JPS64724A - Forming method of deposit film - Google Patents
Forming method of deposit filmInfo
- Publication number
- JPS64724A JPS64724A JP62073610A JP7361087A JPS64724A JP S64724 A JPS64724 A JP S64724A JP 62073610 A JP62073610 A JP 62073610A JP 7361087 A JP7361087 A JP 7361087A JP S64724 A JPS64724 A JP S64724A
- Authority
- JP
- Japan
- Prior art keywords
- space
- film formation
- film
- exciting
- formation space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Light Receiving Elements (AREA)
Abstract
PURPOSE: To equalize various characteristics of a film formed, the quality of the film and film thickness, and to shape the film having a large area by gradually increasing the sectional area of gas transport space between film formation space and gas exciting space toward the film formation space.
CONSTITUTION: The sectional area of gas transport space between film formation space 5 and exciting space 3 is expanded gradually toward the film formation space 5. A raw material gas 1 is excited by microwaves 2 in the exciting space 3, and one part is deposited onto a base body 6 mounted into the film formation space 5 through a hone-shaped nozzle 4 made of a metal, and one part is exhausted 7 by an exhaust means. When the raw material gas 1 is excited by microwaves and brought to the state of plasma, partial microwaves are emitted from a cavity resonator 8, but they are damped slowly by the hone-shaped nozzle 4 made of the metal, and do not intrude into the cavity resonator again, thus allowing plasma discharge even at low voltage. Since length l1 up to the film formation space from the exciting space is made sufficiently long, plasma does not reach onto the base body.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62073610A JPS64724A (en) | 1987-03-20 | 1987-03-27 | Forming method of deposit film |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62-66516 | 1987-03-20 | ||
JP6651687 | 1987-03-20 | ||
JP62073610A JPS64724A (en) | 1987-03-20 | 1987-03-27 | Forming method of deposit film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01724A JPH01724A (en) | 1989-01-05 |
JPS64724A true JPS64724A (en) | 1989-01-05 |
Family
ID=26407701
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62073610A Pending JPS64724A (en) | 1987-03-20 | 1987-03-27 | Forming method of deposit film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS64724A (en) |
-
1987
- 1987-03-27 JP JP62073610A patent/JPS64724A/en active Pending
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