JPH0254131B2 - - Google Patents
Info
- Publication number
- JPH0254131B2 JPH0254131B2 JP58130291A JP13029183A JPH0254131B2 JP H0254131 B2 JPH0254131 B2 JP H0254131B2 JP 58130291 A JP58130291 A JP 58130291A JP 13029183 A JP13029183 A JP 13029183A JP H0254131 B2 JPH0254131 B2 JP H0254131B2
- Authority
- JP
- Japan
- Prior art keywords
- container
- spacer
- center
- hole
- synthetic resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 30
- 125000006850 spacer group Chemical group 0.000 claims description 22
- 239000010409 thin film Substances 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 12
- 229920003002 synthetic resin Polymers 0.000 claims description 11
- 239000000057 synthetic resin Substances 0.000 claims description 11
- 239000012530 fluid Substances 0.000 claims description 10
- 239000012779 reinforcing material Substances 0.000 claims description 6
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 239000004677 Nylon Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- -1 polypropylene Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 235000013361 beverage Nutrition 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 238000010353 genetic engineering Methods 0.000 description 1
- 239000002648 laminated material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
Description
【発明の詳細な説明】
この発明は水、溶剤などの液体あるいは各種の
気体中に含まれる微粒子などを処理流体から除去
するための精密フイルタに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a precision filter for removing particulates contained in liquids such as water, solvents, or various gases from a processing fluid.
ICやLSIなどの半導体素子の製造工程では、各
種の薬液、ガスおよび超純水が用いられ、より純
度が高く微粒子の少ないものが要求されている。
医薬品、遺伝子工学あるいは食品、飲料の分野に
おいても同様であり、0.5μ以下と云つた微粒子や
細菌でも容易に捕捉できる精密フイルタが望まれ
ている。 Various chemical solutions, gases, and ultrapure water are used in the manufacturing process of semiconductor devices such as ICs and LSIs, and there is a demand for higher purity and fewer particulates.
The same is true in the fields of pharmaceuticals, genetic engineering, food, and beverages, where precision filters that can easily capture even microparticles and bacteria of 0.5μ or less are desired.
現在、広く利用されている精密フイルタを示せ
ば第１図のとおりであり、弗素系の樹脂、ポリプ
ロピレン、ナイロンなどの樹脂成形品で作られ、
板面および中央のスペーサボス部d1に流体通路を
形成したデスクｄの上下面に同じ合成樹脂からな
る多孔質の薄膜ｆを配設し、その内外周縁をデス
クｄに溶着した過エレメントｅを所要段数（通
常20段）積層してセンターパイプｐに嵌挿し、こ
のセンターパイプｐの上端をカバーｃに取付け
て、過エレメントｅを容器ａ中に収容するよう
にしている。 Figure 1 shows precision filters that are currently widely used. They are made of resin molded products such as fluorine resin, polypropylene, and nylon.
A porous thin film f made of the same synthetic resin is placed on the upper and lower surfaces of a desk d with fluid passages formed on the plate surface and the central spacer boss portion d 1 , and an overelement e is required, the inner and outer edges of which are welded to the desk d. A number of stages (usually 20 stages) are stacked and inserted into a center pipe p, the upper end of the center pipe p is attached to a cover c, and the over-element e is housed in a container a.
ところで、この従来のものは、過エレメント
の構成部品として樹脂成形品からなる厚手なデス
クを用いているために、柔軟性に乏しく容器内径
より大きなものを使用することができず、しか
も、一定容積の容器中に占めるデスクの容積が大
きく、そのため材（薄膜）の収納効率が悪く
過面積が比較的に小さい。そして、処理能力の低
い割りに部品点数（デスク数）が多く、組立てに
も手間がかかりコスト高にもなつている。 By the way, this conventional type uses a thick desk made of resin molded product as a component of the over-element, so it has poor flexibility and cannot be used with a container larger than the inner diameter. The desk occupies a large volume in the container, so the storage efficiency of the material (thin film) is poor and the excess area is relatively small. In addition, the number of parts (number of desks) is large despite the low processing power, and assembly is time-consuming, resulting in high costs.
そこで、この発明は上記従来品の欠点を改良す
べく工夫されたもので、過エレメントの材を
柔軟で折り曲げ可能に形成し、容器の内径より大
きなものにすることができ、積層段数が少ないに
拘らず、過面積が大きくて処理能力を向上させ
ることのできるフイルタを提供するものであり、
縦孔を有するボス部とその縦孔に通じる横通孔を
備えた水平片とからなるスペーサの水平片の上下
の面に、合成樹脂からなる多孔室の薄膜材の両面
または片面に合成樹脂からなる柔軟で透過性の補
強用当て材を添設しかつ中心孔を設けた二つの
材の中心孔の部分をそれぞれ気密に取付けると共
にそれらの周縁部を密封して容器の内径より大き
な過エレメントを形成し、該過エレメントを
上記スペーサを当接させてセンターパイプを介し
または介さずに複数段積層してカバーに取付け、
各過エレメントの材を折り曲げ周縁部を容器
内面に当接させて容器中に収容したことを特徴と
している。 Therefore, this invention was devised to improve the above-mentioned drawbacks of the conventional products.The material of the over-element is made flexible and bendable, so that it can be made larger than the inner diameter of the container, and the number of stacked layers is small. However, the purpose of the present invention is to provide a filter that has a large overarea and can improve processing capacity.
The upper and lower surfaces of the horizontal piece of the spacer, which consists of a boss having a vertical hole and a horizontal piece having a horizontal hole communicating with the vertical hole, are made of synthetic resin on both or one side of the thin film material of the porous chamber made of synthetic resin. A flexible and permeable reinforcing material is attached, and the center hole portions of the two materials with a center hole are attached airtightly, and their peripheral edges are sealed to form an over-element larger than the inner diameter of the container. and attach the over-element to the cover by abutting the spacer and stacking them in multiple stages with or without a center pipe,
It is characterized in that the material of each cross-element is folded and housed in the container with the peripheral edge abutting against the inner surface of the container.
以下図面参照の上この発明の実施例について説
明する。 Embodiments of the present invention will be described below with reference to the drawings.
第２図はこの発明に係る過エレメントＥを示
すものであり、１は中央ボス部１ａと水平片１ｂ
とで段付きボタン状に形成されたスペーサであつ
て、弗素樹脂、ポリプロピレンまたはナイロンの
ような耐薬品性と耐熱性を有する合成樹脂からな
り、ボス部１ａにはセンターパイプに挿通すべき
縦孔が、水平片１ｂにはこれに連通する複数の横
通孔１ｃが設けられ、このスペーサ１のボス部１
ａの上下には次のような材２が中心孔を介して
それぞれ嵌め込まれ、中心孔の周辺部がスペーサ
の水平片１ｂの上下面に溶着されている。 FIG. 2 shows a cross-element E according to the present invention, in which 1 indicates a central boss portion 1a and a horizontal piece 1b.
The spacer is formed in the shape of a stepped button and is made of synthetic resin having chemical and heat resistance such as fluororesin, polypropylene, or nylon, and the boss portion 1a has a vertical hole through which the center pipe is inserted. , the horizontal piece 1b is provided with a plurality of horizontal holes 1c communicating therewith, and the boss portion 1 of the spacer 1
The following materials 2 are respectively fitted into the upper and lower parts of a through the center hole, and the peripheral parts of the center hole are welded to the upper and lower surfaces of the horizontal piece 1b of the spacer.
材２は上記スペーサ１と同じような合成樹脂
からなるもので、第３図イのように厚さが30〜
250μ程度の多孔質な円形の薄膜材（メンブレン）
２ａと、その形体保持と密着防止を兼ねて両面に
補強用当て材２ｂとして添設された網体（30〜50
メツシユで厚さは0.2〜２mm程度）とからなつて
いて、その大きさは収容容器の内径のほぼ２倍程
度に形成され、中央にはスペーサ１のボス部１ａ
に嵌挿すべき中心孔２ｃを備えており、そして、
上下の材２の中央部は個々にスペーサの水平片
１ｂの上下面に溶着される一方、周縁部は互いに
重ね合わされて溶着され、内部はボス部１ａの縦
孔に通じる空洞になつていて柔軟性を備え、溶着
されたスペーサの水平片１ｂの近傍から周縁部に
かけて上下に折り曲げ易く形成されている。 The material 2 is made of the same synthetic resin as the spacer 1, and has a thickness of 30 to 30 mm as shown in Figure 3A.
Porous circular thin film material (membrane) of approximately 250μ
2a, and a net (30 to 50
The mesh is approximately 0.2 to 2 mm thick), and its size is approximately twice the inner diameter of the storage container.
It is provided with a center hole 2c to be inserted into the
The center parts of the upper and lower members 2 are individually welded to the upper and lower surfaces of the horizontal piece 1b of the spacer, while the peripheral parts are overlaid and welded to each other, and the inside is a hollow that communicates with the vertical hole of the boss part 1a and is flexible. It is formed so that it can be easily bent up and down from the vicinity of the welded horizontal piece 1b of the spacer to the peripheral edge.
この場合、上記補強用当て材２ｂは薄膜材２ａ
の両面でなく、片面だけとし、しかも一つの過
エレメントＥを形成したとき、薄膜材２ａ同士が
直接接触しないように両者の間に一枚だけが存在
するように配設してもよく、また、補強用当て材
２ｂとしては網体のほかに空隙率が50％以上で厚
さ0.2〜２mm程度の不織布または連続気泡のスポ
ンジを用いてもよい。 In this case, the reinforcement material 2b is the thin film material 2a.
When only one side of the thin film material 2a is formed instead of both sides, and one superelement E is formed, it may be arranged such that only one sheet exists between the thin film materials 2a so that they do not come into direct contact with each other, or As the reinforcing material 2b, in addition to the net, a nonwoven fabric or open-cell sponge having a porosity of 50% or more and a thickness of about 0.2 to 2 mm may be used.
そして、薄膜材２ａの外側（原液側）に補強用
当て材２ｂを設ける場合には、その外側の補強用
当て材２ｂは薄膜材２ａに対し、内周縁か外周縁
のいずれか一方で溶着するようにしても差支えな
く、処理流体によつては薄膜材２ａは孔径の異な
るものを二枚以上重ねて用いる場合もある。 When the reinforcing material 2b is provided on the outside (undiluted solution side) of the thin film material 2a, the reinforcing material 2b on the outside is welded to either the inner peripheral edge or the outer peripheral edge of the thin film material 2a. Depending on the processing fluid, two or more thin film materials 2a with different pore diameters may be stacked and used.
しかして、上記のような過エレメントＥの複
数個が第４図のようにスペーサ１のボス部１ａを
介して合成樹脂材からなりスペーサの横通孔１ｃ
に通じる小孔を備えたセンターパイプ３に嵌挿さ
れ、ボス部１ａ同士は溶着される。 As shown in FIG.
The boss portions 1a are fitted into a center pipe 3 having a small hole communicating with the center pipe 3, and the boss portions 1a are welded together.
次いで、センターパイプ３にカラー４が嵌挿さ
れ、センターパイプ３の上端ねじ部が合成樹脂材
のカバー５の中央取出し口部に螺着され、その状
態で、各過エレメントＥがセンターパイプ３と
共に合成樹脂材のコツプ状容器６の中に押し込み
収容され、第５図のようにカバー５の周縁部が容
器６の上端縁に溶着される。その際、容器６の内
径より大きな各過エレメントＥの材２はスペ
ーサ１の部分を基にして外側部分が容易に上向き
に折れ曲がり、互いに重なり合つて収容され、そ
の周縁部は第６図のように波状にひだ付けられて
容器６の内面に当接し、流体の通路７が多数形成
される。 Next, the collar 4 is inserted into the center pipe 3, and the upper end threaded part of the center pipe 3 is screwed into the central outlet of the synthetic resin cover 5. In this state, each over-element E is inserted into the synthetic resin material together with the center pipe 3. The cover 5 is pushed into the top-shaped container 6, and the peripheral edge of the cover 5 is welded to the upper edge of the container 6, as shown in FIG. At this time, the material 2 of each over-element E, which is larger than the inner diameter of the container 6, has its outer part easily bent upward based on the spacer 1, and is accommodated by overlapping each other, with the peripheral edge part as shown in FIG. It is corrugated and comes into contact with the inner surface of the container 6, forming a large number of fluid passages 7.
そこで、使用に当たつて、処理すべき流体を容
器６の下端取入れ口６ａから供給すれば、流体は
各過エレメントＥの周縁部に形成された通路７
を通つて順次に上昇し容器６中に充満する。 Therefore, in use, if the fluid to be treated is supplied from the lower end intake port 6a of the container 6, the fluid will flow through the passage 7 formed at the peripheral edge of each passing element E.
