JPS6465442A - Hydrogenated gas detecting element - Google Patents
Hydrogenated gas detecting elementInfo
- Publication number
- JPS6465442A JPS6465442A JP22205587A JP22205587A JPS6465442A JP S6465442 A JPS6465442 A JP S6465442A JP 22205587 A JP22205587 A JP 22205587A JP 22205587 A JP22205587 A JP 22205587A JP S6465442 A JPS6465442 A JP S6465442A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- pair
- electrode terminal
- hydrogenated gas
- semi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
PURPOSE:To improve sensitivity and accuracy by constituting an element of a semi-insulating high-purity semiconductor provided with a chemical reaction carrier which can react with a hydrogenated gas and a pair of electrode terminal metals which make ohmic electrical contact with this semiconductor. CONSTITUTION:The chemical reaction carrier (thin HgO film) 2 having 0.1mum film thickness is joined by a sputtering method to the semi-insulating high-purity semiconductor (substrade) 1. A pair of the Au electrode terminal 3 and in electrode terminal 4 which make ohmic electric contact with the semiconductor 1 having said carrier 2 are provided to said semiconductor. Element current is detected with high sensitivity and high accuracy by a pair of the terminal 3, 4.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22205587A JPH0658335B2 (en) | 1987-09-07 | 1987-09-07 | Hydrogen gas detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22205587A JPH0658335B2 (en) | 1987-09-07 | 1987-09-07 | Hydrogen gas detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6465442A true JPS6465442A (en) | 1989-03-10 |
JPH0658335B2 JPH0658335B2 (en) | 1994-08-03 |
Family
ID=16776392
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22205587A Expired - Fee Related JPH0658335B2 (en) | 1987-09-07 | 1987-09-07 | Hydrogen gas detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0658335B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017161302A (en) * | 2016-03-08 | 2017-09-14 | 富士通株式会社 | Gas sensor, gas sensor array, and gas sensor device |
-
1987
- 1987-09-07 JP JP22205587A patent/JPH0658335B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017161302A (en) * | 2016-03-08 | 2017-09-14 | 富士通株式会社 | Gas sensor, gas sensor array, and gas sensor device |
Also Published As
Publication number | Publication date |
---|---|
JPH0658335B2 (en) | 1994-08-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |