JPS646048U - - Google Patents
Info
- Publication number
- JPS646048U JPS646048U JP10126587U JP10126587U JPS646048U JP S646048 U JPS646048 U JP S646048U JP 10126587 U JP10126587 U JP 10126587U JP 10126587 U JP10126587 U JP 10126587U JP S646048 U JPS646048 U JP S646048U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- side walls
- carrier
- peripheral portion
- sandwiched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 230000002093 peripheral effect Effects 0.000 claims 2
Landscapes
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10126587U JPS646048U (zh) | 1987-06-30 | 1987-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10126587U JPS646048U (zh) | 1987-06-30 | 1987-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS646048U true JPS646048U (zh) | 1989-01-13 |
Family
ID=31330102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10126587U Pending JPS646048U (zh) | 1987-06-30 | 1987-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS646048U (zh) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03143837A (ja) * | 1989-10-26 | 1991-06-19 | Oki Electric Ind Co Ltd | ウエハ搬送処理装置とそれを用いた搬送処理方法 |
| JPH0548658U (ja) * | 1991-12-09 | 1993-06-29 | 泰東製綱株式会社 | 海中生物付着防止装置 |
| JPH0626263U (ja) * | 1992-08-31 | 1994-04-08 | 株式会社柿崎製作所 | 薄板用支持容器 |
| JP2002208627A (ja) * | 2001-01-11 | 2002-07-26 | Seiko Instruments Inc | ウエハキャリアケース |
-
1987
- 1987-06-30 JP JP10126587U patent/JPS646048U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03143837A (ja) * | 1989-10-26 | 1991-06-19 | Oki Electric Ind Co Ltd | ウエハ搬送処理装置とそれを用いた搬送処理方法 |
| JPH0548658U (ja) * | 1991-12-09 | 1993-06-29 | 泰東製綱株式会社 | 海中生物付着防止装置 |
| JPH0626263U (ja) * | 1992-08-31 | 1994-04-08 | 株式会社柿崎製作所 | 薄板用支持容器 |
| JP2002208627A (ja) * | 2001-01-11 | 2002-07-26 | Seiko Instruments Inc | ウエハキャリアケース |
| JP4497731B2 (ja) * | 2001-01-11 | 2010-07-07 | セイコーインスツル株式会社 | ウエハキャリアケース |