JPS646886Y2 - - Google Patents

Description

[Detailed Description of the Invention] This invention relates to a precision filter for purifying chemical solutions for processing electronic equipment components or water for producing foods, beverages, and pharmaceuticals.

Chemical solutions, food and beverages for etching and cleaning electronic equipment parts such as ICs and LSIs,
Due to the nature of the products being handled, water used in the manufacture of pharmaceuticals and other products requires high purity, and the filters used to purify these liquids require precision filters that can easily remove even minute impurities of 5 microns or less. It is used. A conventional filter of this type is shown in Figure 1, which is made of a fluorine-based resin, polypropylene, or nylon resin molded product, and has a surface of a desk d with fluid passages formed on the plate surface and the center spacer boss d. A porous thin film (membrane) f made of synthetic resin is disposed on the surface, and the outer and inner edges of the membrane are welded to the desk d.The required number of layers (usually 20 layers) of over-elements e are stacked and inserted into the center pipe P.
The upper end of this center pipe P is attached to an end cover c, so that the desk-type over-element is accommodated in the container a.

However, since this type uses a hard and thick disk as the main component of the over-element, it is not possible to use a disk larger than the inner diameter of the container, and the disk occupies a large volume in a container with a certain volume. , material (thin film) storage efficiency is poor,
Small overarea.

In addition, the number of parts is large despite the low processing capacity, and assembly is labor-intensive, resulting in high costs. Therefore, this idea was devised to improve the above-mentioned drawbacks.The over-element is made flexible so that it can be bent, and a large one can be used without being limited by the inner diameter of the container, and the number of stacked layers is small. To provide a filter that increases processing capacity regardless of the situation, has a small number of parts, and is easy to assemble.

The embodiment will be explained with reference to the drawings.
In Fig. 2, E is an over-element formed by joining a number of pieces of material 1 as shown below in a bellows shape, and the material 1 has a circular or square shape as shown in Fig. 3 A porous thin film 1a (approximately 30 mm thick) made of synthetic resin with chemical and heat resistance such as fluorine-based resin, polypropylene, or nylon. A net 1b (30 to 50 meshes, 0.2 to 2 mm thick) for shape retention is attached to the front and back of the 250μ), and a center pipe (described later) is installed in the center except for the bottom one. The center hole 1c is larger than the diameter of the center hole 1c. In this case, even if the mesh cloth is added to only one side of the thin film 1a, it is sufficient if the thin films 1a do not directly overlap each other when the materials 1 are stacked in a bellows shape. The over-element E is one in which the required number of materials 1 with holes are stacked on top of the material 1 without the center hole 1c, and the peripheral and central portions of the materials 1 overlap vertically. The upper and lower parts are alternately shifted one by one, and the upper and lower parts are sealed at the periphery and the center, and the whole is formed into a bellows shape that can be expanded, contracted, and folded. In addition, a stepped collar 2a provided at the lower end of the center pipe 2 made of synthetic resin with the same effect is fitted into the center hole 1c of the uppermost material 1 of the over-element E, and the stepped collar 2a provided at the lower end of the center pipe 2 made of the same synthetic resin is fitted around the center hole of the material 1 on its upper surface. is welded.

In this case, the stepped collar 2a is made separate from the center pipe 2, and the stepped collar 2a is first welded to the center hole 1c of the uppermost member 1, and then this collar 2a is attached to the lower end of the center pipe 2. It may also be welded to.

Thus, a collar 5 is applied to the center pipe 2, and the upper end screw portion is screwed and fixed to the center outlet 3a of the end cover 3 made of synthetic resin with the same effect. A pot-shaped container 4 made of synthetic resin
The end cover 3 is pushed in, and the peripheral edge of the end cover 3 is welded to the upper end surface of the container 4.

At this time, since the over-element E, which is larger than the inner diameter of the container 4, is formed to be expandable and bendable, the peripheral part can be freely and easily bent upward based on the center hole 1c, as shown in FIG. The liquid container 4 is housed in the container 4, and its peripheral edge is corrugated as shown in FIG.

Reference numeral 7 in FIG. 4 is an air vent with a cap provided in the end cover 3.

In use, first remove the cap of the outlet 7 and supply the liquid to be treated from the lower intake port 4a. It rises sequentially while expelling air and fills the container 4.

When it is full, a cap is applied to the outlet 7 to seal it, and the liquid is continuously supplied.
Then, the processing liquid passes through the porous thin membranes 1a at each stage of the filter element E as shown by the arrows in Fig. 4, is purified, collects in the center of the element, passes through the center pipe 2, and flows from the outlet 3a to the tank side. It flows out into.

As described above, in this invention, a thin film made of synthetic resin is attached with a net made of synthetic resin on both sides or one side, and a central hole is provided in the material, which is made larger than the inner diameter of the container, except for the lowest one. A large number of materials are stacked with one or two sheets of net cloth interposed between the thin films, and the materials that overlap each other are alternately shifted at the periphery and the center, and two sheets are formed as a set. The central part is sealed to form a bellows-shaped over-element, the top material of this over-element is welded to the lower end brim of the synthetic resin center pipe, and the upper end of the center pipe is connected to the outlet of the synthetic resin end cover. At the same time, the over-element is folded and housed in a container made of synthetic resin, so the over-element can be expanded and contracted and can be bent freely, and large items can be used without being limited by the inner diameter of the container, making it easier to use than conventional containers. It is possible to increase the overarea with fewer stages compared to the desk type (the overarea is proportional to the diameter of the element or the square of the length of one side, so if the inner diameter of the container is twice and the number of pieces of material is the same) (If the overarea is the same, the number of materials will be 1/4), processing capacity will be significantly improved, and there will be no need for extra parts such as spacers, making assembly time-consuming. It is possible to reduce costs without any additional costs.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of a conventional filter, and FIG. 2 is a sectional view of a filter element according to this invention attached to a center pipe. Figures 3A and 3B are partial perspective views of the material. FIG. 4 is a sectional view of an embodiment of this invention. FIG. 5 is a sectional view taken along the line A-A. In the figure, 1... Material, 1a... Thin film, 1b... Net body, 1c... Center hole, 2... Center pipe, 2
a...Stepped brim, 3...End cover, 3a...
...Outlet, 4...Container, 4a...Intake, E...
excess element.

Claims (1)

[Scope of utility model registration request] A net body 1b made of synthetic resin is attached to both sides or one side of a porous thin film 1a made of synthetic resin, and center holes 1c are provided in the material 1, which is formed larger than the inner diameter of the container, except for the lowest one. A large number of sheets of material 1 are stacked with one or two sheets of net cloth 1b interposed between the thin films 1a, and the overlapping materials 1 are alternately shifted one by one at the periphery and center of the stack to separate two sheets. A bellows-shaped over-element E is formed by sealing the periphery and center of each pair, and the uppermost material 1 of the over-element E is welded to the lower end flange 2a of the center pipe 2 made of synthetic resin. A precision filter for liquid processing, in which the upper end is fixed to an outlet 3a of an end cover 3 made of synthetic resin, and the filter element E is folded and housed in a container 4 made of synthetic resin.