JPWO2006129534A1 - XY guidance device - Google Patents

Abstract

When the second slide member (13) is coupled to the first slide member (11), the first slide member (11) and the second slide member (13) are coupled even if the fixing bolt (71) is strongly tightened. The amount of deformation of the rubber shim (8) between the bolt (71) and the bolt (71) is released even when a load acts between the slide members (11, 13). The first slide member (11) movable in the X direction along the first track rail (10) and the Y along the second track rail (12). A second slide member (13) movable in the direction, an elastic sheet (8) interposed between the first and second slide members (11, 13), and the elastic sheet (8) ) Is crushed so that the second slide member (13) A fixing means (71) coupled to the first slide member (11), and a spring of the elastic sheet (8) between the fixing means (71) and the second slide member (13). A gap absorbing member (9) having a spring constant smaller than the constant was interposed.

Description

  The present invention relates to an XY guide device capable of freely moving an object to be mounted in a X direction and a Y direction orthogonal to each other on a fixed base, and more specifically, a track rail and a slide member movable along the track rail. The present invention relates to an XY guide device constructed by stacking two such linear guide devices.

  Conventionally, this type of XY guide device has been widely used as a moving mechanism for a work table of a machine tool. However, in recent years, it has also been used as a seismic isolation device for reducing the shaking of a mounted object. This seismic isolation device is used as a vibration countermeasure when transporting precision equipment, art showcases, etc., or as a countermeasure against earthquakes in real estate such as buildings and houses. It is used for the purpose of insulating from the vibration of the ground and reducing the shaking of the mounted object caused by the vibration (JP-A-8-240033, etc.).

  In this seismic isolation device, a rolling surface of a rolling element such as a ball is formed along the longitudinal direction, and the first and second track rails are fixed so as to be orthogonal to the base and the structure. And a first slide member that is assembled to the first track rail via a number of rolling elements and that can freely linearly reciprocate along the first track rail, and is fixed to the first slide member. And a second slide member that is assembled to the second track rail via a number of rolling elements and is capable of linear reciprocating movement along the second track rail. Then, each track rail and the slide member assembled to them perform a relative linear reciprocating motion. That is, this seismic isolation device uses two linear guide devices in which track rails and slide members are combined, and these linear guide devices are disposed along the X direction and the Y direction, respectively, and are coupled to each other, Can be freely guided in the X and Y directions on the base.

  FIG. 7 shows an example in which a building is constructed on the base 100 via the above-described base isolation device G, and the base isolation devices G are arranged at four locations between the structure 101 and the base 100. The first track rail of each seismic isolation device G is fixed to the base 100 along the X direction, while the second track rail is fixed to the structure 101 along the Y direction perpendicular to the first track rail. . Since the coefficient of dynamic friction between the track rail and the slide member is extremely small, when the base 100 swings in the horizontal direction due to an earthquake or the like, the slide member of each seismic isolation device moves along the track rail so as to absorb the swing. Move along the direction or Y direction. That is, the structure 101 provided on the seismic isolation device G is insulated from the shaking of the base 100, and the kite is in a state of floating in the air. Thus, even if vibration energy due to an earthquake or the like propagates to the structure 101, the structure 101 can swing with its own vibration period regardless of the vibration period of the base 100. By setting the length sufficiently long, resonance between the structure 101 and the substrate 100 can be avoided, and the vibration of the structure 101 can be reduced.

  In this seismic isolation device, the second slide member is fixed to the first slide member. For example, in the case of a seismic isolation device as an earthquake countermeasure for a building, the fixed surface of the first track rail in the base 100, or The smoothness of the fixed surface of the second track rail in the structure 101 must be low, and the first track rail and the second track rail are fixed to the base 100 or the structure 101 in a slightly wavy state. It is expected that. For this reason, when the first slide member that moves along the first track rail and the second slide member that moves along the second track rail are firmly coupled without play, the lightness of each slide member with respect to each track rail is improved. Movement is hindered, and the initial purpose of absorbing and reducing the shaking of the structure 101 cannot be sufficiently achieved.

