JPS6487886A - Cryopump for nuclear fusion device - Google Patents

Cryopump for nuclear fusion device

Info

Publication number
JPS6487886A
JPS6487886A JP62242795A JP24279587A JPS6487886A JP S6487886 A JPS6487886 A JP S6487886A JP 62242795 A JP62242795 A JP 62242795A JP 24279587 A JP24279587 A JP 24279587A JP S6487886 A JPS6487886 A JP S6487886A
Authority
JP
Japan
Prior art keywords
chamber
chevron
cryopanel
cryopump
trap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62242795A
Other languages
Japanese (ja)
Other versions
JP2509951B2 (en
Inventor
Kosuke Okamoto
Junpei Yuyama
Hiroyuki Yamakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP62242795A priority Critical patent/JP2509951B2/en
Publication of JPS6487886A publication Critical patent/JPS6487886A/en
Application granted granted Critical
Publication of JP2509951B2 publication Critical patent/JP2509951B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/10—Nuclear fusion reactors

Abstract

PURPOSE:To speed up the pumping sped by surrounding the system, which consists of a cryopanel, a superfilter, and a trap chamber, with a Chevron chamber that is cooled to a specified temperature. CONSTITUTION:The first Chevron chamber 11, which is situated outside and which is cooled down to about 100 deg.K, and the second Chevron chamber 12, which is situated inside with respect to the first Chevron chamber 11, are arranged to the inside of a pump case 20. The second Chevron chamber 12 is cooled down to about 4.2 deg.K by means of liquid helium. In the inside of the second Chevron chamber 12. A cryopanel 13 is connected to a trap chamber 14 by means of a superfilter 15 made up of many, minute flow passages. Since the cryopanel 13 and the trap chamber 14 are surrounded by doubled Chevron chamber, the pumping sped of the cryopanel 13 per unit area can be increased.
JP62242795A 1987-09-29 1987-09-29 Cryopump for fusion device Expired - Fee Related JP2509951B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62242795A JP2509951B2 (en) 1987-09-29 1987-09-29 Cryopump for fusion device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62242795A JP2509951B2 (en) 1987-09-29 1987-09-29 Cryopump for fusion device

Publications (2)

Publication Number Publication Date
JPS6487886A true JPS6487886A (en) 1989-03-31
JP2509951B2 JP2509951B2 (en) 1996-06-26

Family

ID=17094404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62242795A Expired - Fee Related JP2509951B2 (en) 1987-09-29 1987-09-29 Cryopump for fusion device

Country Status (1)

Country Link
JP (1) JP2509951B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5323751A (en) * 1990-07-13 1994-06-28 Toyota Jidosha Kabushiki Kaisha Device for controlling operation of fuel evaporative purge system of an internal combustion engine
CN103939316A (en) * 2013-01-21 2014-07-23 北京北方微电子基地设备工艺研究中心有限责任公司 Cold pump heating system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107993733B (en) * 2017-12-07 2020-11-03 中国工程物理研究院核物理与化学研究所 Three-stage cryogenic pump treatment device and method for radioactive tail gas of fusion reactor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5323751A (en) * 1990-07-13 1994-06-28 Toyota Jidosha Kabushiki Kaisha Device for controlling operation of fuel evaporative purge system of an internal combustion engine
CN103939316A (en) * 2013-01-21 2014-07-23 北京北方微电子基地设备工艺研究中心有限责任公司 Cold pump heating system
CN103939316B (en) * 2013-01-21 2016-08-03 北京北方微电子基地设备工艺研究中心有限责任公司 A kind of heating system of cold pump

Also Published As

Publication number Publication date
JP2509951B2 (en) 1996-06-26

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

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R250 Receipt of annual fees

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LAPS Cancellation because of no payment of annual fees