of the reflective portion is formed to extend from the colored resin layer of the transmissive portion and run on the transparent resin layer, and is exposed and developed using a photomask pattern including a semi-light-shielding film. Therefore, it is possible to reduce the amount of reduction in the thickness of the colored resin layer in the reflecting portion, thereby reducing the variation in the thickness of the colored resin layer in the reflecting portion. Provided is a method for producing a color filter for a transflective liquid crystal display device capable of adjusting the thickness of a colored resin layer in a reflective portion without changing the resist material even if the size or shape of the transparent resin layer changes. .

本発明の第1の実施形態に係るカラーフィルタ基板の構成を示す断面図である。It is sectional drawing which shows the structure of the color filter substrate which concerns on the 1st Embodiment of this invention. 本発明の第1の実施形態に係るカラーフィルタ基板の製造プロセスを示す断面図である。It is sectional drawing which shows the manufacturing process of the color filter substrate which concerns on the 1st Embodiment of this invention. 本発明の第1の実施形態に係るカラーフィルタ基板の製造プロセスを示す断面図である。It is sectional drawing which shows the manufacturing process of the color filter substrate which concerns on the 1st Embodiment of this invention. 本発明の第1の実施形態に係るカラーフィルタ基板の製造プロセスを示す断面図である。It is sectional drawing which shows the manufacturing process of the color filter substrate which concerns on the 1st Embodiment of this invention. 本発明の第2の実施形態に係る半透過型液晶表示装置の構成を示す断面図である。It is sectional drawing which shows the structure of the transflective liquid crystal display device which concerns on the 2nd Embodiment of this invention. フォトマスクのハーフトーン膜の透過率特性を示す特性図である。It is a characteristic view which shows the transmittance | permeability characteristic of the halftone film of a photomask.

以下、本発明の実施形態について説明する。   Hereinafter, embodiments of the present invention will be described.

図1は、本発明の一実施形態に係る半透過型液晶表示装置用カラーフィルタの1画素を示す断面図である。図1において、透明基板1上には透明樹脂層2が形成されている。透明基板1上の透明樹脂層2が形成されていない領域には着色樹脂層3が形成されて透過部Aが構成され、この着色樹脂層3から延びて透明樹脂層2上を乗り上げる形で着色樹脂層4が形成されて、透明樹脂層2と着色樹脂層4とにより反射部Bが構成されている。   FIG. 1 is a cross-sectional view showing one pixel of a color filter for a transflective liquid crystal display device according to an embodiment of the present invention. In FIG. 1, a transparent resin layer 2 is formed on a transparent substrate 1. A colored resin layer 3 is formed in a region where the transparent resin layer 2 is not formed on the transparent substrate 1 to form a transmission part A, and the colored portion extends from the colored resin layer 3 and rides on the transparent resin layer 2. The resin layer 4 is formed, and the reflective portion B is configured by the transparent resin layer 2 and the colored resin layer 4.

図1に示すカラーフィルタにおいて、反射部Bの着色樹脂層4の膜厚は、透過部Aの着色樹脂層3の膜厚よりも薄く、透過部Aの着色樹脂層3の膜厚の40%以下、好ましくは5〜40%である。反射部Bの着色樹脂層4の膜厚が、この範囲より厚い場合には、反射部Bにおける反射光を表示光として画面表示する場合に、明度が低くなり、この範囲より薄い場合には、膜厚の制御が困難となる。   In the color filter shown in FIG. 1, the thickness of the colored resin layer 4 in the reflective portion B is thinner than the thickness of the colored resin layer 3 in the transmissive portion A, and is 40% of the thickness of the colored resin layer 3 in the transmissive portion A. Hereinafter, it is preferably 5 to 40%. When the thickness of the colored resin layer 4 of the reflective part B is thicker than this range, the brightness is low when the reflected light from the reflective part B is displayed on the screen as display light. It becomes difficult to control the film thickness.

透過部Aの着色樹脂層3の膜厚は、1.5〜3.0μmであることが好ましく、従って、反射部Bの着色樹脂層4の膜厚は、その5〜40%、即ち、0.07〜1.2μmであることが好ましい。   The thickness of the colored resin layer 3 in the transmissive part A is preferably 1.5 to 3.0 μm. Therefore, the thickness of the colored resin layer 4 in the reflective part B is 5 to 40%, that is, 0 It is preferably 0.07 to 1.2 μm.

なお、透明樹脂層2の厚さは、2〜4μmであることが望ましい。透明樹脂層2の厚さがこの範囲より厚い場合には、反射部Bの着色樹脂層4の膜厚が薄くなって、上記問題が生じ易くなり、この範囲より薄い場合には、反射部Bの着色樹脂層4の膜厚が厚くなって、明度が低下する傾向となる。   The thickness of the transparent resin layer 2 is preferably 2 to 4 μm. When the thickness of the transparent resin layer 2 is larger than this range, the thickness of the colored resin layer 4 of the reflective portion B becomes thin and the above problem is likely to occur. When the transparent resin layer 2 is thinner than this range, the reflective portion B The thickness of the colored resin layer 4 becomes thick and the brightness tends to decrease.

以上のような膜厚の厚い着色樹脂層2及び膜厚の薄い着色樹脂層3からなる着色樹脂層パターンは、それぞれに対応する透明部及び半遮光部を有するフォトマスクパターンを用いて形成される。なお、このフォトマスクパターンの遮光部は金属クロム、半遮光部はITOからなるものとすることができる。   The colored resin layer pattern including the thick colored resin layer 2 and the thin colored resin layer 3 as described above is formed using a photomask pattern having a transparent portion and a semi-light-shielding portion corresponding to each. . The light-shielding portion of this photomask pattern can be made of metal chrome, and the semi-light-shielding portion can be made of ITO.

図1に示す本発明の一実施形態に係る半透過型液晶表示装置用カラーフィルタは、図2A〜図2Cに示すような製造プロセスにより製造することができる。   The color filter for a transflective liquid crystal display device according to an embodiment of the present invention shown in FIG. 1 can be manufactured by a manufacturing process as shown in FIGS. 2A to 2C.

まず、図2Aに示すように、透明基板1上にブラックマトリクス(図示せず)を形成した後、全面に透明樹脂をコートし、露光及び現像して、ブラックマトリクスにより区分された画素領域の反射部形成領域に、透明樹脂層2を形成する。   First, as shown in FIG. 2A, after forming a black matrix (not shown) on the transparent substrate 1, the entire surface is coated with a transparent resin, exposed and developed, and the reflection of the pixel area divided by the black matrix is reflected. The transparent resin layer 2 is formed in the part forming region.

次いで、図2Bに示すように、全面に、例えば赤の着色樹脂をコートし、着色樹脂層5を形成する。この時、着色樹脂層5の透明樹脂層2上の部分の膜厚は、透明基板1上の部分の膜厚の30〜70%に減少する。   Next, as shown in FIG. 2B, for example, a red colored resin is coated on the entire surface to form a colored resin layer 5. At this time, the thickness of the portion of the colored resin layer 5 on the transparent resin layer 2 is reduced to 30 to 70% of the thickness of the portion on the transparent substrate 1.

その後、透明部、半遮光部、及び遮光部を有するフォトマスクパターンを用いて着色樹脂層5を露光し、次いで現像し、フォトマスクパターンの遮光部に対応する着色樹脂層5の部分を除去するとともに、半遮光部に対応する部分の膜厚を減少させる。これにより、図2Cに示すように、フォトマスクパターンの透明部に対応する着色樹脂層3からなる透過部Aと、フォトマスクパターンの半遮光部に対応する着色樹脂層4からなる反射部Bを有する画素が形成される。この場合、着色樹脂層4の膜厚は、着色樹脂層3の膜厚の5〜40%となる。   Thereafter, the colored resin layer 5 is exposed using a photomask pattern having a transparent portion, a semi-light-shielding portion, and a light-shielding portion, and then developed to remove the portion of the colored resin layer 5 corresponding to the light-shielding portion of the photomask pattern. At the same time, the thickness of the portion corresponding to the semi-light-shielding portion is reduced. As a result, as shown in FIG. 2C, a transmissive portion A composed of the colored resin layer 3 corresponding to the transparent portion of the photomask pattern and a reflective portion B composed of the colored resin layer 4 corresponding to the semi-light-shielding portion of the photomask pattern are formed. A pixel is formed. In this case, the thickness of the colored resin layer 4 is 5 to 40% of the thickness of the colored resin layer 3.

このような工程を緑及び青の画素についても繰り返し、赤、緑、及び青の着色画素を含む半透過型液晶表示装置用カラーフィルタが得られる。   Such a process is repeated for green and blue pixels, and a color filter for a transflective liquid crystal display device including red, green, and blue colored pixels is obtained.

図3は、本発明の第2の実施形態に係る半透過型液晶表示装置の一例を模式的に示す構成図である。図3において、カラーフィルタ基板10と、透明基板21の所定位置に電極22が形成されたアレイ基板30とを貼り合わせてセル化し、液晶40を封入し、更にセルの両面に偏光膜50a,50bを配置することにより、本発明の第2の実施形態に係る半透過型液晶表示装置が構成される。   FIG. 3 is a configuration diagram schematically showing an example of a transflective liquid crystal display device according to the second embodiment of the present invention. In FIG. 3, a color filter substrate 10 and an array substrate 30 having electrodes 22 formed at predetermined positions on a transparent substrate 21 are bonded to form a cell, liquid crystal 40 is sealed, and polarizing films 50a and 50b are formed on both surfaces of the cell. The transflective liquid crystal display device according to the second embodiment of the present invention is configured.

なお、カラーフィルタ基板10は、透明基板1上のブラックマトリクス7により区分された領域に、赤色画素11R、緑色画素11G、及び青色画素11Bが形成され、更に透明電極12及びオーバーコート層13を形成してなる。なお、それぞれの着色画素11R,11G,11Bは、図1に示すような構成の透過部Aと反射部Bとから構成されている。   In the color filter substrate 10, red pixels 11R, green pixels 11G, and blue pixels 11B are formed in regions separated by the black matrix 7 on the transparent substrate 1, and further, a transparent electrode 12 and an overcoat layer 13 are formed. Do it. Each of the colored pixels 11R, 11G, and 11B includes a transmissive portion A and a reflective portion B configured as shown in FIG.

以下、本発明の実施例と従来例を示し、本発明の効果を具体的に説明する。   Examples of the present invention and conventional examples will be described below to specifically explain the effects of the present invention.

<アクリル樹脂溶液の作製>
反応容器にシクロヘキサノン800.0部を入れ、容器に窒素ガスを注入しながら加熱して、上記モノマーおよび熱重合開始剤の混合物を滴下して重合反応を行った。
<Preparation of acrylic resin solution>
The reaction vessel was charged with 800.0 parts of cyclohexanone, heated while injecting nitrogen gas into the vessel, and a mixture of the monomer and the thermal polymerization initiator was added dropwise to conduct a polymerization reaction.

スチレン 60.0部
メタクリル酸 60.0部
メチルメタクリレート 65.0部
ブチルメタクリレート 65.0部
熱重合開始削 10.0部
滴下が完了した後、十分に加熱し、熱重合開始剤2.0部をシクロヘキサノン50.0部に溶解した溶液を添加し、さらに反応を続けてアクリル樹脂の溶液を得た。
Styrene 60.0 parts Methacrylic acid 60.0 parts Methyl methacrylate 65.0 parts Butyl methacrylate 65.0 parts Thermal polymerization initiation scrap 10.0 parts After dripping is completed, the mixture is heated sufficiently to 2.0 parts of a thermal polymerization initiator. Was added to a solution of 50.0 parts of cyclohexanone, and the reaction was further continued to obtain an acrylic resin solution.