For this reason, when two linear guide devices composed of track rails and slide members are stacked to form a seismic isolation device, a rubber shim is interposed between the first slide member and the second slide member coupled to each other. With the rubber shim interposed therebetween, a fixing bolt is inserted into the first slide member and the second slide member, and the fixing bolt is fastened so that the rubber shim is slightly crushed. And the second slide member. As a result, even if the smoothness of the mounting surface of the first track rail or the second track rail is somewhat poor, the rubber shim is elastically deformed, so Therefore, it is possible to easily move each slide member with respect to each track rail.
JP-A-8-240033

  However, when fixing the second slide member to the first slide member, if the fixing bolt is tightened with an excessively large fastening force, a rubber shim interposed between the first slide member and the second slide member is fixed. There is a problem that the rubber shim is largely crushed only by the fastening force of the bolt, and such a rubber shim cannot sufficiently absorb the change in the posture of the second slide member with respect to the first slide member.

  On the other hand, when the fastening force of the fixing bolt is set to be weak, the elastic deformation amount of the rubber shim can be increased, so that the posture change of the second slide member relative to the first slide member can be sufficiently absorbed. It becomes. However, after the seismic isolation device is assembled, a building that will be a structure is constructed on the seismic isolation device, and when a large load of the structure gradually acts on the seismic isolation device, this load causes The rubber shim interposed between the first slide member and the second slide member is crushed and the head of the fixing bolt is lifted from the second slide member, so that the fastening force of the fixing bolt is released. There was a bug. This is considered to induce problems such as a decrease in the shear strength of the fixing bolt, further loosening of the fixing bolt due to vertical vibration, and occurrence of twisting of the second slide member relative to the first slide member.

  The present invention has been made in view of such problems, and the object of the present invention is to firmly tighten the fixing bolt to a certain degree when the second slide member is connected to the first slide member with the fixing bolt. However, the amount of deformation of the rubber shim between the first slide member and the second slide member can be kept small, so that even if the load of the structure acts on the seismic isolation device, the bolts can be fastened. An object of the present invention is to provide an XY guide device capable of preventing the force from being released.

  In the XY guide device of the present invention, the first track rail in which the rolling surface of the rolling element is formed along the longitudinal direction, the rolling surface of the rolling element is formed along the longitudinal direction, and the first A second track rail disposed orthogonal to the track rail, and a second track rail that is assembled to the first track rail via a number of rolling elements and that can freely linearly reciprocate along the first track rail. 1 slide member, fixed to the first slide member, and assembled to the second track rail via a number of rolling elements, and can freely reciprocate linearly along the second track rail. And a second slide member.

  Thus, for example, when the first track rail is fixed to the base along the X direction, the first slide member freely moves in the X direction along the first track rail, and the first slide The second slide member fixed to the member also moves in the X direction. On the other hand, the second track rail orthogonal to the first track rail can be freely moved in the Y direction by the second slide member. When the structure is fixed to the second track rail, the structure is It can move freely in the X and Y directions with respect to the base.

  An elastic sheet is interposed between the first slide member and the second slide member, while the second slide member is coupled to the first slide member by a fixing means. Yes. When the first slide member and the second slide member are coupled by the fixing means, the elastic sheet is slightly crushed between the first slide member and the second slide member, and the second slide The member is coupled to the first slide member in a state of being biased in a direction away from the first slide member. Thereby, even if the relative posture changes between the first slide member and the second slide member, the elastic body sheet absorbs it by elastic deformation. The smoothness of the reciprocating motion of the first slide member and the reciprocating motion of the second slide member relative to the second track rail is not impaired.

  But when the load of the direction which presses this toward a 1st slide member acts with respect to a 2nd slide member, the said elastic body sheet will be further between a 1st slide member and a 2nd slide member. Since it is crushed, the fixing means is lifted from the second slide member, and there is a possibility that play occurs in the connection between the first slide member and the second slide member.

