JPS6472214A - Vacuum pressure regulator - Google Patents

Vacuum pressure regulator

Info

Publication number
JPS6472214A
JPS6472214A JP22929387A JP22929387A JPS6472214A JP S6472214 A JPS6472214 A JP S6472214A JP 22929387 A JP22929387 A JP 22929387A JP 22929387 A JP22929387 A JP 22929387A JP S6472214 A JPS6472214 A JP S6472214A
Authority
JP
Japan
Prior art keywords
negative pressure
pressure
nozzle
sucking
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22929387A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0474727B2 (pm
Inventor
Motonari Ikehata
Hiroyuki Mikami
Mitsuhisa Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Priority to JP22929387A priority Critical patent/JPS6472214A/ja
Publication of JPS6472214A publication Critical patent/JPS6472214A/ja
Publication of JPH0474727B2 publication Critical patent/JPH0474727B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Control Of Fluid Pressure (AREA)
JP22929387A 1987-09-12 1987-09-12 Vacuum pressure regulator Granted JPS6472214A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22929387A JPS6472214A (en) 1987-09-12 1987-09-12 Vacuum pressure regulator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22929387A JPS6472214A (en) 1987-09-12 1987-09-12 Vacuum pressure regulator

Publications (2)

Publication Number Publication Date
JPS6472214A true JPS6472214A (en) 1989-03-17
JPH0474727B2 JPH0474727B2 (pm) 1992-11-27

Family

ID=16889860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22929387A Granted JPS6472214A (en) 1987-09-12 1987-09-12 Vacuum pressure regulator

Country Status (1)

Country Link
JP (1) JPS6472214A (pm)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945519A (ja) * 1982-09-09 1984-03-14 Orion Mach Co Ltd 電子式真空圧調整装置
JPS6024415A (ja) * 1983-07-20 1985-02-07 Shimadzu Corp 電−空変換器
JPS6116472U (ja) * 1984-07-03 1986-01-30 株式会社山武 弁
JPS61103604U (pm) * 1984-12-14 1986-07-01
JPS61104872U (pm) * 1984-12-17 1986-07-03

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945519A (ja) * 1982-09-09 1984-03-14 Orion Mach Co Ltd 電子式真空圧調整装置
JPS6024415A (ja) * 1983-07-20 1985-02-07 Shimadzu Corp 電−空変換器
JPS6116472U (ja) * 1984-07-03 1986-01-30 株式会社山武 弁
JPS61103604U (pm) * 1984-12-14 1986-07-01
JPS61104872U (pm) * 1984-12-17 1986-07-03

Also Published As

Publication number Publication date
JPH0474727B2 (pm) 1992-11-27

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