JPS6482631A - Atmospheric pressure cvd system - Google Patents

Atmospheric pressure cvd system

Info

Publication number
JPS6482631A
JPS6482631A JP24231287A JP24231287A JPS6482631A JP S6482631 A JPS6482631 A JP S6482631A JP 24231287 A JP24231287 A JP 24231287A JP 24231287 A JP24231287 A JP 24231287A JP S6482631 A JPS6482631 A JP S6482631A
Authority
JP
Japan
Prior art keywords
parts
blow
gas
dissimilar
movement routes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24231287A
Other languages
Japanese (ja)
Inventor
Kouichirou Tsutahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP24231287A priority Critical patent/JPS6482631A/en
Publication of JPS6482631A publication Critical patent/JPS6482631A/en
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To make a dissimilar or single species film formable, by whirling gas blow-off parts in the direction perpendicular or parallel to movement routes of heating trays. CONSTITUTION:Three sheets of wafers W are juxtaposed at intervals (x) perpendicularly to the tray movement direction on respective heating trays 1. A gas supply head 6 is mounted above the movement routes 2. Gas blow-off parts 3 of the gas supply head 6 are disposed in the direction perpendicular to the tray movement routes 2. Accordingly, dissimilar reaction gases G are supplied into the respective gas blow-off parts 3, and so dissimilar films can be formed with characteristics such as alpha, beta, gamma different from each other. When the respective blow-off parts 3 are disposed in the direction parallel to the tray movement routes 2 by whirling a supporting axis 7 at 90 degrees, only a single species film such as alpha can be formed continuously by supplying a single reaction gas G from all the blow-off parts 3.
JP24231287A 1987-09-25 1987-09-25 Atmospheric pressure cvd system Pending JPS6482631A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24231287A JPS6482631A (en) 1987-09-25 1987-09-25 Atmospheric pressure cvd system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24231287A JPS6482631A (en) 1987-09-25 1987-09-25 Atmospheric pressure cvd system

Publications (1)

Publication Number Publication Date
JPS6482631A true JPS6482631A (en) 1989-03-28

Family

ID=17087341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24231287A Pending JPS6482631A (en) 1987-09-25 1987-09-25 Atmospheric pressure cvd system

Country Status (1)

Country Link
JP (1) JPS6482631A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5691618A (en) * 1992-11-16 1997-11-25 Yupiteru Industries Co., Ltd. Battery pack charging device
JP2009531549A (en) * 2006-03-29 2009-09-03 イーストマン コダック カンパニー Atomic layer deposition

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5691618A (en) * 1992-11-16 1997-11-25 Yupiteru Industries Co., Ltd. Battery pack charging device
JP2009531549A (en) * 2006-03-29 2009-09-03 イーストマン コダック カンパニー Atomic layer deposition

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