  Therefore, in the XY guide device of the present invention, a gap absorbing member is provided between the fixing means and the second slide member, and the spring constant of the gap absorbing member is set smaller than the spring constant of the elastic sheet. ing. Thus, when the gap absorbing member having a spring constant smaller than the spring constant of the elastic sheet is provided between the fixing means and the second slide member, the second slide member is moved to the first slide member by the fixing means. Even if it is strongly coupled to the elastic member, the gap absorbing member is crushed before the elastic sheet between the first slide member and the second slide member is crushed. The 2nd slide member can be firmly fixed to the 1st slide member in the state where the crushing margin of the body sheet was left enough. That is, since the elastic sheet can sufficiently absorb the change in the relative posture between the first slide member and the second slide member, the first slide member with respect to the first track rail The smoothness of the reciprocating motion and the reciprocating motion of the second slide member relative to the second track rail is not impaired.

  Further, even if the load of a structure such as a building acts on the second slide member and the elastic sheet is further crushed, the gap absorbing member is extended by the amount of the crushed elastic sheet. Therefore, it is possible to prevent the fixing means from floating from the second slide member and to prevent play from occurring in the coupling between the first slide member and the second slide member.

  The gap absorbing member may be any member such as a rubber sheet, a spring coil, or a spring washer, as long as it has a smaller spring constant than the elastic sheet. However, in order to prevent the fixing means from floating from the second slide member when a large load acts on the second slide member and the elastic body sheet is crushed, the elastic body It is necessary that the gap absorbing member be stretched by the amount of the collapsed sheet. From this viewpoint, the gap absorbing member preferably has a large amount of deformation with respect to the load.

It is a perspective view which shows embodiment of the XY guide apparatus of this invention. It is a perspective view which shows the combination of the track rail and slide member which are used for XY guide apparatus shown in FIG. It is a front view which shows a mode that the 1st slide member and the 2nd slide member were couple | bonded through the bracket. It is a schematic diagram which shows the positional relationship of an elastic-body sheet | seat and the clearance gap absorption member in the state in which the fixing bolt is not fastened. It is a schematic diagram which shows the mode of a deformation | transformation of the elastic body sheet and the clearance gap absorption member in the state which fastened the fixing volt | bolt. It is a schematic diagram which shows the mode of a deformation | transformation of the elastic body sheet | seat and clearance gap absorption member when the load F acts with respect to the 2nd slide member. It is the schematic which shows the example which used the disk spring washer as a clearance gap absorption member, and shows the state in which the fixing bolt is not fastened. An example using a disc spring washer as a gap absorbing member is shown, and is a schematic diagram showing a state of deformation of an elastic sheet and a gap absorbing member in a state where a fixing bolt is fastened. It is a schematic diagram showing an example in which a posture following member is interposed between a gap absorbing member and a second slide member, and showing a state in which a fixing bolt is not fastened. It is a schematic diagram which shows the state which interposed the attitude | position follower member between the clearance gap absorption member and the 2nd slide member, and fastened the fixing bolt. An example in which a structure is constructed on a base using an XY guide device as a seismic isolation device is shown.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Base | substrate, 2 ... Structure, 8 ... Elastic body sheet, 9 ... Gap absorption member, 10 ... 1st track rail, 11 ... 1st slide member, 12 ... 2nd track rail, 13 ... 2nd Slide member, 71 ... fixing bolt, 90 ... rubber sheet

  Hereinafter, the XY guide device of the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 shows an example of an embodiment of an XY guide device to which the present invention is applied. The XY guide device G is provided, for example, between a base 1 that is a foundation of a building and a structure 2 such as a building, and supports this on the base 1 against the load of the structure 2. Used for.

  The XY guide device G includes a first track rail 10 fixed to the base 1, a first slide member 11 assembled to the first track rail 10, and a right angle with the first track rail 10. A second track rail 12 fixed to the structure 2 such as a building, and a second slide member 13 assembled to the second track rail 12 and fixed to the first slide member 11. It is configured. Each track rail is formed with a plurality of ball rolling grooves along the longitudinal direction, and each of the slide members 11 and 13 has a large number of balls rolling in the ball rolling grooves. The slide members 11 and 13 can freely move on the track rails 10 and 12 with a very small dynamic frictional resistance by rolling the ball. The first slide member 11 and the second slide member 13 are exactly the same member, and are fixed back to back through a bracket. Since the first track rail 10 and the second track rail 12 are provided orthogonal to each other, the first slide member 11 moves along the first track rail 10 and the second slide member 13 moves. When moving along the second track rail 12, the structure 2 moves two-dimensionally on the base 1.

  FIG. 2 is a perspective view showing an example of a combination of a track rail and a slide member that can be used in the XY guide device of the present invention, that is, an example of a linear guide device. The linear guide device 3 is engaged with the track rail 4 through the track rail 4 in which the rolling surface 40 of the ball 30 is formed along the longitudinal direction, and a large number of balls 30 as rolling elements, and inside. The slide member 5 having an infinite circulation path of the ball 30 and the seal member 6 which is attached to both front and rear end surfaces in the moving direction of the slide portion 5 and is in close contact with the upper surface and both side surfaces of the track rail 4. As the ball 30 circulates, the slide member 5 reciprocates on the track rail 4.

  As shown in this figure, the track rail 4 is formed in a substantially rectangular cross section, and mounting holes 41 for inserting fixing bolts are formed through the longitudinal direction at appropriate intervals. In addition, two ball rolling grooves 40 are formed on the upper surface of the track rail 4 so as to sandwich the mounting hole 41, and one ball rolling groove 40 is formed on each side surface. The four ball rolling grooves 40 are formed in a deep groove shape with a curvature slightly larger than the curvature of the spherical surface of the ball 30.

  On the other hand, the slide member 5 is composed of a block main body 51 having a mounting surface 50 for the bracket and a pair of end plates 52 and 52 fixed to both front and rear end faces of the block main body 51. 4 is provided with a recess in which the upper part of 4 is loosely fitted on the lower surface side, and is formed in a substantially saddle shape in cross section. The block body 51 is formed with four ball rolling grooves that face the ball rolling grooves 40 on the track rail 4 side. The ball 3 rolls while applying a load between the ball rolling groove of the block body and the ball rolling groove 40 of the track rail, whereby the slide member 5 moves on the track rail 4.

  The block main body 51 is formed with ball return holes corresponding to the respective ball rolling grooves. These ball return holes are substantially U-shaped direction change paths (not shown) formed in the end plate 52. And the ball rolling groove. That is, the direction changing path scoops up the ball 30 that has finished rolling in the ball rolling groove of the block body 51 and sends it to the ball return hole, while sending the ball 30 from the ball return hole to the ball rolling groove. It is configured. Accordingly, the end plate 52 is fixed to the block main body 51 by using the mounting bolts 53 so that an infinite circulation path for the balls 30 is formed in the slide member 5.

  Further, the end plate 52 is provided with an oil supply port for injecting lubricating oil into the endless circulation path, and a supply nipple 54 is attached to the oil supply port via the end seal 6. It has become.

  On the other hand, FIG. 3 shows a combined state of the first slide member 11 and the second slide member 13 in the XY guide device G. A rectangular metal bracket 7 is interposed between the first slide member 11 and the second slide member 13, and the fixing bolt 70 and the second slide member 13 penetrating the first slide member 11 are provided. The fixing bolts 71 that pass through are fastened to the bracket 7 respectively. Thereby, the 1st slide member 11 and the 2nd slide member 13 are mutually joined. The second slide member 13 can be directly fastened to the first slide member 11 using the fixing bolt 71 without using the metal bracket 7.

  However, when both the first slide member 11 and the second slide member 13 are directly fixed to the bracket 7 which is a metal lump, the first slide member 11 traveling on the first track rail 10 is the first slide member 11. While trying to change the posture following the track rail 10, it is also restrained by the posture of the second slide member 13, so the mounting surface of the first track rail 10 on the base 1 or the second surface of the structure 2. When the smoothness of the mounting surface of the track rail 12 is low, there is a disadvantage that smooth running of the slide members 11 and 13 with respect to the track rails 10 and 12 is hindered. For this reason, an elastic sheet 8 is interposed between the bracket 7 and the second slide member 13, and the first slide member 11 and the second slide member 13 are elastically deformed by the elastic sheet 8. It is configured to absorb the relative posture changes between.