The liquid rises sequentially through the container 6 and fills the container 6.
それと同時に処理流体は各過エレメントＥの
材２の多孔質な薄膜材２ａを矢印のように通り
抜けて浄化され、過エレメントＥの内部空洞を
経て中心部に流れ、各スペーサ１の横通孔１ｃか
らセンターパイプ３中に入つて上昇し、カバー５
の取出し口からタンク側に流れていく。 At the same time, the processing fluid passes through the porous thin film material 2a of the material 2 of each spacer element E as shown by the arrow, is purified, flows through the internal cavity of the spacer element E to the center, and flows through the lateral through hole 1c of each spacer 1. Go into the center pipe 3 and go up to the cover 5.
It flows from the outlet to the tank side.
なお、図示の例ではスペーサ１をセンターパイ
プ３に嵌挿させて過エレメントＥを積層するよ
うにしたものを示したが、センターパイプ３は用
いずにスペーサ１を直接重ね合せ、その最上段の
ものをカバー５の中心部に溶着して取付けるよう
にしてもよく、その場合には、最下段のスペーサ
１は縦孔の下端が閉じたものとなり、カバー５は
中心部にカラー４を一体にしたものとなる。ま
た、材２を第３図ロのように角形にすれば、材
料取りに無駄がなくなり、コストを低減できる。 In addition, in the illustrated example, the spacer 1 is inserted into the center pipe 3 and the over-element E is stacked, but the spacer 1 is directly stacked without using the center pipe 3, and the topmost one is stacked. It may be attached by welding to the center of the cover 5. In that case, the lowermost spacer 1 has a vertical hole closed at the lower end, and the cover 5 has a collar 4 integrated in the center. becomes. Moreover, if the material 2 is made into a square shape as shown in FIG. 3B, there will be no waste in material collection, and costs can be reduced.
以上のようにこの発明では、中央ボス部と水平
片を備えたスペーサの水平片の上下の面に、合成
樹脂製で多孔質の薄膜材両面または片面に合成樹
脂からなる柔軟で透過性の補強用当て材を添設し
中心孔を設けた二つの材の中心孔の部分を溶着
する一方、それらの周縁部を密封して容器の内径
より大きな過エレメントを形成したので、材
自体が柔軟性があつて折り曲げ易く、従来のデス
クタイプのものより少ない段数を組付けたにして
も過面積を大きくすることができ（過面積は
エレメントの直径または一辺の長さの二乗に比例
するので、仮に直径または一辺を容器内径の二倍
とし、段数を同じとするなら過面積は従来の四
倍となり、また、過面積が同じならエレメント
の段数は1/4ですむ）、流体の処理能力が向上し、
組立て工数を減らすことができる。 As described above, in this invention, the upper and lower surfaces of the horizontal piece of a spacer having a central boss portion and a horizontal piece are provided with flexible and permeable reinforcement made of synthetic resin on both sides or one side of a porous thin film made of synthetic resin. By welding the center hole parts of the two materials with a filler attached and a center hole, we sealed their peripheries to form an over-element larger than the inner diameter of the container, making the material itself flexible. It is easy to bend and can be bent easily, and the overarea can be increased even if fewer stages are assembled than with conventional desk types (the overarea is proportional to the diameter of the element or the square of the length of one side, so if If the diameter or side is twice the inner diameter of the container and the number of stages is the same, the over area will be four times that of the conventional one, and if the over area is the same, the number of stages of the element will be 1/4), improving fluid processing capacity. death,
Assembly man-hours can be reduced.
また、積層される過エレメントの材を折り
曲げて周縁部を容器内面に当接させて容器中に収
容したので、使用時に外部から振動や流体の脈動
を受けたにしても、過エレメントがばたついて
破損するようなことがない。 In addition, since the laminated materials of the over-element are folded and housed in the container with the peripheral edge in contact with the inner surface of the container, the over-element will not flap even if it is subjected to external vibrations or fluid pulsations during use. There is no chance of damage due to contact.
