JPS6475144A - Manufacture of evaporation body for vacuum deposition - Google Patents

Manufacture of evaporation body for vacuum deposition

Info

Publication number
JPS6475144A
JPS6475144A JP23179187A JP23179187A JPS6475144A JP S6475144 A JPS6475144 A JP S6475144A JP 23179187 A JP23179187 A JP 23179187A JP 23179187 A JP23179187 A JP 23179187A JP S6475144 A JPS6475144 A JP S6475144A
Authority
JP
Japan
Prior art keywords
vacuum
bar
forming
chamber
molten metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23179187A
Other languages
Japanese (ja)
Inventor
Kazuhiko Tabei
Noboru Yonezawa
Hiroshi Uchibori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP23179187A priority Critical patent/JPS6475144A/en
Publication of JPS6475144A publication Critical patent/JPS6475144A/en
Pending legal-status Critical Current

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  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To obtain the evaporation body of high cleanness with good yield and good efficiency by forming a blank for forming a vacuum depisition thin film in a bar-like body by casting immediately after its vacuum melting and forming this bar-like body in grannular or lumpy shape by cutting it. CONSTITUTION:The blank for forming a vacuum deposition thin film is charged into a crucible 15 of the inside of a vacuum-pressurizing continuous casting device and melted by a high frequency induction coil 16 with holding the degree of vacuum of the inside of a chamber 11 at the specified value to obtain a molten metal 18. After executing the vacuum dissolution, Ar gas is led through an inert gas lead-in pipe 13 into chamber 11 and the molten metal is is pressurized by making the chamber 11 inside a high pressure. The molten metal 18 is elevated through a mold 19, cooled by a water cooling jacket 14 and the bar-like body 17 is obtd. The bar-like body 17 is cut at the specified intervals to obtain a circular columnar evaporation body. The evaporation body of high cleanness is thus obtd. with good yield.
JP23179187A 1987-09-16 1987-09-16 Manufacture of evaporation body for vacuum deposition Pending JPS6475144A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23179187A JPS6475144A (en) 1987-09-16 1987-09-16 Manufacture of evaporation body for vacuum deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23179187A JPS6475144A (en) 1987-09-16 1987-09-16 Manufacture of evaporation body for vacuum deposition

Publications (1)

Publication Number Publication Date
JPS6475144A true JPS6475144A (en) 1989-03-20

Family

ID=16929077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23179187A Pending JPS6475144A (en) 1987-09-16 1987-09-16 Manufacture of evaporation body for vacuum deposition

Country Status (1)

Country Link
JP (1) JPS6475144A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993023586A1 (en) * 1992-05-11 1993-11-25 Sumitomo Electric Industries, Ltd. Vapor deposition material and production method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61238445A (en) * 1985-04-15 1986-10-23 Mitsubishi Metal Corp Continuous casting method for ingot having unidirectionally solidified structure
JPS6264455A (en) * 1985-09-17 1987-03-23 Mitsubishi Metal Corp Continuous production of cast material
JPS62151253A (en) * 1985-12-25 1987-07-06 Mitsubishi Metal Corp Continuous casting furnace

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61238445A (en) * 1985-04-15 1986-10-23 Mitsubishi Metal Corp Continuous casting method for ingot having unidirectionally solidified structure
JPS6264455A (en) * 1985-09-17 1987-03-23 Mitsubishi Metal Corp Continuous production of cast material
JPS62151253A (en) * 1985-12-25 1987-07-06 Mitsubishi Metal Corp Continuous casting furnace

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993023586A1 (en) * 1992-05-11 1993-11-25 Sumitomo Electric Industries, Ltd. Vapor deposition material and production method thereof
US5441010A (en) * 1992-05-11 1995-08-15 Sumitomo Electric Industries, Ltd. Evaporation material and method of preparing the same

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