この樹脂溶液に不揮発分が20.0重量%になるようにシクロヘキサノンを添加して、感光性着色樹脂組成物用のアクリル樹脂溶液を調製した。このアクリル樹脂の重量平均分子量は、約30000であった。   Cyclohexanone was added to the resin solution so that the nonvolatile content was 20.0% by weight to prepare an acrylic resin solution for the photosensitive colored resin composition. The weight average molecular weight of this acrylic resin was about 30000.

以上のように作製したアクリル樹脂溶液を用いて、以下の組成の3色の感光性着色樹脂組成物を作製し、それぞれ室温で3時間攪拌した。   Using the acrylic resin solution prepared as described above, three colored photosensitive colored resin compositions having the following compositions were prepared and stirred at room temperature for 3 hours, respectively.

(感光性赤色樹脂組成物)
アクリル樹脂溶液40g、ジペンタエリスリトールペンタアクリレート10.0g、1−[4−(2−ヒドロキシエトキシ)−フェニル]−2−ヒドロキシ−2−メチル−1−プロパン−オン2.0g、2−メチル−1[4−(メチルチオ)フェニル]−2−モルフオリノプロパン−1−オン1.0g、C.I.Pigment Red 177を7.0g、顔料分散剤2.0g、及び2−メトキシエタノール38.0g
(感光性緑色樹脂組成物)
アクリル樹脂溶液40.0g、ジペンタエリスリトールペンタアクリレート10.0g、1−[4−(2−ヒドロキシエトキシ)−フェニル]−2−ヒドロキシー2−メナル−1−プロパン−オン2.0g、2−メチル−1[4−(メチルチオ)フェニル]−2−モルフォリノプロパン−1−オン1.0g、C.I.Pigment Green36を8.0g、顔料分散剤2.0g、及び2−メトキシエタノール37.0g
(感光性青色樹脂組成物)
アクリル樹脂溶液40.0g、ジペンタエリスリトールペンタアクリレート10.0g、1−[4−(2−ヒドロキシエトキシ)−フェニル]−2−ヒドロキシ−2−メテル−1−プロパン−オン2.0g、2−メチル−1[4−(メチルチオ)フェニル]−2−モルフォリノプロパン−1−オン1.0g、C.I.Pigment Blue 15:6を6.0g、顔料分散剤2.0g、及び2−メトキシエタノール39.0g
実施例
透明基板(320×400×0.7mm)上に黒色の顔料分散感光性樹脂膜を形成し、これをフォトリングラフィープロセスにより加工し、厚さ1.4μmのブラックマトリックスを形成した。その後、上記感光性着色樹脂組成物の顔料分散剤を含まないものをスピンコートで塗布し、80℃で20分間乾燥した。次いで、所定のパターンを介して露光し、現像して、ブラックマトリックスで区画された透明基板上の反射部予定領域に厚さ3.6μmの透明樹脂層を形成した。
(Photosensitive red resin composition)
40 g acrylic resin solution, 10.0 g dipentaerythritol pentaacrylate, 2.0 g 1- [4- (2-hydroxyethoxy) -phenyl] -2-hydroxy-2-methyl-1-propan-one, 2-methyl- 1.0 g of 1 [4- (methylthio) phenyl] -2-morpholinopropan-1-one, C.I. I. 7.0 g of Pigment Red 177, 2.0 g of pigment dispersant, and 38.0 g of 2-methoxyethanol
(Photosensitive green resin composition)
Acrylic resin solution 40.0 g, dipentaerythritol pentaacrylate 10.0 g, 1- [4- (2-hydroxyethoxy) -phenyl] -2-hydroxy-2-menal-1-propan-one 2.0 g, 2-methyl -1 [4- (methylthio) phenyl] -2-morpholinopropan-1-one 1.0 g, C.I. I. Pigment Green 36 8.0 g, Pigment Dispersant 2.0 g, and 2-methoxyethanol 37.0 g
(Photosensitive blue resin composition)
40.0 g acrylic resin solution, 10.0 g dipentaerythritol pentaacrylate, 2.0 g 1- [4- (2-hydroxyethoxy) -phenyl] -2-hydroxy-2-meth-1-propan-one, 2- 1.0 g of methyl-1 [4- (methylthio) phenyl] -2-morpholinopropan-1-one, C.I. I. Pigment Blue 15: 6 (6.0 g), pigment dispersant (2.0 g), and 2-methoxyethanol (39.0 g)
Example A black pigment-dispersed photosensitive resin film was formed on a transparent substrate (320 × 400 × 0.7 mm), and this was processed by a photolinography process to form a black matrix having a thickness of 1.4 μm. Thereafter, the photosensitive coloring resin composition containing no pigment dispersant was applied by spin coating and dried at 80 ° C. for 20 minutes. Next, the film was exposed through a predetermined pattern and developed to form a transparent resin layer having a thickness of 3.6 μm in the planned reflective area on the transparent substrate partitioned by the black matrix.

次に、感光性赤色樹脂組成物(アクリル系レジスト:東洋インキ製造(株)製)を、188rpmの回転速度のスピンコート(時間:10秒、Acc:3秒)で塗布し、減圧乾燥(到達圧:1torr)し、50℃で30秒間プリベークした。   Next, a photosensitive red resin composition (acrylic resist: manufactured by Toyo Ink Manufacturing Co., Ltd.) was applied by spin coating (time: 10 seconds, Acc: 3 seconds) at a rotation speed of 188 rpm, and dried under reduced pressure (arrival) Pressure: 1 torr) and prebaked at 50 ° C. for 30 seconds.

そして、透明部、半遮光部、及び遮光部を有し、図4に示すような透過率特性を有するハーフトーン膜を半遮光部とするフォトマスクパターンを介して露光した。露光は、露光ギャップを100μmとし、露光機に0.5mmの厚さの青板を挿入して短波長輝線をカットして行なった。次いで、現像時間50秒で現像して、ブラックマトリックスで区画された所定の領域上に、赤色画素を形成した。   And it exposed through the photomask pattern which has a transparent part, a semi-light-shielding part, and a light-shielding part, and uses the halftone film which has the transmittance | permeability characteristic as shown in FIG. 4 as a semi-light-shielding part. The exposure was performed by setting the exposure gap to 100 μm, inserting a blue plate having a thickness of 0.5 mm into the exposure machine, and cutting short wavelength bright lines. Next, development was performed with a development time of 50 seconds, and red pixels were formed on a predetermined area partitioned by the black matrix.

即ち、フォトマスクパターンの遮光部に対応する感光性赤色樹脂組成物の部分を除去し、半遮光部に対応する部分の膜厚を減少させた。これにより、図1に示すように、フォトマスクパターンの透明部に対応する(赤色)着色樹脂層3からなる透過部Aと、フォトマスクパターンの半遮光部に対応する(赤色)着色樹脂層4からなる反射部Bを有する赤色画素が形成された。   That is, the part of the photosensitive red resin composition corresponding to the light shielding part of the photomask pattern was removed, and the film thickness of the part corresponding to the semi-light shielding part was reduced. As a result, as shown in FIG. 1, the transmissive portion A made of the (red) colored resin layer 3 corresponding to the transparent portion of the photomask pattern and the (red) colored resin layer 4 corresponding to the semi-light-shielding portion of the photomask pattern. A red pixel having a reflection part B made of was formed.

以上のようにして、透過部の着色樹脂層からの透明樹脂層上への乗り上げと、半遮光膜を含むフォトマスクパターンを用いることにより形成された反射部と透過部とを有する赤色画素を形成した後、感光性着色樹脂組成物を替えて、塗布、露光、現像を繰り返すことで、ブラックマトリックスで区画された透明基板上に緑色画素及び青色画素を形成し、半透過型液晶表示装置用のカラーフィルタを得た。   As described above, a red pixel having a reflective part and a transmissive part formed by using a photomask pattern including a semi-light-shielding film, and running on the transparent resin layer from the colored resin layer of the transmissive part is formed. After that, by changing the photosensitive colored resin composition and repeating coating, exposure, and development, green pixels and blue pixels are formed on a transparent substrate partitioned by a black matrix, and for a transflective liquid crystal display device. A color filter was obtained.

