JPS648268A - Sputtering device - Google Patents
Sputtering deviceInfo
- Publication number
- JPS648268A JPS648268A JP16423687A JP16423687A JPS648268A JP S648268 A JPS648268 A JP S648268A JP 16423687 A JP16423687 A JP 16423687A JP 16423687 A JP16423687 A JP 16423687A JP S648268 A JPS648268 A JP S648268A
- Authority
- JP
- Japan
- Prior art keywords
- target
- shield
- opening
- holder
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To prevent the contamination of adjacent substrate and target with each other by covering the space between the target shield provided on the outer periphery of the target and a substrate holder shield with a shielding member when a shutter is opened. CONSTITUTION:In the vacuum vessel 3 of the sputtering device, a sputtering target 2 is arranged in the target shield 5 having an opening 12 for opening and closing the shutter 6. The substrate 1 is arranged on the substrate holder 10 and opposed to the target 2, the holder shield 4 having an opening is arranged in the vicinity of the target 2, and the target shield 11 on the holder side overhung from the target shield 5 is fixed to the holder shield 4. When sputtering is carried out while opening the shutter 6 by an opening and closing mechanism 8, a shielding member 7 is moved to the position of the opening 12 by a driving mechanism 9. As a result, the space between the target 2 and the holder shield 4 is completely covered, and the leakage of the sputtering substance from the outside and to the outside is prevented.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16423687A JPS648268A (en) | 1987-06-30 | 1987-06-30 | Sputtering device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16423687A JPS648268A (en) | 1987-06-30 | 1987-06-30 | Sputtering device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS648268A true JPS648268A (en) | 1989-01-12 |
Family
ID=15789257
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16423687A Pending JPS648268A (en) | 1987-06-30 | 1987-06-30 | Sputtering device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS648268A (en) |
-
1987
- 1987-06-30 JP JP16423687A patent/JPS648268A/en active Pending
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