第１図は従来のフイルタの断面図。第２図はこ
の発明に係る過エレメントの断面図。第３図
イ，ロは材の一部の斜視図。第４図はセンター
パイプに過エレメントを取付けた状態の側面
図。第５図は容器に収容した状態の断面図。第６
図は第５図のＡ−Ａ線に沿つた平断面図。
図中、１……スペーサ、１ａ……ボス部、１ｂ
……水平片、１ｃ……横通孔、２……材、２ａ
……薄膜材、２ｂ……補強用当て材、３……セン
ターパイプ、５……カバー、６……容器、Ｅ……
過エレメント。
FIG. 1 is a sectional view of a conventional filter. FIG. 2 is a sectional view of the over-element according to the present invention. Figures 3A and 3B are perspective views of part of the material. FIG. 4 is a side view of the center pipe with the over-element attached. FIG. 5 is a sectional view of the state accommodated in the container. 6th
The figure is a plan sectional view taken along the line A-A in FIG. 5. In the figure, 1...Spacer, 1a...Boss part, 1b
...Horizontal piece, 1c...Horizontal hole, 2...Material, 2a
... Thin film material, 2b ... Reinforcing material, 3 ... Center pipe, 5 ... Cover, 6 ... Container, E ...
excess element.
Claims (1)
孔を備えた水平片とからなるスペーサの水平片の
上下の面に、合成樹脂からなる多孔質の薄膜材の
両面または片面に合成樹脂からなる柔軟で透過性
の補強用当て材を添設しかつ中心孔を設けた二つ
の材の中心孔の部分をそれぞれ気密に取付ける
と共にそれらの周縁部を密封して容器の内径より
大きな過エレメントを形成し、該過エレメン
トを上記スペーサを当接させてセンターパイプを
介しまたは介さずに複数段積層してカバーに取付
け、各過エレメントの材を折り曲げ周縁部を
容器内面に当接させて容器中に収容したことを特
徴とする流体処理用の精密フイルタ。1 A porous thin film material made of synthetic resin is coated with synthetic resin on both or one side of the upper and lower surfaces of the horizontal piece of the spacer, which consists of a boss portion with a vertical hole and a horizontal piece with a horizontal hole communicating with the vertical hole. A flexible and permeable reinforcing material consisting of a material with a center hole is attached, and the center hole portions of the two materials are airtightly attached, and their peripheries are sealed to form a super-element larger than the inner diameter of the container. The spacer elements are brought into contact with each other, stacked in multiple stages with or without a center pipe, and attached to the cover.The material of each spacer element is bent and the peripheral edge is brought into contact with the inner surface of the container, and the spacer is placed in the container. A precision filter for fluid processing, characterized by being housed in a .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13029183A JPS6022904A (en) | 1983-07-19 | 1983-07-19 | Precision filter for treating fluid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13029183A JPS6022904A (en) | 1983-07-19 | 1983-07-19 | Precision filter for treating fluid |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6022904A JPS6022904A (en) | 1985-02-05 |
| JPH0254131B2 true JPH0254131B2 (en) | 1990-11-20 |
Family
ID=15030799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13029183A Granted JPS6022904A (en) | 1983-07-19 | 1983-07-19 | Precision filter for treating fluid |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6022904A (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63201601U (en) * | 1987-06-12 | 1988-12-26 | ||
| US6712966B1 (en) * | 1999-02-04 | 2004-03-30 | Cuno Incorporated | Graded particle-size retention filter medium for cell-type filter unit |
| US6939466B2 (en) | 1998-08-17 | 2005-09-06 | Cuno Incorporated | Graded particle-size retention filter medium for fluid filtration unit with improved edge seal |
| JP2002204129A (en) | 2000-12-28 | 2002-07-19 | Niigata Seimitsu Kk | Amplifier circuit for am broadcast |
| PL2674074T3 (en) | 2012-03-02 | 2020-08-10 | Intex Marketing Ltd. | Inflatable product with an internal tensioning structure |
| EP3021721B1 (en) | 2013-07-18 | 2020-09-16 | Intex Marketing Ltd. | Inflatable spa |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5920804B2 (en) * | 1981-09-28 | 1984-05-15 | 日曹マスタ−ビルダ−ズ株式会社 | How to bury a discharge pipe in a concrete dam |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5920804U (en) * | 1982-07-30 | 1984-02-08 | 株式会社土屋製作所 | Filter media support plate for laminated precision filters |
-
1983
- 1983-07-19 JP JP13029183A patent/JPS6022904A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5920804B2 (en) * | 1981-09-28 | 1984-05-15 | 日曹マスタ−ビルダ−ズ株式会社 | How to bury a discharge pipe in a concrete dam |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6022904A (en) | 1985-02-05 |
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