JPS64978Y2 - - Google Patents

Description

[Detailed Description of the Invention] This invention relates to a precision filter for removing particulates contained in liquids such as water, solvents, or various gases from a processing fluid.

Various chemical solutions, gases, and ultrapure water are used in the manufacturing process of semiconductor devices such as ICs and LSIs, and there is a demand for higher purity and fewer particulates.

The same is true in the fields of pharmaceuticals, genetic engineering, food, and beverages, where precision filters that can easily capture even microparticles and bacteria of 0.5 microns or less are desired.

A conventional filter of this kind is shown in Fig. 1, and is made of a resin molded product such as fluorine resin, polypropylene, or nylon, and has fluid passages formed on the plate surface and the center spacer boss portion _d1 . A porous thin film f made of the same synthetic resin is placed on the upper and lower surfaces of the desk d, and a required number of layers (usually about 20 layers) of superelements e, whose inner and outer edges are welded to the desk d, are stacked to form a center pipe p. Insert and fix
The upper end of this center pipe p is attached to a cover c, and is housed in a container a.

By the way, since this device uses a thick desk made of resin molded product as the main part of the over-element, it has poor flexibility and cannot be used with anything larger than the inner diameter of the container. The volume of the desk occupied is large, so the storage efficiency of the material (thin film) is poor and the excess area is small. In addition, the number of parts is large despite the low processing capacity, and assembly is labor-intensive, resulting in high costs.

This idea was devised to improve the above-mentioned drawbacks of the conventional products.The over-element is made bendable, allowing the use of an element much larger than the inner diameter of the container, and even though the number of stacked layers is small,
We provide a filter with a large excess area that can improve processing capacity, and all components are made of synthetic resin with chemical and heat resistance.
Flexible and permeable channel members are attached to both or one side of the thin film material on the upper and lower surfaces of the horizontal piece of the spacer, which is composed of a boss part and a horizontal piece having a plurality of horizontal holes that communicate with the inside of the boss part. The center hole portions of the two materials are airtightly attached, and the peripheral edges of these materials are sealed to form a super-element, and the super-element is attached to the center pipe in multiple stages via the spacer, and the top or top The diameter or length of one side of the lower element is made larger than the inner diameter of the container, and the other elements are sequentially made larger,
It is characterized in that the upper end of the center pipe 3 is fixed to the cover 5, and each over-element is folded and housed in a container.

The embodiment will be explained with reference to the drawings.
Figure 2 shows the overelement E, with 1
is a spacer made of synthetic resin having chemical and heat resistance such as fluorine-based resin, polypropylene, or nylon, and has a boss portion 1a provided with a vertical hole to be inserted into the center pipe, and a plurality of spacers communicating with the vertical hole. The spacer 1 is formed into a button shape having a cross section with a horizontal piece 1b provided with a horizontal hole 1c, and the following materials 2 are respectively fitted through the center hole on the top and bottom of the boss portion 1a of the spacer 1. The peripheral portion of the center hole is welded to the upper and lower surfaces of the horizontal piece 1b.

The material 2 is made of the same synthetic resin material as the spacer 1, and has a thickness of 30 to 30 mm as shown in Figure 3A.
Porous circular thin film (membrane) of about 250μ 2
It consists of nets (30 to 50 meshes and a thickness of about 0.2 to 2 mm) attached to both sides as a channel member 2b to maintain the shape and prevent adhesion between a and a, and a spacer in the center. The boss part 1a is provided with a center hole 2c to be fitted into the boss part 1a, and the central parts of the upper and lower members 2 are individually welded to the upper and lower surfaces of the horizontal piece 1b of the spacer, and the peripheral parts are overlapped and welded to each other, and the space between the upper and lower members 2 is is a cavity communicating with the vertical hole of the boss portion 1a,
It has flexibility and is formed to be easily folded up and down.

In this case, the flow path member 2b is not provided on both sides of the thin film 2a, but only on one side, and when one over-element E is formed, only one sheet exists between the thin films 2a so that they do not come into direct contact with each other. In addition to the net, the flow path member 2b may be made of a material having a porosity of 50% or more and a thickness of 0.2 to 2.
A non-woven fabric or an open-cell sponge of about mm size may also be used.

When the flow path member 2b is provided outside the thin film 2a (on the stock solution side), the outside flow path member 2b
The thin film 2b may be welded to either the inner peripheral edge or the outer peripheral edge, and depending on the processing fluid, two or more thin films 2a with different pore diameters may be stacked and used.

Then, a plurality of such superelements E are connected to the boss portion 1 of the spacer 1 as shown in FIG.
A is inserted into a center pipe 3 made of the same resin material and stacked, but in the one shown, the diameter of the uppermost over-element E is approximately twice the inner diameter of the container 6; are successively formed with larger diameters. The boss portions 1a of the spacer 1 are welded together, and a collar 4 is fitted into the upper half of the center pipe 3.

Thus, the upper end threaded portion of the center pipe 3
As shown in the figure, it is screwed into the central outlet of a cover 5 made of the same effect resin, and in this state, the plurality of stages of over-elements E are pushed and accommodated together with the center pipe 3 into a pot-shaped container 6 made of the same effect resin, cover 5
The peripheral edge of the container 6 is welded to the upper edge of the container 6.

At this time, since the over-element E attached to the center pipe 3 has a flexible structure as described above, even if it is considerably larger than the inner diameter of the container 6, it can be Each element E is easily folded upward, and is accommodated with its outer edge aligned with the joint of the cover 5. As shown in FIG. A large number of fluid passages 7 are formed between the elements E by gaps.

Therefore, in use, if the fluid to be treated is supplied from the lower end inlet 6a of the container 6, the fluid will rise sequentially through the passage 7 and fill the container 6.
At the same time, the processing fluid passes through the porous thin film 2a of each spacer element E as shown by the arrow, is purified, flows through the inner cavity to the center, and flows through each spacer element 1.
It enters the center pipe 3 through the horizontal passage hole 1c, and flows from the outlet of the cover 5 to the tank side.

Note that if the material 2 is made into a square shape as shown in FIG. 3B, there will be no waste in material collection.

As described above, in this invention, the over-element is formed of a spacer made of synthetic resin and a thin film of synthetic resin with a flexible and permeable channel member attached to both sides or one side, so it has flexibility. It is easy to bend and can be used by bending without being limited by the inner diameter of the container as in conventional cases. The diameter of the element is made larger than the inner diameter of the container, and the other diameters are made larger sequentially, making it possible to reduce the number of stages of the element compared to conventional products and significantly increase the overarea (the overarea is defined as the diameter of the element or (Since it is proportional to the square of the length of one side, if the number of stages is the same as before, the excess area will be more than 4 times, and if the excess area is constant, the number of stages of the element will be less than 1/4). can be significantly improved.

[Brief explanation of drawings]

FIG. 1 is a sectional view of a conventional filter. FIG. 2 is a sectional view of the over-element according to this invention. Figures 3A and 3B are perspective views of part of the material. FIG. 4 is a side view of the center pipe with the over-element attached. FIG. 5 is a sectional view of the state accommodated in the container. 6th
The figure is a sectional view taken along line A-A in FIG. 5. In the figure, 1...Spacer, 1a...Boss part, 1b...Horizontal piece, 1c...Horizontal hole, 2...Material, 2a...Thin film, 2
b... Channel member, 3... Center pipe, 5... Cover, 6... Container.

Claims (1)

[Scope of utility model registration request] A flexible thin film material 2a is attached to both or one side of the horizontal piece 1b of the spacer 1, which is made of synthetic resin and consists of a boss part 1a and a horizontal piece 1b having a plurality of horizontal holes 1c leading into the boss part. The center hole 2c of the two materials 2 is attached with a transparent and permeable channel member 2b.
2 are attached airtightly, and the peripheral edges of these materials 2 are closely attached to form the over-element E, and the over-element E is attached to the center pipe 3 in multiple stages via the spacer 1, and the uppermost or lowermost stage The diameter or the length of one side of the over-element E is made larger than the inner diameter of the container, and the other over-elements E are sequentially made larger, and while the upper end of the center pipe 3 is fixed to the cover 5, each over-element E is bent to form the container 6. A precision filter for fluid treatment, characterized by being housed in a .