JPS6475144A - Manufacture of evaporation body for vacuum deposition - Google Patents
Manufacture of evaporation body for vacuum depositionInfo
- Publication number
- JPS6475144A JPS6475144A JP23179187A JP23179187A JPS6475144A JP S6475144 A JPS6475144 A JP S6475144A JP 23179187 A JP23179187 A JP 23179187A JP 23179187 A JP23179187 A JP 23179187A JP S6475144 A JPS6475144 A JP S6475144A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- bar
- forming
- chamber
- molten metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To obtain the evaporation body of high cleanness with good yield and good efficiency by forming a blank for forming a vacuum depisition thin film in a bar-like body by casting immediately after its vacuum melting and forming this bar-like body in grannular or lumpy shape by cutting it. CONSTITUTION:The blank for forming a vacuum deposition thin film is charged into a crucible 15 of the inside of a vacuum-pressurizing continuous casting device and melted by a high frequency induction coil 16 with holding the degree of vacuum of the inside of a chamber 11 at the specified value to obtain a molten metal 18. After executing the vacuum dissolution, Ar gas is led through an inert gas lead-in pipe 13 into chamber 11 and the molten metal is is pressurized by making the chamber 11 inside a high pressure. The molten metal 18 is elevated through a mold 19, cooled by a water cooling jacket 14 and the bar-like body 17 is obtd. The bar-like body 17 is cut at the specified intervals to obtain a circular columnar evaporation body. The evaporation body of high cleanness is thus obtd. with good yield.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23179187A JPS6475144A (en) | 1987-09-16 | 1987-09-16 | Manufacture of evaporation body for vacuum deposition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23179187A JPS6475144A (en) | 1987-09-16 | 1987-09-16 | Manufacture of evaporation body for vacuum deposition |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6475144A true JPS6475144A (en) | 1989-03-20 |
Family
ID=16929077
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23179187A Pending JPS6475144A (en) | 1987-09-16 | 1987-09-16 | Manufacture of evaporation body for vacuum deposition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6475144A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1993023586A1 (en) * | 1992-05-11 | 1993-11-25 | Sumitomo Electric Industries, Ltd. | Vapor deposition material and production method thereof |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61238445A (en) * | 1985-04-15 | 1986-10-23 | Mitsubishi Metal Corp | Continuous casting method for ingot having unidirectionally solidified structure |
JPS6264455A (en) * | 1985-09-17 | 1987-03-23 | Mitsubishi Metal Corp | Continuous production of cast material |
JPS62151253A (en) * | 1985-12-25 | 1987-07-06 | Mitsubishi Metal Corp | Continuous casting furnace |
-
1987
- 1987-09-16 JP JP23179187A patent/JPS6475144A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61238445A (en) * | 1985-04-15 | 1986-10-23 | Mitsubishi Metal Corp | Continuous casting method for ingot having unidirectionally solidified structure |
JPS6264455A (en) * | 1985-09-17 | 1987-03-23 | Mitsubishi Metal Corp | Continuous production of cast material |
JPS62151253A (en) * | 1985-12-25 | 1987-07-06 | Mitsubishi Metal Corp | Continuous casting furnace |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1993023586A1 (en) * | 1992-05-11 | 1993-11-25 | Sumitomo Electric Industries, Ltd. | Vapor deposition material and production method thereof |
US5441010A (en) * | 1992-05-11 | 1995-08-15 | Sumitomo Electric Industries, Ltd. | Evaporation material and method of preparing the same |
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