JPS6465096A - Production of substrate comprising single crystal of lithium tetraborate - Google Patents

Production of substrate comprising single crystal of lithium tetraborate

Info

Publication number
JPS6465096A
JPS6465096A JP22141287A JP22141287A JPS6465096A JP S6465096 A JPS6465096 A JP S6465096A JP 22141287 A JP22141287 A JP 22141287A JP 22141287 A JP22141287 A JP 22141287A JP S6465096 A JPS6465096 A JP S6465096A
Authority
JP
Japan
Prior art keywords
single crystal
wafer
mirror
substrate
crystal substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22141287A
Other languages
Japanese (ja)
Other versions
JP2845432B2 (en
Inventor
Tadao Komi
Jisaburo Ushizawa
Sadao Matsumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=16766333&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPS6465096(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP22141287A priority Critical patent/JP2845432B2/en
Publication of JPS6465096A publication Critical patent/JPS6465096A/en
Application granted granted Critical
Publication of JP2845432B2 publication Critical patent/JP2845432B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • ing And Chemical Polishing (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To decrease warp of a substrate and to improve the yield of a device when a single crystal substrate is processed to obtain a rough surface having a specified roughness and a mirror-finished surface by providing an etching stage using water to the stages for processing. CONSTITUTION:In a process for producing a single crystal substrate by forming a rough surface having >=0.1mu roughness (Ra) and a mirror-finished surface to an Li2Bi4O7 single crystal substrate, an etching stage using water is provided to the stages for forming the rough surface and the mirror-finished surface. For example, a single crystal wafer is bonded to a glass plate with wax, the wafer is lapped with a GC #1,000 abrasive. Then, the wafer is stripped off and the wax is removed. The warp of the wafer is corrected by etching with hot water at 60 deg.C for 5min. Obtd. wafer is bonded to a glass plate again and lapped with GC #2,000 abrasive, and finishing to mirror-surface by grinding with colloidal silica. The product is stripped thereafter and packed under vacuum after washing with an org. solvent.
JP22141287A 1987-09-04 1987-09-04 Method for producing lithium tetraborate single crystal substrate Expired - Lifetime JP2845432B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22141287A JP2845432B2 (en) 1987-09-04 1987-09-04 Method for producing lithium tetraborate single crystal substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22141287A JP2845432B2 (en) 1987-09-04 1987-09-04 Method for producing lithium tetraborate single crystal substrate

Publications (2)

Publication Number Publication Date
JPS6465096A true JPS6465096A (en) 1989-03-10
JP2845432B2 JP2845432B2 (en) 1999-01-13

Family

ID=16766333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22141287A Expired - Lifetime JP2845432B2 (en) 1987-09-04 1987-09-04 Method for producing lithium tetraborate single crystal substrate

Country Status (1)

Country Link
JP (1) JP2845432B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021034629A (en) * 2019-08-28 2021-03-01 住友金属鉱山株式会社 Piezoelectric substrate, manufacturing method thereof, and composite substrate

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5947822A (en) * 1982-09-10 1984-03-17 Sumitomo Metal Mining Co Ltd Manufacture of substrate for surface acoustic wave
JPS6264110A (en) * 1985-09-13 1987-03-23 Fujitsu Ltd Manufacture of piezoelectric crystal device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5947822A (en) * 1982-09-10 1984-03-17 Sumitomo Metal Mining Co Ltd Manufacture of substrate for surface acoustic wave
JPS6264110A (en) * 1985-09-13 1987-03-23 Fujitsu Ltd Manufacture of piezoelectric crystal device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021034629A (en) * 2019-08-28 2021-03-01 住友金属鉱山株式会社 Piezoelectric substrate, manufacturing method thereof, and composite substrate

Also Published As

Publication number Publication date
JP2845432B2 (en) 1999-01-13

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term