JPS646901A - Protective film for optical purpose - Google Patents

Protective film for optical purpose

Info

Publication number
JPS646901A
JPS646901A JP62163369A JP16336987A JPS646901A JP S646901 A JPS646901 A JP S646901A JP 62163369 A JP62163369 A JP 62163369A JP 16336987 A JP16336987 A JP 16336987A JP S646901 A JPS646901 A JP S646901A
Authority
JP
Japan
Prior art keywords
film
boron
silicon
protective film
optical purpose
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62163369A
Other languages
English (en)
Other versions
JPH07111481B2 (ja
Inventor
Takahiro Nakahigashi
Yoshitaka Setoguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP62163369A priority Critical patent/JPH07111481B2/ja
Publication of JPS646901A publication Critical patent/JPS646901A/ja
Publication of JPH07111481B2 publication Critical patent/JPH07111481B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Optical Elements (AREA)
JP62163369A 1987-06-29 1987-06-29 光学用保護膜 Expired - Fee Related JPH07111481B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62163369A JPH07111481B2 (ja) 1987-06-29 1987-06-29 光学用保護膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62163369A JPH07111481B2 (ja) 1987-06-29 1987-06-29 光学用保護膜

Publications (2)

Publication Number Publication Date
JPS646901A true JPS646901A (en) 1989-01-11
JPH07111481B2 JPH07111481B2 (ja) 1995-11-29

Family

ID=15772576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62163369A Expired - Fee Related JPH07111481B2 (ja) 1987-06-29 1987-06-29 光学用保護膜

Country Status (1)

Country Link
JP (1) JPH07111481B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012200106A1 (de) * 2012-01-05 2013-07-11 Von Ardenne Anlagentechnik Gmbh Transparente Klimaschutzschicht für ein Reflexionsschichtsystem und Verfahren zu deren Herstellung

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58185428A (ja) * 1982-04-20 1983-10-29 Sharp Corp 光電部材

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58185428A (ja) * 1982-04-20 1983-10-29 Sharp Corp 光電部材

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012200106A1 (de) * 2012-01-05 2013-07-11 Von Ardenne Anlagentechnik Gmbh Transparente Klimaschutzschicht für ein Reflexionsschichtsystem und Verfahren zu deren Herstellung
DE102012200106A8 (de) * 2012-01-05 2013-09-12 Von Ardenne Anlagentechnik Gmbh Transparente Klimaschutzschicht für ein Reflexionsschichtsystem und Verfahren zu deren Herstellung
DE102012200106B4 (de) * 2012-01-05 2016-03-24 Von Ardenne Gmbh Reflexionsschichtsystem mit transparenter Klimaschutzschicht, Verfahren zu dessen Herstellung sowie Substrat mit einem solchen Reflexionsschichtsystem

Also Published As

Publication number Publication date
JPH07111481B2 (ja) 1995-11-29

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees