JPS6471096A - Plasma device - Google Patents
Plasma deviceInfo
- Publication number
- JPS6471096A JPS6471096A JP62225208A JP22520887A JPS6471096A JP S6471096 A JPS6471096 A JP S6471096A JP 62225208 A JP62225208 A JP 62225208A JP 22520887 A JP22520887 A JP 22520887A JP S6471096 A JPS6471096 A JP S6471096A
- Authority
- JP
- Japan
- Prior art keywords
- microwave
- conductor wall
- microwaves
- conductor
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Lasers (AREA)
- Plasma Technology (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62225208A JPS6471096A (en) | 1987-09-10 | 1987-09-10 | Plasma device |
EP95108095A EP0674471B1 (en) | 1987-01-26 | 1988-01-23 | Laser Plasma apparatus |
DE3855896T DE3855896T2 (de) | 1987-01-26 | 1988-01-23 | Plasmavorrichtung |
DE3856348T DE3856348T2 (de) | 1987-01-26 | 1988-01-23 | Laser Plasmavorrichtung |
EP88101007A EP0280044B1 (en) | 1987-01-26 | 1988-01-23 | Plasma apparatus |
US07/147,726 US4890294A (en) | 1987-01-26 | 1988-01-25 | Plasma apparatus |
KR1019880000551A KR910002239B1 (ko) | 1987-01-26 | 1988-01-25 | 레이저 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62225208A JPS6471096A (en) | 1987-09-10 | 1987-09-10 | Plasma device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6471096A true JPS6471096A (en) | 1989-03-16 |
Family
ID=16825676
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62225208A Pending JPS6471096A (en) | 1987-01-26 | 1987-09-10 | Plasma device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6471096A (ja) |
-
1987
- 1987-09-10 JP JP62225208A patent/JPS6471096A/ja active Pending
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