JPS6460988A - Heat treatment furnace for semiconductor substrate - Google Patents

Heat treatment furnace for semiconductor substrate

Info

Publication number
JPS6460988A
JPS6460988A JP21844087A JP21844087A JPS6460988A JP S6460988 A JPS6460988 A JP S6460988A JP 21844087 A JP21844087 A JP 21844087A JP 21844087 A JP21844087 A JP 21844087A JP S6460988 A JPS6460988 A JP S6460988A
Authority
JP
Japan
Prior art keywords
furnace core
core tube
tube
spacers
furnished
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21844087A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0520878B2 (enrdf_load_html_response
Inventor
Yusuke Muraoka
Takamasa Sakai
Keiji Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP21844087A priority Critical patent/JPS6460988A/ja
Priority to US07/159,404 priority patent/US4849608A/en
Publication of JPS6460988A publication Critical patent/JPS6460988A/ja
Publication of JPH0520878B2 publication Critical patent/JPH0520878B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
  • Furnace Details (AREA)
JP21844087A 1987-02-14 1987-08-31 Heat treatment furnace for semiconductor substrate Granted JPS6460988A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP21844087A JPS6460988A (en) 1987-08-31 1987-08-31 Heat treatment furnace for semiconductor substrate
US07/159,404 US4849608A (en) 1987-02-14 1988-02-11 Apparatus for heat-treating wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21844087A JPS6460988A (en) 1987-08-31 1987-08-31 Heat treatment furnace for semiconductor substrate

Publications (2)

Publication Number Publication Date
JPS6460988A true JPS6460988A (en) 1989-03-08
JPH0520878B2 JPH0520878B2 (enrdf_load_html_response) 1993-03-22

Family

ID=16719946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21844087A Granted JPS6460988A (en) 1987-02-14 1987-08-31 Heat treatment furnace for semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS6460988A (enrdf_load_html_response)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006284077A (ja) * 2005-03-31 2006-10-19 Kumamoto Technology & Industry Foundation 熱輻射反射炉
JP2007502549A (ja) * 2003-05-23 2007-02-08 エムアールエル インダストリーズ 高温拡散炉の加熱コイルの保持メカニズム
JP2010021147A (ja) * 2008-07-11 2010-01-28 Qinghua Univ 中空熱源
JP2010021148A (ja) * 2008-07-11 2010-01-28 Qinghua Univ 中空熱源
JP2010034047A (ja) * 2008-07-25 2010-02-12 Qinghua Univ 中空熱源
JP2010034064A (ja) * 2008-07-25 2010-02-12 Qinghua Univ 中空熱源の製造方法
JP2010034061A (ja) * 2008-07-25 2010-02-12 Qinghua Univ 中空熱源
JP2010034062A (ja) * 2008-07-25 2010-02-12 Qinghua Univ 中空熱源
JP2010034063A (ja) * 2008-07-25 2010-02-12 Qinghua Univ 中空熱源
US8410676B2 (en) 2007-09-28 2013-04-02 Beijing Funate Innovation Technology Co., Ltd. Sheet-shaped heat and light source, method for making the same and method for heating object adopting the same
US8450930B2 (en) 2007-10-10 2013-05-28 Tsinghua University Sheet-shaped heat and light source
JP2018139221A (ja) * 2012-11-06 2018-09-06 貞徳舎株式会社 電気ヒーター並びにこれを備えた加熱装置及び半導体製造装置
JP2023526363A (ja) * 2020-06-05 2023-06-21 エルジー エナジー ソリューション リミテッド チューブモジュール及びそれを含むチューブ組立体

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007502549A (ja) * 2003-05-23 2007-02-08 エムアールエル インダストリーズ 高温拡散炉の加熱コイルの保持メカニズム
JP2006284077A (ja) * 2005-03-31 2006-10-19 Kumamoto Technology & Industry Foundation 熱輻射反射炉
US8410676B2 (en) 2007-09-28 2013-04-02 Beijing Funate Innovation Technology Co., Ltd. Sheet-shaped heat and light source, method for making the same and method for heating object adopting the same
US8450930B2 (en) 2007-10-10 2013-05-28 Tsinghua University Sheet-shaped heat and light source
JP2010021148A (ja) * 2008-07-11 2010-01-28 Qinghua Univ 中空熱源
JP2010021147A (ja) * 2008-07-11 2010-01-28 Qinghua Univ 中空熱源
JP2010034064A (ja) * 2008-07-25 2010-02-12 Qinghua Univ 中空熱源の製造方法
JP2010034061A (ja) * 2008-07-25 2010-02-12 Qinghua Univ 中空熱源
JP2010034062A (ja) * 2008-07-25 2010-02-12 Qinghua Univ 中空熱源
JP2010034063A (ja) * 2008-07-25 2010-02-12 Qinghua Univ 中空熱源
JP2010034047A (ja) * 2008-07-25 2010-02-12 Qinghua Univ 中空熱源
JP2018139221A (ja) * 2012-11-06 2018-09-06 貞徳舎株式会社 電気ヒーター並びにこれを備えた加熱装置及び半導体製造装置
JP2023526363A (ja) * 2020-06-05 2023-06-21 エルジー エナジー ソリューション リミテッド チューブモジュール及びそれを含むチューブ組立体

Also Published As

Publication number Publication date
JPH0520878B2 (enrdf_load_html_response) 1993-03-22

Similar Documents

Publication Publication Date Title
JPS6460988A (en) Heat treatment furnace for semiconductor substrate
JP3024449B2 (ja) 縦型熱処理炉及び熱処理方法
ZA200003071B (en) High performance heat exchangers.
GB1330881A (en) Brazing furnace and process for aluminium radiator cores
EP1998017A3 (de) Wärmetauscher
JPH01132127A (ja) 反応装置
JPH09266167A5 (enrdf_load_html_response)
BR8501662A (pt) Permutador termico e processo de permutacao termica entre material pulverulento e um gas
DK157707C (da) Roer-varmeveksler
NO20016212D0 (no) Gassrensesystem med integrert hydrogensorpsjon og filtersammenstilling
IT8323321A0 (it) Scambiatore di calore per dei gas aventi temperature fortemente differenti.
JPS5596850A (en) Air blowing structure for air conditioner
JPH04154500A (ja) 宇宙環境試験装置
JPS61183896A (ja) 高周波誘導プラズマ用ト−チ
JPH0519950Y2 (enrdf_load_html_response)
JP2584193B2 (ja) 蓄熱式バーナを用いた燃焼システム
JPH0136024B2 (enrdf_load_html_response)
JPS5831282A (ja) 電気炉
Doak Special Vacuum Designs Can Heat Treat Variety of Alloys
Creal Bell Furnaces Pay Their Way With 75% Cut in Gas Usage
JPS6425541A (en) Vertical cvd reaction apparatus
JPS587861U (ja) 熱処理炉
JPS5760126A (en) Space heater
JPS6245434Y2 (enrdf_load_html_response)
SU877258A1 (ru) Электронагреватель газовых сред

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees