JPWO2007007580A1 - 除振装置及び除振方法 - Google Patents

除振装置及び除振方法 Download PDF

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Publication number
JPWO2007007580A1
JPWO2007007580A1 JP2006541533A JP2006541533A JPWO2007007580A1 JP WO2007007580 A1 JPWO2007007580 A1 JP WO2007007580A1 JP 2006541533 A JP2006541533 A JP 2006541533A JP 2006541533 A JP2006541533 A JP 2006541533A JP WO2007007580 A1 JPWO2007007580 A1 JP WO2007007580A1
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JP
Japan
Prior art keywords
support mechanism
vibration isolation
displacement
vibration
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006541533A
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English (en)
Japanese (ja)
Inventor
毅 水野
毅 水野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saitama University NUC
Original Assignee
Saitama University NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saitama University NUC filed Critical Saitama University NUC
Publication of JPWO2007007580A1 publication Critical patent/JPWO2007007580A1/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F7/00—Vibration-dampers; Shock-absorbers
    • F16F7/10—Vibration-dampers; Shock-absorbers using inertia effect
    • F16F7/1005—Vibration-dampers; Shock-absorbers using inertia effect characterised by active control of the mass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
JP2006541533A 2005-07-13 2006-07-03 除振装置及び除振方法 Pending JPWO2007007580A1 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005204076 2005-07-13
JP2005204076 2005-07-13
PCT/JP2006/313243 WO2007007580A1 (fr) 2005-07-13 2006-07-03 Dispositif et procédé d’isolation contre les vibrations

Publications (1)

Publication Number Publication Date
JPWO2007007580A1 true JPWO2007007580A1 (ja) 2009-01-29

Family

ID=37636976

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006541533A Pending JPWO2007007580A1 (ja) 2005-07-13 2006-07-03 除振装置及び除振方法

Country Status (2)

Country Link
JP (1) JPWO2007007580A1 (fr)
WO (1) WO2007007580A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5912338B2 (ja) * 2011-08-26 2016-04-27 国立大学法人埼玉大学 力測定装置
WO2019111335A1 (fr) * 2017-12-05 2019-06-13 株式会社 東芝 Dispositif de commande de vibration

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000120766A (ja) * 1998-10-13 2000-04-25 Canon Inc ハイブリッド式能動振動絶縁装置
JP2000136845A (ja) * 1998-10-30 2000-05-16 Canon Inc 能動振動絶縁装置およびそれを用いた露光装置
JP2005106272A (ja) * 2003-09-11 2005-04-21 Japan Science & Technology Agency 除振方法およびその装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000120766A (ja) * 1998-10-13 2000-04-25 Canon Inc ハイブリッド式能動振動絶縁装置
JP2000136845A (ja) * 1998-10-30 2000-05-16 Canon Inc 能動振動絶縁装置およびそれを用いた露光装置
JP2005106272A (ja) * 2003-09-11 2005-04-21 Japan Science & Technology Agency 除振方法およびその装置

Also Published As

Publication number Publication date
WO2007007580A1 (fr) 2007-01-18

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