JPS6467853A - Power source device for plasma discharge - Google Patents
Power source device for plasma dischargeInfo
- Publication number
- JPS6467853A JPS6467853A JP62223743A JP22374387A JPS6467853A JP S6467853 A JPS6467853 A JP S6467853A JP 62223743 A JP62223743 A JP 62223743A JP 22374387 A JP22374387 A JP 22374387A JP S6467853 A JPS6467853 A JP S6467853A
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- substrate
- trigger electrode
- discharge
- power source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Generation Of Surge Voltage And Current (AREA)
- Plasma Technology (AREA)
- Electron Sources, Ion Sources (AREA)
- Gas-Filled Discharge Tubes (AREA)
Abstract
PURPOSE:To smoothly start a stable discharge by generating the discharge in advance with a trigger electrode near a substrate and increasing the substrate voltage with time. CONSTITUTION:The electric power is fed to a substrate 2 and a trigger electrode 12 arranged in a vacuum tank 1 from a three-phase power source 13 through separate channels. The contactor 15b of the trigger channel is closed to generate a discharge on the trigger electrode 12, a controller 20 closes the contactor 15a of the substrate channel and applies the voltage to the substrate 2, the voltage is gradually increased from the low voltage to the preset voltage finally, and the voltage applied to the trigger electrode 12 is made 0 when the preset time elapses after the preset voltage is attained. The stable discharge can be thereby started smoothly.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62223743A JPH07105210B2 (en) | 1987-09-07 | 1987-09-07 | Power supply for plasma discharge |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62223743A JPH07105210B2 (en) | 1987-09-07 | 1987-09-07 | Power supply for plasma discharge |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6467853A true JPS6467853A (en) | 1989-03-14 |
JPH07105210B2 JPH07105210B2 (en) | 1995-11-13 |
Family
ID=16803002
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62223743A Expired - Lifetime JPH07105210B2 (en) | 1987-09-07 | 1987-09-07 | Power supply for plasma discharge |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH07105210B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5253013A (en) * | 1988-10-17 | 1993-10-12 | Asahi Kogaku Kogyo Kabushiki Kaisha | Image recording apparatus having releasable fixing device |
-
1987
- 1987-09-07 JP JP62223743A patent/JPH07105210B2/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5253013A (en) * | 1988-10-17 | 1993-10-12 | Asahi Kogaku Kogyo Kabushiki Kaisha | Image recording apparatus having releasable fixing device |
Also Published As
Publication number | Publication date |
---|---|
JPH07105210B2 (en) | 1995-11-13 |
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