JPS6483114A - Flowmeter - Google Patents

Flowmeter

Info

Publication number
JPS6483114A
JPS6483114A JP24116887A JP24116887A JPS6483114A JP S6483114 A JPS6483114 A JP S6483114A JP 24116887 A JP24116887 A JP 24116887A JP 24116887 A JP24116887 A JP 24116887A JP S6483114 A JPS6483114 A JP S6483114A
Authority
JP
Japan
Prior art keywords
spool
displacement
flow rate
constitution
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24116887A
Other languages
Japanese (ja)
Inventor
Kazunari Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP24116887A priority Critical patent/JPS6483114A/en
Publication of JPS6483114A publication Critical patent/JPS6483114A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To achieve the simplification, wt. reduction and miniaturization of constitution and to improve the measuring accuracy of a flow rate, by providing a means for outputting the signal proportional to the displacement quantity of a spool when the spool moves against energizing force. CONSTITUTION:An input port 4 having to allow the pressure on an input side to act and the output port 5 allowed to communicate with the port 4 through a communication chamber 1A by the displacement of a spool 2 are provided to a cylinder main body 1. A detector 7 is fixed to the main body 1 to be inserted in the internal recessed part 2K of the spool 2 and outputs the electric signal corresponding to the displacement of the spool 2. Therefore, when the spool 2 moves to the right from the position of a drawing (b) to reach the position shown by a drawing (a), since the displacement quantity thereof is proportional to a flow rate, the signal corresponding to the flow rate is detected by the detector 7.
JP24116887A 1987-09-25 1987-09-25 Flowmeter Pending JPS6483114A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24116887A JPS6483114A (en) 1987-09-25 1987-09-25 Flowmeter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24116887A JPS6483114A (en) 1987-09-25 1987-09-25 Flowmeter

Publications (1)

Publication Number Publication Date
JPS6483114A true JPS6483114A (en) 1989-03-28

Family

ID=17070259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24116887A Pending JPS6483114A (en) 1987-09-25 1987-09-25 Flowmeter

Country Status (1)

Country Link
JP (1) JPS6483114A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5175129A (en) * 1991-03-01 1992-12-29 Motorola, Inc. Method of fabricating a semiconductor structure having an improved polysilicon layer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5175129A (en) * 1991-03-01 1992-12-29 Motorola, Inc. Method of fabricating a semiconductor structure having an improved polysilicon layer

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