JPS648388A - Vacuum pump device - Google Patents
Vacuum pump deviceInfo
- Publication number
- JPS648388A JPS648388A JP16107187A JP16107187A JPS648388A JP S648388 A JPS648388 A JP S648388A JP 16107187 A JP16107187 A JP 16107187A JP 16107187 A JP16107187 A JP 16107187A JP S648388 A JPS648388 A JP S648388A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- oil
- plasma etching
- temperature
- pump device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Applications Or Details Of Rotary Compressors (AREA)
- Drying Of Semiconductors (AREA)
- Compressor (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16107187A JPS648388A (en) | 1987-06-30 | 1987-06-30 | Vacuum pump device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16107187A JPS648388A (en) | 1987-06-30 | 1987-06-30 | Vacuum pump device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS648388A true JPS648388A (en) | 1989-01-12 |
Family
ID=15728069
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16107187A Pending JPS648388A (en) | 1987-06-30 | 1987-06-30 | Vacuum pump device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS648388A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5053122A (en) * | 1990-09-13 | 1991-10-01 | Micron Technology, Inc. | Oil filtration and exhaust apparatus |
WO2001096744A1 (fr) * | 2000-06-15 | 2001-12-20 | Alcatel | Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide |
JP2005264938A (ja) * | 2004-03-15 | 2005-09-29 | Varian Spa | 真空ポンプシステム |
WO2010128055A1 (fr) * | 2009-05-07 | 2010-11-11 | Olivier Lepez | Procède et installation de densification énergétique d'un produit sous forme de solides divises, en vue de l'obtention d'huiles pyrolytiques a vocation énergétique |
CN102410226A (zh) * | 2011-09-19 | 2012-04-11 | 王敬达 | 一种机械泵的排除水分的运行方法及装置 |
-
1987
- 1987-06-30 JP JP16107187A patent/JPS648388A/ja active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5053122A (en) * | 1990-09-13 | 1991-10-01 | Micron Technology, Inc. | Oil filtration and exhaust apparatus |
WO2001096744A1 (fr) * | 2000-06-15 | 2001-12-20 | Alcatel | Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide |
FR2810375A1 (fr) * | 2000-06-15 | 2001-12-21 | Cit Alcatel | Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide |
US6679676B2 (en) | 2000-06-15 | 2004-01-20 | Alcatel | Temperature control with constant cooling flow and temperature for vacuum generating device |
JP2005264938A (ja) * | 2004-03-15 | 2005-09-29 | Varian Spa | 真空ポンプシステム |
WO2010128055A1 (fr) * | 2009-05-07 | 2010-11-11 | Olivier Lepez | Procède et installation de densification énergétique d'un produit sous forme de solides divises, en vue de l'obtention d'huiles pyrolytiques a vocation énergétique |
US9321964B2 (en) | 2009-05-07 | 2016-04-26 | Lepez Conseils Finance Innovations—Lcfi | Method and apparatus for the energy densification of a material in the form of divided solids, with a view to obtaining pyrolysis oils for energy purposes |
CN102410226A (zh) * | 2011-09-19 | 2012-04-11 | 王敬达 | 一种机械泵的排除水分的运行方法及装置 |
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