本発明者らは、以上の実施例において、露光量、照度、膜厚比を変えて赤色画素の形成を行う、実験No.1〜8を行なった。得られた赤色画素の色度を下記表1に示す。

Figure 2008050638
In the above embodiment, the present inventors changed the exposure amount, the illuminance, and the film thickness ratio to form red pixels. 1-8 were performed. The chromaticity of the obtained red pixel is shown in Table 1 below.
Figure 2008050638

上記表1より、膜厚比が40%を超える実験No.8では、Y値が低く、望ましい色度は得られないことがわかる。   From Table 1 above, Experiment No. with a film thickness ratio exceeding 40%. 8 indicates that the Y value is low and the desired chromaticity cannot be obtained.

次に、透明樹脂層を形成することなく、透明部、半遮光部、及び遮光部を有するフォトマスクを用いて、透過部及び反射部を有する赤色画素を形成する実験No.9を行なった。感光性赤色樹脂組成物としては、上記とは異なるアクリル系レジスト(東洋インキ製造(株)製)を用いた。   Next, an experiment No. 1 in which a red pixel having a transmissive part and a reflective part is formed using a photomask having a transparent part, a semi-light-shielding part, and a light-shielding part without forming a transparent resin layer. 9 was performed. As the photosensitive red resin composition, an acrylic resist (made by Toyo Ink Manufacturing Co., Ltd.) different from the above was used.

露光条件、透過部A及び反射部Bの膜厚、膜厚比、色度を下記表2に示す。

Figure 2008050638
Table 2 below shows the exposure conditions, the film thicknesses of the transmission part A and the reflection part B, the film thickness ratio, and the chromaticity.
Figure 2008050638

上記表2より、この実験No.9では29.0%の膜厚比であったが、透明樹脂層への乗り上げを用いない場合には、この程度の膜厚比が限界であった。   From Table 2 above, this experiment No. The film thickness ratio of 9 was 29.0%, but this film thickness ratio was the limit in the case where no climbing on the transparent resin layer was used.

また、反射部を透過部の着色樹脂層から延びて透明樹脂層上に乗り上げるように形成することのみにより膜厚を減少させ、半遮光膜を含まないフォトマスクパターンを用いて露光、現像することにより、透過部及び反射部を有する赤色画素を形成する実験No.10〜13を行なった。感光性赤色樹脂組成物としては、上記とは異なるアクリル系レジスト(東洋インキ製造(株)製)を用いた。   In addition, the film thickness is reduced only by forming the reflective part so as to extend from the colored resin layer of the transmissive part and run on the transparent resin layer, and exposure and development are performed using a photomask pattern that does not include a semi-light-shielding film. In accordance with Experiment No. 1 for forming a red pixel having a transmission part and a reflection part. 10-13 were performed. As the photosensitive red resin composition, an acrylic resist (made by Toyo Ink Manufacturing Co., Ltd.) different from the above was used.

露光条件、透過部A及び反射部Bの膜厚、膜厚比、色度を下記表3に示す。

Figure 2008050638
Table 3 below shows exposure conditions, film thicknesses, film thickness ratios, and chromaticities of the transmission part A and the reflection part B.
Figure 2008050638

上記表3より、透明樹脂層上への乗り上げのみにより反射部の膜厚を減少させた場合には、Y値が低く、望ましい色度は得られないことがわかる。また、膜厚比は、35%程度が限界であった。   From Table 3 above, it can be seen that when the film thickness of the reflective portion is reduced only by running on the transparent resin layer, the Y value is low and the desired chromaticity cannot be obtained. The film thickness ratio was limited to about 35%.

