JPS6460926A - Manufacture of oxide superconductive thin film - Google Patents

Manufacture of oxide superconductive thin film

Info

Publication number
JPS6460926A
JPS6460926A JP62218890A JP21889087A JPS6460926A JP S6460926 A JPS6460926 A JP S6460926A JP 62218890 A JP62218890 A JP 62218890A JP 21889087 A JP21889087 A JP 21889087A JP S6460926 A JPS6460926 A JP S6460926A
Authority
JP
Japan
Prior art keywords
gas
plasma
intermediate electrode
thin film
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62218890A
Other languages
Japanese (ja)
Inventor
Koichi Ono
Tatsuo Omori
Shigeto Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62218890A priority Critical patent/JPS6460926A/en
Publication of JPS6460926A publication Critical patent/JPS6460926A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Abstract

PURPOSE:To enhance the thin film growing speed by introducing a test gas containing powder of oxide superconductive component material in plasma, and by spraying the plasma having gasified oxide superconductive component material to the base board. CONSTITUTION:Vacuum exhaust is made from a vacuum draw hole 7, and a gas 8, for ex. argon gas, is introduced to a discharge chamber 1 from a main gas lead-in hole 6, and a DC voltage is impressed between a cathode 2 and an intermediate electrode 10. This gas is electrolytically dissociated by glow discharge or arc discharge generated between the cathode 2 and intermediate electrode 10 and turned into plasma. It passes through an intermediate electrode hole 11 and flows into the space between the intermediate electrode 10 and anode 4. Test gases 16-18 containing component material powder for oxide superconductor, for ex. lanthanum oxide, and argon gas to carry it are led in from test gas lead-in holes 13-15. The gases become plasma, and the powder is gasified. This mixed plasma flows into a vacuum chamber 12, and electrolytic dissociated gas jet 19 is formed. An oxide superconductive thin film is grown on a base board arranged oppositely.
JP62218890A 1987-08-31 1987-08-31 Manufacture of oxide superconductive thin film Pending JPS6460926A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62218890A JPS6460926A (en) 1987-08-31 1987-08-31 Manufacture of oxide superconductive thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62218890A JPS6460926A (en) 1987-08-31 1987-08-31 Manufacture of oxide superconductive thin film

Publications (1)

Publication Number Publication Date
JPS6460926A true JPS6460926A (en) 1989-03-08

Family

ID=16726906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62218890A Pending JPS6460926A (en) 1987-08-31 1987-08-31 Manufacture of oxide superconductive thin film

Country Status (1)

Country Link
JP (1) JPS6460926A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1041863A1 (en) * 1999-04-01 2000-10-04 Commissariat A L'energie Atomique Plasma cell

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1041863A1 (en) * 1999-04-01 2000-10-04 Commissariat A L'energie Atomique Plasma cell
FR2791859A1 (en) * 1999-04-01 2000-10-06 Commissariat Energie Atomique PLASMA CELL
US6507149B1 (en) 1999-04-01 2003-01-14 Commissariat A L 'energie Atomique Plasma cell

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