JPS6459037A - In-liquid particle measuring instrument - Google Patents
In-liquid particle measuring instrumentInfo
- Publication number
- JPS6459037A JPS6459037A JP62215027A JP21502787A JPS6459037A JP S6459037 A JPS6459037 A JP S6459037A JP 62215027 A JP62215027 A JP 62215027A JP 21502787 A JP21502787 A JP 21502787A JP S6459037 A JPS6459037 A JP S6459037A
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- light
- light quantity
- detect
- measurement cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 title abstract 3
- 239000007788 liquid Substances 0.000 title 1
- 238000005259 measurement Methods 0.000 abstract 8
- 230000005856 abnormality Effects 0.000 abstract 2
- 230000003287 optical effect Effects 0.000 abstract 2
- 230000005494 condensation Effects 0.000 abstract 1
- 238000009833 condensation Methods 0.000 abstract 1
- 238000011109 contamination Methods 0.000 abstract 1
Landscapes
- Optical Measuring Cells (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
PURPOSE:To detect abnormality of a particle measurement system by comparing the values of two light quantity sensors which detect the quantities of laser beams which is made incident on and projected from a measurement cell. CONSTITUTION:A light quantity sensor 3 measures the quantity of laser light before it made incidence on the measurement cell 5 or the quantity of light before it make incidence on a projection lens system 4. A light quantity sensor 10 measures the quantity of laser light after it passes through the measurement cell 5. Then the values of both sensors 3 and 10 are compared and the light quantity loss of laser light is calculated to detect the deviation and contamination of an optical system or dew condensation on the measurement cell. Further, abnormality of the measurement system during measurement is detected. Furthermore, time-series variation of the light quantity loss is checked to know the history of the optical system, and measurement data is corrected with the extent of the loss to accurately measure particles.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62215027A JPS6459037A (en) | 1987-08-31 | 1987-08-31 | In-liquid particle measuring instrument |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62215027A JPS6459037A (en) | 1987-08-31 | 1987-08-31 | In-liquid particle measuring instrument |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6459037A true JPS6459037A (en) | 1989-03-06 |
Family
ID=16665528
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62215027A Pending JPS6459037A (en) | 1987-08-31 | 1987-08-31 | In-liquid particle measuring instrument |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6459037A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012251886A (en) * | 2011-06-03 | 2012-12-20 | Fuji Electric Co Ltd | Particulate detection device |
-
1987
- 1987-08-31 JP JP62215027A patent/JPS6459037A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012251886A (en) * | 2011-06-03 | 2012-12-20 | Fuji Electric Co Ltd | Particulate detection device |
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