以上の半透過型液晶表示装置用のカラーフィルタの製造プロセスによると、反射部の着色樹脂層が、透過部の着色樹脂層から延びて透明樹脂層上に乗り上げるように形成するとともに、半遮光膜を含むフォトマスクパターンを用いて露光、現像することにより形成しているため、反射部の着色樹脂層の膜厚の低減量を少なくすることができ、それによって反射部の着色樹脂層の膜厚のバラツキを低減することが可能となった。また透明樹脂層のサイズや形状が変わってもレジスト材料を代えることなく、反射部の着色樹脂層の膜厚を調整することが可能であった。   According to the above process for manufacturing a color filter for a transflective liquid crystal display device, the colored resin layer of the reflective portion is formed so as to extend from the colored resin layer of the transmissive portion and run on the transparent resin layer. Therefore, the amount of reduction in the thickness of the colored resin layer in the reflective portion can be reduced, thereby reducing the thickness of the colored resin layer in the reflective portion. It became possible to reduce the variation of the. In addition, even if the size and shape of the transparent resin layer are changed, it is possible to adjust the thickness of the colored resin layer in the reflective portion without changing the resist material.

Claims (5)

透明基板上に着色画素を形成してなる半透過型液晶表示装置用カラーフィルタであって、前記着色画素は、透過部と、前記透過部に隣接する反射部とを有し、
前記反射部の前記着色樹脂層の膜厚は、前記透過部の着色樹脂層の膜厚の40%以下であることを特徴とする半透過型液晶表示装置用カラーフィルタ。
A color filter for a transflective liquid crystal display device in which colored pixels are formed on a transparent substrate, the colored pixels having a transmissive part and a reflective part adjacent to the transmissive part,
The color filter for a transflective liquid crystal display device, wherein the thickness of the colored resin layer in the reflective portion is 40% or less of the thickness of the colored resin layer in the transmissive portion.
透明基板上に着色画素を形成してなる半透過型液晶表示装置用カラーフィルタであって、前記着色画素は、透過部と、前記透過部に隣接する反射部とを有し、
前記透過部は、前記透明基板上に形成された着色樹脂層からなり、前記反射部は、前記透明基板上に形成された透明樹脂層と、前記透過部の着色樹脂層から延びて前記透明樹脂層上に乗り上げるように形成された着色樹脂層とからなり、
前記反射部の前記着色樹脂層の膜厚は、前記透過部の着色樹脂層の膜厚の40%以下であることを特徴とする半透過型液晶表示装置用カラーフィルタ。
A color filter for a transflective liquid crystal display device in which colored pixels are formed on a transparent substrate, the colored pixels having a transmissive part and a reflective part adjacent to the transmissive part,
The transmissive part includes a colored resin layer formed on the transparent substrate, and the reflective part extends from the transparent resin layer formed on the transparent substrate and the colored resin layer of the transmissive part. It consists of a colored resin layer formed so as to run on the layer,
The color filter for a transflective liquid crystal display device, wherein the thickness of the colored resin layer in the reflective portion is 40% or less of the thickness of the colored resin layer in the transmissive portion.
前記透過部の着色樹脂層の膜厚は、1.5〜3.0μmであることを特徴とする請求項1又は2に記載の半透過型液晶表示装置用カラーフィルタ。   3. The color filter for a transflective liquid crystal display device according to claim 1, wherein a thickness of the colored resin layer in the transmissive portion is 1.5 to 3.0 μm. 透明基板上に着色樹脂層からなる着色画素を形成してなる半透過型液晶表示装置用カラーフィルタの製造方法であって、
前記透明基板の全面に着色樹脂を塗布し、透過部に厚い着色樹脂層を、反射部に薄い着色樹脂層を形成する工程、
前記着色樹脂層を、透明部、半遮光部、及び遮光部を有するフォトマスクパターンを用いて露光する工程、及び
前記露光された着色樹脂層を現像し、前記フォトマスクパターンの遮光部に対応する着色樹脂層の部分を除去し、半遮光部に対応する着色樹脂層の部分の膜厚を減少させ、フォトマスクパターンの透明部に対応して前記反射部領域での着色樹脂層、及び前記透過部領域に対応する着色樹脂層を形成する工程
を具備することを特徴とする半透過型液晶表示装置用カラーフィルタの製造方法。
A method for producing a color filter for a transflective liquid crystal display device, wherein a colored pixel comprising a colored resin layer is formed on a transparent substrate,
Applying a colored resin to the entire surface of the transparent substrate, forming a thick colored resin layer on the transmission portion, and forming a thin colored resin layer on the reflection portion;
A step of exposing the colored resin layer using a photomask pattern having a transparent portion, a semi-light-shielding portion, and a light-shielding portion; and developing the exposed colored resin layer to correspond to the light-shielding portion of the photomask pattern The colored resin layer is removed, the thickness of the colored resin layer corresponding to the semi-light-shielding portion is reduced, the colored resin layer in the reflective region corresponding to the transparent portion of the photomask pattern, and the transmission Forming a colored resin layer corresponding to the partial region. A method for producing a color filter for a transflective liquid crystal display device.
透明基板上に、着色樹脂層からなる透過部と、前記透過部に隣接して透明樹脂層上に形成された、前記透過部の着色樹脂層より膜厚の薄い着色樹脂層からなる反射部とを有する着色画素を備える半透過型液晶表示装置用カラーフィルタの製造方法において、
前記透明基板の反射部形成領域に透明樹脂層を形成する工程、
前記透明基板の全面に着色樹脂を塗布し、前記透明基板の透過部形成領域に厚い着色樹脂層を、前記透明樹脂層上に薄い着色樹脂層を形成する工程、
前記着色樹脂層を、透明部、半遮光部、及び遮光部を有するフォトマスクパターンを用いて露光する工程、及び
前記露光された着色樹脂層を現像し、前記フォトマスクパターンの遮光部に対応する着色樹脂層の部分を除去し、半遮光部に対応する着色樹脂層の部分の膜厚を減少させ、フォトマスクパターンの透明部に対応して前記透過部の着色樹脂層、及び前記半遮光部に対応して前記反射部の着色樹脂層を形成する工程
を具備することを特徴とする半透過型液晶表示装置用カラーフィルタの製造方法。
A transparent portion formed of a colored resin layer on the transparent substrate, and a reflective portion formed of a colored resin layer having a thickness smaller than that of the transparent resin layer formed on the transparent resin layer adjacent to the transparent portion; In a method for producing a color filter for a transflective liquid crystal display device comprising a colored pixel having
Forming a transparent resin layer in the reflective portion forming region of the transparent substrate;
Applying a colored resin to the entire surface of the transparent substrate, forming a thick colored resin layer on a transparent portion forming region of the transparent substrate, and forming a thin colored resin layer on the transparent resin layer;
A step of exposing the colored resin layer using a photomask pattern having a transparent portion, a semi-light-shielding portion, and a light-shielding portion; and developing the exposed colored resin layer to correspond to the light-shielding portion of the photomask pattern The colored resin layer portion is removed, the thickness of the colored resin layer portion corresponding to the semi-light-shielding portion is reduced, the colored resin layer of the transmissive portion corresponding to the transparent portion of the photomask pattern, and the semi-light-shielding portion Forming a colored resin layer of the reflective portion corresponding to the above. A method for producing a color filter for a transflective liquid crystal display device.
JP2008540948A 2006-10-16 2007-10-16 Color filter for transflective liquid crystal display device and manufacturing method thereof Pending JPWO2008050638A1 (en)

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JP2004045757A (en) * 2002-07-11 2004-02-12 Seiko Epson Corp Manufacturing method for color filter, electrooptical device and electronic appliance
JP2004233399A (en) * 2003-01-28 2004-08-19 Toppan Printing Co Ltd Color filter and translucent liquid crystal display device using the same

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004045757A (en) * 2002-07-11 2004-02-12 Seiko Epson Corp Manufacturing method for color filter, electrooptical device and electronic appliance
JP2004233399A (en) * 2003-01-28 2004-08-19 Toppan Printing Co Ltd Color filter and translucent liquid crystal display device using the same

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