JPS6471098A - Plasma device - Google Patents

Plasma device

Info

Publication number
JPS6471098A
JPS6471098A JP62225226A JP22522687A JPS6471098A JP S6471098 A JPS6471098 A JP S6471098A JP 62225226 A JP62225226 A JP 62225226A JP 22522687 A JP22522687 A JP 22522687A JP S6471098 A JPS6471098 A JP S6471098A
Authority
JP
Japan
Prior art keywords
microwave
plasma
dielectric
recess
internal conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62225226A
Other languages
English (en)
Inventor
Masakazu Taki
Kenji Yoshizawa
Junichi Nishimae
Tadashi Yanagi
Yoshihiro Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62225226A priority Critical patent/JPS6471098A/ja
Publication of JPS6471098A publication Critical patent/JPS6471098A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
JP62225226A 1987-09-10 1987-09-10 Plasma device Pending JPS6471098A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62225226A JPS6471098A (en) 1987-09-10 1987-09-10 Plasma device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62225226A JPS6471098A (en) 1987-09-10 1987-09-10 Plasma device

Publications (1)

Publication Number Publication Date
JPS6471098A true JPS6471098A (en) 1989-03-16

Family

ID=16825961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62225226A Pending JPS6471098A (en) 1987-09-10 1987-09-10 Plasma device

Country Status (1)

Country Link
JP (1) JPS6471098A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005062335A3 (de) * 2003-12-12 2005-10-20 R3T Gmbh Rapid Reactive Radica Vorrichtung zur erzeugung angeregter und/oder ionisierter teilchen in einem plasma und verfahren zur erzeugung ionisierter teilchen

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005062335A3 (de) * 2003-12-12 2005-10-20 R3T Gmbh Rapid Reactive Radica Vorrichtung zur erzeugung angeregter und/oder ionisierter teilchen in einem plasma und verfahren zur erzeugung ionisierter teilchen
US7665416B2 (en) 2003-12-12 2010-02-23 R3T Gmbh Rapid Reactive Radicals Technology Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particles

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