JPS6472079A - Electrical characteristic measuring instrument - Google Patents

Electrical characteristic measuring instrument

Info

Publication number
JPS6472079A
JPS6472079A JP63153742A JP15374288A JPS6472079A JP S6472079 A JPS6472079 A JP S6472079A JP 63153742 A JP63153742 A JP 63153742A JP 15374288 A JP15374288 A JP 15374288A JP S6472079 A JPS6472079 A JP S6472079A
Authority
JP
Japan
Prior art keywords
electrical characteristic
measured
placing board
measuring
prevent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63153742A
Other languages
English (en)
Other versions
JPH0762691B2 (ja
Inventor
Tomoji Hayakawa
Takuo Uchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP63153742A priority Critical patent/JPH0762691B2/ja
Publication of JPS6472079A publication Critical patent/JPS6472079A/ja
Publication of JPH0762691B2 publication Critical patent/JPH0762691B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP63153742A 1987-06-24 1988-06-22 電気特性測定装置 Expired - Fee Related JPH0762691B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63153742A JPH0762691B2 (ja) 1987-06-24 1988-06-22 電気特性測定装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP62-157430 1987-06-24
JP15743087 1987-06-24
JP63153742A JPH0762691B2 (ja) 1987-06-24 1988-06-22 電気特性測定装置

Publications (2)

Publication Number Publication Date
JPS6472079A true JPS6472079A (en) 1989-03-16
JPH0762691B2 JPH0762691B2 (ja) 1995-07-05

Family

ID=26482276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63153742A Expired - Fee Related JPH0762691B2 (ja) 1987-06-24 1988-06-22 電気特性測定装置

Country Status (1)

Country Link
JP (1) JPH0762691B2 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001135684A (ja) * 1999-08-23 2001-05-18 Ibiden Co Ltd ウエハプローバ装置
JP2008224681A (ja) * 2002-04-25 2008-09-25 Murata Mfg Co Ltd 電子部品の特性測定装置
JP2010050155A (ja) * 2008-08-19 2010-03-04 Denso Corp 半導体装置の製造方法およびそれに用いられる半導体装置の検査装置
WO2011007555A1 (ja) * 2009-07-17 2011-01-20 Ｄｏｗａエレクトロニクス株式会社 横方向を電流導通方向とする電子デバイス用エピタキシャル基板およびその製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6013250B2 (ja) * 2013-03-27 2016-10-25 東京エレクトロン株式会社 プローブ装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58220438A (ja) * 1982-06-17 1983-12-22 Nippon Maikuronikusu:Kk 半導体ウエハ測定載置台
JPS61147544A (ja) * 1984-12-21 1986-07-05 Toshiba Corp 電気特性測定用ステ−ジ
JPS62291937A (ja) * 1986-06-12 1987-12-18 Matsushita Electric Ind Co Ltd プロ−バ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58220438A (ja) * 1982-06-17 1983-12-22 Nippon Maikuronikusu:Kk 半導体ウエハ測定載置台
JPS61147544A (ja) * 1984-12-21 1986-07-05 Toshiba Corp 電気特性測定用ステ−ジ
JPS62291937A (ja) * 1986-06-12 1987-12-18 Matsushita Electric Ind Co Ltd プロ−バ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001135684A (ja) * 1999-08-23 2001-05-18 Ibiden Co Ltd ウエハプローバ装置
JP2008224681A (ja) * 2002-04-25 2008-09-25 Murata Mfg Co Ltd 電子部品の特性測定装置
JP2010050155A (ja) * 2008-08-19 2010-03-04 Denso Corp 半導体装置の製造方法およびそれに用いられる半導体装置の検査装置
WO2011007555A1 (ja) * 2009-07-17 2011-01-20 Ｄｏｗａエレクトロニクス株式会社 横方向を電流導通方向とする電子デバイス用エピタキシャル基板およびその製造方法
JP2011023664A (ja) * 2009-07-17 2011-02-03 Dowa Electronics Materials Co Ltd 横方向を電流導通方向とする電子デバイス用エピタキシャル基板およびその製造方法
KR101321660B1 (ko) * 2009-07-17 2013-10-23 도와 일렉트로닉스 가부시키가이샤 횡방향을 전류 도통 방향으로 하는 전자 디바이스용 에피택셜 기판 및 그 제조방법
US8710489B2 (en) 2009-07-17 2014-04-29 Dowa Electronics Materials Co., Ltd. Epitaxial substrate for electronic device, in which current flows in lateral direction and method of producing the same

Also Published As

Publication number Publication date
JPH0762691B2 (ja) 1995-07-05

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees