JPS6467853A - Power source device for plasma discharge - Google Patents

Power source device for plasma discharge

Info

Publication number
JPS6467853A
JPS6467853A JP62223743A JP22374387A JPS6467853A JP S6467853 A JPS6467853 A JP S6467853A JP 62223743 A JP62223743 A JP 62223743A JP 22374387 A JP22374387 A JP 22374387A JP S6467853 A JPS6467853 A JP S6467853A
Authority
JP
Japan
Prior art keywords
voltage
substrate
trigger electrode
discharge
power source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62223743A
Other languages
Japanese (ja)
Other versions
JPH07105210B2 (en
Inventor
Shinobu Nakajima
Shuichi Okabe
Kiyoshi Nehashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Priority to JP62223743A priority Critical patent/JPH07105210B2/en
Publication of JPS6467853A publication Critical patent/JPS6467853A/en
Publication of JPH07105210B2 publication Critical patent/JPH07105210B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Generation Of Surge Voltage And Current (AREA)
  • Plasma Technology (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Gas-Filled Discharge Tubes (AREA)

Abstract

PURPOSE:To smoothly start a stable discharge by generating the discharge in advance with a trigger electrode near a substrate and increasing the substrate voltage with time. CONSTITUTION:The electric power is fed to a substrate 2 and a trigger electrode 12 arranged in a vacuum tank 1 from a three-phase power source 13 through separate channels. The contactor 15b of the trigger channel is closed to generate a discharge on the trigger electrode 12, a controller 20 closes the contactor 15a of the substrate channel and applies the voltage to the substrate 2, the voltage is gradually increased from the low voltage to the preset voltage finally, and the voltage applied to the trigger electrode 12 is made 0 when the preset time elapses after the preset voltage is attained. The stable discharge can be thereby started smoothly.
JP62223743A 1987-09-07 1987-09-07 Power supply for plasma discharge Expired - Lifetime JPH07105210B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62223743A JPH07105210B2 (en) 1987-09-07 1987-09-07 Power supply for plasma discharge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62223743A JPH07105210B2 (en) 1987-09-07 1987-09-07 Power supply for plasma discharge

Publications (2)

Publication Number Publication Date
JPS6467853A true JPS6467853A (en) 1989-03-14
JPH07105210B2 JPH07105210B2 (en) 1995-11-13

Family

ID=16803002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62223743A Expired - Lifetime JPH07105210B2 (en) 1987-09-07 1987-09-07 Power supply for plasma discharge

Country Status (1)

Country Link
JP (1) JPH07105210B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5253013A (en) * 1988-10-17 1993-10-12 Asahi Kogaku Kogyo Kabushiki Kaisha Image recording apparatus having releasable fixing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5253013A (en) * 1988-10-17 1993-10-12 Asahi Kogaku Kogyo Kabushiki Kaisha Image recording apparatus having releasable fixing device

Also Published As

Publication number Publication date
JPH07105210B2 (en) 1995-11-13

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