JPS6484720A - Apparatus for baking semiconductor wafer - Google Patents

Apparatus for baking semiconductor wafer

Info

Publication number
JPS6484720A
JPS6484720A JP24305687A JP24305687A JPS6484720A JP S6484720 A JPS6484720 A JP S6484720A JP 24305687 A JP24305687 A JP 24305687A JP 24305687 A JP24305687 A JP 24305687A JP S6484720 A JPS6484720 A JP S6484720A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
hot plate
atmosphere
heat
heated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24305687A
Other languages
English (en)
Inventor
Isao Murase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP24305687A priority Critical patent/JPS6484720A/ja
Publication of JPS6484720A publication Critical patent/JPS6484720A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP24305687A 1987-09-28 1987-09-28 Apparatus for baking semiconductor wafer Pending JPS6484720A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24305687A JPS6484720A (en) 1987-09-28 1987-09-28 Apparatus for baking semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24305687A JPS6484720A (en) 1987-09-28 1987-09-28 Apparatus for baking semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS6484720A true JPS6484720A (en) 1989-03-30

Family

ID=17098148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24305687A Pending JPS6484720A (en) 1987-09-28 1987-09-28 Apparatus for baking semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS6484720A (ja)

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