  The elastic sheet 8 is made of rubber, and is sandwiched between two steel plates 80 and 80 in order to prevent a local load from acting on the elastic sheet 8 from the second slide member 13. In this state, it is located between the bracket 7 and the second slide member 13. A fixing bolt 71 for fixing the second slide member 13 passes through the steel plate 80 and the elastic sheet 8 and is fastened to the bracket 7.

  On the other hand, if the fixing bolt 71 is tightened too much with the elastic sheet 8 interposed between the bracket 7 and the second slide member 13, the elastic sheet 8 is attached to the bracket 7 and the second slide by the tightening force. The original purpose of interposing the elastic sheet 8, that is, the relative posture between the first slide member 11 and the second slide member 13 is crushed between the two slide members 13. There is a concern that the function of absorbing changes will be impaired. On the other hand, when the fastening of the fixing bolt 71 is loosened, the amount by which the elastic sheet is crushed due to the fastening force of the fixing bolt is reduced, but the weight of the structure 2 relative to the second slide member 13 is reduced. When this occurs, the elastic sheet 8 is crushed by its own weight, so that there is a disadvantage that the head of the fixing bolt floats from the second slide member. When the head of the fixing bolt 71 is lifted from the second slide member, the fastening force of the fixing bolt 71 is completely released, the shear strength of the fixing bolt is reduced, and the fixing bolt is further loosened due to vertical vibration. This causes a problem such as occurrence of twisting of the second slide member with respect to the first slide member.

  For this reason, the gap absorbing member 9 made of an elastic body is interposed between the second slide member 13 and the head of the fixing bolt 71. In the example shown in FIG. 3, the gap absorbing member 9 is obtained by sandwiching a rubber sheet 90 between two steel plates 91, 91. When the fixing bolt 71 is fastened, the steel plates 91, 91 crush the rubber sheet 90. To be elastically deformed.

  4a to 4c are schematic views simply showing the deformation of the elastic sheet 8 and the gap absorbing member 9 when the fixing bolt 71 is fastened. In these drawings, the elastic sheet 8 and the gap absorbing member 9 are depicted as springs. The spring constant of the rubber sheet 90 is set smaller than the spring constant of the elastic sheet 8, and as shown in FIGS. 4a and 4b, the fixing bolt 71 is fastened and the second slide member 13 and the bracket 7 are tightened. Are combined so that the thickness of the gap absorbing member 9 is greatly reduced compared to the amount by which the thickness of the elastic sheet 8 is reduced. For this reason, even after the second slide member 13 and the bracket 7 are joined, there is sufficient room for elastic deformation with respect to the elastic sheet 8, and the first slide member 11 and the second slide are left. The original function of the elastic sheet 8 that absorbs a change in relative posture with the slide member 13 can be fully exhibited.

  Further, as shown in FIG. 4c, after the second slide member 13 and the bracket 7 are coupled, a load F acts on the second slide member 13 from the structure 2, and the elastic sheet 8 is Even if the thickness is reduced due to elastic deformation, the distance between the head of the fixing bolt 71 and the bracket 7 does not change at all, and the thickness of the gap absorbing member 9 is the same as the thickness of the elastic sheet 8 is reduced. Therefore, the trouble that the head of the fixing bolt 71 is completely lifted off the second slide member 13 can be prevented. For this reason, even if the structure 2 is constructed on the second slide member 13 of the XY guide device and the weight of the structure 2 acts in the direction of pressing the second slide member 13 against the bracket 7, the second The fastening force of the fixing bolt 71 connecting the slide member 13 and the bracket 7 is not released, the shear strength of the fixing bolt 71 is reduced, the fixing bolt 71 is further loosened due to vertical vibration, and the first It is possible to prevent the occurrence of problems such as the occurrence of twisting of the second slide member 13 with respect to the slide member 11.

