JPS6460538A - Reel web supporting mechanism in winder of surface winding type - Google Patents

Reel web supporting mechanism in winder of surface winding type

Info

Publication number
JPS6460538A
JPS6460538A JP21309587A JP21309587A JPS6460538A JP S6460538 A JPS6460538 A JP S6460538A JP 21309587 A JP21309587 A JP 21309587A JP 21309587 A JP21309587 A JP 21309587A JP S6460538 A JPS6460538 A JP S6460538A
Authority
JP
Japan
Prior art keywords
reel
web
cylinder
reel web
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21309587A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0541542B2 (enrdf_load_stackoverflow
Inventor
Eiichi Shiokawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobayashi Engineering Works Ltd
Original Assignee
Kobayashi Engineering Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobayashi Engineering Works Ltd filed Critical Kobayashi Engineering Works Ltd
Priority to JP21309587A priority Critical patent/JPS6460538A/ja
Publication of JPS6460538A publication Critical patent/JPS6460538A/ja
Publication of JPH0541542B2 publication Critical patent/JPH0541542B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Winding Of Webs (AREA)
JP21309587A 1987-08-28 1987-08-28 Reel web supporting mechanism in winder of surface winding type Granted JPS6460538A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21309587A JPS6460538A (en) 1987-08-28 1987-08-28 Reel web supporting mechanism in winder of surface winding type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21309587A JPS6460538A (en) 1987-08-28 1987-08-28 Reel web supporting mechanism in winder of surface winding type

Publications (2)

Publication Number Publication Date
JPS6460538A true JPS6460538A (en) 1989-03-07
JPH0541542B2 JPH0541542B2 (enrdf_load_stackoverflow) 1993-06-23

Family

ID=16633479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21309587A Granted JPS6460538A (en) 1987-08-28 1987-08-28 Reel web supporting mechanism in winder of surface winding type

Country Status (1)

Country Link
JP (1) JPS6460538A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8189175B2 (en) 2008-10-03 2012-05-29 National Chiao Tung University Immersion lithography apparatus and tank thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6238247U (enrdf_load_stackoverflow) * 1985-08-28 1987-03-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6238247U (enrdf_load_stackoverflow) * 1985-08-28 1987-03-06

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8189175B2 (en) 2008-10-03 2012-05-29 National Chiao Tung University Immersion lithography apparatus and tank thereof
US8755029B2 (en) 2008-10-03 2014-06-17 National Chiao Tung University Immersion lithography apparatus and tank thereof

Also Published As

Publication number Publication date
JPH0541542B2 (enrdf_load_stackoverflow) 1993-06-23

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