JPS646503U - - Google Patents

Info

Publication number
JPS646503U
JPS646503U JP10219487U JP10219487U JPS646503U JP S646503 U JPS646503 U JP S646503U JP 10219487 U JP10219487 U JP 10219487U JP 10219487 U JP10219487 U JP 10219487U JP S646503 U JPS646503 U JP S646503U
Authority
JP
Japan
Prior art keywords
tool microscope
pattern shapes
parts
ccd camera
measure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10219487U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10219487U priority Critical patent/JPS646503U/ja
Publication of JPS646503U publication Critical patent/JPS646503U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)

Description

【図面の簡単な説明】
第1図は、本考案の工具顕微鏡の測定機構の系
統図であり、第2図は、従来の工具顕微鏡の測定
機構を示した系統図である。 1:光源(ハロゲンランプ)、2:被検査物、
3:CCDカメラ、4:コントローラ、5:A/
D変換器、6:デイジタルカウンター、7:パソ
コン、8:プリンター、9:光電検出装置。

Claims (1)

    【実用新案登録請求の範囲】
  1. 金属部分が種々のパターン形状を有するリード
    フレーム、フイルムキヤリアの如き被測定部材の
    そのようなパターン形状を測定するために用いる
    、光透過法による工具顕微鏡において、その受光
    部にCCDカメラを組み込んだことを特徴とする
    工具顕微鏡。
JP10219487U 1987-07-02 1987-07-02 Pending JPS646503U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10219487U JPS646503U (ja) 1987-07-02 1987-07-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10219487U JPS646503U (ja) 1987-07-02 1987-07-02

Publications (1)

Publication Number Publication Date
JPS646503U true JPS646503U (ja) 1989-01-13

Family

ID=31331879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10219487U Pending JPS646503U (ja) 1987-07-02 1987-07-02

Country Status (1)

Country Link
JP (1) JPS646503U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03210263A (ja) * 1990-01-16 1991-09-13 Matsushita Electric Ind Co Ltd 気泡水流発生装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03210263A (ja) * 1990-01-16 1991-09-13 Matsushita Electric Ind Co Ltd 気泡水流発生装置

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