JPS647498B2 - - Google Patents

Info

Publication number
JPS647498B2
JPS647498B2 JP54118996A JP11899679A JPS647498B2 JP S647498 B2 JPS647498 B2 JP S647498B2 JP 54118996 A JP54118996 A JP 54118996A JP 11899679 A JP11899679 A JP 11899679A JP S647498 B2 JPS647498 B2 JP S647498B2
Authority
JP
Japan
Prior art keywords
point
measured
electron beam
pulsed
irradiation position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54118996A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5643737A (en
Inventor
Kanji Iwase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP11899679A priority Critical patent/JPS5643737A/ja
Publication of JPS5643737A publication Critical patent/JPS5643737A/ja
Publication of JPS647498B2 publication Critical patent/JPS647498B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP11899679A 1979-09-17 1979-09-17 Automatic potential measurement device within ic Granted JPS5643737A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11899679A JPS5643737A (en) 1979-09-17 1979-09-17 Automatic potential measurement device within ic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11899679A JPS5643737A (en) 1979-09-17 1979-09-17 Automatic potential measurement device within ic

Publications (2)

Publication Number Publication Date
JPS5643737A JPS5643737A (en) 1981-04-22
JPS647498B2 true JPS647498B2 (2) 1989-02-09

Family

ID=14750413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11899679A Granted JPS5643737A (en) 1979-09-17 1979-09-17 Automatic potential measurement device within ic

Country Status (1)

Country Link
JP (1) JPS5643737A (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3428965A1 (de) * 1984-08-06 1986-02-06 Siemens AG, 1000 Berlin und 8000 München Verfahren und vorrichtung zur detektion und abbildung von messpunkten, die einen bestimmten signalverlauf aufweisen

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51108580A (2) * 1975-03-19 1976-09-25 Fujitsu Ltd
JPS5390876A (en) * 1977-01-21 1978-08-10 Nippon Telegr & Teleph Corp <Ntt> Inspecting method for integrated semiconductor circuit device

Also Published As

Publication number Publication date
JPS5643737A (en) 1981-04-22

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