JPS6463852A - Automatic monitor for electroless plating speed - Google Patents
Automatic monitor for electroless plating speedInfo
- Publication number
- JPS6463852A JPS6463852A JP62220974A JP22097487A JPS6463852A JP S6463852 A JPS6463852 A JP S6463852A JP 62220974 A JP62220974 A JP 62220974A JP 22097487 A JP22097487 A JP 22097487A JP S6463852 A JPS6463852 A JP S6463852A
- Authority
- JP
- Japan
- Prior art keywords
- electroless plating
- amplifier
- peak voltage
- time
- plating speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemically Coating (AREA)
Abstract
PURPOSE:To monitor an electroless plating speed automatically on time, by automatically adjusting the peak voltage of a potential difference between a sample electrode and a reference electrode until the voltage reaches a value in the optimum preset range, and computing the electroless plating speed based on the relationship between the overvoltage and the time of this adjustment. CONSTITUTION:A potential difference between a sample electrode W and a reference electrode R is inputted into an input terminal (a) of an adding amplifier 6 through an operation amplifier 3. An output from an inverting amplifier 7 is inputted into an input terminal (b) of the adding amplifier 6. As a result, a curve showing relationship between the overvoltage and the time is obtained. A peak voltage based on said curve is inputted into an input terminal (b) of a high speed switch 10. A CPU 4 increases the amplitude of an amplifier 15 stepwise so that the peak voltage is located in the preset range of the optimum peak voltage. Thus the peak voltage is adjusted. The data of the curve of relation between the overvoltage and the time, which is obtained with the adding amplifier 6, are computed as a trial, and the electroless plating speed is computed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62220974A JPS6463852A (en) | 1987-09-03 | 1987-09-03 | Automatic monitor for electroless plating speed |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62220974A JPS6463852A (en) | 1987-09-03 | 1987-09-03 | Automatic monitor for electroless plating speed |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6463852A true JPS6463852A (en) | 1989-03-09 |
Family
ID=16759482
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62220974A Pending JPS6463852A (en) | 1987-09-03 | 1987-09-03 | Automatic monitor for electroless plating speed |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6463852A (en) |
-
1987
- 1987-09-03 JP JP62220974A patent/JPS6463852A/en active Pending
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