JPS6471098A - Plasma device - Google Patents
Plasma deviceInfo
- Publication number
- JPS6471098A JPS6471098A JP62225226A JP22522687A JPS6471098A JP S6471098 A JPS6471098 A JP S6471098A JP 62225226 A JP62225226 A JP 62225226A JP 22522687 A JP22522687 A JP 22522687A JP S6471098 A JPS6471098 A JP S6471098A
- Authority
- JP
- Japan
- Prior art keywords
- microwave
- plasma
- dielectric
- recess
- internal conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Plasma Technology (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62225226A JPS6471098A (en) | 1987-09-10 | 1987-09-10 | Plasma device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62225226A JPS6471098A (en) | 1987-09-10 | 1987-09-10 | Plasma device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6471098A true JPS6471098A (en) | 1989-03-16 |
Family
ID=16825961
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62225226A Pending JPS6471098A (en) | 1987-09-10 | 1987-09-10 | Plasma device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6471098A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005062335A3 (de) * | 2003-12-12 | 2005-10-20 | R3T Gmbh Rapid Reactive Radica | Vorrichtung zur erzeugung angeregter und/oder ionisierter teilchen in einem plasma und verfahren zur erzeugung ionisierter teilchen |
-
1987
- 1987-09-10 JP JP62225226A patent/JPS6471098A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005062335A3 (de) * | 2003-12-12 | 2005-10-20 | R3T Gmbh Rapid Reactive Radica | Vorrichtung zur erzeugung angeregter und/oder ionisierter teilchen in einem plasma und verfahren zur erzeugung ionisierter teilchen |
US7665416B2 (en) | 2003-12-12 | 2010-02-23 | R3T Gmbh Rapid Reactive Radicals Technology | Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particles |
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