JPS6465787A - Silicon carbide heater - Google Patents

Silicon carbide heater

Info

Publication number
JPS6465787A
JPS6465787A JP22126887A JP22126887A JPS6465787A JP S6465787 A JPS6465787 A JP S6465787A JP 22126887 A JP22126887 A JP 22126887A JP 22126887 A JP22126887 A JP 22126887A JP S6465787 A JPS6465787 A JP S6465787A
Authority
JP
Japan
Prior art keywords
silicon carbide
heater
carbide heater
coming
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22126887A
Other languages
English (en)
Inventor
Yoshiyuki Watabe
Takashi Tanaka
Akiyoshi Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP22126887A priority Critical patent/JPS6465787A/ja
Publication of JPS6465787A publication Critical patent/JPS6465787A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
JP22126887A 1987-09-04 1987-09-04 Silicon carbide heater Pending JPS6465787A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22126887A JPS6465787A (en) 1987-09-04 1987-09-04 Silicon carbide heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22126887A JPS6465787A (en) 1987-09-04 1987-09-04 Silicon carbide heater

Publications (1)

Publication Number Publication Date
JPS6465787A true JPS6465787A (en) 1989-03-13

Family

ID=16764114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22126887A Pending JPS6465787A (en) 1987-09-04 1987-09-04 Silicon carbide heater

Country Status (1)

Country Link
JP (1) JPS6465787A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101300104B1 (ko) * 2010-05-20 2013-08-30 임광현 탄화규소 발열체의 제조방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5811601B2 (ja) * 1975-06-06 1983-03-03 アサヒコウガクコウギヨウ カブシキガイシヤ ジドウシヨウテンチヨウセツキ
JPS59167986A (ja) * 1983-03-15 1984-09-21 松下電器産業株式会社 管状発熱体
JPS6021699B2 (ja) * 1979-08-16 1985-05-29 ゼネラル・エレクトリツク・カンパニイ 強化エポキシ構造物の製法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5811601B2 (ja) * 1975-06-06 1983-03-03 アサヒコウガクコウギヨウ カブシキガイシヤ ジドウシヨウテンチヨウセツキ
JPS6021699B2 (ja) * 1979-08-16 1985-05-29 ゼネラル・エレクトリツク・カンパニイ 強化エポキシ構造物の製法
JPS59167986A (ja) * 1983-03-15 1984-09-21 松下電器産業株式会社 管状発熱体

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101300104B1 (ko) * 2010-05-20 2013-08-30 임광현 탄화규소 발열체의 제조방법

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