JPS6483583A - Method for forming cellular film - Google Patents
Method for forming cellular filmInfo
- Publication number
- JPS6483583A JPS6483583A JP24195587A JP24195587A JPS6483583A JP S6483583 A JPS6483583 A JP S6483583A JP 24195587 A JP24195587 A JP 24195587A JP 24195587 A JP24195587 A JP 24195587A JP S6483583 A JPS6483583 A JP S6483583A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- separating
- phase
- heat treatment
- substrate surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001413 cellular effect Effects 0.000 title abstract 3
- 239000011521 glass Substances 0.000 abstract 14
- 238000010438 heat treatment Methods 0.000 abstract 7
- 239000000758 substrate Substances 0.000 abstract 6
- 239000000919 ceramic Substances 0.000 abstract 5
- 238000010306 acid treatment Methods 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000011148 porous material Substances 0.000 abstract 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract 1
- 229910010271 silicon carbide Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Glass Compositions (AREA)
- Surface Treatment Of Glass (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24195587A JPS6483583A (en) | 1987-09-26 | 1987-09-26 | Method for forming cellular film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24195587A JPS6483583A (en) | 1987-09-26 | 1987-09-26 | Method for forming cellular film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6483583A true JPS6483583A (en) | 1989-03-29 |
| JPH039074B2 JPH039074B2 (enrdf_load_stackoverflow) | 1991-02-07 |
Family
ID=17082058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24195587A Granted JPS6483583A (en) | 1987-09-26 | 1987-09-26 | Method for forming cellular film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6483583A (enrdf_load_stackoverflow) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013073150A2 (en) | 2011-11-18 | 2013-05-23 | Canon Kabushiki Kaisha | Optical member, image pickup apparatus, and method for manufacturing optical member |
| WO2013073131A1 (en) | 2011-11-18 | 2013-05-23 | Canon Kabushiki Kaisha | Optical member, image pickup apparatus, and method for manufacturing optical member |
| WO2013088700A1 (en) | 2011-12-15 | 2013-06-20 | Canon Kabushiki Kaisha | Method for manufacturing optical member |
| WO2013088632A1 (en) | 2011-12-15 | 2013-06-20 | Canon Kabushiki Kaisha | Optical member, image pickup apparatus, and method for manufacturing optical member |
| WO2013140717A2 (en) | 2012-03-23 | 2013-09-26 | Canon Kabushiki Kaisha | Method for manufacturing optical member, optical member, and image pickup apparatus |
| WO2013175724A1 (en) * | 2012-05-23 | 2013-11-28 | Canon Kabushiki Kaisha | Optical member, image pickup apparatus, and method for manufacturing optical member |
| WO2013179563A1 (en) | 2012-05-30 | 2013-12-05 | Canon Kabushiki Kaisha | Optical member with porous glass layer, image pickup apparatus, and method for manufacturing optical member |
| WO2013179602A1 (en) | 2012-05-30 | 2013-12-05 | Canon Kabushiki Kaisha | Optical member, image pickup apparatus, and method for manufacturing optical member |
| US9517969B2 (en) | 2011-11-18 | 2016-12-13 | Canon Kabushiki Kaisha | Method for manufacturing a porous glass film |
-
1987
- 1987-09-26 JP JP24195587A patent/JPS6483583A/ja active Granted
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013073131A1 (en) | 2011-11-18 | 2013-05-23 | Canon Kabushiki Kaisha | Optical member, image pickup apparatus, and method for manufacturing optical member |
| WO2013073150A2 (en) | 2011-11-18 | 2013-05-23 | Canon Kabushiki Kaisha | Optical member, image pickup apparatus, and method for manufacturing optical member |
| US9517969B2 (en) | 2011-11-18 | 2016-12-13 | Canon Kabushiki Kaisha | Method for manufacturing a porous glass film |
| US9487436B2 (en) | 2011-11-18 | 2016-11-08 | Canon Kabushiki Kaisha | Optical member, image pickup apparatus, and method for manufacturing optical member |
| US9212088B2 (en) | 2011-12-15 | 2015-12-15 | Canon Kabushiki Kaisha | Method for manufacturing optical member |
| WO2013088700A1 (en) | 2011-12-15 | 2013-06-20 | Canon Kabushiki Kaisha | Method for manufacturing optical member |
| WO2013088632A1 (en) | 2011-12-15 | 2013-06-20 | Canon Kabushiki Kaisha | Optical member, image pickup apparatus, and method for manufacturing optical member |
| JP2013124209A (ja) * | 2011-12-15 | 2013-06-24 | Canon Inc | 光学部材、撮像装置及び光学部材の製造方法 |
| JP2013144634A (ja) * | 2011-12-15 | 2013-07-25 | Canon Inc | 光学部材の製造方法 |
| WO2013140717A2 (en) | 2012-03-23 | 2013-09-26 | Canon Kabushiki Kaisha | Method for manufacturing optical member, optical member, and image pickup apparatus |
| WO2013140717A3 (en) * | 2012-03-23 | 2014-09-25 | Canon Kabushiki Kaisha | Method for manufacturing optical member, optical member, and image pickup apparatus |
| WO2013175724A1 (en) * | 2012-05-23 | 2013-11-28 | Canon Kabushiki Kaisha | Optical member, image pickup apparatus, and method for manufacturing optical member |
| US9766374B2 (en) | 2012-05-23 | 2017-09-19 | Canon Kabushiki Kaisha | Optical member, image pickup apparatus, and method for manufacturing optical member |
| WO2013179602A1 (en) | 2012-05-30 | 2013-12-05 | Canon Kabushiki Kaisha | Optical member, image pickup apparatus, and method for manufacturing optical member |
| WO2013179563A1 (en) | 2012-05-30 | 2013-12-05 | Canon Kabushiki Kaisha | Optical member with porous glass layer, image pickup apparatus, and method for manufacturing optical member |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH039074B2 (enrdf_load_stackoverflow) | 1991-02-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment |
Year of fee payment: 17 Free format text: PAYMENT UNTIL: 20080207 |