JPS646026A - Purification of photosensitive polymer - Google Patents

Purification of photosensitive polymer

Info

Publication number
JPS646026A
JPS646026A JP16122887A JP16122887A JPS646026A JP S646026 A JPS646026 A JP S646026A JP 16122887 A JP16122887 A JP 16122887A JP 16122887 A JP16122887 A JP 16122887A JP S646026 A JPS646026 A JP S646026A
Authority
JP
Japan
Prior art keywords
polymer
photosensitive polymer
solution
purification
hexane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16122887A
Other languages
Japanese (ja)
Inventor
Shinji Ishida
Katsumi Tanigaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP16122887A priority Critical patent/JPS646026A/en
Publication of JPS646026A publication Critical patent/JPS646026A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

PURPOSE:To obtain the titled polymer having extremely high purity, by dissolving a photosensitive polymer such as polybutenesulfone in isoamyl acetate and dripping the obtained solution into n-hexane, thereby precipitating the polymer in the form of fine powder. CONSTITUTION:Poly(1-butenesulfone) or poly(2-methylpentene-1-sulfone) which is a photosensitive polymer is dissolved in isoamyl acetate or cyclohexane to obtain a solution having a concentration of 1-10%. The solution is dripped into n-hexane to precipitate the above photosensitive polymer in the form of fine powder, which is fractionated and dried to obtain purified polymer.
JP16122887A 1987-06-30 1987-06-30 Purification of photosensitive polymer Pending JPS646026A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16122887A JPS646026A (en) 1987-06-30 1987-06-30 Purification of photosensitive polymer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16122887A JPS646026A (en) 1987-06-30 1987-06-30 Purification of photosensitive polymer

Publications (1)

Publication Number Publication Date
JPS646026A true JPS646026A (en) 1989-01-10

Family

ID=15731064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16122887A Pending JPS646026A (en) 1987-06-30 1987-06-30 Purification of photosensitive polymer

Country Status (1)

Country Link
JP (1) JPS646026A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8685526B2 (en) 2009-12-24 2014-04-01 Lg Innotek Co., Ltd. Decorating material with cubic effect

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8685526B2 (en) 2009-12-24 2014-04-01 Lg Innotek Co., Ltd. Decorating material with cubic effect

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