JPS6463247A - Field ionization type ion source - Google Patents

Field ionization type ion source

Info

Publication number
JPS6463247A
JPS6463247A JP22081087A JP22081087A JPS6463247A JP S6463247 A JPS6463247 A JP S6463247A JP 22081087 A JP22081087 A JP 22081087A JP 22081087 A JP22081087 A JP 22081087A JP S6463247 A JPS6463247 A JP S6463247A
Authority
JP
Japan
Prior art keywords
emitter
tip
ion
emitted
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22081087A
Other languages
Japanese (ja)
Inventor
Takashi Horiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP22081087A priority Critical patent/JPS6463247A/en
Publication of JPS6463247A publication Critical patent/JPS6463247A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0807—Gas field ion sources [GFIS]

Abstract

PURPOSE:To raise the luminance of an emitted ion as well as to make the processing speed of ion beam exposure improvable by projecting the tip of an emitter to the outside from an inner side at the emitter side of a drawer electrode. CONSTITUTION:An emitter 1 passes through almost the center of an opening 3 and set up as its tip is projected as much as 2mm or so to the outside from an inner side of a drawer electrode 2 in an ionization chamber 5 where the drawer electrode 2 is acicularly formed. Ionization object gas is led into the chamber 5, and since the opening 3 doubles as a differential exhaust throttle when an ion is emitted out of the tip of the emitter 1, gas pressure around the emitter 1 comes low at the tip even if it comes high at a base of the tip part of the emitter 1. Consequently, even if it is in a high field range, it is polarized whereby an increase of gas molecules bombarding the tip of the emitter becomes lessened, and a temperature rise in the emitter tip part decreases, so that a supply action of the gas molecule being ionized to the emitter tip is not checked, and such a probability that the emitted ion collides with other neutral gas molecules, doing charge-exchange, and is restored to neutrality is also lessened, thus the luminance of the emitted ion is improved.
JP22081087A 1987-09-03 1987-09-03 Field ionization type ion source Pending JPS6463247A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22081087A JPS6463247A (en) 1987-09-03 1987-09-03 Field ionization type ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22081087A JPS6463247A (en) 1987-09-03 1987-09-03 Field ionization type ion source

Publications (1)

Publication Number Publication Date
JPS6463247A true JPS6463247A (en) 1989-03-09

Family

ID=16756916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22081087A Pending JPS6463247A (en) 1987-09-03 1987-09-03 Field ionization type ion source

Country Status (1)

Country Link
JP (1) JPS6463247A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6217932B1 (en) * 1996-12-20 2001-04-17 Fraunhofer-Gesell Schaft Zur Forderung Der Angewandten Forschung E.V. Method of obtaining haemin from slaughter blood

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6217932B1 (en) * 1996-12-20 2001-04-17 Fraunhofer-Gesell Schaft Zur Forderung Der Angewandten Forschung E.V. Method of obtaining haemin from slaughter blood

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