  Considering the function of such a rubber sheet 90, that is, the gap absorbing member 9, if the amount of elastic deformation of the rubber sheet 90 when the fixing bolt 71 is fastened is too small, the elastic body sheet 8 eventually becomes fixed to the fixing bolt 71. If the increase in the thickness of the rubber sheet 90 is small with respect to the thickness of the elastic sheet 8 which is reduced by the action of the load F, the head of the fixing bolt 71 is moved to the first position. It will float from the second slide member 13. From this point of view, the elastic deformation amount for the predetermined load of the gap absorbing member 9 needs to be larger than that of the elastic sheet 8, and the elastically deformable stroke amount of the gap absorbing member 9 is required. Needs to be set larger than that of the elastic sheet 8.

  5a and 5b show an example in which a disc spring washer 92 is used as the gap absorbing member 9. FIG. In the example of FIGS. 5 a and 5 b, two disc spring washers 92 face each other, and are interposed between the head of the fixing bolt 71 and the second slide member 13. The spring constant of each disc spring washer 92 is set so that the total spring constant considering all the disc spring washers 92 is smaller than the spring constant of the elastic sheet 8. That is, the second slide member 13 is fixed to the bracket 7 with six fixing bolts 71, and two disc spring washers 92 are overlapped with each fixing bolt 71, A total of 12 disc spring washers 92 are interposed in series or in parallel. The total spring constant of these disc spring washers 92 is set to be smaller than the spring constant of the elastic sheet 8, and the disc spring washer 92 is fixed to the fixing bolt 71 and the second slide member as shown in FIG. 5a. When the fixing bolt 71 is fastened to the bracket 7 from this state, the disc spring washer 92 is crushed more than the elastic sheet 8 as shown in FIG. It is possible to fasten the second slide member 13 and the bracket 7 while giving the seat 8 sufficient room for elastic deformation.

  When a rubber sheet is used as the gap absorbing member 9, the rubber has a buckling load, and when the fixing bolt 71 is fastened with a force exceeding the buckling load, the shape before the rubber sheet 90 fastens the fixing bolt 71. Can not be restored. In that respect, when a metal disc spring washer 92 is used as the gap absorbing member 9, such inconvenience does not occur, and the fixing bolt 71 is tightened until the disc spring 92 is flattened. It is possible to cause the gap absorbing member 9 to exhibit the function performed. In addition, by using a plurality of disc spring washers that are alternately stacked, it is possible to arbitrarily adjust the stroke amount of the gap absorbing member that can be elastically deformed.

  Even when the disc spring washer 92 is used as the gap absorbing member 9 as described above, when the weight of the structure 2 acts in the direction of pressing the second slide member 13 against the bracket 7, the second It is possible to avoid the disadvantage that the fastening force of the fixing bolt 71 that joins the slide member 13 and the bracket 7 is released, the shearing strength of the fixing bolt is lowered, the fixing bolt is further loosened due to vertical vibration, It is possible to prevent the occurrence of problems such as twisting of the second slide member with respect to the first slide member.

  In the example shown in FIGS. 5a and 5b, the two disc spring washers 92 are used so as to face each other. May be used in piles. Further, it is not always necessary to interpose a plurality of disc spring washers 92 with respect to one fixing bolt 71, and only one disc spring washer 92 may be interposed. In any case, the number and the stacking direction of the disc spring washers 92 can be arbitrarily determined according to the spring constant and the stroke amount required for the disc spring washer 92 as the gap absorbing member 9.

  6A and 6B show an example in which a posture follower member 93 is interposed between the disc spring washer 92 as the gap absorbing member 9 and the second slide member 13. The posture following member 93 has a spherical surface protruding toward the second slide member 13, and when the fixing bolt 71 is fastened, the protruding spherical surface of the posture following member 93 is the second as shown in FIG. 6b. The spherical seat 94 formed on the sliding member 13 is in sliding contact with no gap. The point that the disc spring washer 92 is crushed more than the elastic sheet 8 when the fixing bolt 71 is fastened to the bracket 7 is the same as the example of FIG. It is possible to fasten the second slide member 13 and the bracket 7 while giving room for the above.

