JPS647532A - Probe for lsi measuring device - Google Patents
Probe for lsi measuring deviceInfo
- Publication number
- JPS647532A JPS647532A JP16373287A JP16373287A JPS647532A JP S647532 A JPS647532 A JP S647532A JP 16373287 A JP16373287 A JP 16373287A JP 16373287 A JP16373287 A JP 16373287A JP S647532 A JPS647532 A JP S647532A
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- probe
- measuring device
- contact
- semiconductor circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To enable exact measuring data on measured LSI chip to be corrected by providing a probe card with a semiconductor circuit. CONSTITUTION:A probe card 2 is provided with a semiconductor circuit 2 formed as a part of measuring circuit by diffusion process on the surface 2a of silicon substrate, multiple probes 2c in contact with LSI chip to be measured and multiple contacts 2d in contact with outer terminal while 2b, 2c and 2d are connected by wiring 2e. An upper case 3 is composed of a recession 3a to be engaged with the probe card 2 on one side, wiring terminals 3b in contact with respective contacts 2d to be connected to the main body of measuring device on the other side and multiple holes 3c to fix the probe. A lower case 4 with a hole 4d corresponding to the holes 3c of the upper case 3 is fixed to the rear side of probe card 2 to be protected. By such procedures, a semiconductor circuit to correct any trouble due to wiring from the main body of measuring device can be provided on the probe card.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16373287A JPS647532A (en) | 1987-06-29 | 1987-06-29 | Probe for lsi measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16373287A JPS647532A (en) | 1987-06-29 | 1987-06-29 | Probe for lsi measuring device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS647532A true JPS647532A (en) | 1989-01-11 |
Family
ID=15779615
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16373287A Pending JPS647532A (en) | 1987-06-29 | 1987-06-29 | Probe for lsi measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS647532A (en) |
-
1987
- 1987-06-29 JP JP16373287A patent/JPS647532A/en active Pending
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