JPS648736U - - Google Patents
Info
- Publication number
- JPS648736U JPS648736U JP10174187U JP10174187U JPS648736U JP S648736 U JPS648736 U JP S648736U JP 10174187 U JP10174187 U JP 10174187U JP 10174187 U JP10174187 U JP 10174187U JP S648736 U JPS648736 U JP S648736U
- Authority
- JP
- Japan
- Prior art keywords
- camera
- projection exposure
- reduction projection
- prealignment
- monitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 238000005070 sampling Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10174187U JPS648736U (de) | 1987-07-03 | 1987-07-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10174187U JPS648736U (de) | 1987-07-03 | 1987-07-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS648736U true JPS648736U (de) | 1989-01-18 |
Family
ID=31331014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10174187U Pending JPS648736U (de) | 1987-07-03 | 1987-07-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS648736U (de) |
-
1987
- 1987-07-03 JP JP10174187U patent/JPS648736U/ja active Pending
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