  Originally, the elastic sheet 8 is provided in order to absorb the posture change of the second slide member 13 that moves along the second track rail 12. Therefore, if a posture follower member 93 having a convex spherical surface is interposed between the head of the fixing bolt 71 and the second slide member 13, the convex spherical surface 93 becomes a spherical seat of the second slide member 13. By making sliding contact with 94, the change of the second slide member 13 relative to the head of the fixing bolt 71 can be facilitated. Thereby, the posture change of the second slide member 13 fastened to the bracket 7 by the fixing bolt 71 can be facilitated, and the original function of the elastic sheet 8 can be effectively exhibited. In particular, when the fixing bolt 71 is firmly fastened and the disc spring washer 92 as the gap absorbing member 9 is completely crushed, the change in the posture of the second slide member 13 is caused by the head of the fixing bolt 71. Therefore, the interposition of the posture following member 93 is more effective.

Claims (6)

A first track rail (10) in which the rolling surface of the rolling element is formed along the longitudinal direction, and a rolling surface of the rolling element is formed in the longitudinal direction and the first track rail (10). Is assembled to the first track rail (10) via a number of rolling elements and freely along the first track rail (10). A first slide member (11) capable of linear reciprocation, and is fixed to the first slide member (11) and assembled to the second track rail (12) via a number of rolling elements. , A second slide member (13) capable of linearly reciprocating freely along the second track rail (12), and the first slide member (11) and the second slide member (13). An elastic sheet (8) interposed between the elastic sheet and the elastic body Is constituted from a fixing means for coupling (71) with respect to over preparative the said as crush (8) the second slide member (13) first sliding member (11),
A gap absorbing member (9) having a spring constant smaller than that of the elastic sheet (8) is interposed between the fixing means (71) and the second slide member (13). An XY guide that features The fixing means includes a plurality of fixing bolts (71) that pass through the second slide member (13) and are fastened to the first slide member (11), and the gap absorbing member (9) includes each fixing bolt ( 71) a disc spring washer (92) interposed between the head of the second slide member (13) and a total spring constant considering all disc spring washers (92). The XY guide according to claim 1, wherein the XY guide is smaller than a spring constant of the seat (8). A posture tracking member (93) having a convex spherical surface is interposed between the gap absorbing member (9) and the second slide member (13), and the convex spherical surface becomes the second slide member (13). The seismic isolation device according to claim 1, wherein the seismic isolation device is in sliding contact with a spherical seat (94) provided in the above-described structure. A seismic isolation device arranged between the base (1) and the structure (2) installed on the base (1) to suppress the transmission of vibrations from the base (1) to the structure (2). A rolling surface of the rolling element is formed along the longitudinal direction, a first track rail (10) fixed to the base (1), and a rolling surface of the rolling element is formed along the longitudinal direction. And a second track rail (12) fixed to the structure (2) orthogonal to the first track rail (10), and the first track rail (10) via a number of rolling elements. And a first slide member (11) capable of linearly reciprocating freely along the first track rail (10), and fixed to the first slide member (11) and many Are assembled to the second track rail (12) via the rolling elements of A second slide member (13) capable of linearly reciprocating freely along the track rail (12), and interposed between the first slide member (11) and the second slide member (13). And an elastic body (8) to be fixed, and a fixing means for coupling the second slide member (13) to the first slide member (11) so as to crush the elastic body sheet (8). 71)
A gap absorbing member (9) having a spring constant smaller than that of the elastic sheet (8) is interposed between the fixing means (71) and the second slide member (13). A seismic isolation device. The fixing means includes a plurality of fixing bolts (71) that pass through the second slide member (13) and are fastened to the first slide member (11), and the gap absorbing member (9) includes each fixing bolt ( 71) a disc spring washer (72) interposed between the head of the second slide member (13) and a total spring constant considering all disc spring washers (72). 5. The seismic isolation device according to claim 4, wherein the seismic isolation device is smaller than a spring constant of the seat (8). A posture tracking member (73) having a convex spherical surface is interposed between the gap absorbing member (9) and the second slide member (13), and the convex spherical surface is the second sliding member (13). The seismic isolation device according to claim 4, wherein the seismic isolation device is in sliding contact with the spherical surface seat (74) provided in the structure.

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