Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Nippon Steel Corp
Original Assignee
Seiko Epson Corp
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
Landscapes
Physics & Mathematics
(AREA)
Health & Medical Sciences
(AREA)
Life Sciences & Earth Sciences
(AREA)
Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Biochemistry
(AREA)
General Health & Medical Sciences
(AREA)
General Physics & Mathematics
(AREA)
Immunology
(AREA)
Pathology
(AREA)
Analysing Materials By The Use Of Radiation
(AREA)
JP8283279A1979-06-291979-06-29Simultaneously measuring crack and inclusion in slab sample using electron beam
GrantedJPS567047A
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