JPS648268A - Sputtering device - Google Patents

Sputtering device

Info

Publication number
JPS648268A
JPS648268A JP16423687A JP16423687A JPS648268A JP S648268 A JPS648268 A JP S648268A JP 16423687 A JP16423687 A JP 16423687A JP 16423687 A JP16423687 A JP 16423687A JP S648268 A JPS648268 A JP S648268A
Authority
JP
Japan
Prior art keywords
target
shield
opening
holder
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16423687A
Other languages
Japanese (ja)
Inventor
Yasuhiko Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP16423687A priority Critical patent/JPS648268A/en
Publication of JPS648268A publication Critical patent/JPS648268A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prevent the contamination of adjacent substrate and target with each other by covering the space between the target shield provided on the outer periphery of the target and a substrate holder shield with a shielding member when a shutter is opened. CONSTITUTION:In the vacuum vessel 3 of the sputtering device, a sputtering target 2 is arranged in the target shield 5 having an opening 12 for opening and closing the shutter 6. The substrate 1 is arranged on the substrate holder 10 and opposed to the target 2, the holder shield 4 having an opening is arranged in the vicinity of the target 2, and the target shield 11 on the holder side overhung from the target shield 5 is fixed to the holder shield 4. When sputtering is carried out while opening the shutter 6 by an opening and closing mechanism 8, a shielding member 7 is moved to the position of the opening 12 by a driving mechanism 9. As a result, the space between the target 2 and the holder shield 4 is completely covered, and the leakage of the sputtering substance from the outside and to the outside is prevented.
JP16423687A 1987-06-30 1987-06-30 Sputtering device Pending JPS648268A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16423687A JPS648268A (en) 1987-06-30 1987-06-30 Sputtering device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16423687A JPS648268A (en) 1987-06-30 1987-06-30 Sputtering device

Publications (1)

Publication Number Publication Date
JPS648268A true JPS648268A (en) 1989-01-12

Family

ID=15789257

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16423687A Pending JPS648268A (en) 1987-06-30 1987-06-30 Sputtering device

Country Status (1)

Country Link
JP (1) JPS648268A (en)

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