JPS647266U - - Google Patents

Info

Publication number
JPS647266U
JPS647266U JP10002487U JP10002487U JPS647266U JP S647266 U JPS647266 U JP S647266U JP 10002487 U JP10002487 U JP 10002487U JP 10002487 U JP10002487 U JP 10002487U JP S647266 U JPS647266 U JP S647266U
Authority
JP
Japan
Prior art keywords
etching
copper sulfate
circulation
tank
recovery device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10002487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354140Y2 (it
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=31327722&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPS647266(U) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed filed Critical
Priority to JP10002487U priority Critical patent/JPH0354140Y2/ja
Publication of JPS647266U publication Critical patent/JPS647266U/ja
Application granted granted Critical
Publication of JPH0354140Y2 publication Critical patent/JPH0354140Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
JP10002487U 1987-07-01 1987-07-01 Expired JPH0354140Y2 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10002487U JPH0354140Y2 (it) 1987-07-01 1987-07-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10002487U JPH0354140Y2 (it) 1987-07-01 1987-07-01

Publications (2)

Publication Number Publication Date
JPS647266U true JPS647266U (it) 1989-01-17
JPH0354140Y2 JPH0354140Y2 (it) 1991-11-28

Family

ID=31327722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10002487U Expired JPH0354140Y2 (it) 1987-07-01 1987-07-01

Country Status (1)

Country Link
JP (1) JPH0354140Y2 (it)

Also Published As

Publication number Publication date
JPH0354140Y2 (it) 1991-11-28

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